Modular Pressure Control Equipment F.R.L. Replacement Procedure

(AR20(K)/25(K)/30(K)/40(K)) AR10 AR20(K) AR25(K) AR30(K) AR40(K) AR20(K)/25(K)/30(K)/40(K) Hook spanner Nominal Tightening torque 2.0 0.2 Nm 2.5 0.2 Nm 3.5 0.3 Nm 4.0 0.4 Nm AR20(K) AR25(K) AR30(K) AR40(K) AR20(K) AR25(K) AR30(K) AR40(K) 34/38 40/42 52/55 52/55 Assembly (Bracket assembly) 1) Mount the bracket to the product.

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140.5 LVR50-V19 22 80 120 169 C F E Breathing port M5 x 0.8 J Tube extensions 4 x 7 Mounting hole 1/8 (Rc, NPT) Pilot port A H D B G Breathing port M5 x 0.8 Model A B C D E LVR20-T07(06) 40 40 49.3 68 20.1 LVR40-T11(10) 82.5 82.5 89 115 33 IN C F Model F G H J K LVR20-T07(06) 8 27 56 33.5 126.2 LVR40-T11(10) 14 64.5 100 40 183.3 E K J J Breathing port M5 x 0.8 5 Applicable Fluids Regulator

Series CDU 10-/11- 21-/22- ø6, ø10, ø16, ø20, ø25 Free Mount Cylinder

80 85 90 95 100 105 60 65 70 75 80 85 73 78 83 88 93 98 16 to 25 Relief port 2 x M5 x 0.8 2 x P through M5 x 0.8 R QA Q GC GB E MM GA D J C 2.8 A Width across flats L 2 x P through A1 H E 4 x T counterbore 0.5 B S Z (mm) S Z A A1 GB P Q QA R T B C D E GA GC H J L MM Bore size 5 30 40 50 5 10 15 20 25 30 40 50 10 15 20 25 20 16 12 11 5.5 4.5 9 4 4.5 2 16 12 26 20 40 32 8 6 30 27 M6 x 1.0

70pvpump

Since a large quantity of liquid will be pumped out, use a suitable throttle in the discharge port if problems occur. 17-5-163 24 Series PB Performance Curves: Built-in Solenoid Valve Type/Air Operated Type Cycle 1 Hz Cycle 5 Hz Cycle 10 Hz 70 70 70 60 60 60 Total lifting range (m) Total lifting range (m) Total lifting range (m) 50 50 50 40 40 40 SUP = 0.7 MPa SUP = 0.7 MPa SUP = 0.7 MPa

VDW

M5 LVC 2 (OUT) port M5, 1/8 1 (IN) port M5, 1/8 1 (IN) port 2 (OUT) port LVA 15 LVH 2-M2.5 x 0.45 2-M3 x 0.5 thread depth 5 LVD Thread depth 3.5 VDW31 LVQ 36 (27.6) LQ 300 Lead wire LVN 40 30 SMC SMC 1 1 TI/ TIL AC type Rectifying device PA 4-5 25 PAX 34 28 PB Bracket assembly part no.

Precision Regulator

1/4 to 1/2 Port size IR IR 66 IRV 36 Female thread for bottom mounting 4 x M5 x 0.8 depth 7 VEX Bottom bracket is not available as an option.

ZPT/ZPX

Hexagon width across flats 19 Width across flats 24 Hexagon width across flats 19 28 Width across flats 24 ZX ZR A 6 ZM 3 B A ZH B 18 ZU Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 18 ZL ZY ZQ (mm) Model A 40 ZPT40H-B8 C M8 x 1.25 40 ZPT40H-B10 42 M10 x 1.5 B

PF2A/PF2W

Connector pin numbers PF2W504T--1 PF2W520T--1 PF2W540T--1 PF2W504T--2 PF2W520T--2 PF2W540T--2 4 0.5 4 0.5 4 3 16 2 16 2 40 5 40 5 2 1 Pin no.

PA3000/5000/PAX1000

Since a large quantity of liquid will be pumped out, use a suitable throttle in the discharge port if problems occur. 16 Series PB1000 Performance Curves/Built-in Solenoid Type/Air Operated Type Cycle 1Hz Cycle 5Hz Cycle 10Hz 70 70 70 60 60 60 50 50 50 40 40 40 Total lifting range m Total lifting range m Total lifting range m SUP=0.7MPa SUP=0.7MPa SUP=0.7MPa SUP=0.5MPa SUP=0.5MPa SUP=0.5MPa

Rotary Table

Note 1) When using D-F8, mount it at a distance of 10mm or more from magnetic substances such as iron. -18- Specifications Table 1.

