Series MXS 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

3.8 NA x M3 x 0.5 thread depth 4 K 14.6 7 3.5 3.8 7 6.5 4 6.5 8 5.5 J 6 Max. 9.5 (With stroke adjuster at retraction end) I 7 Operating port 2 x M5 x 0.8 2 2 x M3 x 0.5 thread depth 4 3H9 ( ) depth 3 +0.025 0 HA GA +0.025 0 B A 3H9 ( ) depth 3 NN x M4 x 0.7 thread depth 8 4 1 6.5 7 7 15 3.2 B A 6.5 13 6.5 13 H (NN 1) x H G Section AA Section BB (mm) Model F 25 25 40 50 38 50 ZZ 74 79 90

Series AS-FM/AS-M/ASD-FM

28.7 17.5 12.7 28.8 33.8 8 10-32UNF 9.3 9.6 25.1 30.1 10.8 34.5 31.9 23.3 20.7 16.5 13.7 8 17 17.5 9.3 13.1 12.7 31.8 18 31.1 36.1 23.9 25.6 28.2 21.9 23.9 25.6 28.2 31 NPT1/8 12.7 14.2 10.9 27.1 32.1 14 16.5 18.5 21 16 17 18.5 19 21 32 33 36 39 40 37.2 41.7 40.1 42.6 45.6 48.4 47 12.9 16.2 10.9 16.2 35.4 40.4 NPT1/4 17.5 18.5 29.4 34.4 18.3 12.9 21 20.2 Reference dimensions for 10-32UNF

AC Servo Motor Driver (Pulse input type/Positioning type)

end Reverse rotation stroke end (Note 5) LSP 6 LSN 7 10m max.

CP95

7 to @0 and @2. Seal kits consist of items !

CP95

7 to @0 and @2. Seal kits consist of items !

Table of Contents

7.

EXxx-OMQ0015CN

Content 0 1 1 1 2 Reserved 3 1 4 1 5 Reserved 6 1 7 1 -67No.EX-OMQ0015CN Unit diagnostic status 0 7 6 5 4 3 2 1 0 Byte 2 Bit No. Content 0 10 1 11 2 12 3 13 4 14 5 15 6 16 7 17 Unit diagnostic status 1 7 6 5 4 3 2 1 0 Byte 3 Bit No.

Thermo-con/Rack Mount Type

With Flow Switch p. 21 High-Pressure Pump Mounted p. 21 VOptional Accessories Power Supply Cable p. 22 Specific Product Precautions p. 23 4 HECR Series Model Selection Guide to Model Selection 1.

3 Port Solenoid Valve, VQZ Series, Base Mounted and Body Ported

L 60.5 3 48 2 85.5 5 73 4 110.5 7 98 6 135.5 9 123 8 160.5 11 148 10 185.5 13 173 12 210.5 15 198 14 235.5 17 223 16 19 248 18 20 260.5 285.5 21 273 No.

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

VP4 21 21 Rc(PT)1/4, 3/8 M5 X 0.8 External pilot port (Only external pilot style(R)) (Rc(PT)3/8) (Rc(PT)3/8) P port 33 VQ 3 4 5 L plug connector (L): VQZ3 5 (R)lLl 0 1 02 03 3 4 5 DIN connector (Y): VQZ3 5 (R)lYl 0 1 02 03 VQ4 VQZ Indicator light 155.5<157.5> 300 VQD (Lead wire length) 71<72> VZS Pg.7 VFS MAX.10 163.5 56.5<60> 75 Applicable cord O.D. 3.5 to 7 VS Indicator light Cover diameter

Plug-in Unit

PW 0 0 0 1 1 1 9 9 9 PW LRUN 2 2 2 8 8 8 3 3 3 7 7 7 4 4 4 6 6 6 SD RD LERR. 5 5 5 L RUN SD RD x10 x1 24V 0V +24V 24G DA DB FG DG L ERR.

