3 Port Solenoid Valve Metal Seal/Rubber Seal, Body Ported Series VQZ100/200/300 1

Plug Lead Unit Series VQZ100/200/300 Dimensions: VQZ200 Single unit Grommet (G): VQZ22(R)-G-C4/C6/M5 C4, C6, M5 C4: One-touch fitting for 4 2-3.5 mounting hole C6: One-touch fitting for 6 70 300 (Lead wire length) M5: M5 thread 22.5 29.5 19.3 R2.7 27 34 V100 A 11 15 SMC 2 8 Cover dia.1.6 Cross section 0.34 mm2 Manual override 3.5 20.5 SY 34 M3 x 0.5 External pilot port (Only external pilot

Fieldbus System

[4(A), 2(B) port] C8: 8 One-touch fitting C8 [1(P) SUP port] C3: 3.2 One-touch fitting C4: 4 One-touch fitting C6: 6 One-touch fitting M5: M5 thread 20.5 P = 10.5 34 L2 = L1 10.5 L3 = 10.5 x n1 + 65.5 L4 = L3 + 81 + 47 x n2 L5 = (L1 L4)/2 L6 = 10.5 x n1 + 45 L7 = 47 x n2 + 89.8 L1: DIN Rail Overall Length (mm) Valve stations (n1) I/O Unit stations (n2) 1 2 3 4 5 6 7 8 9 10 11 12 13 14

MU

BY 7 8 9 9 12 B 24 28 32 39 50 BX 9 6.5 8 10 11 ET M5 X 0.8 Depth 11 AL 19.5 23.5 27 32 32 BS 37 45 44 54 53 K 5.5 5.5 6 7 7 A 22 26 30 35 35 BT M5 X 0.8 Depth 7.5 M6 X 1 Depth 12 M6 X 1 Depth 11 M8 X 1.25 Depth 13 M8 X 1.25 Depth 11 M10 X 1.5 Depth 15 M10 X 1.5 Depth 14.5 M12 X 1.75 Depth 15 M12 X 1.75 Depth 18 Rod end female thread (mm) (mm) P M5 X 0.8 Rc(PT) Rc(PT) Rc(PT) Rc(PT) NY 26

LEC-OM07605CN

G3G4 :120V AC/DC :0.5A/4.8VDC :2.4VA 11 10 11. 11.2.4 (1) LEC-MR-RB-12 [mm] TE1 G3 G4 40 6 6 36 P 15 (6) 6 C 2 2.5 mm 2 (AWG 24 12) 0.2 mm : 0.5 0.6 [N m] 5 156 168 144 M5 : 3.24 [N m] TE1 1.1 [kg] 12 6 149 2 (20) 169 (2) LEC-MR-RB-032 [mm] TE1 6 6 30 G3 15 G4 P C 0.2mm(AWG24)2.5mm(AWG12) 0.50.6[N m] M5 3.24[N m] 5 0.5[kg] TE1 6 1.6 (20) 99 119 11 11 11. 11.3 (MR Configurator2

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

ass'y for 4 C4: One-touch fitting ass'y for 4 C6: One-touch fitting ass'y for 6 M5: M5 thread C6: One-touch fitting ass'y for 6 M5: M5 thread VQD 45.5 2.5 10.5 (5) 21.5 VZS Dimensions Equation L1=11n+20 n: Staion ( Max. 24 stations) 7.5 L n 1 31 50 60.5 2 42 62.5 73 3 53 75 85.5 5 4 64 87.5 98 6 7 8 11 9 10 12 29 18 VFS L1 L2 L3 75 86 97 108 141 119 130 152 100 112.5 125 125 162.5 137.5

VFS

12 11 12 10 11 11 12 11 11 6.3 6.8 12 12 12 12 10 11 10 10 11 11 6.5 6.8 0.18 0.15 0.18 0.15 0.18 0.18 0.16 0.15 0.22 0.22 2 position 3 position 40 or less 0.63 1,000 Single VFS4100 1 2 VFR 3 8 15 or less 0.75 Double VFS4210 VFS4200 1,200 1 2 3 8 1 2 3 8 1 2 3 8 1 2 VP4 Closed center Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16

Table Series MXP Dimensions MXP16/With Shock Absorber 2-M5 x 0.8 depth 8 Z 3 V K 6.5 Max. 15 11 M Stroke: S MXP16-20B Width across flats 12 A M8 x 1 H 24.3 17.1 14.4 40.8 MA 10.5 11 11 8.5 27.3 34 Operating port 2-M5 x 0.8 (Plug: M-5P) A 19 6.5 30 4-M6 x 1 Prepared hole dia. 5.1 4-M5 x 0.8 depth 7 32 0.05 W D B 80.05 47 13 Operating port 2-M5 x 0.8 J 8 Mounting reference planes B D 16.5

