High Vacuum L Type Valve

52 71 XLFV-63-2 88 212 100 87 95 70 80.5 XLFV-80-2 90 257 117 114 110 83 90.5 Model K L M N S T XLFV-16-2 17.2 10.2 3.6 3.6 M5 M5 XLFV-25-2 21.4 10.2 3.6 3.6 M5 M5 XLFV-40-2 33.9 10.2 3.6 3.6 M5 M5 XLFV-50-2 35.3 12 4 2 Rc1/8 M5 XLFV-63-2 43.8 12 4 2 Rc1/8 M5 XLFV-80-2 59.8 12 4 2 Rc1/8 M5 11 XL-OMV0019 6.

Series VC, Direct Operated, 2 Port Solenoid Valve for Water, Series VCW

36.5 13.5 15 32 25 23 M5 24 59 46 57 60 54.5 48.5 101 57 68 1/2 22 45 89 41 11 17 36 22.5 23 M5 26 64.5 48 62.5 62 60 50.5 103 62.5 70 1/4, 3/8 VCW41 30 50 93.5 41 13.5 17 36 25 23 M5 26 66.5 48 64.5 62 62 50.5 103 64.5 70 1/2 35 60 101 41 17.5 17 36 30 28.2 M5 26 70 48 68 62 65.5 50.5 103 68 70 3/4 4 Direct Operated 2Port for Water Series VCW Dimensions (N.O.)

Speed Exhaust Controller Series ASV Size: M3, M5, 1/8, 1/4, 3/8 1

Port size ASV Model M3 x 0.5 ASV120F-M3 0.3 0.3 AK M5 x 0.8 ASV220F-M5 1.3 1.3 R 1/8 ASV310F-01 8 7 ASS R 1/4 ASV310F-02 8 7 R 1/8 ASV410F-01 14 13.5 ASR R 1/4 ASV410F-02 14 13.5 R 3/8 ASV410F-03 14 13.5 ASF R 1/4 ASV510F-02 27 23 R 3/8 ASV510F-03 29 27 R 1/2 ASV510F-04 29 27 10-32 UNF ASV220F-U10/32 1.3 1.3 NPT 1/8 ASV310F-N01 8 7 NPT 1/4 ASV310F-N02 8 7 NPT 1/8 ASV410F-N01 14 13.5 NPT 1

3-Screen Display High-Precision Digital Pressure Switch ∗1 ® New New The ∗1  Excluding the Z/ISE20B-L compatible type has been added to the 20B series.

female thread, R1/8, NPT1/8 R1/41, NPT1/41, G1/41, Rc1/8, URJ1/42, TSJ1/43 Copy function5, Auto-shift function5 Copy function, Auto-shift function 1 M5 female threaded 2 Face seal fitting 3 Compression fitting 4 1 output in SIO mode (NPN or PNP switching type) 5 This function is not provided with the IO-Link compatible type. 3-Screen Display High-Precision Digital Pressure Switch ZSE20B(

CV/MVGQ

A B C D F H HX MM NA NB ND S Z 90 [91] NN Bore size (mm) 10 8 0 0.022 10 0 0.022 15 12 14 4 8 28 35 M4 x 0.7 12.5 9.5 46 M8 x 1 91 [92] 16 15 18 20 5 8 28 41 M5 x 0.8 12.5 9.5 47 M10 x 1 10-15-7 Series CVJ5 Axial Foot Style (L) CVJ5L M5 x 0.8 M5 x 0.8 53.5 [54.5] 28 [34.5] M5 x 0.8 Manual override Width across flats B1 16 [17] S + Stroke Z + Stroke Mounting hole Rod End Nut H1 B1 Bore

Title not found

(800) 526-7661 M5 x 0.8 Series Fibre Gasket Supplied 1/4 Hex Typ 35/64 35/64 29/64 29/64 .085 29/64 83 M5-B2 1/2 M5-B1 M5-B2 M5-B3 M5-B4 15/32 1/2 11 32 11 32 11 32 9/32 13/64 9/32 13/64 13/64 3 5/16 Hex Typ 84 M5-LB4 M5-LB1 M5-LB2 M5-LB3 M5-LB2 1/2 1 15/16 11/16 11/16 11/16 3 3 1/4 Hex Typ 5/16 Hex Typ 85 M5-T1 M5-T2 M5-T3 M5-T4 M5-T2 1/2 See complete selection of adapters on pages

