High Vacuum Angle Valve, XL Series

) 46.5(57) 46.5(57) 50(66) 8.5 11.5 11.5 11.5 22 25 25 25 20 23 25.5 25.5 56 61 61 65 64 75.5 82 82 30 35 40 40 XSA12S(V) XSA22S(V) XSA3-32S(V) XSA3-43S(V) P DIN terminal M L Model G 59 60 63 H 48 58.5 64 64 63 J 47 48 51 51 (Unit: inch) 1/4 1/4 1/4 3/8 8 10 10 10 3 5 5 5 XSA12S(V) XSA22S(V) XSA3-32S(V) XSA3-43S(V) 34 High Vacuum Angle Valve Series XL 1 With pilot pressure at 0.5MPa (72psi

CRBU

With auto switch CDRBUWUSize SSCRB Size , #10 CDRBUWU15-lS 25 47 18 M5 X 0.8 CDRBUWU20-lS 34.5 51 20 M5 X 0.8 CDRBUWU30-lS 47.5 55.5 22 M5 X 0.8 With Angle Adjuster and Auto Switch Dimensions/Double Vane Style The dimensions below show rotation middle point during pressurization to A port or B port.

Digital Pressure Switch

Piping/weight specifications Product No. 02(L) N02(L) F02(L) C01(L) A2(L) B2(L) Port size R1/4 NPT1/4 G1/4 Rc1/8 URJ1/4 TSJ1/4 fluid contact Materials in part Pressure-sensing part Pressure sensor: SUS630, Fitting: SUS304 Body (Rear piping) 51 g 51 g 48 g 47 g 54 g 46 g Weight Body (Bottom piping) 77 g 78 g 74 g 65 g 81 g 72 g Lead wire with connector +39 g Leakage 1 x 10-5Pa m3/s 1 x 10

Integrated Controller

Dimensions [mm] Size Stroke range [mm] A B C D EH EV H J K L M O1 R S S2 T T2 U CV V X2 Y Without lock With lock 25 15 to 100 136.2 121.7 13 20 44 45.5 M8 x 1.25 24 17 14.5 34 M5 x 0.8 8 46 58.1 115 113.6 1 66.3 57.8 144 184 32.2 101 to 400 161.2 146.7 32 20 to 100 153.6 135.1 13 25 51 56.5 M8 x 1.25 31 22 18.5 40 M6 x 1 10 60 70.8 142 140.3 2 83.5 69.8 144 189 39.1 101 to 500 183.6 165.1

SMC Pneumatic Clean Series

1.25 M18 x 1.5 11.5 Head side flange style (G) / CA2G, CA2G 10112122Relief port 2-cushion valve M5 x 0.8 GA 6 4-FD 4-J GB Width across flats KA 2-RcP Width across flats B1 FV FY D B E MM H1 AL A N C 18 K N 7 B H S + Stroke FT FX ZZ + Stroke FZ (mm) AL Bore size Stroke range Symbol B B B1 C D E FV FD FT J FX FY MM M FZ P S ZZ A GAGB H H1 K KA N 12 80 42 33 11 40 15 M8 x 1.25 27 Up to 1000 51

Series MXQ 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

This could cause an auto switch malfunction. 14 30 14 Vacuum suction port Rc1/8 (NPT1/8, G1/8) Extension end adjuster 45.5 (Extension end adjuster) 15 6 N x M5 x 0.8 thread depth 8 Note 1) Note 2) Retraction end adjuster 6 14.5 (Extension end adjuster) 31 33 70 35 1.5 30 3 60 17.5 5H9 ( ) depth 5 +0.030 0 F 7 4 x M5 x 0.8 thread depth 8 18 2 N 1 x F 51 3 x M6 x 1 thread depth 13 5H9 ( )

Series REC 10- ø20, ø25, ø32, ø40 11- Sine Cylinder

NA N LX LD D C A B 16 13 13 13 8 F Bore size K H1 H 8 6 6 5 H2 I 41 32 32 26 B2 54 47 47 40 B1 Stroke range 50 45 45 41 M10 x 1.25 M8 x 1.25 30 40 32 25 20 5.5 5.5 5 200 to 1000 150 to 1000 150 to 700 150 to 700 10 8 8 8 26.5 22 20 20 12.5 11 10 10 24 22 22 18 46.5 37.5 33.5 22 17 17 13 21 19.5 19.5 15.5 55.5 49.5 45.5 40 7 6.8 6.8 6.8 30 28 28 25 227 199 186 186 55 40 40 40 75 55 55 55 51

15

51 67.5 76.5 Note 1) The values in the above list are used as a guide for the auto switch mounting position for end of stroke detection.

