CXS

x 0.8 with depth 8 2-M6 x 1.0 (Through) 4-M5 x 0.8 with depth 7.5 30 (Z) 19 11.5 T 20 9 (30) (Z) 8 2-M5 x 0.8 with depth 8 2-M8 x 1.25 with depth 12 0.2 75 16 S SS ZZ Z Part no.

Stability of suction position,

ZP3EA-YAL16 [Weight: 116.6 g] M16 x 1.5 Width across flats 22 Width across flats 19 M14 x 1 6 6 25 24.5 49.5 16 5 5 25 41 M5 x 0.8/ Effective thread depth 5 Rc1/8 14.5 9 9.9 Applicable pad part no. ZP3E-63UM ZP3E-80UM ZP3E-100UM ZP3E-125UM ZP3E-63BM ZP3E-80BM ZP3E-100BM ZP3E-125BM 7 M10 x 1 M16 x 1.5 Applicable pad part no.

C85

(mm) M10 x 1.25 M4 x 0.7 M6 x 1 M6 x 1 M8 x 1.25 M4 x 0.7 Piston rod thread Port size G 1/8 M5 x 0.8 M5 x 0.8 M5 x 0.8 G 1/8 M5 x 0.8 Action Double acting, Single/Double rod Rubber cushion/Single rod Fluid Air Proof pressure 1.5 MPa CJ1 Max. operating pressure 1.0 MPa Spring return 0.05 MPa 0.05 MPa Min. operating pressure CJP 0.1 MPa 0.08 MPa Spring extended 0.08 MPa Air cushion/Single rod

3-Screen Display High-Precision Digital Pressure Switch ∗1 ® New New The ∗1  Excluding the Z/ISE20B-L compatible type has been added to the 20B series.

female thread, R1/8, NPT1/8 R1/41, NPT1/41, G1/41, Rc1/8, URJ1/42, TSJ1/43 Copy function5, Auto-shift function5 Copy function, Auto-shift function 1 M5 female threaded 2 Face seal fitting 3 Compression fitting 4 1 output in SIO mode (NPN or PNP switching type) 5 This function is not provided with the IO-Link compatible type. 3-Screen Display High-Precision Digital Pressure Switch ZSE20B(

CRQ2

(Example) For M3: L1 = 6 mm Applicable shaft types: J, K, T Q1 = M K axis T, X shaft Q1 = M L1 = L2 + (3 x P) L2 + (3 x P) L1 + (3 x P) L1 + (3 x P) L2 = L2 = L1 = Q2 = M Q2 = M (mm) (mm) Size 10 15 20 30 40 Q2 M3 M3, M4 M3, M4, M5, M6 M4, M5, M6, M8 M4, M5, M6, M8, M10 Q1 M3 M3, M4 M3, M4, M5, M6 M4, M5, M6, M8 M4, M5, M6, M8, M10 Size 10 15 20 30 40 (mm) Q1 Size 20 30 40 M3, M4 M3, M4,

Mechanically Jointed Rodless Cylinder Series MY2H/HT ø16, ø25, ø40

Example) D-A90L Contact protection box OUT () Brown [Red] Reed switch CD-P11 OUT () Blue [Black] CD-P12 Auto Switch Weights D-A93(V) (g) D-A90 D-A90V D-A93 D-A93V D-A96 D-A96V LED Type Brown [Red] Contact protection box OUT (+) Brown [Red] Resistor Lead wire length 0.5m 7 7 6 7 8 8 Reed switch Zener diode Lead wire length 3m 35 35 30 35 41 41 CD-P11 OUT () Blue [Black] CD-P12 Blue [Black]

Low torque Metal seal type Rotary joint

* flange: MQR8-F (for MQRF8-M5) * flange: MQR12-F (for MQRF12-M5) * o 55 * o 45 * o 41 * o 50 * 4-4.5 mounting hole * 4-8 counter bore 5.5 4.5 mounting hole +0.05 4.1 depth10 54h8 24 x M5 x 0.8 10 counter bore depth1.5 30h8 (10 from end) 49h8 0 -0.033 25h8 16-M5 x 0.8 10 counter bore depth1.5 0 0.033 3 120 140 17 *7 (10 from end) 3 (87) 1 2 3 4 5 6 7 8 9 10 11 12 1 2 31 9 8.2 x 11 = 90.2

