Rotary Table/

to the plate (also the same in case of a thicker plate) = m 2 r2 = m 5 2r2 = m 4 r2 = m 12 a2 + b2 !

CLQ

6 41.5 6.5 50 40 43.5 48 44.5 47.5 41 42 6 47 8.5 47.5 9 44.5 63 50 51 54 50 47.5 48.5 54.5 11.5 46.5 12 43.5 9 46 80 63 64 60 57.5 58.5 64.5 61 52 15 49 12 51.5 14.5 100 80 70 67.5 68.5 74.5 71 74 18.5 58 15.5 60.5 18 61 100 68.5 21.5 24 71.5 24.5 71 9-10-27 27 Series CLQ Operating Range Auto switch model Bore size (mm) 20 25 32 40 50 63 80 100 D-A7/F7H D-A73C D-A80/A80H D-A80C 12 11

CLQ

50 47.5 43.5 48 44.5 41 42 40 6 51.5 13 44.5 8.5 47.5 9 47 63 50 54.5 51 54 48.5 47.5 50 50.5 16 43.5 9 46.5 12 46 11.5 80 60 61 64 58.5 64.5 57.5 63 56 19 12 52 15 49 14.5 51.5 100 71 74 70 74.5 67.5 68.5 80 22.5 15.5 65 18.5 58 18 61 60.5 100 28.5 75.5 24.5 68.5 21.5 71.5 71 24 21 Series CLQ Auto Switch Connections and Examples Basic Wiring Lead wire colors inside [ ] are those prior to

Compact Cylinder with Lock Series CLQ

50 47.5 43.5 48 44.5 41 42 40 6 51.5 13 44.5 8.5 47.5 9 47 63 50 54.5 51 54 48.5 47.5 50 50.5 16 43.5 9 46.5 12 46 11.5 80 60 61 64 58.5 64.5 57.5 63 56 19 12 52 15 49 14.5 51.5 100 71 74 70 74.5 67.5 68.5 80 22.5 15.5 65 18.5 58 18 61 60.5 100 28.5 75.5 24.5 68.5 21.5 71.5 71 24 21 Series CLQ Auto Switch Connections and Examples Basic Wiring Lead wire colors inside [ ] are those prior

Series REC 10- ø20, ø25, ø32, ø40 11- Sine Cylinder

port 2 x 7 Mounting hole Relief port (mm) H G FZ FT E F FX FY AL A Bore size B2 24 22 22 18 D B B1 Stroke range 0 50 45 45 41 75 150 to 1000 150 to 700 150 to 700 41 32 32 26 14 12 10 8 16 13 13 13 5 4 4 4 12.5 11 10 10 19.5 19.5 15.5 . 40 40 34 17 17 13 60 60 60 40 32 25 20 20-0.033 FX 26-0.033 0 82 36 75 75 26-0.033 0 20, 25 and 32 22 200 to 1000 32-0.039 0 66 21 52 247 217 204 200 191

High Power Cylinder:

16 20 24 1500 2000 2500 3000 1,000 2,000 3,000 Max. speed Vmax (mm/s) Graph 3:40 40 8 10 1/4, 3/8 h=0.7 6 500 30 0.5 40 (3/8) 12 18 24 30 36 1000 1500 2000 2500 3000 3/8 12 3/8 12 3/8 12 3/8 12 3/8 12 0.1 0.3 20 10 Note) Refer to p.4.10-5 for max. absorbed energy since cushioning ability may in some cases exceed the allowable cushioning ability if the cylinder is used under high speeds and

PF-OMN0009_C

30 45.6 40.6 15.2 27 18 39 30 18 13.6 2.7 12 PF3W540 1/2 3/4 98 71 38 53.6 48.6 19.2 32 28 49 35 28 16.8 2.7 12 PF3W511 3/41 124 92 46 62.6 57.6 23 41 42 63 48 28 18 3.5 14 S T U V W WX Y Z PF3W504 24 22 32 40 50 4.5 5 1.5 PF3W520 28 22 32 40 50 4.5 5 1.5 PF3W540 34 30 42 48 58 4.5 5 1.5 PF3W511 44 36 48 58 70 5.5 7 2 -41No.PF-OMN0009CN-F PF3W521 2X A AA B DD E F G H J K L N P 11/4,11/2

IDG

Purge air flow rate (l/min(ANR))(3) 2.5 12 25 50 75 125 125 150 190 6 Inlet air pressure (MPa) 0.7 Part no.

