Possible to transfer a workpiece at low-speed.

1 !9 !2 @1 @3 e u o t @2 !8 @0 @0 @3 !2 !9 e @0 @1 o t u !8 @0 @2 !1 !4 q w r y !5 !6 i w i !

Remote Type Pressure Sensors/Pressure Sensor Controllers Series PSE

kPa 2 kPa PSE550 0 2 kPa With LED display for confirming energization 2 mounting types Accuracy 1 % F.S. 1 % F.S.

3

Wetted parts material Note 5) Non-grease Note 5) Refer to Wetted Parts Piping port size 3/8 3/8, 1/2 1/2, 3/4 3/4, 1 705 g 840 g 1 1/4, 1 1/2 Construction on page 6 for details.

Speed Controller with One-touch Fitting

2 1/2 4 Fluororesin (TLM, TILM Series) (TH, TIH Series) 1/8 2 R 1/4 3/8 3 NPT 1/2 4 2 1/8 2 2 2 1/4 Gasket seal Uni Brass/Steel wire 1/4 3 3/8 2 1/2 4 1 Without sealant type can be selected as a standard option. 2 Universal type is not available.

Programless controller (with stroke study) Step motor (servo 24 VDC)

Sensor A-3 Blue 2 2 Shield Electric actuator side Controller side 1 6 5 3 4 Terminal no. 12 13 7 6 (4) Actuator cable for with lock and sensor (8-20m) 9 8 Cable color Terminal signal Terminal no 3 no A B-1 Brown 2 A A-1 4 Terminal no Cable length (L) Red 1 B B-2 5 2 Orange 6 B A-2 1 1 8 8m *1 Yellow 5 COM-A / COM B-3 2 6 Green 3 COM-B / A-3 A 10m *1 5 Blue 4 Shield

Digital Flow Switch (Integrated display type)

For OUT2, all "1" in the chart will be changed to "2".

Vacuum Unit Ejector / Vacuum Pump System

purity class is 2:6:3 of ISO8573-1:2010.

AC Servo Motor Driver (SSCNET Type)

1) (Note 1) 31 Overspeed 32 Overcurrent Alarms 33 Overvoltage 34 Receive error 1 (Note 2) 35 Command frequency error 36 Receive error 2 37 Parameter error 45 Main circuit device overheat (Note 1) (Note 1) (Note 1) 46 Servo motor overheat (Note 1) (Note 1) (Note 1) 47 Cooling fan error 50 Overload 1 (Note 1) (Note 1) (Note 1) 51 Overload 2 (Note 1) (Note 1) (Note 1) 52 Error excessive 8A USB

Digital Flow Switch ( compatible)

Name Lead wire colour Function 1 DC(+) Brown 12 to 24 VDC 2 N.C./OUT2 White Not connected/Switch output 2 (SIO)/Analogue output/External input 3 DC(-) Blue 0 V 4 OUT1 Black Switch output 1 Used as IO-Link device No. Name Lead wire colour Function 1 L+ Brown 18 to 30 VDC 2 N.C.

Dual Rod Cylinder: Basic Type Series CXS ø6, ø10, ø15, ø20, ø25, ø32 1

1 @1 !8 !5 w !9 !0 !7 u !7 w @1 !9 !3 @3 !2 !0 o @0 i A A MX MTS MY CY !4 !3 y e !2 q r t o !6 @0 !4 !1 q !6 i t y e !5 r u !

4/5 Port Air Operated Valve Series SYJA3000 1

-4.3 (For mounting) 63.6 34 8.5 2-M5 x 0.8 1 (Pilot port) 13 3 1 A B B A 2-M5 x 0.8 34 2-3.2 27 17 A B (Pilot port) (For manifold mounting) 1 35 R1 P R2 31.5 2-3.2 18 35 (For mounting) 63.6 Manual override 74.6 28 29 25 21 1.6 14 74.6 Manual override 55 1/8 2-1.8 (Bleed port) With fiflter (80 mesh) 40 25.5 (Piping port) 20 12 11.5 R1 R2 P 18 22 22 1/4 2-1.8 (Bleed port) 63 27.2 (R1, R2 port

Electric Actuator

Step 1 Step 2 Check the cycle time.

Rubber seal 5 Port Solenoid Valve Series SYJ7000

1 (P) (A) 4 (B) 2 3 position exhaust center (A) 4 (B) 2 5 (R1) 3 (R2) 1 (P) 3 position pressure center (A) 4 (B) 2 i 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) (This figure shows a closed center type.)

SMC Pneumatic Clean Series

Direct mount type End lock Standard 1 3 3 1 2 Double rod Air Cylinder Direct mount type 10-/1121-/221 3 3 1 2 CA2 Air Cylinder Standard 10113 1 2 CUJ Mini-free Mount Cylinder 10-/1121-/221 3 3 1 2 CDU Free Mount Cylinder 10-/1121-/221 2 3 1 2 CQS Compact Cylinder 10-/1121-/221 2 3 1 2 CQ2 10113 1 2 REC Sine Cylinder Note) 11-/1221-/221 3 1 2 CXSJ 3, 4 Dual Rod Cylinder Note) 10-/11-/1221

Series AK1000

) tGauge port (Outlet) 2P 3P 4PL 5PC MPA MPA MPA 1 1 1 0 0 40 2) Other range available.

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

1 Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 CRB2 CRBU2 CRB1 MSU CRJ Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com CRA1 CRQ2 MSQ MRQ D20Series MSQ now includes smaller sizes 1, 2, 3 and 7 11-9-1 2 Compact rotary table

Digital Pressure Switch

Rated value kPa Pa mbar psi inchHg mmHg inchH2O mmH2O 1 X576 500 Pa 0.001 (Initial value) 0.01 0.001 0.001 0.01 0.01 0.1 0.001 X577 1 kPa (Initial value) 1 0.01 0.001 0.001 0.01 0.01 0.1 0.01 X578 2 kPa (Initial value) 2 0.1 0.001 0.001 0.1 0.01 1 0.01 X579 5 kPa (Initial value) 0.1 0.001 0.01 0.1 0.1 1 0.01 X580 10 kPa (Initial value) 0.1 0.01 0.01 0.1 0.1 1 -: No units for display -30No.PS-OMX1005

Environment

1 !2 !

Process Pump

1/8 With LQ3 fitting With LQ1 fitting (6.35) (1.2) 55 15 FLUID IN FLUID OUT 4.5 30 41 7 (140) (149) 139 87 77 79 2 (2 x R2.25) 4.5 FLUID IN Rc, NPT, G 1/8 With nut (LQ1/LQ3 fittings) 1/4" tube extension Caution 1.

OMS0020

Data No. 0Note6) to 1000 8 MovementMode (0:ABS, 1:REL) 1 0 , 1 9 ThresholdForceValue 0.1 0.1 to 5 10 Positioning width [m] 1 0 to Note1) 11 AREA A Position 1 [m] Note1) 1 0 to Note1) 12 AREA A Position 2 [m] Note1) 1 0 to Note1) 13 AREA B Position 1 [m] Note1) 1 0 to Note1) 14 AREA B Position 2 [m] Note1) 1 0 to Note1) 15 Unused 4 Step Data No. 2 (Step Data No. 1Note6) 0-15 Same as above