Rotary Cylinder Series MRQ Size: 32, 40 1

/2 63.5 ( 20 Stroke)/2 61 ( 25 Stroke)/2 63.5 ( 30 Stroke)/2 63.5 ( 40 Stroke)/2 66 ( 50 Stroke)/2 66 ( 65 Stroke)/2 71 ( 75 Stroke)/2 68.5 ( 90 Stroke)/2 73.5 ( 100 Stroke)/2 68 ( 5 Stroke)/2 68 ( 10 Stroke)/2 70.5 ( 15 Stroke)/2 68 ( 20 Stroke)/2 70.5 ( 25 Stroke)/2 68 ( 30 Stroke)/2 70.5 ( 40 Stroke)/2 75.5 ( 50 Stroke)/2 75.5 ( 65 Stroke)/2 80.5 (

MLGP

Step 2 1. For vertical mounting 2.

MLGP

Step 2 1. For vertical mounting 2.

3-Position Rotary Table

2 #2 !6 !4 @4 #3 !8 #7 #8 o #6 q #9 y i $2 @3 @2 #1 @6 #4 #5 Component Parts Note Anodized Nickel plated Chromated Note No.

MLU

4 @1 u q !3 !2 @6 t @4 w @8 r !1 @5 @3 @2 e !6 CL A CL1 MLGC CNG A MNB C Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com B CNA M(D)LUB25 CNS y CLS !9 i o !5 @0 CLQ Extension locking w q MLGP Section A-A' !

RQ

Basic style (Through-hole/Both ends tapped common): RQB/RDQB 2-M5 x 0.8 (port size) 2-cushion needle 2 x 4-9 depth of counter bore 7 H thread effective depth C E1 E2 Q F 4-5.4 through D M E 1 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Flat washer 4 pcs.

SMC Pneumatic Clean Series

(mm) 26 20 16.5 14 C 16 12 10 8 D 25 18 14 12 E 2 2 2 2 F 13<10> 20<18> 20 20 GA 50 40 40 35 H 8 6 6 5 H1 19 17 17 13 B1 47 38 31 26 I 187 175 173 163 ZZ M6 x 1 depth 12 M5 x 0.8 depth 8 M5 x 0.8 depth 7.5 M4 x 0.7 depth 7 J 27 19.5 19.5 15.5 AL Bore size A M14 x 1.5 M10 x 1.25 M10 x 1.25 M8 x 1.25 MM 44 35.5 29 24 NA 1/8 1/8 1/8<M5 x 0.8> 1/8<M5 x 0.8> P 9 7 7 7 RA 87 95 93 93 S 6 5.5 5.5

Micro Mechanical Valve Series VM1000

Max. 6 R port (3 port only) (62) 32 24 16 Symbol 2 port (A) 2 12 10 1 (P) 30 (A) 2 3 port 17 44 25.4 10.5 12 10 1 (P) 3 (R) 2 x 4.6 mounting hole 14 8.5 2 x M5 x 0.8 depth 4 * 0.5 MPa supply F .O.F .* 29 N P .T. 2 mm O.T. 1.5 mm T.T. 3.5 mm Roller plunger VM122-M5-06A VM132-M5-06A VM122-M5-06SA VM132-M5-06SA Panel mounting hole 2 x M14 x 1 Hexagon nut Thickness 5, Width across flats 17 10

Series CE1

2 r e y @4 @8 @0 !0 i @3 o @4 @8@7 u @2 r y MK/MK2 RSQ/RSG !9 #0 w #1 #0 t q e @9 #1 @1 !9 t @5@6 @1 #0 q !1 w #1 #0 @2 @9 #1 @1 RSH CE1 40 to 63 CE2 @0 @4 @8 i u o @3 !1 #1 #2 @8@4 !2 @7 !3#3 r !4 e !6 @6 ML2B ML1C #7 #6 !5 REA REC RHC !9 @5 t @6 y #0 w @1 #0 #5 !7 #4 q @9@2 !8 #1 #2 !7 #5 #4 @1 MTS CC Component Parts Component Parts Description Material Note Description Material No.

