Air cylinder (Series compatible with secondary batteries)

1 D-M9WV-900 55 30 (n 4 65 30 (n 4 60 30 (n 4 70 30 (n 4 10 30 (n n=(4,8,12,16) n n=(4,8,12,16) n=(4,8,12,16) n=(4,8,12,16) n=(2,4,6,8) 15 Auto switch Connection and Example 16 3.

High Rigidity Slider Type Ball Screw Drive/11-LEJS Series

Environment Clean Room Specification ISO Class 4*1 (ISO14644-1) Built-in vacuum piping Possible to mount the main body without removing the external cover etc. Body-integrated linear guide specification *1 Changes depending on the suction flow rate.

F

8 (N)ASN2-01 15 34.2 38.2 17 1/4 (N)ASN2-02 20 37 41 21 3/8 (N)ASN2-03 25 49 55 24 1/2 (N)ASN2-04 30 y, South San Francisco, CA 94080-6370 !

Precision Cylinder Series MTS

20.5 8.5 55 Stud bolt part number: MT-S40 Rod end nut part number: MCN-NT-04 15.5 Width across flats 16 With end lock 5 172 + Stroke 198 + Stroke Basic type With end lock Accessories SMTS40, #1 (#1 + #4) SMTS40, #2 (#2 + #4) SMTS40, #3 10

70pvvna

B: Locking slotted type 4 1 6A 8A 10A 10A 15A 20A 25A 32A 40A 50A 1 8 1 4 3 8 3 8 1 2 3 4 220 VAC 50/60 Hz 10 5 6 24 VDC 12 VDC 240 VAC 50/60 Hz 7 15 2 9 Other Nil: Non-locking push type 20 3 Option Valve size 5 to 7 25 4 1 1 1 2 32 5 1 4 1 2 40 50 6 7 Note) Air operated only Electrical entry/ With light/surge voltage suppressor E GS G Grommet with surge voltage suppressor Grommet Grommet

Air Slide Table Long Stroke Type Series MXY ø6, ø8, ø12 1

9 #4 #5 #1 MY CY @7 @8 t @9 @4 @4 @4 MG Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com CX DMetal stopper Shock absorber e !8 A -X i !1 !0 @6 o @0 20Data !3 !4 !5 !6 !2 @2 @1 Detail drawing of part A Component Parts Note Note Material Material No.

Dual Speed Controller with One-touch Fitting Series ASD 1

Port size 10 8 6 12 1/8" 1/4" 3/8" 5/32" 3/16" 5/16" 4 ASD230F-M5 ASD330F-01 ASD430F-02 ASD530F-02 ASD530F-03 ASD630F-04 M5 x 0.8 R 1/8 R 1/4 R 1/4 R 3/8 R 1/2 ASD230F-U10/32 ASD330F-N01 ASD430F-N02 ASD530F-N02 ASD530F-N03 ASD630F-N04 10-32 UNF NPT 1/8 NPT 1/4 NPT 1/4 NPT 3/8 NPT 1/2 Specifications Fluid Air Proof pressure 1.5 MPa Max. operating pressure 1 MPa Min. operating pressure

Series 10-, 21- AW-B Filter Regulator

53 70 70 90 15.4 8 10.5 10.5 13 5.4 6.5 8.5 8.5 11 43.9 45.8 54 55.5 65.8 34 40 54 54 66 30 41 50 50 70 30 38.4 38.4 47.5 63 66.4 74.3 74.3 80.3 26 29.4 37.3 37.3 43.3 44 44 44 44 44 72.4 85.6 91.7 93.2 175.5 11 10.5 10.5 8 6.5 91.4 121.9 153.9 155.9 242.6 25.5 24.8 28.9 30.4 42.2 40 53 70 75 95 5 3.5 1.5 1.2 3.2 1/8, 1/4 1/4, 3/8 1/4, 3/8, 1/2 3/4 3/4, 1 1/8 1/8 1/8 1/8 1/8 M28 x 1 M38

Direct Operated Precision Regulator Series ARP20/30/40  Sensitivity: Within 0.2% F.S.  Expanded lineup  ARJ 3 types of set pressure and the body size AR425  Energy saving, Air consumption: allow more freedom in designing a circuit. to 935 80% reduct

C D F J K ARP20(K) ARP30(K) ARP40(K) 28.5 Note 2) 1/8 40 98 27 28.5 M28 x 1 2 1/8, 1/4 29.5 1/8 53 117 29 29.5 M38 x 1.5 2.5 1/4, 3/8 34 1/4 70 148 41 34 M42 x 1.5 1 1/4, 3/8, 1/2 Optional specifications Square embedded type pressure gauge Digital pressure switch Round type pressure gauge Bracket mount dimension Panel mount Model Z ARP20(K) ARP30(K) ARP40(K) H J H J H J M N Q R S T U V W

Direct Operated Precision Regulator ARP20/30/40 Series  Sensitivity: Within 0.2% F.S.  Expanded lineup  ARJ 3 types of set pressure and the body size AR425  Energy saving, Air consumption: allow more freedom in designing a circuit. to 935 80% reduct

C D F J K ARP20(K) ARP30(K) ARP40(K) 2 Note 2) 40 1/8 98 27 28.5 M28 x 1 28.5 1/8, 1/4 2.5 1/8 53 117 29 29.5 M38 x 1.5 29.5 1/4, 3/8 1 1/4 70 148 41 34 M42 x 1.5 34 1/4, 3/8, 1/2 Optional specifications Square embedded type pressure gauge Digital pressure switch Round type pressure gauge Bracket mount dimension Panel mount Model Z ARP20(K) ARP30(K) ARP40(K) H J H J H J M N Q R S T U V W

