NVKF

Stations Applicable blank plate ass'y vK300-42-1A Dimuuiun $uies t{U|ff30 Body Ported Grommet (G): NVKF332-"G-M5 inch (mm) Base Mounted Grommet (G) : NVKF334rG-01 T inch (mm) =1 1 .81 (=3001 lld wi'e hQt') Ssis ilUff300 Dimsui Body Ported (Top Ported) lType 20 Manifold NVV3KF3-20-Stations-007 inch(mm L: Dimensions 19 20 14.84 15.59 (377) 't3.78 r4.53115.28 (350) (36s) (388) ( 1 r 1 ) ( 1

Speed Controller: Standard Type In-line Type AS Series

Nil Metric thread (M3, M5) Rc NPT G N F Bore size Bore size Applicable series M3 M5 01 02 03 04 M3 x 0.5 M5 x 0.8 1/8 1/4 3/8 1/2 AS1000 AS1000 AS2000 AS2000, 3000, 4000, 5000 AS3000, 4000, 5000 AS4000, 5000 650 A AS Series Speed Controller: Standard Type In-line Type Needle Valve/Flow Rate Characteristics Note) The flow rate characteristics are representative values.

AS-FPQ/AS-FPG

Port size M5 01 02 03 04 M5 x 0.8 R 1/8 R 1/4 R 3/8 R 1/2 With One-touch fitting Clean specifications Metal parts material Q G Brass (electoless nickel plated) Stainless steel 304 Needle Valve/Flow Rate Characteristics Note) The flow rate characteristics are representative values.

AS-FPQ/AS-FPG

Port size M5 01 02 03 04 M5 x 0.8 R 1/8 R 1/4 R 3/8 R 1/2 With One-touch fitting Clean specifications Metal parts material Q G Brass (electoless nickel plated) Stainless steel 304 Needle Valve/Flow Rate Characteristics Note) The flow rate characteristics are representative values.

Speed Controller with One-touch Fitting for Clean Room Series AS-FPQ/AS-FPG

Metric sizes Type 4 6 8 10 12 04 06 08 10 12 2 Elbow Control type 0 1 Meter-out Meter-in Port size M5 x 0.8 1/8 1/4 3/8 1/2 M5 01 02 03 04 With One-touch fitting Clean specification Metal part material Q G Brass (electoless nickel plated) Stainless steel (SUS304) Needle Valve/Flow Characteristics AS121FP-M5 AS221FP-01 AS221FP-02 08,10 06,08 06 04 04 AS321FP-03 AS421FP-04 12 10 10,12 08 06

Stainless Steel Cylinder Series CJ5-S/Series CG5-S

5 8 8 5 28 23 5.5 14 2.5 33 25 42 M5 x 0.8 M12 x 1.0 12.5 9.5 47 6 9 75 4 Series CJ5-S Dimensions R V Front flange type (F)/CJ5FS CA Rod cover side GB Piping port 2-M5 x 0.8 Piping port M5 x 0.8 GA NN MM Cover surface BA CB D FY FB 2-FC With head cover port in axial position (R) Mounting hole NB A BB FX FZ NA F FT S + Stroke Z + Stroke H (mm) A BA BB CA CB D F FB FC FT FX FY FZ GA GB H

Guide Cylinder Series MGG ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

Stroke range (mm) Bore size (mm) A N AD AC M AF L AE F K AB C E J AA AP B D G H I 99 45 75 16.5 25 80 30 60 11 92 55 24 5.5 12 25 108 60 30 20 75, 100, 125, 150, 200 M5 x 0.8 depth 10 9.5 depth 6 M8 x 1.25 depth 14 109 54 85 16.5 35 100 30 70 13 26.5 113 6.6 65 16 30 130 65 35 25 11 depth 8 M10 x 1.5 depth 18 M6 x 1 depth 12 75, 100 125, 150 200, 250 300 129 60 100 19 35 106 35 80 16 118

Speed Controller with Pilot Check Valve with One-touch Fitting Series ASP 1

Metric size Inch size Model Port size Pilot port 6 8 10 12 1/4" 5/16" 3/8" 1/2" ASP330F-01 ASP430F-02 ASP530F-03 ASP630F-04 ASP430F-F02 ASP530F-F03 ASP630F-F04 ASP330F-N01 ASP430F-N02 ASP530F-N03 ASP630F-N04 R 1/8 M5 x 0.8 R 1/4 Rc 1/8 R 3/8 Rc 1/8 R 1/2 Rc 1/4 R 1/4 G 1/8 R 3/8 G 1/8 R 1/2 G 1/4 NPT 1/8 10-32 UNF NPT 1/4 NPT 1/8 NPT 3/8 NPT 1/8 AS NPT 1/2 NPT 1/4 Note

NARM Series

Option: Pressure gauge G15-10-01 How to Order NARM2000-4A2-N01G G15 P10 01 Symbol Units Nil MPa P PSI Common IN Individual IN IN M5 x 0.8 .39 (10) Max. pressure indication 10 150PSI (1.0MPa) .59 (15) IN OUT OUT *Pressure gauge for 30psig (0.2MPa) is not available.

CXT

x 0.8 2-RB G G HT U (NA) (Option) A L HN (Max.)

Smooth Cylinder Series CG1Y ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 Specifications and auto switch information not provided below are the same as those of the low friction, double acting, single rod type of Series CG1  Q .

