ITV

M5 x 0.8 hole Built-in regulator EXH Built-in regulator EXH Solenoid valve EXH 1/4 (Rc, NPT) Port 3 (Exhaust port) 38.5 24 72 41 24 Port 3 (Exhaust port) 58 39 Port 2 (Output port) Port 1 (Supply port) 1/4, 3/8 (Rc, NPT) Port 1 (Supply port) 1/4, 3/8 (Rc, NPT) Port 2 (Output port) 36 36 4 x M5 x 0.8 depth 11 Bracket mounting hole Do not block three EXH ports on this product.

Stainless Steel 316

(mm) Connection thread R Note 1) L2 M Weight (g) A D L1 L1 Applicable tubing M KQGL04-M5 KQGL04-01S KQGL06-M5 KQGL06-01S KQGL06-02S KQGL08-01S KQGL08-02S KQGL08-03S KQGL10-02S KQGL10-03S KQGL12-03S KQGL12-04S 3.5 18 16 18.3 M5 x 0.8 4 18 10.6 20.5 4.2 20 19.5 1/8 20.8 D 10 A 3.5 25 17 20.5 M5 x 0.8 L2 6 18.8 9 26 20.5 23 13 1/8 22.1 H Connection thread 35 24.5 25 1/4 14 37 21.9 25.4 1/8 12

Vacuum

Thread dia. 6 8 10113 10 a o a a M4 x 0.7 16 a a o a o o a M5 x 0.8 20 o a a a o a M6 x 1.0 25 a a o o o MB x 1.25 32 o o a o o M'l0 x 1 .25 zcDuKc T.

High Power Cylinder Series RHC

(123) 20 8, 10 1/4 500 9.5 0 1,000 2,000 3,000 Maximum speed Vmax [mm/s] 50 12, 16 1/4, 3/8 1000 19 63 Composite effective area So [mm] Composite effective area So [mm] Composite effective area So [mm] 1500 2000 2500 3000 28.5 3/8, 16 3/8, 16 3/8, 16 1/2, 16 100 =0.7 38 47 0.5 56.5 0.1 0.3 50 10, 12, 16 1/4, 3/8 500 15 63 1000 1500 2000 2500 3000 30 3/8, 16 1/2, 16 1/2, 16 3/4, 16 3/4, 16

High Power Cylinder Series RHC

=0.7 2000 38 2500 47 0.5 3000 56.5 0.1 0.3 10, 12, 16 1/4, 3/8 50 500 15 63 1000 30 3/8, 16 1/2, 16 1/2, 16 3/4, 16 3/4, 16 0 1500 45 1,000 2,000 3,000 2000 60 Maximum speed Vmax (mm/s) 2500 75 80 3000 89.5 16 3/8, 1/2 500 24.5 =0.7 1000 48.5 3/8, 16 1/2, 16 3/4 3/4 3/4 3/8 1/2, 16 3/4 3/4 3/4 3/4 150 80 1500 72.5 2000 96.5 0.5 100 2500 120.5 0.1 0.3 3000 106 500 38 50 1000 75.5 1500 113

RHC

, 16 3/8, 16 1/2, 16 1500 2000 2500 3000 28.5 Composed effective area So (mm2) Composed effective area So (mm2) Composed effective area So (mm2) 100 RHC = 0.7 38 47 0.5 56.5 MK(2) 0.1 0.3 10, 12, 16 1/4, 3/8 50 RS Q G 500 15 63 RS H A 3/8, 16 1/2, 16 1/2, 16 3/4, 16 3/4, 16 1000 1500 2000 2500 3000 30 0 45 1,000 2,000 3,000 60 RZQ Maximum speed Vmax (mm/s) 75 89.5 80 MI W S 16 3/8, 1/2 500