VCA

VCA20-12-1A 41 52 30 40 4.5 6 VCA30-12-1A 48 56 36 44 5.5 7 VCA40-12-1A 50 62 38 50 5.5 7 3 Direct Operated 2 Port for Air Series VCA Dimensions Grommet: G Conduit: C Approx. 300 Approx. 280 Q F D Q F D G1/2 C R C R L IN E E Manual override A B B A 2-P Port size 2-P Port size Manual override 2 L K 2-M Thread depth 6 2-M Thread depth 6 K DIN connector: D Conduit terminal: T F F (Q) Q S 34

AC Servo Motor Driver (Pulse input type)

Driver Servo amplifier 24VDC (Note 4, 12) Controller (Note 7) Positioning module CN1 QD75D (Note 7) 21 DICOM CN1 (Note 2) Trouble (Note 6) 20 46 DICOM 48 ALM RA1 14 13 Zero speed detection CLEARCOM DOCOM 23 ZSP CLEAR CR 41 RA2 (Note 12) Limiting torque RDYCOM 12 25 TLC RA3 READY 11 RD PP PG NP NG 49 10 11 35 In-position 24 INP 15 16 RA4 PULSE F PULSE F 10m max. 17 PULSE R PULSE R 18 36 4

NCA1

8 2 1/2 1 7/8-12 3 3.125 1/2 1 1/2 3 7/16 5 7/8 3 1/4 6 5/8 10 1 3/4 1 1/4-12 2 2.375 3/8 1 1/8 3 1/8 7 1/8 4 1/8 7 1/4 10 2 1 1/2-12 2 1/4 2.625 3/8 1 1/4 3 1/4 7 1/8 4 1/8 7 3/8 10 2 1/2 1 7/8-12 3 3.125 1/2 1 1/2 3 1/2 7 1/8 41/8 7 5/8 12 2 1 1/2-12 2 1/4 2.625 3/8 1 1/4 3 1/4 7 5/8 4 5/8 7 7/8 12 2 1/2 1 7/8-12 3 3.125 1/2 1 1/2 3 1/2 7 5/8 4 5/8 8 1/8 12 3 2 1/4-12 3 1/2 3.75 1/2 1 1

Air Cylinder NCA1 Series

/8 8 2 1/2 1 7/8-12 3 3.125 1/2 1 1/2 3 7/16 5 7/8 3 1/4 6 5/8 10 1 3/4 1 1/4-12 2 2.375 3/8 1 1/8 3 1/8 7 1/8 4 1/8 7 1/4 10 2 1 1/2-12 2 1/4 2.625 3/8 1 1/4 3 1/4 7 1/8 4 1/8 7 3/8 10 2 1/2 1 7/8-12 3 3.125 1/2 1 1/2 3 1/2 7 1/8 41/8 7 5/8 12 2 1 1/2-12 2 1/4 2.625 3/8 1 1/4 3 1/4 7 5/8 4 5/8 7 7/8 12 2 1/2 1 7/8-12 3 3.125 1/2 1 1/2 3 1/2 7 5/8 4 5/8 8 1/8 12 3 2 1/4-12 3 1/2 3.75 1/2

Table of Contents

LXFH5 Without brake Direct acting guide 5 phase stepper 210 2 5 6 12 Without brake 218 LXPB2 2 phase stepper 2 5 6 12 With brake 226 LXP Ball bushing 2 5 6 12 Without brake 234 LXPB5 5 phase stepper 2 5 6 12 With brake 242 2 5 6 12 Without brake 250 LXSH2 2 phase stepper 2 5 6 12 With brake 258 High rigidity direct acting guide LXS 2 5 6 12 Without brake 266 LXSH5 5 phase stepper 2 5 6 12

