CE

9 #0 w #1 #0 t q e @9 #1 @1 !9 t @5 @6 @1 #0 q !1 w#1 #0 @2 @9 #1 @1 CX CY 40 to 63 MQQ M @0 @4 @8 i u o @3 !1 #1 #2 @8@4 !2 @7 !3 #3 r !4 e !6 @6 RHC MK(2) #7 #6 !5 RS Q G RS H A !9 @5 t @6 y #0 w @1 #0 #5 !7 #4 q @9@2 !8 #1 #2 !7 #5 #4 @1 RZQ MI W S CEP1 Component Parts CE1 No. No.

CE

7 #4 q @9@2 !8 #1 #2 !7 #5 #4 @1 RZQ MI W S CEP1 Component Parts CE1 No. No. Note Note Description Material Description Material 40 to 63 Wear ring Resin Aluminum alloy Cylinder body q !8 CE2 12 to 20 Carbon steel Brass Rod end nut !

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

-3A-1U t VZ1000-2A-1M SUP/EXH block assembly y Note) Block pin (2 pcs.) is attached for q, e, t, y.

KJ

w No. q w e r t y u i o !

&snac

R e m o v e a n Y b t o c k o n b e n d o n t n e p u r q i n s a l r P i P i n s ' b . P l p i n s f o r p u r g i n g a i r i s r e d u c e o r t o n q e r t h a n s P e c i f i e d l e n q t n ' r e f e r t o P . 2 , 7 f o r c o r r e c t i o n ' c .

Regulator Unit Combination: [Other FRL Combination Devices] Other FRL Combination Device, Port Size: G1, Compressed Air Quality: General Dry Air, Maximum Operating Pressure(MPa): 1, Case Material: [Resin] Polycarbonate Case, Case Guard: Presence, Exhaust Structure: Relief type, Flow Direction: [Reverse Flow (Right to Left)] Right to left, Drain Cock: [Not Provided] No, Pressure Gauge: -,

Size: 2 [ø15(ø11)], Valve Type: 2 [NO (Operating Pressure 1MPa)], Sealant: NBR Seal, Body Material: Standard, Pilot System Option: Standard, Thread: G(PF), Port Size: 3/8, Voltage: 24VDC, Lead Wire: DIN Terminal w/Light & Surge Voltage Suppressor, Manual Override: Non-locking Push Style, Bracket: Bracket, X200: -, CE Compliance: -

Size: 2 [ø15(ø11)], Valve Type: 4 [NC (Operating Pressure 1MPa)], Sealant: NBR Seal, Body Material: Standard, Pilot System Option: Standard, Thread: G(PF), Port Size: 3/8, Voltage: 24VDC, Lead Wire: DIN Terminal w/Light & Surge Voltage Suppressor, Manual Override: Non-locking Push Style, Bracket: Bracket, X200: -, CE Compliance: -

Body Size: 50, Thread: F (G), Port Size: 10 (1), Handle/Bonnet Material: A (Flame Resistant PBT), Options: S (Built-in Silencer, EXH Port), Semi-Standard: R (Flow Direction: Right to Left)

Size: 2 [ø15(ø11)], Valve Type: 2 [NO (Operating Pressure 1MPa)], Sealant: A (NBR Seal), Body Material: Standard, Pilot System Option: Standard, Thread: F (G(PF)), Port Size: 10A (3/8), Voltage: 5 (24VDC), Lead Wire: DZ (DIN Terminal w/Light & Surge Voltage Suppressor), Manual Override: Non-locking Push Style, Bracket: B (Bracket)

Size: 2 [ø15(ø11)], Valve Type: 4 [NC (Operating Pressure 1MPa)], Sealant: A (NBR Seal), Body Material: Standard, Pilot System Option: Standard, Thread: F (G(PF)), Port Size: 10A (3/8), Voltage: 5 (24VDC), Lead Wire: DZ (DIN Terminal w/Light & Surge Voltage Suppressor), Manual Override: Non-locking Push Style, Bracket: B (Bracket)

CNA

MLGC Taper ring Steel ball CNG P q MNB f CNA R R CNS CLS CLQ MLGP RLQ MLU ML1C Manual override for unlocking DEven if the air supply is blocked or exhausted, lock release is possible. The fail safe mechanism locks again when the manual override is released.

