Series VF1000/3000/5000 Pilot Operated 5 Port Solenoid Valve Single Unit Note) Only DIN and conduit terminal types are available with AC mode. Refer to the electrical entry for details.

Refer to page 51 for details. 1

Air Slide Table Series MXS

(N) EPDM seal Bore size (mm) Rod size (mm) Piston area (mm2) Operating direction Operating pressure (MPa) For clean room specifications, refer to Pneumatic Clean Series catalog. 0.7 0.6 0.5 0.4 0.3 0.2 40 34 29 23 17 11 OUT IN 57 6 3 29 25 21 17 13 8 42 Standard Stroke 71 61 51 40 30 20 OUT IN 101 8 4 53 45 38 30 23 15 75 Model Standard stroke (mm) 158 136 113 90 68 45 OUT IN 226 12 6 10,

7.5

A B C Series Model Effective area (8) For SJ2000 SJ3000 AN203-KM8 SJ3000-155-1A 14 mm2 16 26 51 Label for SUP/EXH block disk M Plug These are inserted in unused cylinder ports and P, E ports. d Label for SUP block disk D A L Label for EXH block disk Dimensions Applicable fitting size d A L D Model KJP-02 KQ2P-04 KQ2P-06 KQ2P-08 KQ2P-01 KQ2P-03 KQ2P-07 KQ2P-09 2 4 6 8 1/8" 5/32" 1/4" 5/16"

Tie-rod Type Low Pressure Hydraulic Cylinder Double Acting/Single Rod Series CHA ø 40, ø 50, ø 63, ø 80, ø 100, ø 125, ø 160

57 104 59 51 93.5 100 63.5 58.5 65 114 70 58.5 104 102

Compact Hydraulic Cylinder Double Acting/Single Rod Series CH
QB ø 20, ø 32, ø 40, ø 50, ø 63, ø 80, ø 100

57.5 M16 x 2 132 6 22 11 17.5 depth 13.5 26 77 11 Rc 3/8 112.5 100 20 25 98 28 89 100 67.5 M20 x 2.5 156 6.5 26 12 17.5 depth 13.5 26 94 11 Rc 3/8 132.5 107 24 30 117 29 95 Rod end male threads (mm) H X D L K C Bore size (mm) 20 M8 x 1.25 18 15.5 10 23 8 32 M14 x 1.5 30 27 16 38.5 14 40 M14 x 1.5 30 27 16 38.5 14 50 M18 x 1.5 35 32 20 46 18 63 M18 x 1.5 35 32 20 46 18 80 M22 x 1.5 40 37 25 51

Compact Hydraulic Cylinder Double Acting/Double Rod Series CH
QWB ø 20, ø 32, ø 40, ø 50, ø 63, ø 80, ø 100

27 60 80 M16 x 2 132 6 22 11 89 57.5 26 111 11 17.5 depth 13.5 Rc 3/8 112.5 20 25 98 28 77 100 M20 x 2.5 156 6.5 26 12 95 67.5 26 119 11 17.5 depth 13.5 Rc 3/8 132.5 24 30 117 29 94 Rod end male threads (mm) C D L K H X Bore size (mm) 20 15.5 10 23 8 M8 x 1.25 18 32 27 16 38.5 14 M14 x 1.5 30 40 27 16 38.5 14 M14 x 1.5 30 50 32 20 46 18 M18 x 1.5 35 63 32 20 46 18 M18 x 1.5 35 80 37 25 51

Series SYJ500 Rubber seal 3 Port Pilot Solenoid Valve

Base mounted (with sub-plate) 65 (51) 1/8 61 (47) 60 (46) 82 (68) Note) Value for DC. Add 1 g for AC. ( ): Without sub-plate. External Pilot SYJ500R Pilot valve pressure is supplied separately from the main valve pressure through the use of a separate supply port. It can be used in the vacuum (up to 100 kPa) or low pressure line with 0.15 MPa or less.

Compact Cylinder with Lock Series CLQ

M E S 3.2 2 x 2-M5 x 0.8 3.2 16 16 Dust cover (manual unlocking unit) W L G B + Stroke A + Stroke Retraction locking LOCK VH1 W1 Dust cover (manual unlocking unit) M5 x 0.8 unlocking port (unlocks when pressurized) Rod end male threads H1 Rod end nut H2 X C1 L1 (mm) Stroke range Without auto switch With auto switch Bore size (mm) A G E H I K L M Q S U VH VV W D C A B B 61 68.5 19.5 22.5 51

Tie-rod Type Low Pressure Hydraulic Cylinder Double Acting/Double Rod Series CHAW

104 57 59 51 93.5 100 63.5 58.5 114 65 70 58.5 104 114

Hydraulic Cylinder 7MPa Nominal Pressure Series CHN

P Rc P GA2 Cushion valve GB1 NN GB2 T V Rc P MM Width across flats B1 H2 GA1 Cushion valve Cushion valve H1 D IA FY I B W Width across flats E Air release Air release Effective thread GB3 FT GA3 4-FD NA NB A K F S + Stroke FX 3 H ZZ + Stroke FZ (mm) Bore size (mm) Stroke range (mm) Effective thread length (mm) A B B1 B2 D E F FD FT FX FY FZ GA1 GA2 GA3 GB1 GB2 20 18 38 13 26 10 8 16 7 6 51

e-Rodless Actuator

However, when a stroke out of the standard 51 to 599 is required, add "-XB10" at the end of the model no. When stroke exceeds 600 mm, add -XB11 at the end of model no. Refer to page 23 for Made to Order. Applicable auto switches/For detailed auto switch specifications, refer to page 17 through 21. Lead wire length (m) 0.5 (Nil) 3 (L) 5 (Z) Auto switch part no.