VZA2000

side) 2-M5 x 0.8 body side Pilot port (A side) Sub-plate side Pilot port (B side) 2-M5 x 0.8 sub-plate side 5-3-4 5 5 Port Air Operated Valve Series VZA4000 Specifications Fluid Air SA VZA4121, 4141 Operating pressure range (MPa) 0.15 to 1.0 2 3 4 2 3 4 0.15 to 1.0 VZA4 21, 4 41 0 to 1.0 VA VZA4121, 4141 Pilot pressure range (MPa) 2 3 4 2 3 4 VZA4 21, 4 41 0.1 to 1.0 SA Impact/Vibration resistance

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16, (ø8: new addition, see 8-8-23 ) 1

Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 24.3 17.1 14.4 40.8 MA 10.5 11 CX 11 8.5 D27.3 -X 34 20Data A 19 6.5 Operating port 2-M5 x 0.8 (Plug: M-5P) 30 4-M6 x 1 4-M5 x 0.8, depth 7 Bottom hole diameter 5.1 W 32 0.05 D B 8 0.05 47 13 Operating port 2-M5 x 0.8 J 8 Mounting base side B D 16.5 14.5

MHY2/MHW2

4-M4 X 0.7 Depth 5 (Thread for mounting attachment) M5 X 0.8 (Finger closing port) MHQ Auto switch mounting groove position MHL2 MHR O 41 30 18 12 S MHK 4 4 5 MHS M5 X 0.8 (Finger opening port) 20 9 6.45 MHC2 6 MHT2 MHW2-20D1 MHY2 Right angle finger MHW2 MRHQ Auto switch 31 15 10 11 14 5 28 16 4-M4 X 0.7 (Thread for mounting attachment) 41 MHW2-20D.SMHW2, #1 MHW2-20D1.SMHW2, #6 2.8-19 Series

Rotary Gripper Series MRHQ

10 3-3H9 long groove depth 3 + 0.025 0 M5 x 0.8 37h9 0 0.062 Port A M5 x 0.8 (one each on three sides) Port B 4-M4 x 0.7 Depth 6 N I J E A D P A A M N R R SMC E O P T P A I R R 6 G Y R A I 18 2 6 21 9 5 23 5 Side A Side B Scale: 60% 9 Series MRHQ Rotary Gripper Dimensions (mm) 1in = 25.4mm Scale: 60% MRHQ16 A B 41 50 66.5 30 4-M5 x 0.8 Depth 6 47h9 0 0.062 20.6 opened 5 0 0.1 8 4-M3

180
Angular Style Air Gripper Series MHY2/MHW2 Cam Style Rack & Pinion Style 1

DO 41 30 12 18 S 204 4 5 M5 x 0.8 (Finger operating port) 20 9 6.45 6 MHW2-20D1 Right angle finger type 31 15 10 11 14 5 28 16 41 4-M4 x 0.7 (Thread for mounting attachment) 12-10-19 19 Series MHW2 Dimensions MHW2-25D Flat finger type (Standard) 24 2-M6 x 1 thread depth 10 (Mounting hole) 20 4-M6 x 1 thread depth 12 (Mounting thread) Bottom through hole dia. 5.1 (Mounting hole) 69 51 40 27

180
Angular Style Air Gripper Series MHY2/MHW2 Cam Style Rack & Pinion Style 1

DO 41 30 12 18 S 204 4 5 M5 x 0.8 (Finger operating port) 20 9 6.45 6 MHW2-20D1 Right angle finger type 31 15 10 11 14 5 28 16 41 4-M4 x 0.7 (Thread for mounting attachment) 12-10-19 19 Series MHW2 Dimensions MHW2-25D Flat finger type (Standard) 24 2-M6 x 1 thread depth 10 (Mounting hole) 20 4-M6 x 1 thread depth 12 (Mounting thread) Bottom through hole dia. 5.1 (Mounting hole) 69 51 40 27

