CV/MVGQ

D LY NN C LX Y B LC LT MM X A LB LH LZ NA NB S Z Z S Z S Z S 96.5 [97.5] 104 [105] 96.5 [97.5] 105 [106] 116 [117] 117 [118] 128 [129] 129 [130] 10 16 28 8 4 M8 x 1 14 24 7 84 12 1.6 5 72 15 15 9 32 9.5 60 37.5 4.5 16.5 M4 x 0.7 12.5 52.5 MVGQ 28 8 5 M10 x 1 20 33 9 85 18 2.3 6 73 15 23 14 42 9.5 61 45.5 5.5 25 M5 x 0.8 12.5 52.5 CC Single Acting, Spring Extend/Rod Side Flange Style (F) RB

CL

h l ZZ With rod boot Stroke range Bore size (mm) H1 WA WW WB WH H PG PH PL PW S TA TB P TC W 30 30 25 20 20 25 32 40 178 193 196 221 198 215 218 241 55 62 62 70 16 17 17 17 30 30 35 35 35 40 40 50 M5 x 0.8 M5 x 0.8 Rc 1/8 Rc 1/8 23 25 28.5 33 11 11 10 10 14 14 13 14 11 11 11 12 5.5 7 7 9 38 41 41 41 86 96 97 105.5 20 24 24 24 5 6 6 8 19.5 24 24 24 141 151 154 169 33 38 39 44 M5 x 0.8 M6 x

Series SYJ300/500/700 3 Port Solenoid Valve Rubber Seal

(Blank plate ass'y) Combinations of Solenoid Valve, Manifold Gasket and Manifold Base Blank Plate Assembly Body ported (SYJ3l2) Base mounted (SYJ3l4) SYJ300-10-1A SYJ300-10-2A Phillips head screw SY100-33-3 M1.7 X 17, Matt nickel plated Phillips head screw SY100-33-2 M1.7 X 17, Matt nickel plated Blank plate SYJ300-10-1 Blank plate SYJ300-10-1 P A Manifold gasket VJ300-5-2 Manifold gasket

Stainless Steel Cylinder Series CJ5-S/Series CG5-S

Piping port M5 x 0.8 GB BA CB D LH LB LY With head cover port in axial position (R) LT BB NB A NA X Y LX LZ S + Stroke Z + Stroke H 2-LC Mounting hole (mm) Bore size (mm) A BA BB CA CB D F GA GB H LB LC LH LT LX LY LZ MM NN NA NB S X Y Z 10 15 15 12 17 14 4 8 8 5 28 21.5 5.5 14 2.5 33 25 42 M4 x 0.7 M10 x 1.0 12.5 9.5 46 6 9 74 16 15 18 18 20 20 5 8 8 5 28 23 5.5 14 2.5 33 25 42 M5 x 0.8

SFOD-OMT0009CN

(1) . 33 (2) . 34 6.

Stainless Steel One-touch Fittings Series KG

17 3 8 1 8 1 4 3 8 1 8 1 4 3 8 1 2 1 4 3 8 24.5 28 28.5 30 30.5 31.5 8 14.9 21.6 15.2 12 23 18.5 R(PT) 21.6 14.9 27 32 30 33 32 34.5 17 10 17 26.5 21 18.5 35.2 25.0 36 63 22 36 37 28 38 31 35.5 33 37 17 12 20.9 17 28.5 22 50.2 39.7 1 2 3 8 1 2 KGL12-04 KGL16-03 KGL16-04 65 22 37 39.5 71 (71) 101 100 (84) 105 26.5 21 33 24 38 44.5 41 46 16 22 Reference dimensions after R(PT) thread installation

KG

27 27.5 29 29 1 8 Applicable tubing 6 1 4 17 11.4 9.0 12.8 10 20 Connection thread 3 8 1 8 1 4 3 8 1 8 1 4 3 8 1 2 1 4 3 8 24.5 28 28.5 30 30.5 31.5 27 32 30 33 32 34.5 8 21.6 14.9 18.5 15.2 12 23 Applicable tubing 21.6 14.9 17 10 17 26.5 21 18.5 35.2 25.0 36 63 22 36 37 28 38 31 35.5 33 37 17 12 22 20.9 17 28.5 50.2 39.7 1 2 3 8 1 2 KGL12-04 KGL16-03 KGL16-04 65 22 37 39.5 71 (71) 101

High Purity Fluoropolymer Fittings HYPER FITTING ® Series LQ1 1

M H L M E W Y 1/8 LQ1H11-F LQ1H12-F LQ1H21-F LQ1H22-F LQ1H23-F LQ1H24-F LQ1H31-F LQ1H32-F LQ1H33-F LQ1H34-F LQ1H35-F LQ1H36-F LQ1H41-F LQ1H42-F LQ1H43-F LQ1H44-F LQ1H51-F LQ1H52-F LQ1H53-F LQ1H54-F LQ1H61-F LQ1H62-F LQ1H63-F LQ1H64-F 4 3 6 4 6 4 10 8 6 10 8 6 12 10 12 10 19 12 19 12 25 19 25 19 11.5 18.5 10 10 26.5 1/8" Class 1 Rc (NPT) Port size VC 18.5 35 1/8" 16.5 14 15 14 L VDW 21.5

VQ

L size Blank plate with 2 screws and gasket 39 498 38 485.5 37 473 36 460.5 35 448 34 435.5 33 423 32 410.5 31 398 No. L size 40 510.5 2.9-15