10

6 47 33.5 45 M6 x 1 6 15 16 4 40 27 14 30 52 38 16 12 35 13 14 27 8 51 38.5 52.5 M6 x 1 6 21 16 4 50 32 18 35 65 46.5 20 13 40 14 15.5 27.5 11 58 45 59 M8 x 1.25 7 21 16 5 63 32 18 35 75 56.5 20 13 45 14 16.5 28.5 11 58 50 64 M8 x 1.25 7 21 16 5 80 37 22 40 95 72 25 16 45 20 19 37 13 72 62 76.5 M10 x 1.5 10 30 16 5 100 37 26 40 114 89 30 16 55 20 19 37 16 72 71.5 86 M10 x 1.5 10 30 16 5

Sine Cylinder Series REC

LZ N NA Bore (mm) 20 M8 x 1.25 18 20 15.5 30 40 26 13 10 55 41 8 13 40 186 40 5 8 33.5 5 6 6.8 25 25 M10 x 1.25 22 20 19.5 34.5 47 32 13 10 55 45 10 17 45.5 186 40 6 8 37.5 5.5 8 6.8 28 D32 M10 x 1.25 22 22 19.5 42.5 47 32 13 11 55 45 12 17 49.5 199 40 6 8 46.5 5.5 10 6.8 28 40 M14 x 1.5 24 26.5 21 51 54 41 16 12.5 75 50 14 22 55.5 227 55 8 10 56.2 7 12 7 30 -X NN P S X Y Z ZZ Bore (mm)

51

A A1 E1 L1 MM R1 U1 ND NZ L NX M22 x 1.5 38 21 21 27 M26 x 1.5 44 21 24 31 Y-G02 Y-G03 Y-G04 Y-G05 Y-G08 Y-G10 16 20 +0.4 +0.2 +0.4 +0.2 +0.5 +0.3 +0.5 +0.3 +0.5 +0.3 +0.5 +0.3 A knuckle pin and retaining rings are included. 34 41 42 56 71 79 8.5 25 30 30 40 50 55 M8 x 1.25 10.3 11.5 8 10 10 14 18 22 16 20 36 44 56 64 21 8 10 18 22 28 32 IY-G02 IY-G03 IY-G04 IY-G05 IY-G08 IY-G10 Knuckle

Sine Cylinder Series REC

LZ N NA Bore (mm) 20 M8 x 1.25 18 20 15.5 30 40 26 13 10 55 41 8 13 40 186 40 5 8 33.5 5 6 6.8 25 25 M10 x 1.25 22 20 19.5 34.5 47 32 13 10 55 45 10 17 45.5 186 40 6 8 37.5 5.5 8 6.8 28 D32 M10 x 1.25 22 22 19.5 42.5 47 32 13 11 55 45 12 17 49.5 199 40 6 8 46.5 5.5 10 6.8 28 40 M14 x 1.5 24 26.5 21 51 54 41 16 12.5 75 50 14 22 55.5 227 55 8 10 56.2 7 12 7 30 -X NN P S X Y Z ZZ Bore (mm)

Miniature Fittings M3, R(PT) 1/8, M5 Series M

I.D. 1 8 1 4 1 8 1 4 3 8 1 8 1 4 3 8 1 8 1 4 3 8 1 4 3 8 1 2 1 4 3 8 1 2 1 4 3 8 1 2 1 4 3 8 1 2 10 17 19 17 19 20 18 21 20 18 21 20 22 21 25 22 21 25 23 22 25 23 22 25 21 25 22 27 38 30 32 39 31 32 37 38 44 66 38 43 65 53 53 68 51 52 67 KFL04-01 KFL04-02 KFL06-01 KFL06-02 KFL06-03 KFL08U-01 KFL08U-02 KFL08U-03 KFL08N-01 KFL08N-02 KFL08N-03 KFL10U-02 KFL10U-03 KFL10U-04 KFL10N-02 KFL10N-03

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

X6 11-7-32 to 11-7-51 Shaft, Bolt, Parallel key stainless spec.

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

on page 11-7-24.

Series CXS 10-/11-/12- Dual rod cylinder 21-/22- ø6, ø10, ø15, ø20, ø25, ø32

CXSJ10-10 21-/2211-/12CXSJ10-20 21-/2211-/12CXSJ10-30 21-/2211-/12CXSJ10-40 21-/2211-/12CXSJ10-50 21-/2211-/1279

MLGP

MLGPM, MLGPL common dimensions (mm) IC Standard stroke (mm) Bore size (mm) B C DA FA FB G GA GB H HA IA IB Extension locking Retraction locking ID IE IF IG IH J K L 79.5 10 10 12 32.5 8.5 9 9 83 M5 M5 M6 26.5 36 40 49 M5 x 0.8 6.5 7 8 21.2 18 21 24 10 12 16 36 42 48 10.5 37 9.5 10 9 24 30 34 6 7.5 9 18 21 24 32 3 20 25 32 20, 30, 40, 50, 75, 100, 125 150, 175, 200, 250, 300, 350 84 36.5