Hydraulic Cylinder 7MPa Nominal Pressure Series CHN

S + Stroke ZZ + Stroke W I (mm) Effective thread length (mm) Bore size (mm) Stroke range (mm) A B1 B2 D E F GA1 GA2 GA3 GB1 GB2 GB3 H H1 H2 I 20 18 13 26 10 8 16 10 12 12 8 10 10 41 5 8 31 25 to 300 15.5 25 22 17 32 12 10 16 10 12 12 8 10 10 46 6 8 34 25 to 400 19.5 32 24 22 38 16 14 19 11 13 13 8 10 10 53 8 9 40 25 to 500 21 40 24 24 41 18 16 21 12 17 17 11 16 16 54 10 11 48 25 to 500 21

Fieldbus System

Digital Unit M12 connector (5 pins) M8 connector (3 pins) D-sub connector Spring type terminal block Input Unit 8 inputs 8 inputs 16 inputs 16 inputs 8 inputs 8 inputs 16 inputs 16 inputs 16 inputs 16 inputs Output Unit 8 outputs 8 outputs 16 outputs 16 outputs 16 outputs 16 outputs Input/ Output Unit 8 outputs 8 outputs 8 inputs/ 8 inputs/ 8 inputs/ 8 inputs/ 8 outputs 8 outputs IP67 IP67

0.55

Piping port Port size Series Model 3.2 4 6 8 10 12 16 4(A), 2(B) M5 VF1;20-;;1-M5 5(EA), 3(EB) M5 4(A), 2(B) 1/8 VF1;20-;;1-01 5(EA), 3(EB) M5 VF1;3;-;;1-M5 VF1000 4(A), 2(B) M5 VF1;3;-;;1-01 4(A), 2(B) 1/8 1(P), 5/3(R) 1/8 Type 30 manifold base 1(P) 1/8 Type 31 manifold base 5(EA), 3(EB) M5 Applicable tubing O.D.

Compact Cylinder with Air Cushion Series RQ

A A1 E1 L1 MM U1 L M8 x 1.25 M10 x 1.25 M14 x 1.5 M18 x 1.5 16 Y-G02 Y-G03 Y-G04 Y-G05 34 41 42 56 8.5 10.5 14 18 16 20 22 28 25 30 30 40 10.3 12.8 12 16 11.5 14 14 20 34 41 42 56 8.5 16 25 30 30 40 M8 x 1.25 10.3 11.5 21 I-G02 I-G03 I-G04 I-G05 8 10 18 22 8 10 10 14 8 10 18 22 8 10 10 14 IY-G02 IY-G03 IY-G04 IY-G05 +0.058 0 +0.4 +0.2 0.2 0.4 +0.058 0 20 10.5 12.8 14 25.6 20 M10 x 1.25 +0.058

reduces flow setting time

0.3 Note 1) 10-32UNF has the same specification as M5.

Round Type Low Pressure Hydraulic Cylinder Series CH
M

10 16 12 8 41 5 30 5 M8 x 1.25 13 26 19 15 M22 x 1.5 1/8 13.5 81 14 136 149.5 15.5 25 25 f8 to 800 22 17 10 16 12 16 12 8 46 6 32 5.5 M10 x 1.25 13 28 19 15 M24 x 1.5 1/8 14.5 81 15 142 156.5 19.5 32 31 f8 to 800 24 22 12 16 16 19 12 8 53 8 40 7.5 M14 x 1.5 13 36 19 15 M30 x 1.5 1/8 18.5 87 20 160 178.5 21 40 34 f8 to 800 24 24 12 24 18 21 14 11 54 10 48 7.5 M16 x 1.5 19 44 24 21 M33 x 2

180° Angular Style Air Gripper Series MHY2/MHW2

+0.052 depth 3 0 +0.2 +0.1 12 16 36 26 4 x M4 x 0.7 thread depth 5 M5 x 0.8 (Finger closing port) (Thread for mounting attachment) Auto Switch Mounting Groove Dimensions 41 30 12 18 4 4 5 M5 x 0.8 (Finger opening port) 20 9 6.45 6 MHW2-20D1 Right angle finger type 31 15 10 11 14 5 28 16 41 4 x M4 x 0.7 through (Thread for mounting attachment) 672 180 Angular Style Air Gripper Series MHW2

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16, (ø8: new addition, see 8-8-23 ) 1

/12/16 MXP6 Applicable bore size (mm) Auto switch model 6 10 12 16 Electrical entry from outside D-A9/A9V 5 3 (2.5) 5 3 (2.5) 5 3 (2.5) 5 3 (2.5) A A D-M9/M9V/F9W/F9WV Note) Figures in parentheses are the cases for D-M9, D-M9V switch types.

