RLQ Bore size (mm) 32, 40 50, 63 T2 T1 M F E D B Part No.
x 35L x 40L x 45L x 50L x 55L x 60L CQ-M3 x 35L x 40L x 45L x 50L x 55L x 60L CQ-M5 x 35L x 40L x 45L x 50L x 55L x 60L x 65L x 70L x 75L x 80L CQ-M5 x 40L x 45L x 50L x 55L x 60L x 65L x 70L x 75L x 80L x 85L CQ-M3 x 25L x 30L x 35L x 40L x 45L x 50L CQ-M3 x 25L x 30L x 35L x 40L x 45L x 50L CQ-M5 x 25L x 30L x 35L x 40L x 45L x 50L x 55L x 60L x 65L x 70L CQ-M5 x 30L x 35L x 40L x 45L
MLU ML1C DMounting of Auto Switch -X Except D-P5DWL D-P5DWL 20Data Auto switch mounting screw Hexagon socket head cap bolt With SW M3 x 0.5 x 5l M3 x 0.5 x 6l Auto switch Switch mounting bracket With SW, M3 x 0.5 x 14l Round head Phillips screw 8 x 3.3 x t0.8 Flat washer Auto switch Auto switch mounting nut Auto switch mounting nut Tightening torque of auto switch mounting screws should
Fittings & Tubing Air Cylinders Rotary Actuators 63.5+ST ST 50+ST 8 5.5 16 2 x 3.2 through 15+1/2ST 2.75 19 2 x 6.5 counterbore depth 3.3 14 1 OUT 3 3 1 3.2 5.6 (16) 280.2 280.2 22.7 35 16 37 6.3 5 6 M3 x 0.5 x 12.5 L and M3 x 0.5 (Hexagon bolt) (Hexagon nut) 7 2 x M5 x 0.8 thread depth 4.5 IN (Piping port) 2 x M3 x 0.5 (Through-hole) 2 x M3 x 0.5 (Through-hole) 4 x M5 x 0.8 thread depth
Nil M With unit switching function Fixed SI unit Note) Port specification Nil N M12 3 m lead wire with connector Without lead wire Nil N F Rc NPT G Note) Fixed units: Real-time flow rate: l/min Accumulated flow: l, m3, m3 x 103 Port size Output specification Port size Applicable model Flow rate (l/min) 28 29 68 69 NPN open collector 1 output + Analog output (1 to 5 V) NPN open collector 1
(VY1A01 only) M5 external pilot port Foot (Option) Port 1 (P), 2 (A), 3 (R) 3 x M5 VEXA-18-3A Hexagon socket head cap screw M3 L = 8 (2 pcs.) (With spring washer) ( ) 2 x 4.5 Mounting hole VEXA-18-2A Bracket (Option) Hexagon socket head cap screw M3 L = 8 (2 pcs.)
alloy Aluminum alloy IIR PC PC PC Rare earth magnet Chrome molybdenum steel Mild steel Zinc plated M3 x 8 M3 137 Series LJ1S Construction LJ1S20 A A Section AA Material Note Parts list Material Note 100W Slide screw No.
(T) (F) (T) VV802-P-01 (Size 18 mm) 18 9 1/8" VV801-P-03 (Size 26 mm) By mounting individual SUP spacers on a manifold block, it is possible to provide individual SUP ports for each valve. 22.5 11 Size 18 mm 1(P) 4(A) 129.5 61 2(B) 1(P') 19 26 13 3/8" 3(R2) 5(R1) Circuit diagram 28.6 14.3 Size 26 mm 112 Individual EXH spacer 49 12.5 (F) (T) (F) (T) VV802-R-01 (Size 18 mm) 18 9 1/8" VV801
QA Tubing O.D. 6 J QB Q F Built-in One-touch Fittings Stroke 13 20 Stroke 8 Applicable tubing O.D.
Air Grippers Modular F.
Series ZSE60F/ISE60 Confirmation of atmospheric pressure of load lock Special fitting types are used in semiconductor production equipment (metal gasket seal fittings) Leak rate: 1 x 10 -10Pa. m3/s ZSE/ ISE60(F)-A2 ZSE/ ISE60(F)-B2 URJ 1/ 4 TSJ 1/ 4 ZSE50F ISE50 ZSE60F ISE60 Model Standard thread type Special fittings for the semiconductor industry (metal gasket seal fittings) Variations
h11 (Shaft) f H9 (Hole) a (Max.) c (Min.) e b d l1 Part no.
/2 (N)AS4200-04 M3 M3x0.5 M5 M5x0.8 01 18 02 14 03 38 04 12 Courtesy of Steven Engineering, Inc. !
R Q2 B P C F(h9) D G1 G2 J K L M N Q1 E(g6) Q3 Model A 90 180 270 M5 M3 CRB1BW10-lS CRB1BW10-lSE CRB1BW15-lS CRB1BW15-lSE CRB1BW20-lS CRB1BW20-lSE CRB1BW30-lS CRB1BW30-lSE 3.4 (5.5) 5 8.5 5 11 9 14 10 15.5 25 9.5 25 10 25 13 25 14 M3 (6) 0 0.036 15 24 8 0.004 0.012 9 14 3 1 5 9 0.5 29 4 M3 M3 (5) M5 M3 3.4 (6) M3 (10) 0.004 0.012 0 0.043 20 29 9 12 18 5 4 1.5 6 10 0.5 34 M3 M4 (7.5) 4.5
Dimensions [mm] Model A B C D E F G H J K L M N P Q R S T U V W Weight [g]*1 Outer body dia.
F Thread type Rc G NPT NPTF Nil F N T Option Part No. Description Part no.
) 258-9200-www.stevenengineering.com Nil Rc G NPT NPTF Option F N T Option Part No.
Note) Fixed unit: For vacuum/Low pressure: kPA For positive pressure: MPa Lead wire with connector Lead wire length: 2 m With mounting screws (M3 x 5L: 2 pcs.) With M3 x 8L (2 pcs.)