2 Finger, 3 Finger, 4 Finger Air Gripper Parallel Type Series MHS

SB RA AA Counter bore depth 9 (mounting hole) 6.4 AB 3 35 35 RA 5 VA, depth VB 8 NA B RB RB XA, depth XB 8h9 0 -0.036 2-UA, thread depth UB (mounting threads) Q 4.5 20 20 FX FY FZ (Open DO) (Closed DC) WA, depth 2 4-M4 x 0.7, thread depth 8 Attachment mounting threads CB CA M5 x 0.8 (finger opening port) Open EO Closed EC 9 L J M5 x 0.8 (finger closing port) G I 2 (mm) RB 25 28 I 6 7 Model

ARM10/11

Handle position 2.

ARM10/11

Handle position 2.

Model Selection 1

/N.O. 1/8 to 3/4 0 to 3 (1) 17-2-57 VV2CW2/3/4 N.C./N.O. Manifold 2, 3, 4, 5, 7 1/8, 1/4, (3/8) 17-2-64 VDW10/20/30 Single unit N.C. M5, 1/8, 1/4 1, 1.6, 2.3, 3.2 2, 3, 4 0 to 0.9 (1) 17-2-68 VV2DW1/2/3 N.C. Manifold M5, 1/8, 1/4, (3/8) Solenoid valve 17-3-17 VX21/22/23 N.C./N.O. Single unit 2, 3, 4.5, 6, 8, 10 1/8 to 1/2 0 to 3 (1) 17-3-25 VVX21/22/23 N.C./N.O.

MU

2 NBR Bumper !

MU

2 NBR Bumper !

rep-modular-e

2 #4 e !8 #8 #6 #5 #2 w !0 e i !3 @8 !9 @0 @1 @2 @3 @4 @5 t u !4 !5 @7 y !6 !7 #0 #3 !1 @9 r q #1 #7 @6 o Component Parts Part Name Qty Remarks Item Part Name Qty Remarks Item q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !

Modular Pressure Control Equipment F.R.L. Replacement Procedure

2 #4 e !8 #8 #6 #5 #2 w !0 e i !3 @8 !9 @0 @1 @2 @3 @4 @5 t u !4 !5 @7 y !6 !7 #0 #3 !1 @9 r q #1 #7 @6 o Component Parts Part Name Qty Remarks Item Part Name Qty Remarks Item q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !

1.63

D-M9W 10 2 pcs. D-M9WV D-M9AV 5 Note 2) 1 pc. 10 2 pcs. 5 Note 2) 1 pc. D-M9A 10 Note 2) 2 pcs. 5 1 pc. D-M9V 5 2 pcs. 5 1 pc. D-A9V 10 2 pcs. 5 1 pc. D-A9 10 2 pcs. 1 pc. 15 D-P3DWA 2 pcs. 15 Note 1) Confirm that it is possible to secure the minimum bending radius of 10 mm of the auto switch lead wire before use.

3 Port Solenoid Valve Metal Seal Series VZ200 1

43 54 Symbol L1 L2 Common exhaust: VV3Z2-30 (G) (L) (M) (D) With light/surge voltage suppressor With light/surge voltage suppressor With light/surge voltage suppressor 19.5 14.5 n-M5 x 0.8 2-4.3 8.5 mounting hole 21.6 17 P E PE 9.5 9.5 43 Max. 10 78 4-Rc 1/8 2-M5 x 0.8 (Pilot EXH) (Pilot EXH) 2-M5x0.8 2-M5 x 0.8 (Pilot EXH) 300 (Lead wire length) 300 (Lead wire length) 76 68.5 2-M5 x 0.8

ZR

PV PV PV PV PV M5 PD port Release flow rate adjustment needle Vacuum release pressure port 2-M5 PD port Common vacuum release pressure port Rc 1/8 PV port Air supply pressure port M5 PS port 2-Rc 1/2 EXH port 3 3 1.5 1 2.5 1.5 1 2.5 7.5 7.5 Pilot valve supply pressure port Common exhaust port 4.5 4.5 Rc 1/8 PV port Air supply pressure port 2-M5 PS port Common pilot supply port 2-Rc 1/8 PV