MXW Series Long Stroke Slide Table

27 27 27 47 B 203 178 153 128 108 3 (3.5) MXW12 W 15 15 15 15 35 V 215 19 16 140 120 A 30.5 30.5 30.5 30.5 30.5 55.5 B 265 240 215 190 165 140 4 (4.5) MXW16 W 18.5 18.5 18.5 18.5 18.5 43.5 V 277 252 227 202 177 152 A 39.5 39.5 39.5 39.5 39.5 39.5 64.5 B 322.5 297.5 272.5 247.5 222.5 197.5 172.5 5 (5.5) MXW20 W 27.5 27.5 27.5 27.5 27.5 27.5 52.5 V 334.5 309.5 284.5 259.5

Mechanical Valves Series NVM, NVFM, NVZNI

Png,ttm*igs' |nc' Phone: 31 7-899 -4440' Fax: 31 7-899-3102' Telex: 27-2184 Specifications subiect to change without notrce 1OK 8/92

Sine Rodless Cylinder Series REBR Direct Mount Type

Content 15 CYR15EAbove numbers 26, 27, 28, 29, 30 25 CYR25E32 CYR32ENote 1) indicates the stroke.

Series LQ3 High Purity Fluororesin Fitting

W M L H E W M 10 14 18 22 30 36 14 20 25 29 37 49 46.5 57 79 88 103 122 11 16 21 24 32 41 10 17 22.5 24.5 27 30 1/8" 1/4" 3/8" 1/2" 3/4" 1" LQ3U1A LQ3U2A LQ3U3A LQ3U4A LQ3U5A LQ3U6A 1/4 (E) (E) L

3 Port Direct Operated Poppet, Solenoid Valve, Series VKF300

50.5 58 63 25 2-3.5 (mounting holes) Manual override (non-locking) 27 0.5 0.5 P R 13.7 2-M5 x 0.8 (ports P, R) 24 See grommet type for other dimensions.

High Purity Chemical Valve

Dimensions LLHmA-mm Stations 4 x Mounting hole for W Y K A D E L2 L1 N Non-locking type Locking type L3 G 60 (H1) (H2) C SMC SMC SMC SMC V 1/4 1/4 1/4 U 3/8 Pitch = B 2 x P port n x A port (mm) Dimensions (mm) A B C D E G H1 H2 K N U V W Y Station Model LLH2A LLH3A LLH4A 2 3 4 5 Model 46.5 31 65 67 19 10 85.5 87 18 27 19 34 M4 5.5 Symbol L1 L2 L3 L1 L2 L3 L1 L2 L3 47 36.5 94.5 76 27.5 19

Servo Motor Controller (24 VDC)

I/O cable CN5 (The PLC, etc. should be obtained separately.) * Please refer to 6.4 Parallel I/O Wiring Example (page 27) for how to wire the CN5 connector. * Please refer to "6.3 The parallel I/O signal is detailed (page 24)" for details of each signal of parallel I/O. 17 - 5.

Ionizer

Horizontal mounting Downward mounting 83 27 94 27 26 32 Center bracket/IZS31-BM Reduced-wiring Fieldbus System 40 15 23 14 3 5.4 18 24 39 Static Neutralization Equipment M5 screw for mounting 2 Ionizer 27 100 Alphabetical Index Length Measuring/ Counter Angle adjustable Ionizer full length (L) Note) Number of center brackets included in a model with brackets.

Multi-Axis Step Motor Controller

27 COM3 18 COM3 18 N.C. 1 N.C. 1 8 8 COM3 19 COM3 19 N.C. 1 N.C. 1 COM3 38 COM3 38 28 28 COM4 20 COM4 20 N.C. 1 N.C. 1 9 9 COM4 39 COM4 39 N.C. 1 N.C. 1 29 29 COM4 40 COM4 40 1 Cannot be connected 1 Cannot be connected I/O 2 Input Signal I/O 2 Output Signal Name Details Name Details BUSY1 Busy signal for axis 1 +COM3 +COM4 Connects the power supply 24 V for input/output signal BUSY2 Busy

S Couplers

22 22 22 27 8.0 11.0 11.0 14.0 8.0 11.0 11.0 14.0 Rc1/8 Rc1/4 Rc3/8 Rc1/2 NPT1/8 NPT1/4 NPT3/8 NPT1/2 30.0 36.0 37.0 42.0 30.0 36.0 37.0 42.0 11.1 17.1 18.1 23.1 11.1 17.1 18.1 23.1 14 17 21 27 14 17 21 27 8.0 8.0 8.0 8.0 8.0 8.0 8.0 8.0 KK130S(L)-N01F -N02F -N03F -N04F KK130P-N01F -N02F -N03F -N04F Barb fitting type (for rubber hose) 24 L2 Plug dimension when socket is connected.