5 Port Pilot Operated Solenoid Valve VFS1000/2000/3000/4000/5000/6000 Series

12 10 11 11 12 11 12 6.3 6.8 12 12 12 12 10 11 10 10 11 11 6.5 6.8 0.18 0.15 0.18 0.15 0.18 0.18 0.16 0.15 0.22 0.22 2 position 3 position 40 or less 0.63 1,000 Single VFS4100 1 2 3 8 15 or less 0.75 Double VFS4210 VFS4200 1,200 1 2 3 8 1 2 3 8 1 2 3 8 1 2 Closed center 50 or less 0.82 VFS4310 600 VFS4300 Exhaust center 50 or less 0.82 VFS4410 VFS4400 600 Pressure center 50 or less 0.82

VEX1

cap screw (with spring washer) M5 x 0.8 x 10 (2 pcs.)

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SZ3000

11 11 23 11 23 SOL.A SOL.B SOL.B Light/Surge voltage suppressor Station 10 Station 10 SOL.A SOL.A 10 10 Light/Surge voltage suppressor Light/Surge voltage suppressor 15 15 15 SOL.B SOL.B SOL.B Station 2 Station 2 Station 2 2 2 SOL.A SOL.A SOL.A Light/Surge voltage suppressor Light/Surge voltage suppressor Light/Surge voltage suppressor 2 SOL.B SOL.B SOL.B 14 Station 1 Station 1 14 14 Station

LEC-OM02904

G3-G4 120V AC/DC 0.5A/4.8VDC 2.4VA 11 15 11 (4) (a) LEC-MR-RB-12 [mm] TE1 TE1 G3 36 40 6 6 G4 P 15 C 2AWG24~2.5mm 2AWG12 0.2mm 0.50.6[Nm] 0.2mm2(AWG24)2.5mm2(AWG12) 0.5~0.6[Nm] M5 3.24[Nm] M5 3.24[Nm] 5 TE1 1.1[kg] 6 149 2 (20) 169 (b) LEC-MR-RB-032 [mm] TE1 TE1 6 6 30 G3 15 G4 P C 0.50.6[Nm] 0.2mm2(AWG24)2.5mm2(AWG12) 2AWG24~2.5mm 2AWG12 0.2mm 0.5~0.6[Nm] M5 3.24[Nm] M5 3.24[

Speed Controller with Indicator Stainless Steel Type Elbow Type/Universal Type AS-FSG Series

)] Flow rate [L/min (ANR)] 06, 07, 08, 09, 10 06, 07, 08, 09, 10 01, 23, 03, 04, 06, 07 01, 23, 03, 04, 06, 07 08, 09, 10, 11 08, 09, 10, 11 03, 04 200 400 06, 07 TMH 02 01, 23 300 50 03, 04 ASD 100 200 01, 23 AS 100 AS-FE 0 0 0 5 0 10 5 0 10 5 0 10 KE Number of needle rotations Number of needle rotations Number of needle rotations Note) -U10/32 has the same specification as M5.

Vacuum

B M5 x 0.8 M4 xO.7 5-30 '11 20 32 2 6 7 8 1 7 2A 1 6 . 5 1 9 M5 x 0-8 N45 x 0.8 5-50 1 4 26 40 3 8 I 8 20 1 9 21.5 M5 x 0.8 N.45 x 0.8 5-50 t l ) . 5 1 8 32 50 4 1 0 1 0 1 0 20 22 43.5 22 1/8 (PT) 1i8 (PT) 5-50 1 9 5 22 40 5 1 l 1 2 24 29 5 1 . 5 22 23 i il : lModel I l ] H : H A L J KI L Mt\4 NA NB oP Q ] . , R i l : : S I sl L', . l Y r l lrye f Kqgq'l 26 5 1 4 M4 xO.7 5 M5 x 0.8 6 1 8

Vacuum

B M5 x 0.8 M4 xO.7 5-30 '11 20 32 2 6 7 8 1 7 2A 1 6 . 5 1 M5 x 0-8 N45 x 0.8 5-50 1 4 26 40 3 8 I 8 20 1 9 21 M5 x 0.8 N.45 x 0.8 5-50 t l ) . 5 1 8 32 50 4 1 0 1 0 1 0 20 22 43.5 22 1/8 (PT) 1i8 (PT) 5-50 1 9 5 22 40 5 1 l 1 2 24 29 5 1 . 5 22 23 i il : lModel I l ] H : H A L J KI L Mt\4 NA NB oP Q ] . , R i l : : S I sl L', . l Y r l lrye f Kqgq'l 26 5 1 4 M4 xO.7 5 M5 x 0.8 6 1 8 4.5