Process Valve

-40A VNA7-50A 1 8 1 4 1 4 1 4 1 105 120 140 77 96 113 53 60 74 26.5 30 37 120.5 137 160 20 24 24 129.5 147 170 170.1 187.6 210.6 211.5 229 252 55 63 74 1 2 1 2 564 A VNA Series Process Valve: 2 Port Valve For Compressed Air and Air-hydro Circuit Control How to Order Pilot Solenoid Valves Valve size 1/2/3/4 Valve size 5/6/7 SF4 5 D 23 Q VO307 5 D 1 Q CE-compliant CE-compliant Coil rated voltage

Vacuum Ejector Box Type (Built-in Silencer)/Body Ported Type Series ZH 1

ZH07B ZH10B ZH13B ZH05D ZH07D ZH10D ZH13D ZH15D ZH18D ZH20D 12/Rc 3 8 Body ported type (Without silencer) 8/Rc 1 8 10/Rc 1 4 6/Rc 1 8 6/Rc 1 8 6/Rc 1 8 6/Rc 1 8 6/Rc 1 8 8/Rc 1 8 8/Rc 1 8 10/Rc 1 4 10/Rc 1 4 3 8 12/Rc 10/Rc 1 4 12/Rc 3 8 12/Rc 3 8 16/Rc 1 2 16/Rc 1 2 13-5-2 3 Series ZH Vacuum Ejector: Box Type (Built-in Silencer)/Body Ported Type Ejector JIS Symbol Body ported type (Without

Compact Cylinder with Solenoid Valve/

0 1 2 3 4 5 6 7 Fully opened 0 0 1 2 3 4 5 6 7 8 9 10 Without restrictor Without restrictor Number of restrictors needle rotations Fully opened Number of restrictors needle rotations Restrictor: ASN2-M5 Pressure: 0.5 MPa Mounting orientation: Horizontal, No-load, Piston extended The above piston speed is for reference purpose only.

CC

4 Oil port size Rc RS H A (mm) Model Air port size Rc Oil port size Rc A B C DA DB DL H NL P QB QL S T W RZQ CCT639.5 11 0 30 86 3 28 45 53 88 86 64 88 104 3/4 3/8 MI W S CCT1007 13 2 32 120 5 33 65 61 123 116 92 125 139 1 1/2 CCT1607 20 2 46 185 0 29 93 60 183 180 144 185 202.5 1 1/4 3/4 CEP1 L Dimension CE1 (mm) 800 700 600 500 400 300 200 100 50 Effective oil level stroke (mm) CE2 CCT63603.5

LFE-OMZ0012

Pin description 4 2 1 DC(+) 2 OUT2 1 3 DC (-) Connector on the body 4 OUT1 Connector pin numbers (male connector) 3 4 2 No.

Sine Rodless Cylinder Series REBR Direct Mount Type

4 !3 !8 !7 @7 #1 @9 !0 t y e i u !2 !1 w #3 !6 @4 @5 @2 @1 r #0 #4 #2 o !5 @8 @3 REBHT32 @6 Parts list Parts list No. Description Material Note No.

High Vacuum L Type Valve

Be sure to tighten the nut to the torque specified in the table as torques other than that specified may cause a loose nut or damage to the valve. -25 1.5 -40 2.5 -50 6.3 -63 -80 14 Step 3 Reassembly of valve seal 1 (No.1) Step 4 Reassembly of valve seal 1 (No.2) 2 1 3 4 Groove for mounting the seal Valve Valve seal 1 Bonnet assembly Bonnet assembly Eliminate any dust within groove for mounting

AR20-B to AR60-B

Note 6) Pressure can be set higher than the specification pressure in some cases, but Standard Specifications Model AR20-B AR25-B AR30-B AR40-B AR40-06-B AR50-B AR60-B Port size 1/8, 1/4 1/4, 3/8 1/4, 3/8 1/4, 3/8, 1/2 3/4 3/4, 1 1 Pressure gauge port size Note 1) 1/8 Fluid Air Ambient and fluid temperature Note 2) 5 to 60C (with no freezing) Proof pressure 1.5 MPa Maximum operating pressure

Direct Operated Precision Regulator/Modular Style (For Special Applications) - ARP20 to - ARP40 Direct Operated Precision Regulator with Backflow Function/Modular Style (For Special Applications) - ARP20K to - ARP40K 10 20 21 10 20 21 10 20 21 10 20 21

C D F J K ARP20(K) ARP30(K) ARP40(K) 28.5 Note 2) 1/8, 1/4 1/8 40 98 27 28.5 M28 x 1 2 1/4, 3/8 1/8 53 117 29 29.5 M38 x 1.5 29.5 2.5 1/4, 3/8, 1/2 1/4 70 148 41 34 M42 x 1.5 34 1 Optional specifications Square embedded type pressure gauge Digital pressure switch Round type pressure gauge Note 3) Bracket mount dimension Panel mount Model Z ARP20(K) ARP30(K) ARP40(K) H J H J H J M N Q R S

MU

, #2 (#1+#2+#11) MUL63SMU63, #2 (#1+#2+#11) CU CQS CQ2 MU (mm) ZZ 99 106 114 139 145 FZ 24 28 32 39 50 FY 66 82 102 126 148 FX 14 16 18 22 30 FV 76 94 118 144 168 FT 8 8 9 12 14 FD 5.5 7 9 11 13 Model MUF25, MUG25 MUF32, MUG32 MUF40, MUG40 MUF50, MUG50 MUF63, MUG63 Rear flange MUG25SMU25, #4 (#1+#4+#11) MUG32SMU32, #4 (#1+#4+#11) MUG40SMU40, #4 (#1+#4+#11) MUG50SMU50, #4 (#1+#4+#11) MUG63SMU63