Mechanically Jointed Rodless Cylinder Series MY2H/HT ø16, ø25, ø40

However, add "-XB10" to the end of the part number for non-standard strokes from 51 to 599. Also when exceeding a 600mm stroke, specify "-XB11" at the end of the model number.

MXW Series Long Stroke Slide Table

5H9 +0.03 depth 4.5 0 Width across flats 8 6-M4 x 0.7 thread depth 6 (Helisert) 6 27 58 46 Y 29 26 103 26 Y L 5H9 +0.03depth 4.5 0 10 15 15 K A 35 20 26.5 A Z Bottom through hole 4.2 N-M5 x 0.8 thread depth 10 (N-1) x H G M5 x 0.8 thread depth 10 GG H 6 depth 4.5 5H9 +0.03 Bottom through hole 4.2 0 F E 5H9 +0.03depth 4.5 0 G F E Model J H GG Z N L K 82.5 123 91 MXW12-100 114 35 30 280 5 51

Mechanical Valves Series NVM, NVFM, NVZNI

Panel lMounting Panel N4ountrng F.tJ T 1 2 3 5 l b s ( 5 6 k 9 ) P T 0 138 in (3 smm) O T 0 079 in (2mm) T T 0 216 in (5 smm) F O F 12 35 lbs (5.6 ks ) P T 0,138 in (3 5mm) O T 0 079 in (2mm) T T 0 216 in (5 Smm) '75 PSIG (5 Kg{/cm2) "75 PSIG (5 Kgt/cm2) A B c D E F G 4.25 (1 08) 2.20 (56) 1 . 3 2 :33.5 0.91 (231 0.24 (6) 0.81 'DN E 0.39 {10) A B c D E F G 4.O7 10s.5 2.03 t51 .5) 1.32 133-51

Digital Flow Switches, Series PF2A, Series PF2W

How to Order Integrated Display Type PF2A7 10 01 27 Flow rate range Thread type Unit specification 1 to 10l/min 5 to 50l/min 10 to 100l/min 20 to 200l/min 50 to 500l/min 10 50 11 21 51 Nil M Wiring specification With unit switching function Fixed SI unit Note) Nil N F Rc NPT G 3m lead wire with connector Without lead wire Nil N Note) Fixed units: Real-time flow rate: l/min Accumulated flow

Digital Flow Switches Series PF2A

How to Order Integrated Display Type M PF2A7 10 01 27 Flow rate range 1 to 10 l/min 5 to 50 l/min 10 to 100 l/min 20 to 200 l/min 50 to 500 l/min 10 50 11 21 51 Thread type Unit specification Nil M With unit switching function Fixed SI unit Note) Nil N F Lead wire (Refer to page 35.)

Sine Rodless Cylinder Series REBR Direct Mount Type

port P Operating direction B Piping port P (plug) Operating direction B 8 Piping port P Operating direction A 16 19.5 16 Plug REBR15 REBR15 (mm) A B C CB CR D F G GP GW H HA HB HC HP HR HS HT Model REBR15 12.5 8 4.2 2 0.5 17 8 5 33 31.5 32 30 17 31 30 8.5 REBR25 12.5 9.5 5.2 3 1 27.8 8.5 10 44 42.5 44 41 23.5 43 14.5 41 6.5 23.5 REBR32 19.5 11 6.5 3 1.5 35 10.5 16 55 53.5 55 52 29 54 20 51

Digital Flow Switch Series PFA For Air Series PFW For Water

temperature regulation Flow control of N2 gas to prevent detection camera shimmering and lead frame oxidation Features 2 For Air For Air Digital Flow Switch Series PFA How to order Integrated display type PFA7 10 01 27 Unit specification Flow rate range With unit switching function Fixed SI unit Note) Nil M 1 to 10l/min 5 to 50l/min 10 to 100l/min 20 to 200l/min 50 to 500l/min 10 50 11 21 51

Miniature Fittings M3, R(PT) 1/8, M5 Series M

I.D. 1 8 1 4 1 8 1 4 3 8 1 8 1 4 3 8 1 8 1 4 3 8 1 4 3 8 1 2 1 4 3 8 1 2 1 4 3 8 1 2 1 4 3 8 1 2 10 17 19 17 19 20 18 21 20 18 21 20 22 21 25 22 21 25 23 22 25 23 22 25 21 25 22 27 38 30 32 39 31 32 37 38 44 66 38 43 65 53 53 68 51 52 67 KFL04-01 KFL04-02 KFL06-01 KFL06-02 KFL06-03 KFL08U-01 KFL08U-02 KFL08U-03 KFL08N-01 KFL08N-02 KFL08N-03 KFL10U-02 KFL10U-03 KFL10U-04 KFL10N-02 KFL10N-03

Pneumatic Transfer System Series MF

+ Static moment (M) Allowable dynamic moment (ME max) 1 Allowable static moment (M max) + Determination 3 3-Dimensional Transfer Single Unit Type Series MF Construction MF15 Material Note Parts list Material Note Parts list Description Qty. 4 8 2 2 2 2 10 4 4 2 4 4 4 2 2 4 2 4 2 2 2 9 5 Qty. 1 Description Cylinder tube No. 1 No. 30 31 32 33 34 35 36 37 38 39 40 41 42 44 45 46 47 49 50 51