Series 10-SYJ3000/5000/7000 Rubber Seal 4/5 Port Solenoid Valve

. 300 (Lead wire length) Applicable cable O.D. 3.5 to 7 Max. 10 60.9 28.1 [35.1] 53.4 12.7 42.1 M8 x 1 32.6 15.1 39.2 [46.2] Approx. 300 (Lead wire length) Pg7 73 [75.2] 63.2 [65.4] 82.1 83 72.1 3 3 58.2 64.7 3 3 42.2 19.5 19.5 19.5 11 11 11 19.5 11 2 x 2.6 (For mounting) 2 x 2.6 (For mounting) 2 x 2.6 (For mounting) 20 20 20 2 x 2.6 (For mounting) (2.3) (2.3) (2.3) 20 (2.3) 23 23 23 23 27

Basic Type/Direct Mount Type

CY36 Consult with SMC in case a bracket with weight exceeding the above value is to be mounted. 28 27 26 25 24 23 22 21 20 19 18 17 16 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 1000 2000 3000 4000 5000 6000 CY315 Note 1) According to the dead weight deflection in the figure on the right, provide clearance so that the cylinder does not touch the mounting surface or the load, etc., and is able

Speed Controller with One-touch Fitting

Counterbore diameter D3 Seal bearing surface diameter D2 Rz 25 Female thread inclination angle: 1 or less (Sealing face) Chamfer dimension D1 45 Table 1 Connection thread size Chamfer dimension D1 mm Seal bearing surface diameter D2 mm R1/8 10.2 to 10.4 12 or more R1/4 13.6 to 13.8 17 or more R3/8 17.1 to 17.3 21 or more R1/2 21.4 to 21.6 27 or more NPT1/16 8.2 to 8.4 11.11 or more NPT1/8

C76

10+0.036 0 12+0.043 0 32 40 M12 x 1.75 50 8 28.3 22 42.5 19 M10 x 1 42.5 45 57 24 M38 x 1.5 14 46.5 G 1/4 35 12 69 12 14.2 Item ZZ S Stroke Bore 51 to 100 101 to 150 151 to 200 201 to 250 1 to 50 51 to 100 101 to 150 151 to 200 201 to 250 1 to 50 32 40 126 (151) 68 (93) 89 (114) 118 139 143 164 168 189 214 176 208 201 233 226 258 283 158 (183) ( ): In the case of non-rotating 6-10-26 27

CJP

30.5 24 5 14.5 19 11.5 15 19 4.5 M22 x 1.5 5 10 20.5 25 17.5 15 27 31.5 24 Note) E and F should be machined in a concentric manner.

Cylinder

. -~. .. 24 17.5 4.5 M22x l .5 19 5 24 I ~ 17 13.5 , 10.5 ~ 10. 23.5 20 . 15 3Q,5 27 17 3.5 M15x l.S 12 4 10 . 24 5 19 14.5 11.5 15 10 25 20.5 15 31.5 27 ~. .. ~ '. ar. ' Panel Mount Type: CJPB NN Exhaust ~ Bore4>6:CO.5 \ \ 4>10. 1S:Cl ~, .. " ~.:p:I L.LJ ~LI--_-II \ ~ '-' f-tw'~ S H r; A Rod end without thread . 1 R H ~. -I Z s .

7

Nickel plating Zinc chromated Auto switch mounting bracket Magnetic field resistant auto switch Oil-impregnated sintered alloy Carbon steel Carbon steel MK Hexagon socket head plug Pin Cotter pin Flat washer Cushion seal retainer Wear ring Cushion seal Cushion valve seal Hexagon socket head cap screw M4 x 0.7 x 14 L Rc1/4 2 pcs. per switch 2 pcs. per switch Hexagon socket head cap screw 27

0.4

VV5Q11 (L4) (L3) L2 (5.25) (12) 13 27 28 L1 Indicator light 63.5 23.5 10.5 (n-1) x 10.5 1.5 Manual override A A A B A B A B A B A FG + + 0V 24V SMC S E R I A L U N I T MODEL SC (SI No.EX120-STA1) 2 93.5 66 64 ERR T/R RUN (35) (5.5) 0 1 DIP SW. 4 x M4 mounting hole 61.5 4.5 Drawing shows a SC case.

High Vacuum Angle Valve

G G Heater A A [mm] Series Valve size A B C D E Fn G H J K 25 50 121 48 27 12 40 26 44 21 40 65 171 66 39 11 55 41 67 29 50 70 185 79 31 11 75 52 76 29 9 XLC XLG 19 Heat-resistant 2-Color Indicator Solid State Auto Switch: Direct Mounting Type D-M9NJ/D-M9PJ RoHS Refer to the SMC website for details on products that are compliant with international standards.

High Vacuum Angle Valve

G G Heater A A [mm] Series Valve size A B C D E Fn G H J K 25 50 121 48 27 12 40 26 44 21 40 65 171 66 39 11 55 41 67 29 50 70 185 79 31 11 75 52 76 29 9 XLC XLG 19 Heat-resistant 2-Color Indicator Solid State Auto Switch: Direct Mounting Type D-M9NJ/D-M9PJ RoHS Refer to the SMC website for details on products that are compliant with international standards.