VQ

(Value in the initial stage.) 1 (P) 3 (R) Normally closed VQZ VZ (A) 2 VS 1 (P) 3 (R) Normally open Option Specifications Latching AC Large flow capacity Type Item Normally open 1 2 VQ120-l VQ110L-l VQ110l (A) 2 VQ110U-l Model 0.7MPa 0.6MPa 0.5MPa Max. operating pressure 3 2 0.14mm2 (Cv ) 1 2 0.68mm2 (Cv ) 0.20mm 2 (Cv ) 2 1 Effective area 0.008 0.038 0.011 1 (P) 3 (R) 0.20mm2 (Cv ) 2 3 0.68mm2

Series CXS 10-/11-/12- Dual rod cylinder 21-/22- ø6, ø10, ø15, ø20, ø25, ø32

M3 x 0.5 through 3 3 6.5 45 45 M4 x 0.7 x 14.5L (Hexagon bolt) and M4 x 0.7 (Hexagon nut) M3 x 0.5 x 10L (Hexagon socket head cap bolt) 2-M4 x 0.7 through Steel ball Steel ball (14+ST) (16) 4 2-M3 x 0.5 through 6 (mm) ST 10 20 30 40 50 14+ST 24 34 44 54 64 17+ST 27 37 47 57 67 49.5+ST 59.5 69.5 79.5 89.5 99.5 61+ST 71 81 91 101 111 Part no.

VK300

(Lead wire length) (Mounting hole for manifold) 2 x 3.2 2 x 3.2 16 [14] M5: M5 x 0.8 [01: 1/8] [14] M5: M5 x 0.8 [01: 1/8] (Mounting hole for manifold) Manual override (Non-locking) 300 2 x M2.5 x 0.45 (Mounting screw) (Mounting screw) Applicable cable O.D: 3.5 to 7 Pg7 (Mounting hole) 3 4 2 x 3.5 63.4 57.9 (Mounting hole) (Bleed hole) 50.4 (P, A, R port) 2 x M5 x 0.8 24 21 3R 1P 62.8 2.3

MX-OMP0051

/ / 1 1. 1-1 2. 2-1 2-2 2-3 2-4 2-5 2-6 2-7 2-8 2-9 2-10 3. 3-1 3-2 3-3 2 *1) *2) (ISO/IEC)(JIS) *1) ISO 4414: Pneumatic fluid power -General rules relating to systems. ISO 4413: Hydraulic fluid power -General rules relating to systems. IEC 60204-1: Safety of machinery -Electrical equipment of machines.

3 Position Cylinder Series RZQ

[White] Blue [Black] Black [White] Load Switch 1 Switch 1 Switch 1 Relay Load Relay contact Blue [Black] Blue [Black] Brown [Red] Brown [Red] Brown [Red] Relay Black [White] Black [White] Blue [Black] Black [White] Switch 2 Switch 2 Switch 2 Blue [Black] Blue [Black] The indicator lights will light up when both switches are turned ON. 2-wire with 2 switches AND connection 2-wire with 2 switches

240

Note 2) When changing the port location, please order a new port plug: MXH-P (2 pcs.)

Series SYJ700 Rubber seal 3 Port Pilot Solenoid Valve

N.O. c f a e b d (A) 2 (A) 2 (A) 2 (A) 2 1 (P) 3 (R) 1 (P) 3 (R) h h 3 (R) 1 (P) 3 (R) 1 (P) g g Component parts Replacement parts Description Body Piston plate End cover Piston Spool valve assembly Spool spring No. No. 1 2 3 4 5 6 Material Aluminum die-casted Resin Aluminum die-casted Resin Stainless steel Note White White White Description Note No.

XM, XY

9-1A AS568-016V XLD50-2-9-1A AS568-016V XLD63-2-9-1A XLD80-2-9-1A Standard AS568-009V S Valve seal assembly r XGT XLD80-2-9-1A XMD XYD XLD40-2-9-1A AS568-016 XLD50-2-9-1A AS568-016 XLD63-2-9-1A AS568-009 Special CYV Note 1) List the optional seal material symbol (refer to Table 1 below) after the model number, except for the standard seal material (FKM: compound no. 1349-80, produced by Mitsubishi

Speed Controller with

2 2 2 2 2 2 2 2 2 2 2 2 2 2 2 AS-33B AS-36B AS-32B AS-37B AS-38B M3 4 M3 4 AS-34B AS-36B AS-35B AS-37B AS-32B AS-34B AS-36B AS-38B AS-41B AS-42B AS-44B AS-45B M4 4 M4 4 AS-45B AS-42B AS-44B AS-47B AS-46B Precautions when options are ordered Threaded studs for manifold are not included when L-bracket and DIN rail mounting bracket are ordered.