Escapements Series MIW/MIS ø8, ø12, ø20, ø25, ø32 1

650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com RHC Scraper Can be mounted on standard products MK(2) Theoretical Output RS Q G Unit: N Operating pressure MPa Rod size (mm) Bore size (mm) Operating direction Piston area (mm2) RS H A 0.3 0.2 0.4 0.5 0.6 0.7 15 10 OUT 36 31 26 20 50 8 4 RZQ 11 7 IN 26 23 19 15 38 34 23 OUT 79 68 57 45 113 12 6 MI W S 26 17 IN 60 51

Non-rotating Double Power Cylinder/ Double Power Cylinder (without non-rotating mechanism) Series MGZ/MGZR ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

(mm) Stroke range Bore size (mm) I J K M B D C E KA GA GB H 51 57 66 78 92 110 144 M5 x 0.8 M5 x 0.8 M6 x 1 M6 x 1 M8 x 1.25 M8 x 1.25 M12 x 1.75 8 8 10 10 14 14 20 11 12 22 25 25 25 25 25 30 36 45 55 68 87 11 12 16 21 26 32 36 21 24 30 36 46 53 65 16 26 28.5 34.5 40 46.5 54 20 21 35 40 45 50 50 29 33 38 46 55 66 86 39 43 49 59 71 82 106 20 25 32 40 50 63 80 12.5 18 19.5 23.5 28 34.5 36 Up

VQ valves are ideal for applications requiring high speed, frequent operation, stable response time and long service life. Innovative mounting methods allow valves to be changed without entirely disassembling the manifold. Built-in one-touch fittings save piping time and labor. Fluid: air/inert gas, Operating pressure range: 0.10 - 1.0MPa, Effective area mm 2 (Cv): 2 position metal seal

VQ valves are ideal for applications requiring high speed, frequent operation, stable response time and long service life. Innovative mounting methods allow valves to be changed without entirely disassembling the manifold. Built-in one-touch fittings save piping time and labor. Fluid: air/inert gas, Operating pressure range: 0.10 - 1.0MPa, Effective area mm 2 (Cv): 2 position metal seal

Actuation Type: 5 (3 Position Pressure Center), Sealant: 1 (Rubber Seal), Function: RY (External Pilot, Low Wattage 0.5W), Voltage: 5 (24VDC), Light & Surge Suppressor: Yes, Manual Override: Non-locking Push Style (Tool Required), Protection: Dust Proof, 1: 1, Piping Specification: Side Ported, Port Size: 04 (Rc1/2)

Actuation Type: 1 (2 Position Single), Sealant: 1 (Rubber Seal), Function: Standard (1W), Voltage: 5 (24VDC), Light & Surge Suppressor: Yes, Manual Override: Non-locking Push Style (Tool Required), Protection: Dust Proof, 1: 1, Piping Specification: Side Ported, Port Size: 04 (Rc1/2)

Actuation Type: 3 (3 Position Closed Center), Sealant: 1 (Rubber Seal), Function: Standard (1W), Voltage: 5 (24VDC), Light & Surge Suppressor: Yes, Manual Override: Non-locking Push Style (Tool Required), Protection: Dust Proof, 1: 1, Piping Specification: Side Ported, Port Size: 04 (Rc1/2)

Actuation Type: 3 (3 Position Closed Center), Sealant: 0 (Metal Seal), Function: Standard (1W), Voltage: 5 (24VDC), Light & Surge Suppressor: Yes, Manual Override: Non-locking Push Style (Tool Required), Protection: Dust Proof, 1: 1, Piping Specification: Side Ported, Port Size: 04 (Rc1/2)

Actuation Type: 2 (2 Position Double), Sealant: 0 (Metal Seal), Function: Standard (1W), Voltage: 5 (24VDC), Light & Surge Suppressor: Yes, Manual Override: Non-locking Push Style (Tool Required), Protection: Dust Proof, 1: 1, Piping Specification: Side Ported, Port Size: 04 (Rc1/2)

Actuation Type: 2 (2 Position Double), Sealant: 0 (Metal Seal), Function: Y (Low Wattage 0.5W), Voltage: 5 (24VDC), Light & Surge Suppressor: Yes, Manual Override: Non-locking Push Style (Tool Required), Protection: Dust Proof, 1: 1, Piping Specification: Side Ported, Port Size: 04 (Rc1/2)

Actuation Type: 4 (3 Position Exhaust Center), Sealant: 1 (Rubber Seal), Function: Y (Low Wattage 0.5W), Voltage: 5 (24VDC), Light & Surge Suppressor: Yes, Manual Override: Non-locking Push Style (Tool Required), Protection: Dust Proof, 1: 1, Piping Specification: Side Ported, Port Size: 04 (Rc1/2)

Actuation Type: 4 (3 Position Exhaust Center), Sealant: 1 (Rubber Seal), Function: Standard (1W), Voltage: 5 (24VDC), Light & Surge Suppressor: Yes, Manual Override: Non-locking Push Style (Tool Required), Protection: Dust Proof, 1: 1, Piping Specification: Side Ported, Port Size: 04 (Rc1/2)