MXW

MXW20 M5 x 0.8 M4 x 0.7 MXW8 2.1 8 0 0 8H9 + 0.036 depth 9 5H9 + 0.030 depth 4.5 18.5 7.4 MXW25 M6 x 1 M5 x 0.8 MXW12 4.4 10 0 0 6H9 + 0.030 depth 5.5 M6 x 1 6.

Guide Cylinder/Compact Type Series MGC

, 125, 150 200, 250, 300 107 19 16 22 75 40 M8 x 1.25 depth 16 37 160 34.5 50 140 8.6 14 depth 10 M10 x 1.5 depth 18 142 25 19 22 110 45 M10 x 1.5 depth 20 42 194 37 80 170 10.5 17 depth 12 M12 x 1.75 depth 21 Bore size (mm) P Note 2) I J K L M N O Q R S T U V W X Y Z WH 20 25 32 40 50 60 80 86 80 25 44 38 25 M6 x 1 M5 x 0.8 21 12 26 12 40 36 30 140 23 30 52 70 95 46 32 M6 x 1 M5 x 0.8 21

CNG

25 2 104 10 (13) 26 7 11 7 12 8 47 Up to 300 301 to 800 20 to 300 301 to 800 Bore size (mm) 20 25 32 40 W J K KA MM NA PG PH PL S TA TB TC WA WB WH WW XA XB P 30 M5 x 0.8 M4 x 0.7 depth 7 5 6 M8 x 1.25 24 M5 x 0.8 21.5 2 65 141 (149) 11 11 88 15 (16) 23 5.5 3 12 30 M6 x 0.75 M5 x 0.8 depth 7.5 5.5 8 M10 x 1.25 29 M5 x 0.8 26.5 2.5 73 151 (159) 11 11 98 15 (16) 25 6 3 12 25 M8 x 1.0 M5 x

CNG

25 2 104 10 (13) 26 7 11 7 12 8 47 Up to 300 301 to 800 20 to 300 301 to 800 Bore size (mm) 20 25 32 40 W J K KA MM NA PG PH PL S TA TB TC WA WB WH WW XA XB P 30 M5 x 0.8 M4 x 0.7 depth 7 5 6 M8 x 1.25 24 M5 x 0.8 21.5 2 65 141 (149) 11 11 88 15 (16) 23 5.5 3 12 30 M6 x 0.75 M5 x 0.8 depth 7.5 5.5 8 M10 x 1.25 29 M5 x 0.8 26.5 2.5 73 151 (159) 11 11 98 15 (16) 25 6 3 12 25 M8 x 1.0 M5 x

Air Slide Table Series MXW

Width across flats 13 Operating port Rc 1/8 (NPT 1/8, G 1/8) 8 x M5 x 0.8 thread depth 13 Note) A Operating direction 6H9 + 0.030 0 depth 5.5 (Insert) 7 (Hexagon socket head taper thread plug) 48 98 72 41 10 8 25 40 40 40 Y Y Operating port Rc 1/8 (NPT 1/8, G 1/8) 41 160 B Operating direction 6H9 + 0.030 0 depth 5.5 (Hexagon socket head taper thread plug) 10.5 Operating direction B A 9.5

5 Port Solenoid Valve SY Series

M5 port block assembly Pilot valve assembly A Bracket Assembly No. B Description No. Caution 3 5 7 SX 000-16-1A (with mounting screw) 3 5 7 SY9000 has no bracket.