ZQ-OM01401

00-N () 70 ZQMA-K15L-F-0 () 70 -10 N.O. +2 +5 +20 Assy +25 +45 +50 [g] ZZQ101-BSB 115 ZZQ101-BSC 130 ZZQ101-BPB 150 ZZQ101-BPC 155 ZZQ101-OB 105 ZZQ101-OC 120 1 +2 (x ) + () + (1 x ) ZQ1-V114-5LU-A ZQ1-V124-5MU-A ZQ1-VQ110L-5L-A / DC24V -10 to 10 (%) 0.4W 1W L M L ( 2 1.7mm 0.2 to 0.33mm ) V100VQ100 33 - No.ZQ-OM01401-B 9.4 ZSE10 [kPa] 0 to -101 -100 to 100 [kPa]

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

= mg 0.2 1 0.8 0.6 0.4 0.4 0.6 0 0.2 0.8 1 Mass m Operating pressure (MPa) Operating pressure (MPa) Operating pressure (MPa) Static torque calculation Movement Load Tf = F x l (Nm) Allowable Load g = 9.8 m/s2 l Lever Do not allow the load and moment applied to the table to exceed the allowable values shown in the table below.

Mechanically Jointed Rodless Cylinder Series MY2 ø16, ø25, ø40 1

M1 M2 M3 m1 m2 m3 16 25 40 16 25 40 16 25 40 5 4 3.5 18 16 14 MY2H 13 14 10 35 35 30 45 33 28 68 66 57 7 6 7 15 13 13 MY2H 28 26 26 32 30 30 60 50 60 62 62 62 46 55 46 20 18 18 MY2HT 100 120 100 38 35 35 200 220 200 80 80 80 The above values are the maximum allowable values for moment and load.

Air Cylinder Series CA2

B1 K F A N H + Stroke S + Stroke Air release CJP B C H ZZ + 2 Strokes CJ2 With rod boot (One side) With rod boot (Both sides) CM2 e e e d d CG1 f 10.2 10.2 l MB f l f l + Stroke h + l + Stroke 10.2 h + l S + Stroke h + l ZZ + l + 2 strokes ZZ + 2l + 2 strokes MB1 (mm) Stroke range (mm) A Bore size (mm) AL B B1 C D E F G H1 J K KA M MM N Without rod boot With rod boot CA2 40 Up to 500 20 to

JXCx-OMT0062

force F to 8 Alarm 2 8 7 to 0 Alarm 3 8 F to 0 Trigger LV F to 8 Alarm 4 9 F to 0 Sub Function 9 F to 0 Pushing speed Occupation area 10 F to 0 Address 10 F to 0 Moving force 11 F to 0 Address (always 0) 11 F to 0 Area 1 Occupation 12 F to 0 DATA (H) 12 F to 0 area 13 F to 0 DATA (L) 13 F to 0 Area 2 14 F to 0 Occupation 14 F to 0 area 15 F to 0 15 F to 0 In position 108 - 22.

ZP3

Form w 1 Material e Buffer spec. r Buffer stroke t Vacuum inlet Square 8 3 A 44 26.5 11 6 50 29 14.5 10 60 33 20.5 N S U F GN GS J K ZP3 Y 10 13 16 B B5 15 63 46.5 10 20 70.5 54 JB K 4 Dimensions Per Vacuum Inlet: One-touch Fitting 15 Model D E F Fitting part min. hole size Fitting part no. Vacuum inlet direction q Pad dia.

JXCx-OMY0006

Memory map 33 9.1 Memory allocation 33 (1) Input Area Mapping 33 (2) Input area mapping of upper level device 34 (3) Output area mapping 38 (4) From upper devices to controller (details) 38 10. Settings and Data Entry 42 10.1 Step Data 42 10.2 Basic parameters 45 10.3 Return to origin parameter 47 11.

•

(psi) Nominal ~upport bracket nominal ~ymbo l symbol ~nd~cJjemallc diagram " Rod f1ang~: Head flange: --i '< "C II> 92 113 103 Fooi: L 44 G .F. " [I" , , III 1 L,F 73 79 70 86 :.T w~ 102 58 66 72 44 45 47 38 en 3 0 0 ~ "'i f" 27 73 34 33 G 22 102 27 26 (') 'cS. ,j" C. r '\ ~ T .

ITV

type 3m Right angle type 3m Without cable connector S L N Option Option Monitor output Bracket Thread type 0 None (for preset input) Analog output 1 to 5V DC Switch output/NPN output Switch output/PNP output Analog output 4 to 20mA Without bracket Flat bracket L-bracket B Port size Rc(PT) NPT NPTF G(PF) 1 2 N T 1/4 (2000, 3000) 3/8 (2000, 3000) 1/2 (3000) 2 3 4 C 3 Option 4 F

Precision Regulator

Pressure gauge is shipped together, but not assembled. 811 IR1000/2000/3000 Series How to Order IR 2 0 0 02 0 Precision regulator Thread type Body size Nil N Note 2) Rc NPT Suffix 1 1 2 3 IR1000 series IR2000 series IR3000 series Nil G F For high temp. environments (5 to 100C) For low temp. environments (30 to 60C) T Note 4) Semi-standard Type of setting L Note 5), 6) 0 1 Note 1) Basic

EXxx-OMY0004

The main F-Parameters are: F_Source/Destination_Address (F-Address for short) The F-Source address is combined with the F-destination address to generate a Codename to identify the communication relationship between two devices.