Digital Gap Checker

20 Mounting and Installation 26 Piping 26 Installation 29 Installation Wiring 34 Part structure 38 Outline of setting 41 Measurement mode 42 Switch Point Setting 44 Switch point change mode 44 Table of default settings 44 How to use Preparation before setting 45 Setting 45 Function Setting 46 Function selection mode 46 Table of default settings 46 Key lock (Security code setting

Transfer

17 FF 6 6 6 FH 12 16 16 TA 7 12 12 TT Max. 16.5 Max. 20 Max. 25 Applicable cylinder ML2B25 ML2B32 ML2B40 D-X 717 ML2B Series Dimensions Side support A MY-SA 2 x G F E 2 x H A B C D Side support B MY-SB 2 x J A B C D A 61 70 87 B 75 84 105 C D E F G H J Part no.

Vacuum Regulator

Applicable model Indicated pressure range Unit display Scale range 100 to 0 kPa kPa 270 180 10 width across flats Pressure Gauge GZ33 Assembly P601010-12 GZ33-K-01 q w e Included Parts No. 1 2 3 30 Description Pressure gauge Gauge nut O-ring R 1/8 3 breathing port 9 1 to 3 are assembled before shipment. (17) 13 GZ43-K-01 Pressure Gauge GZ43 Assembly P601020-12 l12 q w e Included Parts No.

39

68 46 48 11 8 30 32 63.5 71.5 12 3.5 78.4 138.5 134 92 50 45 10 55 52 78 52 54 11 8 30 32 63.5 71.5 12 3.5 78 151 146.5 17 Series CKZ3T Dimensions Without switch XA (mm) Bore size (mm) XA 50 63 100.5 107.5 Metal cover type Leave sufficient space to open and close the metal cover when operating the manual release.

EXxx-OMY0004

VDC) 6 Unused Fixed at 0 7 US1 diagnostics 2 0: US1 present (> approx. 17.0 VDC) 1: US1 has dropped (< approx. 17 VDC) 46 No.EX##-OMY0004 9.1.2.2.

SFOD-OMT0010

Signal name Category (OUT0 output is turned ON) (2)(6)(10)(14)(18)(22) DRIVE (4)INP output is turned OFF. (1)(9)(17) Input IN0 (5)BUSY output is turned ON. (1)(9)(17) IN1 PLC (6)Turn the DRIVE input OFF. (19)(11)(3) OUT0 (19)(11)(3) (7)INP output is turned ON. OUT1 Output (23)(20)(15)(12)(7)(4) (8)BUSY output is turned OFF.

Parallel Style Air Gripper Series MHZ

when using the auto switch at the square groove. 410 Standard Type/Series MHZ2 Finger Option Side Tapped Mounting [1/N1] Through-holes in Opening/ Closing Direction [2/N2] 4 x MM through (Thread for mounting attachment) C C B A 4 x H through (Hole for mounting attachment) S S O O B A (mm) (mm) Model A 2.5 3 4 5 6 7 9 Model A 2.5 3 4 5 6 7 9 B 5 5.7 7 9 12 14 17 B 5 5.7 7 9 12 14 17 C 2 2

VXP21/22/23

$%&' 2 0 17-3-43 2 The VX series will be revised shortly. Series VXP21/22/23 Normally Closed (N.C.)

HRX-OM-X010

HRZ Series 8.1 Specification 8-17 8-17 HRX-OM-X010 Chapter 8 Appendix Serial RS-485 Table 8-8 Serial RS-485 Item Specification Connector No.

SFOD-OMT0009CN

*ALARM3 17 1) 7 N.C. *ALARM4 37 1) 27 N.C. -COM3 18 1) 8 N.C. -COM3 19 -COM3 38 1) 28 N.C. -COM4 20 1) 9 N.C. -COM4 39 1) 29 N.C.

