ITV

(Maximum 10 stations) Example) IITV00-05-07 02 03 2 stations 3 stations Indicate part numbers in order starting from the first station on the D side. 10 10 stations Note) Combination with having different pressure ranges is not available due to common supply/exhaust features. Note) A DIN rail with the length specified by the number of stations is attached to the manifold.

XLAQ/XLDQ

-10 (FKM) 1.3 x 10-8 External 1.3 x 10-10 (FKM) 1.3 x 10-8 Nil A B C None w, e, r, t w, r, t e Seal material 1.3 x 10-8 1.3 x 10-10 (FKM) 1.3 x 10-8 Seal material FKM EPDM Barrel Perfluoro Compound no. 1349-80 2101-80 Symbol Nil N1 1.3 x 10-10 (FKM) Note 1) Values at ambient temperatures, excluding gas permeation.

PC Wiring System Series PCW

, A1SY42] 0 1 2 3 4 5 6 7 8 9 A B C D E F 8 6 4 2 40 38 36 34 32 30 28 26 24 22 20 18 16 14 12 10 Input/output connector (CS0) 3 7 5 1 39 37 35 33 31 29 27 25 23 21 19 17 15 13 11 9 Power supply terminal block 20 18 16 14 12 10 8 6 4 2 Input/output connector (CS1) 19 17 15 13 11 9 7 5 3 1 Green Red F E D C B A 9 8 7 6 5 4 3 2 1 0 4 3 2 1 CN1 4 3 2 1 CN2 4 3 2 1 CN3 4 3 2 1 CN4 4 3 2 1 CN5

Vacuum Pad: Ball Joint Type, Series ZPT/ZPR

Q Width across flats 12 N M5 x 0.8 Width across flats 10 8 3 5 Y R R F F Width across flats 12 Width across flats 3 Width across flats 10 Width across flats 2 E E D C D C 2 2 A A B B Dimensions A Dimensions A (mm) (mm) B B C D E F Y C D E F N Model Model ZPR10F-0-B5 ZPR20F-0-B5 10 12 10 12.5 23.4 39.5 1.5 M5 x 0.8 20 22 ZPR13F-0-B5 ZPR20F-0-B8 13 15 M8 x 1.25 23.9 10.5 13 40 2 12.5 15.5 29.3

JXCx-OMT0061CN

: RESET SVON PLC 1-150 D LED RWr0,bit F (LRUN) *2 ON PLC RWw0,bit 2:ON Ry0B: RESET ON OFF PC/TB Ry0B: RESET ON PLC PLC PC/TB PC:TB: <> 1-192 E <> <> ON(SVON ON) 1-193 E <>ON SVON ON <> 1-194 E <> <> 1-195 E <> <> 1-196 E <> 75 - <>EEPROM 1-197 E <> EEPROM 10 <>CPU CPU CPU 1-198 CPU E <> <>CC-Link WDT CC-Link (01-206) CC-Link WDT E <> *1 (RWr)code

5 Port Solenoid Valve, Series VQC

Refer to e.

ATEX Compliant 5 Port Solenoid Valve Series 52-SY

(Lead wire length) Max.10 11 ATEX Compliant Body Ported Type Series 52-SY9000 Dimensions 2-position double L plug connector (L) 52-SY9220-L02 03 106 6.5 Insulation: Black () 18.4 2B 4A Manual override Insulation: Red (+) 33.6 3 x 3.2 (Mounting holes for manifold) 64.2 2 x 1/4", 3/8" {4 (A), 2 (B) port} 46 (For E type) 0.3 mm2 51.5 42 36.6 16.7 1.55 10 2 x 4.4 (Mounting holes) (12) 24.9 194.2

Series IDG

50M IDG30HM, 50HM IDG30LM, 50LM (B) K (D) C L H F 37 J IN OUT M (E) (G) M5 female threads Drain discharge With drain guide With float type auto drain (P) (N) N.C.: Gray N.O.: Black Thread size: 1/4 (without valve mechanism) Applicable tube O.D.: 10 (NPT threads: 3/8 inch) Width across flats 19 With float type auto drain With drain guide Port size A B C D E F G H J K L M N Model P 150 146

C95Series

10 !

CJ2-Z 10-/11- Series 21-/22- ø10, ø16 Air Cylinder

M5 x 0.8 M4 x 0.7 NDh8 Z S 12-0.027 10-0.022 4 5 122 121 66 65 0 0 Foot (L): CJ2WL, CJ2WL 10112122View E Mounting nut Relief port 2 x M5 x 0.8 GA GA NN GC F MM NN GC F Rod end nut Cover surface Piping port 2 x M5 x 0.8 MM D D LY LB LH LZ LX LT LT Y NA X S + Stroke H NA Y A X 4 x LC Mounting hole A H + Stroke Z + 2 x Stroke C B 0 0.3 B 0 0.3 Drawing of view E (mm) Bore size 16 10 15 15 B LT

Rodless Cylinder for Vacuum Series CYV ø15, ø32 1

10-10 0 5 10 t i o o n L DTime [min] Operation cycles -X e e a a l l k k a t e l u w w g a a c 2 e i o o g g 1 O-ring seals separate vacuum and atmosphere. t Employs a magnetically coupled rodless cylinder with no air leakage from moving parts. n 1 r a L L e e e Particulate generation from the linear guide unit has been reduced with the use of a stainless steel linear guide and low particulate