MXW Series Long Stroke Slide Table

100, 125, 150 Operating port 2-M5 x 0.8 Width across hexagon socket hole 2.5 (mm) J 12 Scale: 30% 6.5 5H9 +0.03 depth 4.5 0 Width across flats 8 6-M4 x 0.7 thread depth 6 (Helisert) 6 27 58 46 Y 29 26 103 26 Y L 5H9 +0.03depth 4.5 0 10 15 15 K A 35 20 26.5 A Z Bottom through hole 4.2 N-M5 x 0.8 thread depth 10 (N-1) x H G M5 x 0.8 thread depth 10 GG H 6 depth 4.5 5H9 +0.03 Bottom through

MIW/MIS

Applicable speed controller Direct connection type AS1200-M5 Piping type AS1001F Piping type AS2001F etc. At the maximum stroke Adjustment range Maximum adjustment range Max tightening torque Nm Model Bolt MIW12D-12D M3 x 0.5 0.88 MIS12D-D MIW20D-20D MIS20D-D M5 x 0.8 4.3 23 Series MIW/MIS Specific Product Precautions 2 Be sure to read before handling.

MVGQ

For details, refer to page 10-20-41. 10-16-20

Electric Actuator Series LJ1H/LJ1S Made to Order Specifications

Refer to page 100 for part numbers. 115 Made to Order/Dust Seal Specification Series LJ1S10 Dimensions/LJ1S101SC (X70) Scale: 15% 120 40 70 2-5H10 depth 8 4-Limit switch mounting groove The two grooves at the bottom cannot be used. 6-M5 x 0.8 thread depth 9 90 203 Work piece mounting reference plane 80 Stroke + 115 (table movement range) 7.5 194 41 46 58 2-T-slot 1 57 69 90 95 9.3 2-T-slot

Heavy Duty Stopper Cylinder Series RSH/RS1H

Double acting spring type Single acting RSH20T-PS RSH32T-PS RSH50T-PS RSH63T-PS RSH80T-PS Double acting RSH20D-PS RSH32D-PS RSH50D-PS RSH63D-PS RSH80D-PS RSH-R20 RSH-R32 RS1H-R50 RS1H-R63 RS1H-R80 Set of items 37 to 41 in above table Set of items 37 to 41 in above table (not including 39) The seal kits for 20 to 32 consist of items 37 to 41 and those for 50 to 80 consist of items 37 to 41

e-Rodless Actuator

Auto switch part no. 8 7 8 0.5 Lead wire length (m) 41 38 41 3 68 63 68 5 Auto Switch Internal Circuit D-M9N, D-M9NV Unit: mm Dimensions DC (+) Brown Mounting screw M2.5 x 4l Slotted set screw D-M9 Switch main circuit Switch main circuit Switch main circuit Indicator light OUT Black 2.6 2.7 2.8 4 DC () Blue 22 500 (3000) D-M9P, D-M9PV 3.2 DC (+) Brown 6 Most sensitive position 22 500 (3000

Escapements Series MIW/MIS

Supply port 2-M5 x 0.8 FC FA FE FH GD GC GB FG FF EB EA D FB B MIS12-10 A C FD GA Model 72 92 112 86.5 106.5 126.5 33 43 53 38.5 48.5 58.5 48 38 28 165 135 105 185 155 125 MIS12-30 MIS12-20 18 19 9.5 6 (Effective depth 3) 4.5 8 -0.1 0 8 -0.1 0 10 M3 x 0.5 5 3.3 23 26 21 MIS20-30 MIS20-20 MIS20-10 52 42 32 11-0.1 0 11-0.1 0 29.5 35 25.5 13 12.5 10 (Effective depth 4) M5 x 0.8 6.5 28.5 7 5.1