CG1Y50-PS Grease pack (10 g) 1 pc. CG1Y63-PS CG1Y80-PS CG1Y100-PS When only grease for maintenance is necessary, please order by the following part numbers. Grease pack GR-L-005 (5 g) GR-L-010 (10 g) GR-L-150 (150 g) 12 Series CG1Y Mounting bracket dimensions are the same as those of the low friction, double acting, single rod type of Series CG1Q.

MU

S 55 58 60 74 75 P M5 x 0.8 Rc 1/8 Rc 1/8 Rc 1/4 Rc 1/4 NY 26 28 36 42 46 NX 6 6.5 8 10 11 NC 7.5 depth 4.5 9 depth 5.5 10.5 depth 6.5 13.5 depth 8.5 17 depth 10.5 MM M10 x 1.25 M12 x 1.25 M14 x 1.5 M18 x 1.5 M18 x 1.5 NS 43 45 44 54 53 N 14 15.5 16 21.5 21.5 KA 10 12 14 18 18 ND M5 x 0.8 M6 x 1 M8 x 1.25 M10 x 1.5 M12 x 1.75 NE 4.3 5.1 6.9 8.7 10.5 ZZ 69 72 75 92 96 Model MUB25 MUB32 MUB40

Miniature Regulator

fitting R1/8, M5 x 0.8 2 1 6 One-touch fitting 5/32" One-touch fitting NPT1/8, M5 x 0.8 1/4" One-touch fitting M5 x 0.8 female thread is cut inside the pipe.

MU

S 55 58 60 74 75 P M5 x 0.8 Rc 1/8 Rc 1/8 Rc 1/4 Rc 1/4 NY 26 28 36 42 46 NX 6 6.5 8 10 11 NC 7.5 depth 4.5 9 depth 5.5 10.5 depth 6.5 13.5 depth 8.5 17 depth 10.5 MM M10 x 1.25 M12 x 1.25 M14 x 1.5 M18 x 1.5 M18 x 1.5 NS 43 45 44 54 53 N 14 15.5 16 21.5 21.5 KA 10 12 14 18 18 ND M5 x 0.8 M6 x 1 M8 x 1.25 M10 x 1.5 M12 x 1.75 NE 4.3 5.1 6.9 8.7 10.5 ZZ 69 72 75 92 96 Model MUB25 MUB32 MUB40

Speed Controller: Standard Type Series AS In-line Type 1

Note 2) AS1000, AS2000 are not applicable. 8 3 2 1 Bore size 2 1 Bore size Applicable series M3 M5 01 02 03 04 M3 x 0.5 M5 x 0.8 Rc 1/8 Rc 1/4 Rc 3/8 Rc 1/2 AS1000 AS1000 AS2000 AS2000/3000/4000/5000 AS3000/4000/5000 AS4000/5000 Thread type Nil Metric thread (M3, M5) Rc NPT G N F Caution Be sure to read before handling.

MU

X 0.8Depth11 M6 X 1Depth11 AL 19.5 23.5 27 32 32 BS 37 45 44 54 53 K 5.5 5.5 6 7 7 A 22 26 30 35 35 BT M5 X 0.8Depth7.5 M6 X 1Depth12 M8 X 1.25Depth13 M8 X 1.25Depth11 M10 X 1.5Depth15 M10 X 1.5Depth14.5 M12 X 1.75Depth18 M12 X 1.75Depth15 Rod end female thread (mm) (mm) P M5 X 0.8 Rc(PT)1 /8 Rc(PT)1/8 Rc(PT)1/4 Rc(PT)1/4 MM M6 X 1Depth12 NY 26 28 36 42 46 H 14 14 15 18 21 NX 6 6.5 8 10

Process Pump Series PA3000/5000/PAX1000 Series PB1000

N Diaphragm material For AIR EXH Air operated type is not available with silencer (symbol N). 1 PTFE (fluororesin) Symbol Type of operation 1 3 Connection port size 1/8 (6A) Built-in solenoid valve Air operated 01 FLUID OUT AIR SUP AIR EXH Thread type FLUID IN Nil T Rc NPTF G NPT Built-in solenoid valve type F N T, F, N are order made specifications.

Process Pump Series PA3000/5000/PAX1000 Series PB1000

N Diaphragm material For AIR EXH Air operated type is not available with silencer (symbol N). 1 PTFE (fluororesin) Symbol Type of operation 1 3 Connection port size 1/8 (6A) Built-in solenoid valve Air operated 01 FLUID OUT AIR SUP AIR EXH Thread type FLUID IN Nil T Rc NPTF G NPT Built-in solenoid valve type F N T, F, N are order made specifications.

IDX-OM-M051

NIL IDF 100 F 30 4 W C 5 G Size K Size Air compressor size Note) 100kW 125kW 150kW 100 125 150 P R Note) The value is referential. Confirm the capability of the compressor used.

IDX-OM-U022

IDFA 100 F 40 C G K 100 125 150 ) 100kW 125kW 150kW ) R V 38 AC380V(50Hz) 40 AC400V(50Hz) C G K R V IDFA100F150F 1 1 1.1 IDX-OM-U022 1. 1.2 1.2.1 (C) 1.2.2 G . 1.2.3 K 1.6MPa 1.2.4 R 30A (IDFA100F, IDFA125F, IDFA150F) 30mA 1.2.5 V ON 1.5 OFF 0.5 IDFA100F150F 1 2 1.2 IDX-OM-U022 1. 1.3 A 3 A IDFA100F150F 1 3 1.3 IDX-OM-U022 1.