3 Port Solenoid Valve Series VQ100 1

x 0.8 (E port) VZ 2-M5 x 0.8 (P port) VS 43.5 A A VFN 20 (8.5) 1.5 5 (7.5) n-M5 x 0.8 (A port) 5 15 P = 10 38 n: Stations (Maximum 18 stations) Formula: L1 = 10n + 32 L2 = 10n + 43 Dimensions n L 2 3 4 5 6 7 8 9 10 L1 L2 (L3) (L4) (L5) 11 12 13 14 15 16 17 18 52 63 83 112.5 123 62 73 93 112.5 123 72 83 103 125 135.5 82 93 113 137.5 148 92 103 123 150 160.5 102 113 133 162.5 173 112 123 143

3 Port Solenoid Valve Series VQ100 1

AXT662-1(1: M5, 2: M3) 1 2 Sub-plate Optional parts Gasket, screw: VQ100-GS-5 Note) 1 set includes: 1 gasket and 2 screws. Purchasing order is available in units of 10 pieces. 4-12-9 10 Series VQ100 How to Order Valves VQ1 1 0 5 L M5 Series VQ Compact 3 port valve Port size Type of actuation Without sub-plate With sub-plate With sub-plate Nil M3 M5 1 N.C. (Normally closed) N.O.

Process Pump

AIR SUP (P1) Rc, NPT, G 1/8" (12.7) 119 106 13 79 39 14 FLUID IN 1/2" tube extension AIR SUP (P2) Rc, NPT, G 1/8" 59 110 Foot (Option) 611 PAF Series Dimensions: Air Operated Type (PAF3000 Series) With nut (with LQ1 fittings): PAF3413S-1S13 1S19 152 2 x M5 x 0.8 Thread depth 9 139 114 116 95 19 4 x 7 Bottom view of body FLUID OUT AIR SUP (P1) Rc, NPT, G 1/8" With nut 119 106 13 79 39 14

LJ1H

mm) Rolling Yawing m 200 L2 Mer 0 2 4 6 8 10 m Transfer load m (kg) 3000 a = 1000 2000 L3 (mm) L3 1000 a = 2000 m a = 3000 Mey a 0 2 4 6 8 10 Transfer load m (kg) Refer to page 145 for deflection data. 2 3 Standard Motor/Horizontal Mount Specification Series LJ1H10 Dimensions/LJ1H101PB Scale: 15% 10 6 Work piece mounting reference plane LJ1 LG1 LX LC6D/LC6C Switches LC1 80 5H10 depth 8 8-M5

ZB-OM00301

M5 Q1 +COM N.C.

3 Port Solenoid Valve Series VQ100

AXT662-1(1: M5, 2: M3) 1 2 Sub-plate Optional parts Gasket, screw: VQ100-GS-5 Note) 1 set includes: 1 gasket and 2 screws. Purchasing order is available in units of 10 pieces. 4-12-9 Series VQ100 How to Order Valves VQ1 1 0 5 L M5 Series VQ Compact 3 port valve Port size Type of actuation Without sub-plate With sub-plate With sub-plate Nil M3 M5 1 N.C. (Normally closed) N.O.

Electric Actuator with Integrated Guide Series LTF Series LTF Lead screw lead mm Mounting Series Guide type Motor type Model Page orientation Ground ball screw Rolled ball screw 6 10 6 10 LTF6 Page 60 to Horizontal 10 20 10 20 LTF8 Page 68 to Frame-type

alloy Mild steel Chromate Aluminum alloy Aluminum alloy Connector cable for sensor Carbon steel 92 Series LTF Mounting Top Mount LTF6 M5 bolt 2 5.5 or M5 2 x n x Mounting hole Pitch = 100 Mounting hole quantity n Quantity Stroke 100 2 4 200 3 6 300 4 8 A = (n 1) x pitch 400 5 10 30 500 6 12 600 7 14 LTF8 M6 bolt 3.5 2 x n x Mounting hole 6.6 or M6 Pitch = 100 Mounting hole quantity n n

MHZ2/MHZJ2

x 0.8 (finger closing port) 4-M3 x 0.5 (attachment mounting thread) M5 x 0.8 (finger opening port) Auto switch mounting groove dimensions 13 Auto switch mounting groove (both sides) 8 0 -0.05 4 7 7.5 2.1 19 4 11.6 In the case of single action, the port on one side is a breathing hole. 15 Parallel Type/With Dust Cover Series MHZJ2 MHZJ2-20 Scale: 60% 35 27.6 0.05 18.6 (34.6) 2-M5 x 0.8

Plug-in Unit

A (+) () () (+) 13 13 Station 7 Station 7 SOL. B SOL. B (+) () () (+) 14 14 Connector Manufacturers Example: SOL. A SOL. A (+) () () (+) 15 15 Station 8 Station 8 SOL. B SOL. B (+) () () (+) 16 16 Hirose Electric CO., Ltd. Sumitomo/3-M Limited Fujitsu, Ltd. Japan Aviation Electronics Industry, Ltd. J.S.T. Mfg. Co., Ltd. Oki Electric Cable Co., Ltd. SOL. A SOL.