Low torque Metal seal type Rotary joint

Temperature rise is reduced by supply of air. 2 Series MQR * symbol indicates flange dimensions Dimensions/Standard Type, Flange Type MQR1-M5 Width across flats: 14 Width across flats: 7 (16.2) M5 x 0.8 14 5 21 34 (8) R1/8 M5 x 0.8 MQR2-M5 MQR4-M5 * 35 * 29 3 +0.1 0 M4 x 0.7 thread length 8 depth 10 5.5 2-M3 x 0.5 thread length 6 P.C.D.38 M5 x 0.8 thread length 10 0.03 * flange: MQR2-F (for

15

bolt Adjustment bolt P Shock absorber PB T PA R S ZZ PW Q QW R1 TT UU W Y1 Y2 Model NF NN adjustable range adjustable range Nil TN TF (Both sides: R1 x 2) (Both sides: Y1 + Y2) CY1SG6-Z RJ0604N M4 x 0.7 M3 0.5 25 25 49 52 16 1 7.5 15 42 10 14 M6 x 0.75 46 11.5 7.5 19 66 15 CY1SG10-Z RJ0806HN M8 x 1 M4 x 0.7 M5 0.8 25 38 61 60 24 1 5.5 11 47 12.5 16.5 58 14 10 24 76 24 CY1SG15-Z RJ0806LN

Compact Guide Cylinder

7.5 13 109 16 8 16 21 M6 x 1 15 M6 x 1 40 (32 x 2) 54 37 16 13 4 41 19.5 21 12 17.5 9 120 20.5 4 20.5 27 M8 x 1.25 20 M6 x 1 Bore size OA OB OL P PD PE PW Q R S T U VA WA X YY YL Z Nil TN TF Nil TN TF 20 (16 x 2) 4.3 8 3.5 M5 x 0.8 7.5 19 21 10 36 18 66 54 75 15.9 29 M5 x 0.8 7.5 4.5 25 (20 x 2) 4.3 8 4 M5 x 0.8 9.5 22 22 12 38 22 75 60 84 12.7 31 M5 x 0.8 7.5 4.5 32 (25 x 2) 5.4

Electric Actuator

Weight [g] D-M9N(V) D-M9P(V) D-M9B(V) Auto switch model Caution 0.5 8 8 7 Precautions 1 14 14 13 Lead wire length (m) 3 41 41 38 Fix the auto switch with the existing screw installed on the auto switch body.

ZSE30A(F)/ISE30A

12 ISA2 ISE35 PSE C4H C6H N7H IS One-touch fitting 4 mm 5/32 inch straight One-touch fitting 6 mm straight One-touch fitting 1/4 inch straight ISG 18 21.8 17.6 ZSM1 10.3 9.8 14 10 14 14 10.9 10.9 10.9 C4L C6L N7L One-touch fitting 4 mm 5/32 inch elbow One-touch fitting 6 mm elbow One-touch fitting 1/4 inch elbow 20.7 22.9 23.5 15.6 16.1 16.1 9.3 11.6 12 10.9 10.9 10.9 37 ZSE30A(F)/ISE30A

Shock Absorbers and Rate Controls

Porl llurnber Illodel (Rell t( IH 5A 5t lolt Sire vvr. (02,1 S;l Va-l2 4f2940056 (tRl0EM74 34 .50 2.25 1.63 5.0 sJ2th-12 M4E30r0056 {tR)otMl r ,41 .or 3.50 2.15 3h 20.0 5t[42x1.5 42940056 (rR)0E l.5 .34 .50 2.25 l-63 146 5.0 5tllt6dx2 M43010056 (tRl0tM2.0li{ .41 . n l 3.50 2.7 5 Yg 20.0 Sfll85x2 M{33300560 3.0fi .53 4.00 w 24.0 Sfiltl | 5x2 M437?

LJ1H

It will cause failure of the driver or its peripheral devices. 14. Do not use the product in an environment subject to a 5. If a danger against the personnel is expected due to an temperature cycle.

