Rotary Clamp Cylinders

Example) M5 x 75 L (MK2B) 6 Moment of inertia (kgm2) 4 MK220/25 2 Mounting bolt 103 6 4 Operating range Flat washer 2 104 Note) Be sure to use a flat washer to mount cylinders via through-holes. 50 100 200 66 120 D 75 85 80 90 90 100 80 90 105 135 105 135 Cylinder model C Mounting bolt size M5 x 75 L M5 x 85 L M5 x 80 L M5 x 90 L M5 x 90 L M5 x 100 L M5 x 80 L M5 x 90 L M6 x 105 L M6 x 135

Free Mount Cylinder for Vacuum Series ZCUK

HEP Related Equipment Port size A Stroke range (mm) 5 to 30 A' B C d D E F FK FL FY GA GC Model Air port Vacuum port M5 x 0.8 M5 x 0.8 M5 x 0.8 16.5 Note 1) Note 2) ZC(D)UKQ16 ZC(D)UKQ20 ZC(D)UKQ25 ZC(D)UKQ32 M5 x 0.8 M5 x 0.8 11 12.5 20 32 2 6 7 8 13 17 28 19 12 5 to 50 14 18 22 26 32 40 40 50 62 3 4 5 8 10 12 9 10 11 8 10 12 16 20 24 20 22 29 33 43.5 51.5 19 21.5 23 21.5 22 22.5 M5 x 0.8

Vacuum System Peripherals:

Air operated Nil M6 x 1 (Option) M5 x 0.8 PV/V port size Applicable to only plug connector.

Stainless Steel 316 Fittings

Hexagon Socket Head Male Connector: KQG2S (M5) Applicable tube O.D.

5 Port Solenoid Valve Series SV1000/2000/3000/4000

side: Orange B side: Green (External pilot port) 56 17.9 (Light/Surge voltage suppressor) M5 x 0.8 (L=300 to 5000) 121.1 115.5 M12 waterproof connector 51 22 9.5 18 18 Rc 1/4 28 (Piping port) 445 Series SV Dimensions: Series SV3000 2 position single/double [M12 waterproof connector type] SV300(R)-W-02, 03 21 22.5 13.5 86.2 M5 x 0.8 71.9 (External pilot port) 10.4 M5 x 0.8 2 x 4.3 21 21.5

24

and 16, M5 x 0.8 is only available.

A

x 0.8 M5 x 0.8 M5 x 0.8 Rc (PT) 18 Rc (PT) 18 Fluid Air Action Double Acting Op.

Hydraulic

Example: M5 x 50l 4pcs.

Pressure Gauge Guide

Symbol Specifications Grade Symbol Unit: MPa Nil M With M5 (Female thread) 0.2 0.4 0.7 1.0 2 4 7 10 Symbol Component parts polishing, Assembly environment Note) Use M5 female thread when panel-mounting for piping.

MHF2

+0.030 0 depth 3 36 36 36 4H9 +0.030 0 depth 3 4-M5 x 0.8 thread depth 12 Mounting thread 6 127.5 5 Finger closing port M5 x 0.8 50 142 2-M5 x 0.8 thread depth 5.5 122 26 10.6 Mounting thread E 20 20 24 33 E 0 -0.1 1.2 4-4.3 through (Mounting hole) 27 37 1.2 37 M5 x 0.8 Finger opening port 4-7.5 +0.1 0 Close: 0 E-E Open: 641 8-M4 x 0.7 thread depth 4 106 Attachment mounting thread 4-M5 x

MHF2

MHZ MHF MHL 2-M5 x 0.8 thread depth 12 MHR Mounting thread 6 79.5 5 MHK Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com MHS M5 x 0.8 2-M5 x 0.8 thread depth 5.5 50 94 Finger closing port Mounting thread MHC 26 74 10.6 MHT E MHY 20 20 24 33 MHW E MRHQ 2-4.3 through

Compact Vacuum Unit

(Refer to Manifold on page 17.) 12 12 stations Common Release Pressure (PD) Port Size Note) Common Supply (PV) Port Size 01 01N 01F M5 Without PD port (PV = PD) M5 x 0.8 (PV PD) Rc1/8 NPT1/8 G1/8 M5 x 0.8 Nil M5 Note) Refer to on page 1 for the combinations of supply valve and release valve selectable.