ZSE30/ISE30

Lead wire with connector ZS-27-A Bracket ZS-27-B Panel mount adapter ZS-27-C 1 2-Color Display Type High-Precision Digital Pressure Switch Series ZSE30/ISE30 Specifications ISE30 0 to 1MPa 0.1 to 1MPa 1.5MPa 0.001MPa Air, Inert gas, Non-flammable gas ZSE30 100 to 100kPa 101 to 101kPa 500kPa 0.2kPa Rated pressure range Regulating pressure range Proof pressure Setting/Display resolution Fluid

VXA21/22

IN MaterialO Model Body Seal Brass, Stainless steel NBR, FPM, EPR Orifice size (mm) Model Port size Rc(PT) VXA212 , 1 8 1 4 , 1 8 1 4 , 1 4 3 8 , 1 4 3 8 , 1 4 3 8 , 1 4 , 3 8 1 2 0 2 3 4.5 VXA213 0 2 VXA223 0 2 4.5 6 8 VXA224 0 2 VXA225 0 2 10 VXA226 0 2 4.1-57 VXA21/22 Normally Closed (N.C.)/Normally Open (N.O.)

212

for Chemical Liquids Material and Fluid Compatibility Check List Chemical Compatibility Acetone Note 1, 2) Ammonium hydroxide Note 2) Isobutyl alcohol Note 1, 2) Isopropyl alcohol Note 1, 2) Hydrochloric acid Note 2) Ozone Hydrogen peroxide Concentration 5% or less, Temperature 50C or less Ethyl acetate Note 1, 2) Butyl acetate Note 1, 2) Nitric acid (except fuming nitric acid) Concentration

RZQ

wire 12V 24V Connector Diagnostic indication (2-color indication) Grommet 3-wire (NPN) 5V,12V IC circuit Grommet 3-wire (PNP) 12V 2-wire Connector 3-wire (NPN) Diagnostic indication (2-color indication) IC circuit Relay, PLC 5V,12V 3-wire (PNP) 24V Yes Grommet 12V Water resistant (2-color indication) 2-wire With diagnostic output (2-color indication) Magnetic field resistant (2-color

Speed Controller with One-touch Fittings

Model Metric size Inch size 4 stations 6 stations 8 stations 10 stations pcs. 2 2 2 2 2 2 2 2 2 2 2 2 2 2 2 2 Length 38 62 72 90 104 114 135 140 78 111 119 147 179 191 236 277 Hexagon nut Flat washer pcs. pcs.

3 Port Air Operated Valve Series SYJA300 1

, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com R P 27 30 (2) 7 12.7 VR A 9.2 VH 2 15 (Bracket) 10 VHS 11 Base mounted: SYJA34-M5 14 5 10 Manual override (Non-locking) 2-3.2 (External pilot port) (For mounting) 17 3 (For solenoid valve) 2.5 M3 x 0.5 (Pilot port) A 11 17.5 1.5 21 27 30 28.5 P R 1 (Breathing hole) 13 5 8.6 10 (P , A,

VXA21/22

TI/ TIL 5 PA PAX Material Model PB %# & 1 & VXA212 0 2 2 0 2 . 2 0 2 . 2 . 0 2 . 0 2 . 0 2 . 0 2 ) .!* VXA213 0 2 VXA223 VXA224 VXA225 0 2 .!* / 0 0 2 0 2 2( VXA226 0 2 17-3-93 2 The VX series will be revised shortly. Series VXA21/22 Normally Closed (N.C.), Normally Open (N.O.) Fluid JIS Symbol N.C.

Rotary Table Series MSU

Dimensions (mm) 1in = 25.4mm MSUA1 MSUA1-S, SE Scale: 70% C 8-M3 x 0.5 depth 5 51 31 38 23.5 B 25 4-M4 x 0.7 depth 4 22.5 4.5 +0.025 0 2.5H9 A Long groove depth 4 (positioning pin hole) 35h9 0 0.062 22.5 +0.025 0 +0.043 0 3-3H9 depth 3 ( A , B , C ) 17 H9 27 2.5 2 2-4.5 through 3-R1.5 12.5 37 8 6.5 10.3 6.5 36h9 0 0.062 31 4.2 2 31.5 2 27 16 9 5 Angle adjustment bolt 4.5 2-4.5 through 3-R1.5

For Water Digital Flow Switch Series PFW

Nil N Port size Size Applicable model Flow rate (l/min) Symbol Output specification 40 4 16 3/8 1/2 3/4 PFW704, PFW720 PFW720, PFW740 PFW740 03 04 06 NPN open collector 2 outputs PNP open collector 2 outputs 27 67 Specifications PFW720 PFW704 PFW740 Model Measured fluid Water Karman vortex Detection type 2 to16l/min 0.5 to 4 (setting is 0.6 to 4) l/min 5 to 40l/min Flow rate measurement

Magnet Gripper Unit for Collaborative Robots

Magnet gripper .13 4-2. 3-port solenoid valve .14 4-3. Auto switch .15 5.Operating method or operation .16 5-1Precautions for Design .16 5-2. Installation .17 5-3. CRX Plug-in software .20 5-4. Air supply .27 5-5. Piping .27 5-6. Operating environment .28 5-7. Lubrication .28 6. Maintenance or inspection .28 6-1. Maintenance or inspection .28 6-2. Replacement part .29 6-3.

Clean Room Rodless Cylinder Series CYP ø15, ø32 1

n = 1 + 2 + 3 1 MX Load factor n 1 = m/mmax Item Note Review m mmax is the maximum load mass MTS 1. Max. load mass 2 = M/Mmax MY Review M1, M2, M3 Mmax is the allowable moment 2. Static moment CY 3 = Me/Memax Review Me1, Me3 Memax is the allowable moment 3.