SMC Corporation of America
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Set clamp ring t to case q. The tapered part of clamp ring t must be facing downward. d. Set seal part of the element e to the cover r while the flange part of case q is being placed on clamp ring t. e. Since PTFE is used for the material of gasket w, a large force is required to tighten clamp ring t.

With locking mechanism t v"lc^ qrl# lrl AFtaS . '. rFo-+ .tE3t-*ec Leve, E P4l \ Pin :'u---) u-'/ ' \ Bracker T h 9qrEl-. s :. Lever standard position Lever lock Lock releasing . Cancel cap (mechanism to hold lever horizontallv) Series Variation ^ -" l f' -Rod erd I s*ardarc lry | "** I lT* I @'@-i*rrry o5O . ' l i i : , . , . . . ' t . ' .

T2 = [s] L 0.5 V (T1 + T3) V Duty ratio: Ratio of T to T6 T T6 x 100 T = T1 + T2 + T3 + T4 T4 varies depending on the motor type and load. The value below is recommended. = 0.1 + 0.90 + 0.1 + 0.05 = 1.15 [s] 2000 T4 = 0.05 [s] 1000 mm/s2 3000 mm/s2 Step 3 Check the allowable moment. 1500 5000 mm/s2 Refer to Dynamic Allowable Moment graphs (Pages 127 and 128).

Note 3) A particulate generation test has been conducted in a vacuum environment of 105 Pa. a t e l u g c Stainless steel linear guide & low particulate generation vacuum grease e i 2 t n r a e p r a 0.0 10 0 20 10 w t i o o n L Operation cycles a t e l u g c e i t n 1 r a e Particulate generation from the linear guide unit has been reduced with the use of a stainless steel linear guide and

I Special bracket major dimensions , t I ' Matenal :Rolled steel KX l KZ KZZ Part No.

Construction XMA/Angle type XYA/In-line type Auto switch (Option) q Bonnet assembly (Maintenance part) (Includes w, t, y, u) Magnet (Option) Pilot port Bellows side exhaust u Bellows holder (Material: Stainless steel 304) e Exterior seal (Maintenance part) y Bellows (Material: Stainless steel 316L) Bellows side exhaust t Valve (Material: Stainless steel 304) w Valve seal (Maintenance part

S R 2 mgh F1S S T t m m Nm C m/s kg MK(2) E1 + E2 mgS mgS F1S mgS F1S + mgS RS Q G E 2 2 E1 + E2 E1 + E2 E1 + E2 E1 + E2 E1 + E2 d p F T n t kg RS H A Me 2 2 2 E 2 2 E 2 2 E 2 2 E 2 E m = 20 kg = 0.7 m/s d = 40 mm p = 0.5 MPa n = 20 cycle/min t = 25C rad/s 2.

0 @1 r ye t !4 !7 !3 wu !8 @0 @2 @3 !6 q !5 !9 i *1 *1 C95K32 A A-A A !2 !

7 Oil-impregnated sintered alloy Urethane 40 or larger: Lead-bronze casted Bushing t Urethane Cushion seal A !8 NCM Bumper A y Urethane Cushion seal B !

Dd9 t m L d Part no. l Trunnion Nut CD-S02 CD-S03 0.040 0.076 8 0.9 1.6 19.5 24.5 7.6 Type C 8 for axis Material: Carbon steel 0.040 0.076 10 1.15 1.35 29 34 9.6 Type C 10 for axis Applicable bore size (mm) 20 25, 32 40 D C B d H Part no.

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Leakage test result a t e l u g c Stainless steel linear guide & low particulate generation vacuum grease e i 2 t n r a e CX p r a 0.0 10 0 20 10 w 10-10 0 5 10 t i o o n L DTime [min] Operation cycles -X e e a a l l k k a t e l u w w g a a c 2 e i o

C a u t i o n When replacing seals, carefully handle parts to prevent injury to your hands or fingers on the corners of parts. 25 3-2-1. Disassembly / Reassembly C a u t i o n Disassemble and assemble the cylinder on a clean cloth in a clean location. Perform on a clean cloth. Make sure no particles are present. Do not scratch the seals.

Note 2) Combinations of H and M, R and S, S and T, L and M are not available. Note 3) Option "T" is not available for IDU6D, 8D-4 and -6.

TC Applicable bore size (mm) TD TH TK TN TT TU TV TW TX TY CJ-010B CJ-016B 6, 10 4.5 3.3 29 18 3.1 2 9 40 22 32 12 16 5.5 5 35 20 6.4 2.3 14 48 28 38 16 Clevis pin L l t t m m D d9 d Material: Stainless steel Part no. d Applicable bore size (mm) D l L m t CD-J010 CD-Z015 CDP-1 3.3 12.2 15.2 1.2 0.3 3 6, 10 5 18.3 22.7 1.5 0.7 4.8 16 9 19.2 25 1.75 1.15 8.6 20, 25 18 Series MQQ/MQM Safety

(Ms) | ieries I{VZ 3-port dirct operated I solenoidvahre I NVZ100 | -EEffi rfl|/h afirF I P F P F II I 3-pod pilot operated I solenoid valrre I NVZ300 I @ Internal dlot type I T di**t* | ,oli*,n,* oiJ I K4 q I l-f " " ' n * | {im#h I P F P F II I I tlffi;lI l&*;" 3-port pilotoperated I solenoad Yalve I NVZSOO I @ Inlerml dlol type I "t" ^"" I ilF a{Zl;lh I exrllar pirot ty"pi I l " i I w

(mm) Internal cross section a (mm 2) Nominal size = Length of piping [mm] a = Internal cross section of piping [mm 2] T 0425 T 0604 TU 0805 T 0806 1/8B T 1075 TU 1208 T 1209 1/4B TS 1612 3/8B T 1613 1/2B 3/4B 1B 4 2.5 4.9 [l (ANR)] QC = Air consumption required for one reciprocation of rotary table 6 4 12.6 8 5 19.6 8 6 28.3 6.5 33.2 7.5 10 44.2 12 8 50.3 12 9 63.6 9.2 66.5 16 12 113 12.7

Note 16) Select C, L, L1, Y when the pressure sensor (P, T) is selected for t Pressure Sensor/Digital Pressure Switch for Vacuum Specifications. Since only grommet type is available for the pressure sensor, sensor without lead wire cannot be selected.

The lock is released when it is turned to the right. t 3 Stop switch 185 Stop switch guard A guard for the stop switch 4 y e Prevents unintentional operation (unexpected operation) of the jog test function. Other functions such as data change are not covered.

The pilot air of the piston r is also exhausted from the pilot valve q, and the piston r is returned upward due to the spring, closing the flow passage from the needle t. q r w Exhaust OFF t e 6 A AV2000-A/3000-A/4000-A/5000-A Series Construction X X-X r e u q y t Component Parts No.