2–4

A B Hs A B Hs Symbol 32 40 50 34 37.5 43.5 3.5 6 8.5 6.5 10.5 12 38 41.5 47.5 The dimension inside ( ) is for D-A72. 35 38.5 44.5 6.5 9 12 6.5 9 12 9.5 13.5 11.5 9.5 13.5 11.5 31.5 35 41 38.5 42 48 6 (6.5) 8.5 (9) 11.5 (12) 6.5 9 12 9 (9.5) 13 (13.5) 11 (11.5) 9.5 13.5 11.5 Bore size (mm) 9 Compact Cylinder/Guide Rod Type Series CQM The number of surfaces and grooves where an auto switch

44

16 20 24 27 38 41 51 37 41 50 41 45 57 42 43 53 72 78 KA 4 2.5 1.8 1.6 10 8 13.5 5 4 3 KQG2 2.3 2.6 Applicable tubing L1 M 6 4 6 10 10 15 5.8 3.3 KG H1 12 d 8 6 KFG2 KFG2 5.3 12 14 17.4 6.6 16 22.2 A L2 23 H2 MS 25.6 10 7.5 6.8 26 Connection thread 27.5 15 17 20.9 7.6 KKA 27 25.6 10 8 7.3 30 KP 27.5 27 25.6 12 9 8 LQ 35 27.5 16 17 23.5 8.5 34 MQR 25.6 12 10 9 44 27.5 31 32.9 T 16 13 79 12

3 Port Solenoid Valve, VQZ Series, Base Mounted and Body Ported

X A 2 10 24 1 P 3 R Manual override 34 41 3.5 (Lead wire length) 38.5 300 Cover diameter 1.4 Cross sectional area 0.2mm2 SMC 35.5 A port PE 16 12 7.5 7.5 14.5 7 7.5 1/8 NPTF P,A,R port M5 x 0.8 PE port L type plug connector (L): VQZ115(R)L -01T M type plug connector (M): VQZ115(R)M -01T 51.5 300 (Lead wire length) 60.5 300 (Lead wire length) Cover diameter 1.5 Cross sectional area 0.23mm2

CP95

38 51 10 21 18 26 31 32 10 6.6 7 8 40 11 12 41 54 10 24 22 28 35 36 11 6.6 9 10 50 15 12 50 65 12 33 30 32 45 45 12 9 11 12 63 15 16 52 67 14 37 35 40 50 50 15 9 11 12 80 18 16 66 86 18 47 40 50 60 63 15 11 12.5 14 100 18 20 11 76 96 20 55 13.5 50 60 70 71 15 19 Mounting style (CR): Head side clevis with ball joint A B C D EN ER F E L M N P H Bore size (mm) 0.2 max 0.2 H7 0.1 max H11 H13

CP95

46.5 63 5 6.5 45 15 9 18 21 51 4.3 4 32 16 25 75 12 56.5 80 5 10 45 18 11 22 25 65 4.3 4 36 20 30 95 16 72 100 5 10 55 18 11 22 41 20 32 115 25 75 6.3 16 89 4 Mounting style (ES) Bore size (mm) d3 CN S5 K1 K2 I2 G1 G2 G3 EN EU CH H6 ER 32 11 10 38 51 21 18 31 14 32 10 15 10.5 8.5 6.6 40 11 12 41 54 24 22 35 16 36 10 18 12 8.5 6.6 50 15 16 50 65 33 30 45 21 45 12 20 15 10.5 9 63 15 16 52

Refrigerated Air Dryers

IDF1E to 75E IDU3E to 75E p. 40, 41 Foundation bolt set For fixing the air dryer to the foundations. Easy to secure by striking the axle. Stainless steel IDF4E to 75E IDU3E to 75E IDF100F to 150F p. 41 Piping adapter For converting the thread type of an IN/OUT fitting for air dryers.

Series MXQ 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

Fittings & Tubing Air Cylinders Rotary Actuators 13 16.5 8.5 20 41 6.3 Operating port 2 x M5 x 0.8 Other dimensions are the same as basic type. 812 MXQ 1322Air Slide Table Dimensions: MXQ16 1322Basic Operating port 2 x M5 x 0.8 J I 12 Max. 12 (Retraction end adjuster) 5.5 Note 1) If long bolts are used, they can touch the guide block and cause malfunction, etc.