Series: 1 (VQZ1000), Stations: 11 Stations, Port Size: N3T (5/32" One-touch Fitting), Option: D (DIN Rail Mounting)

Series: 1 (VQZ1000), Stations: 11 Stations, Port Size: N3T (5/32" One-touch Fitting), Option: D0 (DIN Rail Mount w/o DIN Rail)

Series: 2 (VQZ2000), Stations: 11 Stations, Port Size: N3T (5/32" One-touch Fitting), Option: N (Name Plate)

Manifold Type: 42 (Base Mounted), Valve Stations: 11 Stations, A, B Port: N3T (5/32" One-touch Fitting NPTF)

Manifold Type: 42P (Base Mounted), Valve Stations: 11 Stations, A, B Port: N3T (5/32" One-touch Fitting)

Stations: 11 Stations, Port Size: N3T (5/32" One-touch Fitting), Option: None, CE Compliant: No

Piping: 41R (Base Mounted), Stations: 11 Stations, A, B Port: N3T (5/32" One-touch Fitting)

Stations: 11 Stations, Port Size: N3T (5/32" One-touch Fitting), Option: D (DIN Rail Mounting), CE Compliant: No

Stations: 11 Stations, Port Size: N3T (5/32" One-touch Fitting), Option: D0 (DIN Rail Mount w/o DIN Rail), CE Compliant: No

Body: 5 (Base Mounted), Stations: 11 Stations, Port Size: N3T (5/32" One-touch Fitting)

Series: 2 (VQZ200), Stations: 11 Stations, Port Size: N3T (5/32" One-touch Fitting)

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

127.5 160.5 11 2 4 105 to 400 15 to 35 24 32 50 32 20 to 100 80 120 14 120 160 14 2 4 105 to 500 M5 x 0.8 6.5 4 5 40 to 100 42 41 105 to 120 75 125 to 200 59 49.5 205 to 400 76 58 25 20 46 29 63 50 to 200 98.5 138.5 12.5 (13.5)* 138.5 178.5 12.5 (13.5)* 4 8 205 to 500 505 to 800 20 to 35 22 36 50 * L lead M6 x 1 8.5 5 6 40 to 100 36 43 105 to 120 80 125 to 200 53 51.5 205 to 500 70 60 32

Series MXS 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

11 5.5 B A 3.2 6.5 7 7 12 1 4 NN x M4 x 0.7 thread depth 8 B A 3H9 ( ) depth 2.5 +0.025 0 3H9 ( ) depth 2.5 +0.025 0 HA GA Section AA Section BB (mm) Model F 20 30 20 28 38 ZZ 64 74 84 106 122 M 42 52 62 84 100 Z 41.5 51.5 61.5 83.5 99.5 K 22.5 32.5 42.5 52.5 62.5 J 17 27 40 50 60 I 10 10 7 19 25 NN 2 2 3 3 4 H 25 35 20 30 24 G 6 6 11 13 17 HA 20 20 20 30 48 N 4 4 6 6 6 GA 11 21 31 43 41

CRB2/CRBU2/CRB1

8.5 9.5 10.5 10.5 0.004 0.012 0 0.043 12 5 15.5 0.5 M3 x 0.5 34 25 9 18 1.5 6 10 29 3.5 M3 x 0.5 21 3 29 36 48 11 10 11.5 11 0.004 0.012 0 0.043 14 6 17 34.5 M4 x 0.7 0.5 42 10 20 1.5 7 10 36 4.5 M4 x 0.7 26 4 36 44 59 M5 x 0.8 14 13 12 13 0.005 0.014 0 0.043 16 8 1 17.5 4.5 47.5 M5 x 0.8 50 13 22 2 8 12 43 5.5 M5 x 0.8 29 42 52 69 M5 x 0.8 15.5 14 41 Series CRBU2 Dimensions: 10, 15,

MXS

5.5 5.5 11 MY1 H (NN-1) X H G Cross section AA Cross section BB (mm) Model F 20 30 20 28 38 ZZ 48 58 68 90 106 M 42 52 62 84 100 Z 41.5 51.5 61.5 83.5 99.5 K 22.5 32.5 42.5 52.5 62.5 J 17 27 40 50 60 I 10 10 7 19 25 NN 2 2 3 3 4 H 25 35 20 30 24 G 6 6 11 13 17 N 4 4 6 6 6 HA 20 20 20 30 48 GA 11 21 31 43 41 MXS6L-10 MXS6L-20 MXS6L-30 MXS6L-40 MXS6L-50 3.11-29 Series MXS Dimensions MXS 8L

CL

11 10 10 14 14 13 14 11 11 11 12 5.5 7 7 9 38 41 41 41 86 96 97 105.5 20 24 24 24 5 6 6 8 19.5 24 24 24 141 151 154 169 33 38 39 44 M5 x 0.8 M6 x 0.75 M8 x 1 M10 x 1.25 Up to 200 Up to 300 Up to 300 Up to 300 0.25 stroke Long Stroke/Refer to pages 9-2-30 to 9-2-32 for mounting dimensions except the table below.

Compact Cylinder

Weight Unit: g Auto switch model 0.5 1 3 5 D-M9B(V) 7 13 38 63 D-M9P(V) 8 14 41 68 D-M9N(V) 8 14 41 68 Precautions Caution Lead wire length (m) Fix the auto switch with the existing screw installed on the auto switch body. The auto switch may be damaged if a screw other than the one supplied is used.

Stainless Steel 316 Fittings

3 P. 9 Metric Inch P. 5 P. 11 Metric Inch P. 6 P. 12 Straight Union KQG2H Extended Male Elbow KQG2W Union Y KQG2U Metric Inch P. 3 P. 9 Metric Inch P. 5 P. 11 Metric Inch P. 7 P. 12 Male Elbow KQG2L Different Diameter Tee KQG2T Metric Inch P. 4 P. 10 Metric Inch P. 5 P. 11 Female Connector KQG2F Metric Inch P. 7 P. 13 Male Branch Tee KQG2T Plug-in Reducer KQG2R Metric Inch P. 4 P. 10 Metric

CLQ

107.5 10 to 50 80 117.5 53.5 11 11 99 116 134 43 10 43.5 77 53.5 117.5 75, 100 53 126 10 to 50 Rod end nut L1 100 136 63 11 11 117 136 154 50 12 43.5 94 63 136 75, 100 Double clevis type: CLQD/CDLQD Double clevis type (mm) CT 4-N Cap bolt Stroke range Without auto switch With auto switch Bore size (mm) CD CT A A B CL B CL 10 to 50 75, 100 10 to 50 75, 100 10 to 50 75, 100 36 112 126 CD hole

Compact Cylinder with Lock Series CLQ

107.5 10 to 50 80 117.5 53.5 11 11 99 116 134 43 10 43.5 77 53.5 117.5 75, 100 53 126 10 to 50 Rod end nut L1 100 136 63 11 11 117 136 154 50 12 43.5 94 63 136 75, 100 Double clevis type: CLQD/CDLQD Double clevis type (mm) CT 4-N Cap bolt Stroke range Without auto switch With auto switch Bore size (mm) CD CT A A B CL B CL 10 to 50 75, 100 10 to 50 75, 100 10 to 50 75, 100 36 112 126 CD hole