REA/REB

MQQ M Table (1) Recommended Speed Controller Bore size (mm) Model Elbow type RHC Straight type In-line type MK(2) AS1201F-M5-04-X214 AS1301F-M5-04-X214 AS1001F-04-X214 AS1001F-04-X214 AS2001F-06-X214 AS2001F-06-X214 AS2001F-06-X214 AS2001F-06-X214 AS3001F-08-X214 AS3001F-08-X214 10 15 20 25 32 40 50 63 AS1201F-M5-04-X214 AS1301F-M5-04-X214 RS Q G AS2201F-01-06-X214 AS2301F-01-06-X214 2.

5 Port Air Operated Valve

A, B port size Port size M5 x 0.8 1/8 1/4 3/8 Symbol M5 01 02 03 VFA1000 VFA3000 VFA5000 VFA1000 Double type only Thread type (Including pilot port) Nil F N T Rc G NPT NPTF M5 is available with Nil only.

Sine Rodless Cylinder Series REA/REB

Table (3) Recommended Speed Controller Bore size (mm) Model Elbow type Straight type In-line type AS1001F-04-X214 AS1001F-04-X214 AS2001F-06-X214 AS2001F-06-X214 AS2001F-06-X214 AS2001F-06-X214 AS3001F-08-X214 AS3001F-08-X214 AS1201F-M5-04-X214 AS1301F-M5-04-X214 10 15 20 25 32 40 50 63 Caution AS1201F-M5-04-X214 AS1301F-M5-04-X214 AS2201F-01-06-X214 AS2301F-01-06-X214 1.

5 Port Solenoid Valve, Series VQC

C3: 3.2 One-touch fitting C4: 4 One-touch fitting C6: 6 One-touch fitting M5: M5 thread (7.5) 20.5 2-C8 1(P) port 34 P = 10.5 (mm) Formulas: L1 = 10.5n + 45, L2 = 10.5n + 167.5 (for 1 input block.

CJ5-S

x 0.8 83 25 CC Up to 400 22 19.5 17 8 M5 x 0.8 9.5 18.5 10 17 3 18 12 40 6 33 M5 x 0.8 depth 8 5.5 8 3.5 M10 x 1.25 29 M5 x 0.8 83 32 Up to 450 22 19.5 17 8 M5 x 0.8 9.5 20 12 19 3 18 12 40 6 38 M5 x 0.8 depth 8 5.5 10 3.5 M10 x 1.25 35.5 Rc 1/8 85 40 RB Up to 800 30 27 19 10 M6 x 1.0 12 26 16 23 3 19 13 50 8 47 M6 x 1.0 depth 12 6 14 4 M14 x 1.5 44 Rc 1/8 93 50 Up to 1200 35 32 27 13 M8

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

(mm) (mm) Q1 M3 M4, M5, M6, M8 M4, M5, M6, M8, M10 M4, M5, M6, M8, M10, M12 M5, M6, M8, M10, M12 Q2 M3 M4, M5, M6, M8 M4, M5, M6, M8, M10 M4, M5, M6, M8, M10, M12 M5, M6, M8, M10, M12 Size 30 50 63 80 100 Size 30 50 63 80 100 Symbol: A35 Symbol: A36 Symbol: A37 Machine female threads into the short shaft.

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

(mm) (mm) Q1 M3 M4, M5, M6, M8 M4, M5, M6, M8, M10 M4, M5, M6, M8, M10, M12 M5, M6, M8, M10, M12 Q2 M3 M4, M5, M6, M8 M4, M5, M6, M8, M10 M4, M5, M6, M8, M10, M12 M5, M6, M8, M10, M12 Size 30 50 63 80 100 Size 30 50 63 80 100 Symbol: A35 Symbol: A36 Symbol: A37 Machine female threads into the short shaft.

CJ5-S

x 0.8 83 25 CC Up to 400 22 19.5 17 8 M5 x 0.8 9.5 18.5 10 17 3 18 12 40 6 33 M5 x 0.8 depth 8 5.5 8 3.5 M10 x 1.25 29 M5 x 0.8 83 32 Up to 450 22 19.5 17 8 M5 x 0.8 9.5 20 12 19 3 18 12 40 6 38 M5 x 0.8 depth 8 5.5 10 3.5 M10 x 1.25 35.5 Rc 1/8 85 40 RB Up to 800 30 27 19 10 M6 x 1.0 12 26 16 23 3 19 13 50 8 47 M6 x 1.0 depth 12 6 14 4 M14 x 1.5 44 Rc 1/8 93 50 Up to 1200 35 32 27 13 M8