EXxx-OMU0020EN

VDC) 1: US2 has dropped (< approx. 17 VDC) or not present 6 Reserved Fixed 0 7 US1 diagnostics 2 0: US1 present (> approx. 17 VDC) 1: US1 has dropped (< approx. 17 VDC) or not present 5.1.2.2.

VXD21/22/23

Refer to Glossary on page 17-3-15 for details of max. operating pressure differential and max. system pressure.

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ Type ）

Encoder cable type (2-wire, 4-wire) Correct the setting in the fourth digit of parameter No.PC04. selection was wrong in parameter setting. 17 Board error 2 CPU/parts fault Faulty parts in the driver Change the driver.

KS/KX

6 25.5 26.5 1 8 1 4 17 23 23 29 38 56 64 82 76 93 14 8.6 8.6 4 K 26 26.5 29.5 31 34 35 38 36.5 39.5 30 31 32 37.5 38 39.5 40.5 42 1 8 Applicable tubing M 17 15.2 26 18.5 6 1 4 3 8 1 4 3 8 1 2 3 8 1 2 8 17 21.6 14.9 Connection thread H 10 22 18.5 31.5 21 22 30.5 25.0 7 D 24 24 20.9 34 22 8 12 35.1 35.1 MS Reference dimensions after R thread installation.

Thermo-chiller/Rack Mount Type

] 59/60 59/60 61/64 61/64 Accessories18 Power supply connector, Particle filter element and maintenance handle19, Operation manual Weight10 [kg] 40 46 1 No condensation should be present.

VFS

14 16 17 9.0 9.0 9.0 VFS600 0.30 0.15 0.15 0.30 0.15 0.15 0.25 0.25 0.25 0.32 0.17 0.20 0.30 0.23 0.25 15 16 17 15 16 17 14 16 16 14 16 17 14 16 18 9.0 9.0 9.0 3.7 3.7 3.9 3.7 3.7 3.9 4.0 4.1 4.1 3.8 3.8 4.2 3.7 3.9 4.6 0.30 0.15 0.13 0.30 0.15 0.13 0.24 0.24 0.23 0.25 0.18 0.13 0.31 0.22 0.22 3 8 4.1 4.5 4.7 4.1 4.5 4.7 4.1 4.1 4.1 3.5 4.1 4.1 3.8 4.1 4.3 Single 1 2 3 4 VFS5100 VFS5110

VCA

LVQ LQ LVN TI/ TIL PA PAX PB 17-2-19

VXZ

Refer to page 17-3-65 for ordering a coil only.

VCC

Indication of A B C D E F G T VCKH1209-02F VCKH1008-02F VCKH1075-02F VCKH0806-02F VCKH0604-02F 12/9 13 38.5 10 19 17 18.5 9 to 12 Nm 10/8 11 38 9 17 17 18.5 6 to 9 Nm 1075 11 38 9 17 17 18.5 6 to 9 Nm 8/6 9 36.5 8 14 14 16 4 to 9 Nm 6/4 7 36.5 8 12 14 15 3 to 8 Nm VCKK 40 swivel elbow 40 B A 10 Approx. F D Width across flats 14 Tightening torque: Tighten within 10 1 Nm. Approx.

CJP

Symbol A A' Bore size (mm) NN MM K J H GB GA E D C CD B CK Q R 6 10 15 +0.040 0 3 M3 x 0.5 8 6 17 11 6 10.5 3 16.5 14 4 9 7 7 M10 x 1.0 0 0.5 17 +0.065 0 5 M4 x 0.7 8 7 20 17 6 13 5 20 15 6.5 12 8 10 M12 x 1.0 0 0.5 22 +0.065 0 6 M5 x 0.8 8 9 24 18.5 6 15.5 6 24.5 20 8 14 10 12 M14 x 1.0 Symbol Z S 5 st 10 st 15 st 20 st 30 st ZZ Bore size (mm) 5 st 10 st 15 st 20 st 30 st 5 st 10 st 15