MGF

Kit components 40 MGF 40-PS Items 19 through 23 from the table above. 63 MGF 63-PS 100 MGF100-PS 4 Series MGF Dimensions 40 MGF40 Scale: 50% 4-M8 x 1.25 through 100 120 90 9.5 36.5 + Stroke 8 46 + Stroke 7.5 18.5 2-Rc 1/8 port for extending cylinder Breathing hole for guide (with element) When the cylinder is extended 38 Port for retracting cylinder M5: T-slot for hexagon bolt 4-M8 x 1.25

Air Cylinder/End Lock Series MBB ø32, ø40, ø50, ø63, ø80, ø100

45 45 55 9 12 13 13 16 16 12 16 20 20 25 30 32.5 38 46.5 56.5 72 89 46 52 65 75 95 114 10 14 18 18 22 26 22 30 35 35 40 40 Wl Stroke range (mm) Bore size (mm) ZZ S ZZ WL W V S RF P NB N MO 32 40 50 63 80 100 up to 500 up to 500 up to 600 up to 600 up to 750 up to 750 151 165 180 180 226 226 100 110 118 118 150 150 143 152 168 168 208 208 24 24 24 24 40 40 6.5 9 10.5 12 14 15 4 4 5 9 11.5

ZSE F/ISE

with female screw), Piping in backward direction Nil None NPT 1/4 (M5 with female screw), Piping in backward direction Bracket A G 1/4 (M5 with female screw), Piping in backward direction Option A Input/Output specifications 22 30 62 NPN open collector 2 output + Analog output Bracket D NPN open collector 2 output + Auto shift input Refer to the dimensions for the difference between brackets

XL-OMY0002

XLD-80 18 16 14 XLD-50 12 10 XLD-40 8 6 4 XLD-25 2 0 0.0 0.5 1.0 1.5 2.0 2.5 3.0 3.5 4.0 4.5 5.0 5.5 6.0 6.5 7.0 n n 9 XL-OMY0002 4-2 XLD-25 XLD-40 XLD-50 XLD-63 AC90240V XLA25-60S-1 XLA25-60S-1 XLA25-60S-2 1 1 1 H4 AC100V 200/40 200/50 400/100 / AC200V 800/40 800/50 800/100 XLA25-60S-1 XLA25-60S-2 XLA25-60S-2 XLA25-60S-3 1 1 1 1 H5 AC100V 200/40 400/70 400/80 600/130 /

ZQ-OM01401

-40 10 -20 -20 5 0 0 0 0.2 0.3 0.4 0.5 0 1 2 3 4 5 6 [MPa] [L/min (AMR) ] ZQ07A 0.43MPa -100 40 -100 35 -80 [L/min (AMR) ] -80 [L/min (AMR) ] 30 [kPa] [kPa] -60 25 -60 20 -40 -40 15 10 -20 -20 5 0 0 0 0 2 4 6 8 10 12 0.2 0.3 0.4 0.5 [MPa] [L/min (AMR) ] ZQ10A 0.43MPa -100 70 -100 60 -80 [L/min (AMR) ] -80 [L/min (AMR) ] [kPa] [kPa] 50 -60 -60 40 -40 30 -40 20 -20 -20 10 0 0 0

Support Guide/11-LEFG Series

(72) 39.4 28 3.5 3H9 (+0.025 0 ) depth 3 (37) A (Table traveling distance) 36 L 7 7 27 40 40 33 (40) 21.7 20 n x 3.5 Vacuum port M5 x 0.8 x 5 34 B D x 100 (= E) 100 F Dimensions [mm] Model L A B n D E F 11-LEFG16-S-50 144 57 130 4 15 11-LEFG16-S-100 194 107 180 11-LEFG16-S-150 244 157 230 11-LEFG16-S-200 294 207 280 6 2 200 11-LEFG16-S-250 344 257 330 11-LEFG16-S-300 394 307 380 8 3 300

High Vacuum L Type Valve

108 38 20 30 17 44 XLA-25-2 50 121 48 27 12 40 26 44 XLA-40-2 65 171 66 39 11 55 41 67 XLA-50-2 70 185 79 46 11 75 52 72 XLA-63-2 88 212 100 55 11 87 95 70 76 XLA-80-2 90 257 117 65 11 114 110 83 104 12 XL-OMS0001-B 6.

F/ISE

with female screw), Piping in backward direction None Nil NPT 1/4 (M5 with female screw), Piping in backward direction Bracket A G 1/4 (M5 with female screw), Piping in backward direction Optional A Input/output specifications 22 30 62 NPN open collector 2 output + Analog output Bracket D NPN open collector 2 output + Auto shift input Refer to the dimensions for the difference between brackets

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Mounting bolt X T MM L H D B RB08-X331 RB10-X331 RB14-X331 RB20-X331 RB27-X331 15 4.5 drill, 8 counterbore depth 4.4 32 M8 x 1.0 10 20 M4 7.5 5.5 drill, 9.5 counterbore depth 5.4 19 40 M10 x 1.0 12 25 M5 9.5 9 drill, 14 counterbore depth 8.6 25 54 M14 x 1.5 16 34 M8 12.5 11 drill, 17.5 counterbore depth 10.8 38 70 M20 x 1.5 22 44 M10 19 13.5 drill, 20 counterbore depth 13 50 80 M27 x 1.5

INFORMATION Modular Connection Type Residual Pressure Relief 3 Port Solenoid Valve For connecting to F.R.L. units AC25-A AC30-A AC40-A VP500 IN OUT VP700 Allows for space saving and reduced piping labor. Power consumption: 0.35 W (Without light) EXH Exam

Surge voltage suppressor (for D YS, D YZ) 2 locations 70 52 Light (for D YZ) 24.5 18 25.5 Bracket (Option) Pg7 18 83 Breathing hole (6.2) 48.6 42.2 90.4 41.9 Max.10 39.6 Manual override part 19.9 IN OUT OUT 2 1 IN EXH 3 EXH 40 2 x M5 x 0.8 thread depth 9 (for bracket mounting) Applicable cable O.D. 3.5 to 7 (24.5) 64.3 56.8 Details of manual override part (for manual operation) 38.5 7 Type