CNA

1 o q $8 y $1 r #5 B A CL CL1 MLGC @3 !4 %0 !3 #9 @8 #6 $0 w #0 $5 $7 $3 $9 %1 $4 @1 @4 !8 @0 !7 !

HRL

Q = qm x C x (T2 T1) x qv x C x iT 60 1 x 70 x 4.186 x 103 x 4.0 60 = = qm x C x (T2 T1) 860 Q = = 19535 [J/s] 19535 [W] = 19.5 [kW] x qv x 60 x C x iT 860 = Cooling capacity = Considering a safety factor of 20%, 19.5 [kW] x 1.2 = 23.4 [kW] 1 x 70 x 60 x 1.0 x 103 x 4.0 860 = Thermo-chiller T1: Outlet temperature Q: Heat generation amount 1680 [cal/h] 860 Users equipment = T = T2 T1

CL

Description q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !9 @0 @1 @2 @3 @4 @5 No. Description q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !

Modular F.R.L. Unit

Metal bowl with level gauge w q With bowl guard e q w Drain guide 1/4 N R q w Non-relieving type Flow direction: Right to left Note 1) The circled numbers indicate the order in which the units are assembled.

Vacuum Pad: Ball Joint Type Series ZPT/ZPR Pad Diameter: ø10, ø13, ø16, ø20, ø25, ø32, ø40, ø50 1

6 Q: 8 Model A B C D F H I J K P Q: 6 Q: 8 Y K P K P ZPT20F10-0-A14 ZPT40F10-0-A14 18.5 39 51.5 118 136.5 13 140 5 12.5 20 22 40 43 13 15.5 36 48.5 50 115 13 133.5 13 137 12.5 52.5 50 ZPT25F10-0-A14 ZPT50F10-0-A14 40 119 137.5 141 6 19.5 13.5 25 28 50 53 ZPT32F10-0-A14 16 36.5 49 115.5 134 135.5 13 32 35 Additional Dimensions by Stroke (mm) Additional Dimensions by Stroke (mm) K P Q: 6 Q

VK3000

VV5K3-20-06 [Option] Note) CE-compliant: For DIN terminal only VV5K3-40-06-M5 Common SUP/Common EXH How to Order Type 20: Body ported (A, B port top ported) 20 05 VV5K3 Applicable solenoid valve VK3120--M5(-Q) VK3120--01(-Q) VK332--M5(-Q) VK332--01(-Q) A port: Rc 1/8, M5 x 0.8 A, B port Rc 1/8, M5 x 0.8 VK3120 Valve stations VK332 Thread type Q CE-compliant Nil CE-compliant 01 1 station

Series 10-SZ3000 5 Port Solenoid Valve Cassette Type Manifold

Ordering example Double solenoid (24 VDC) 10-SZ3260-5LOZ-C6(-Q) (3 sets) SUP/EXH block assembly (U side mounting) Single solenoid (24 VDC) 10-SZ3160-5LOZ-C6(-Q) (2 sets) Manifold base (5 stations) 10-SS5Z3-60S6BD-05U(-Q) SI unit part no. LOCK FREE SI unit specifications SI unit part no.

VCW

(mm) Electrical entry P Port size A B C D E F H K L M N Model Grommet: G Conduit: C DIN terminal: D Conduit terminal: T Q R Q R Q R S Q R S U 13.5 28 64 31 6.5 12.5 28 14 12.8 M4 4.5 22 45 44 43 58 40.5 46.5 99 43 66 83 1/8 VCW21 18 36 67.5 31 8.5 12.5 28 18 12.8 M4 6 22 46 44 44 58 41.5 46.5 99 44 66 86 1/4 22 40 81.5 36.5 11 15 32 20 19 M5 8 24 56.5 46 54.5 60 52 48.5 101 54.5 68 99 1/4