3 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported VQZ100/200/300

holes 70 300 M5: M5 thread 19.3 (Lead wire length) R2.7 22.5 29.5 SY A 11 15 27 34 SMC 2 Cover dia 1.6 Cross section 0.34mm2 8 3.5 20.5 SYJ Manual override 34 VK M3 X 0.5 External pilot port (Only external pilot style (R)) 2-2.7 Mounting holes 25 10 (C4, C6) (M5) VZ VT 2-M2.5 X 0.45 Thread length 4 9 9.2 VT 30 20 2.1 12.5 VP 2.5 5 5.2 4.1 28 2-3.2 Mounting holes VG 4.5 29.5 10 G(PF)1/16

One-touch Fittings Series KQ2

Nylon Urethane KQ2W23-M5 30 8 31 10 M5 0.8 8 9.6 37 43 10 17.5 15.5 38 42 19 2.8 2.4 41 1 8 KQ2W23-01S KQ2W23-02S 10 14 3.2 1 4 KQ2W04-M5 KQ2W04-01S 8 18 30 37.5 32 38.5 M5 0.8 11 3.0 3.0 8 10.4 1 8 4 16 4.0 4.0 23 14 10 10 1 4 KQ2W04-02S 43.5 42.5 38 11 26 KQ2W06-M5 KQ2W06-01S 30.5 40 33.5 42.5 M5 0.8 8 3 3 8 1 8 10 6 17 12.8 20 1 4 10 KQ2W06-02S 46 46.5 17 14 10.9 10.9 41 3 8 KQ2W06-03S

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Bl>llOws type ZPY10g 10 12 12 22 38 49 72 83 3 1,7 Mode~ M4 M5 M6 MB M5 M6 M8 M5 M6 Me /'.14 M5 M6 M8 ZPY13C U 13 1 5 121 ' 22 , ZPY02 1 \,1,11 \ ' 11 11 'E:o:.d' i&M' ZPIlB (lib,.,) II,.r,4,1 ~ 49 72 183 3, 1.8 ZPY16g 16 18 12.5 22.5 38.5 49.5 72.5 83,5 3.5 1.2 Deep type mm ZPY10 y Model F I>A, fe, c D E G c H ZPY13 I 25 25 25 !

Series CG1-Z 10-/11- ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 21-/22- Air Cylinder: Double acting, Single rod

Model Auto switch mounting Cushion Rubber Bore size (mm) Port size Lubrication Action Standard stroke Note 2) (mm) Long stroke (mm) Note 1) Note 2) Model Air 10-/21-CG120 10-/21-CG125 10-/21-CG132 10-/21-CG140 10-/21-CG150 10-/21-CG163 10-/21-CG180 10-/21-CG1100 11-/22-CG120 11-/22-CG125 11-/22-CG132 11-/22-CG140 11-/22-CG150 11-/22-CG163 11-/22-CG180 11-/22-CG1100 25, 50, 75, 100, 125, 150

EX120/121/122

10 9 8 8 9 10 11 1 + 2 + 3 + 4 + 5 + + 5 + 4 + 3 + 2 + 1 6 6 12 13 14 15 15 14 13 12 10 10 6 + 7 + 8 + 9 + 10 + + 10 + 9 + 8 + 7 + 6 PWR PWR 11 11 COM COM 15 15 11 + 12 + 13 + 14 + 15 + + 15 + 14 + 13 + 12 + 11 5A 5A 0V +24V +24V 0V 2 x M4 Mounting hole Shown with cover removed. 60 1711 Series EX510 Parts Description i w t Output Unit No.

MHF2

dimension table Unit: mm A B Model A C D B 25 MHF2-8DR 11 M3 x 0.5 37 5.5 MHF2-8D1R 61 MHF2-8D2R C 38 MHF2-12DR 14.8 M5 x 0.8 54 7 MHF2-12D1R 90 MHF2-12D2R 54 MHF2-16DR D D 19 M5 x 0.8 76 9 MHF2-16D1R (Finger closing port) (Finger opening port) 124 MHF2-16D2R 66 MHF2-20DR For dimensions not given above, please refer to the table of dimensions on pages 9 through 20. 94 M5 x 0.8 23 10 MHF2