CJ2-Z 10-/11- Series 21-/22- Air Cylinder/ø10, ø16

Model Cushion Rubber Air Bore size (mm) Action Standard stroke (mm) Auto switch mounting Port size Lubrication Model Relief type Vacuum suction type 10-/21-CJ210 10 15, 30, 45, 60, 75, 100, 125, 150 Double 10-/21-CJ216 M5 x 0.8 15, 30, 45, 60, 75, 100, 125, 150, 175, 200 16 Band mounting only Standard acting, Non-lube 10-/22-CJ210 15, 30, 45, 60, 75, 100, 125, 150 10 Single rod 10-/22-

Cylinder with Lock

Bore size B DA DB DL DU DC DX DE DO DR DT DS DH Z DD H10 32 219 40 237 50 268 63 280 80 351 100 371 MB-B03 32 46 42 32 22 10 44 14 62 9 6.6 15 7 33 213 10+0.058 0 40 52 42 32 22 10 44 14 62 9 6.6 15 7 33 231 10+0.058 0 MB-B05 50 65 53 43 30 11.5 60 20 81 10.5 9 18 8 45 260 14+0.070 0 63 75 53 43 30 11.5 60 20 81 10.5 9 18 8 45 272 14+0.070 0 MB-B08 80 95 73 64 45 14 86 30 111 12.5 11 22 10

Series SYJ3000/5000/7000 4, 5 Port Solenoid Valve Rubber Seal

13 13 5 5 10 10 5-M5 X 0.8 10 10 5-M5 X 0.8 28 (Piping port) 28 (Piping port) [ ] for AC Other dimensions are the same as the grommet style. [ ] for AC Other dimensions are the same as the grommet style. 1.2-16 Series SYJ3000 3 Position Closed Center/Exhaust Center/Pressure Center 3 4 5 G H Grommet (G), (H): SYJ3 40-l ll-M5 10 9 5 10 SY 16.5 33.5 SYJ 2-1.8 (Mounting holes) Manual override

Rubber seal Series 10-SYJ3000/5000/7000 4/5 port solenoid valve

0.075 0.062 0.062 0.079 0.084 0.081 0.084 0.024 0.047 0.024 0.024 M5 x 0.8 C4 M5 x 0.8 C4 M5 x 0.8 C4 M5 x 0.8 C4 M5 x 0.8 C4 M5 x 0.8 C4 10-SS5YJ3-32-M5 10-SS5YJ3-32-C4 10-SYJ333 1/8 10-SS5YJ3-S32-M5 10-SS5YJ3-S32-C4 Base mounted for internal pilot 10-SS5YJ3-41-M5 10-SS5YJ3-41-C4 10-SYJ343 1/8 10-SS5YJ3-S41-M5 10-SS5YJ3-S41-C4 10-SS5YJ3-46-M5 1/8 M5 x 0.8 10-SS5YJ3-46-C4 10-SYJ343 10-SS5YJ3

10

E1 + E2 E1 + E2 E1 + E2 E1 + E2 Note 2) E 2 2 E 2 2 E 2 2 E 2 2 Equivalent mass Me Note 1) This is the momentary speed at which an object is impacting against a shock absorber.

MNB

C 4FD A K BN F GF GB Width across flats B1 Cushion valve 4-J MM H1 Q D E B V FB FY FT N FX FZ Width across flats ZZ + Stroke (mm) Width across flats 10 Effective thread length (mm) Bore size (mm) Stroke range (mm) BP A B1 H1 BN C D Ee11 F FT FX FY FZ GA GB GC GD FB B FD 32 1/8 22 17 6 97 32.5 12 30 13 10 72 38 87 83 13 45.5 13 56 54 to 500 7 19.5 40 1/8 30 22 8 104 38 16 35 13 10 83 46

53

Cooling Capacity HRSH090-A-20HRSH090-A-4012 12 Ambient temperature 32C Ambient temperature 32C 10 10 Cooling capacity [kW] Cooling capacity [kW] 8 8 Ambient temperature 43C Ambient temperature 43C 6 6 Ambient temperature 45C 4 4 Ambient temperature 45C 2 2 0 0 5 10 15 20 25 30 35 40 5 10 15 20 25 30 35 40 Circulating fluid temperature [C] Circulating fluid temperature [C] HRSH090-W-20/4014

MXW Series Long Stroke Slide Table

port M5 x 0.8 Operation direction A (Plug: M-5P) 49 46 38 5 22 12 19 4 40 25 Y Y 5.5 Operating port M5 ~0.8 24 84 Operation direction B (Plug: M-5P) Operation direction B A 7 6.5 13 10 10 13 A 14.8 30 7 24 A 15.8 Z Cross section AA (scale 50%) (N-1) x H G H 6 depth 4.5 5H9 +0.03 N-M4 x 0.7 thread depth 8 0 Bottom through hole 3.3 5H9 +0.03depth 4.5 0 F E Model J N H G F E Z MXW8-25 64 3

Rotary Cylinder Series MRQ Size: 32, 40 1

F: Angle adjustment range 5 E: Angle adjustment range 5 E: Angle adjustment range 5 B port Angle adjustment screw A port Clockwise rotation 0 8 0 e Allowable Lateral Load to the Piston Rod End gl 10 n a e nt gl e an m st t en u dj m a m st u ju m i in ad M Using friction fittings makes it easier to mount the load to the piston rod end.