EXxx-OMY0004

Product Summary . 14 3.1. Features . 14 3.2. Structure . 15 3.3. Safe digital inputs and clock outputs UT1 and UT2 . 16 3.4. Safe power supply (outputs) . 20 4. General Specifications . 21 5. Power Supply Concept . 22 5.1. Power distribution . 22 5.2. Under-voltage detection . 23 6. Valve Manifold . 24 7. Installation . 25 7.1. Mounting . 25 7.2. Wiring . 27 8. Commissioning . 33 8.1.

Series VC, Series VCL, Direct Operated 2 Port Solenoid Valve for Oil

66.5 48 64.5 62 62 50.5 103 64.5 70 30 50 93.5 41 13.5 17 36 25 23 M5 8 1/2 119 26 26.5 70 48 68 62 65.5 50.5 103 68 70 35 60 101 41 17.5 17 36 30 28.2 M5 8 3/4 Note) For class H 4 Direct Operated 2 Port for Oil Series VCL How to Order Manifolds How to Order Manifold Assemblies (Example) VV2C L 2 02 01 Enter the valve and option models to be mounted under the manifold base part number.

5 Port Solenoid Valve, Body Ported Type/Flip Plug-in Unit, Series VQ1000

U side 1 2 3 4 5 6 7 8 n 2-C10 R(EXH) port DIN rail clamping screw EXH EXH SMC SMC SMC SMC SMC SMC SMC 2-C10 P(SUP) port R R X B B B B B B B B X P 49 P 31.6 9.5 24.5 16 A A A A A A A A (12) (7.5) 23 2n-C3, C4, C6, M5 C3: One-touch fitting for 3.2 C4: One-touch fitting for 4 C6: One-touch fitting for 6 M5: M5 threads 41 P = 16 Broken lines and dimensions inside ( ) indicate type [-D] (with

MHC2

When auto switches are used, through hole mounting is not available. 4-M3 x 0.5 (Thread for mounting attachment) Adjusting needle for finger speed M5 x 0.8 (Finger closing port) M5 x 0.8 (Finger closing port) 12-8-4 5 Angular Style Air Gripper Standard Type Series MHC2 Double Acting: Size 10, 16, 20, 25 MHC2-20 2-M5 x 0.8 thread depth 8 (Mounting thread) MHZ MHF 4-M5 x 0.8 thread depth 10

MHC2

When auto switches are used, through hole mounting is not available. 4-M3 x 0.5 (Thread for mounting attachment) Adjusting needle for finger speed M5 x 0.8 (Finger closing port) M5 x 0.8 (Finger closing port) 12-8-4 5 Angular Style Air Gripper Standard Type Series MHC2 Double Acting: Size 10, 16, 20, 25 MHC2-20 2-M5 x 0.8 thread depth 8 (Mounting thread) MHZ MHF 4-M5 x 0.8 thread depth 10

VQ4000

Polarity Lead wire color Dot marking Release valve SOL.A 1 1 () (+) Black None SOL.B 14 14 (+) () Yellow Black 1 station 1 14 1 2 3 Stations Pressure switch SOL.A 2 2 () (+) Brown None 2 U side 15 VQC SOL.B 15 15 (+) () Pink Black 2 stations 3 16 4 SOL.A 3 3 () (+) Red None SOL.A 17 D side 5 SOL.B 16 16 () (+) Blue White 3 stations SQ SOL.B 18 6 19 SOL.A 4 4 () (+) Orange None SOL.A 7 SOL.B

Sine Rodless Cylinder Series REBR Direct Mount Type

23.5 43 14.5 41 6.5 23.5 REBR32 19.5 11 6.5 3 1.5 35 10.5 16 55 53.5 55 52 29 54 20 51 7 29 K L LD M N P PW QW T TC W WP J x E Q MM Model REBR15 14 53 4.3 5 6 M5 x 0.8 32 18 21 17 25 M5 x 0.8 x 7 84 M4 x 0.7 REBR25 15 70 5.6 6 6.5 Rc 1/8 43 20 25.5 22.5 40 21.5 M6 x 1 x 8 105 M5 x 0.8 REBR32 13 76 7 7 8.5 Rc 1/8 54 26 33 28 50 27 M8 x 1.25 x 10 116 M6 x 1 X Y Z Model REBR15 18 54.5 98 REBR25