Transfer

56 68 AA 106 133 164 BB 30 35 40 CC 16 19 23 DD 12 15 16.5 EE 14.5 16 22 FF 63.5 77.5 95 GG 22 27 35 HH 24 32 37 II 16 19 23 F 93.5 Model ML2B25 ML2B32 ML2B40 107.5 130.5 KK 15 16 17.5 LL 28 30.5 37.5 MM 16 21.5 24.5 NN 22 26 37.5 OO 9 9.8 23 PP 56 62.5 77 QQ 34.5 42 51 RR 37.5 45 54 MA M5 x 0.8 M6 x 1 M8 x 1.25 LA 11 12 14 MB M6 x 1 M8 x 1.25 M10 x 1.5 LB 9.5 16 15 MC M5 x 0.8 M6 x 1 M8

VCC

Qty. 1 6 11 2 7 12 3 8 13 4 9 14 5 10 15 2 port valve is specified for the gate valve and the cleaning valve. 7 valves + 1 valve + 4 valves = 12 valves 668

DOC1023125

Work piece fixed Maximum tightening Model Bolt size Max.thread torque [Nm] depth (mm) EQFS25 M5 x 0.8 3.0 8 EQFS32 M6x1 5.2 9 EQFS40 M8 x 1.25 12.5 13 Use screws with adequate length, but with length less than the maximum thread depth. The use of screws that are to long can touch the body and cause malfunction.

EtherNet/IP TM Compatible Fieldbus System

Same as Investigation method. 69 No.EX-OMS0014-A Fault No. 13 Fault Possible cause Investigation method Countermeasures Solenoid valves not operating correctly. Solenoid valve LED is ON. Solenoid valve failure Refer to the troubleshooting of the solenoid valve. Same as Investigation method.

VQ

35.1 32.4 H 43.5 43.3 W 44.8 38.9 H 32.2 37.2 Latching 16.4 12.5 VG 7.5 100V AC or more 12.9 P=10 n-M5 A port VP Equation: L1=10n+13 L2=10n+7 n: Station (Max. 20 stations) Dimenshions n L L1 L2 2 33 27 3 43 37 4 53 47 5 63 57 6 73 67 7 83 77 8 93 87 9 103 97 10 113 107 11 123 117 12 133 127 13 143 137 14 153 147 15 163 157 16 173 167 17 183 177 18 193 187 19 203 197 20 213 207 1 23 17 VQ

End Lock Cylinder Series CBG1

I J to 350 20 18 15.5 13 14 8 12.5 12 2 12 12 35 5 25.3 37 26 M4 x 0.7 depth 7 to 400 25 22 19.5 17 16.5 10 12.5 14 2 12 12 40 6 28.3 40 31 M5 x 0.8 depth 7.5 to 450 32 22 19.5 17 20 12 12 18 2 12 12 40 6 31.3 43 38 M5 x 0.8 depth 8 to 800 40 30 27 19 26 16 15 25 2 13 13 50 8 38.3 52.5 47 M6 x 1 depth 12 to 1200 50 35 32 27 32 20 16.5 30 2 14 14 58 11 44.5 58.5 58 M8 x 1.25 depth 16 to 1200

MGQ

Bore size Standard stroke (mm) MM YY L X K W J V H GA GB TA TB U G T F S DA R C Z NN Q B ML P PW YL (mm) 12 16 20 25 18 50 13 5 16 40 58 5 7.5 5 36 29 56 8 22 6 48 29 12 14 39 7 10, 20, 30, 40, 50, 75, 100 M4 x 0.7 10 M4 x 0.7 M5 x 0.8 7 M4 x 0.7 11 22 54 15 7 18 42 64 2.5 8 5.5 38 33 62 8 25 8 52 33 13 16 43 8 10, 20, 30, 40, 50, 75, 100 M5 x 0.8 13 M5 x 0.8 M5 x 0.8 5 M5 x 0.8 11 20, 30

Soft Start-up Valve

. -13- DIN Connector Part Nos.

Slider Type/Ball Bushing Bearing

x 0.8 M5 x 0.8 M6 x 1.0 L 106 108 138 LL 44 48.5 56 LW 71.5 75.5 86 M M5 x 0.8 M5 x 0.8 M6 x 1.0 MM 8 8 10 N 16.5 18 20.5 NL 15 15 18 NT 8 8 9 EA 26.5 26.5 29 CY1L CY1H15 CY1H20 CY1H25 CY1H CY1H Model P M5 x 0.8 Rc1/8 Rc1/8 PA 50 50 65 PB 62 65 75 PP 21 23 27 S 161 169 209 TW 65 70 75 W 88.5 92.5 103 XA XB Z 194 205 250 ZZ 17.5 19.5 23.5 CY1F CY1H15 CY1H20 CY1H25 CYP 11.3 9.5 D-X Technical

DOC1001322

P.5-12 (10) Compressor circuit High pressure side Displays the High pressure side of refrigeration circuit P.5-12 (11) Compressor circuit Low pressure side Displays the Low pressure side of refrigeration circuit P.5-13 (12) Circulating fluid electrical conductivity Displays the electrical conductivity. P.5-13 (13) Key lock condition display Displays the status of key lock settings.

High Vacuum Angle Valve

Rc1/8 XLAV M5: Port 1(P), 3(R) Rc1/8: Port 1(P), M5: Port 3(R) Weight [kg] XLA 0.28 0.47 1.1 1.7 3.1 5.1 XLAV 0.33 0.52 1.2 1.8 3.2 5.2 *1 Conductance is the value for the elbow with the same dimensions.