CG1

22 26 M8 X 1.25 M10 X 1.25 M10 X 1.25 M14 X 1.5 M18 X 1.5 M18 X 1.5 M22 X 1.5 M26 X 1.5 24 29 M5 X 0.8 M5 X 0.8 Rc(PT)1/8 Rc(PT)1/8 Rc(PT)1/4 Rc(PT)1/4 Rc(PT)3/8 Rc(PT)1/2 69 (77) 11 11 11 12 13 13 M5 X 0.8 106 (114) 16 16 16 16 18 18 22 22 15 (16) Up to 200 201to350 23 30 19.5 10 (12) 40 69 (77) 111 (119) 15 (16) 16.5 20 26 32 38 50 60 M5 X 0.8 Depth 7.5 5.5 M6 X 0.75 Up to 300 301to400

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

52 70 83 G 41 63 68 72 98 H J K P.C.D L1 6-6.6 8-8.4 L2 XMD-25 XMD-40 XMD-50 XMD-63 XMD-80 50 65 70 88 90 16 20 20 20 20 7.5 15 17.5 19.5 26.5 P.C.D 58.7 P.C.D 92.1 C D XYD/In-line type G Fd C (K flange) J K H B S M 45 A Fn (KF flange) E K (mm) Model A 86.7 114 128 163 193 B 48 66 79 100 117 C 1 2 2 3 3 D 23.5 38 53 61 80 E 40 55 75 87 114 Fn 95 110 Fd 26 41 52 70 83 G 66 84 95 121

CA2

34 38.5 46.5 55 63 Hs 30 34 41 48.5 56 Ht 30.5 35 42.5 51 59 Hs 30 34 41 48.5 56 40 50 63 80 100 30 34 41 49.5 58.5 B 32 A Operating Range Bore size Auto switch model 40 8 50 7 63 9 80 9.5 100 10.5 D-Z7/Z80 D-A3/A44/A3C/A44C D-A5/A6 D-B5/B64 9 10 11 11 11 D-A59W D-B59W D-Y59/Y69/Y7P/Y7V/Y7W/Y7WV D-Y7BAL D-F5/J5/F5W/J59W/F5BAL/F5NTL D-F59F D-G5/K59/G5W/K59W/G5BAL/G5NTL/G59F D-G39/K39/G39C

MRHQ

18 6 21 9 5 5 23 34 Side A Side B 12-11-13 14 Series MRHQ Dimensions MRHQ16 A B 41 50 66.5 4-M5 x 0.8 depth 8 30 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 0 -0.062 47h9 +2.2 -0.2 20.9 opened 0 -0.1 5 41 +0.03 0 3-4H9 depth 6 (one each on three sides) 4-M3 x

CNG

x 0.8 M4 x 0.7 depth 7 5 6 M8 x 1.25 24 M5 x 0.8 21.5 2 65 11 11 15 (16) 23 30 3 12 151 (159) M6 x 0.75 98 6 5.5 8 M10 x 1.25 29 M5 x 0.8 26.5 2.5 73 11 11 15 (16) 25 30 3 12 M5 x 0.8 depth 7.5 154 (162) 99 6 M8 x 1.0 5.5 10 M10 x 1.25 35.5 Rc(PT) 1/8 26.5 2.5 73 11 10 (11) 15 (16) 28.5 25 3 12 M5 x 0.8 depth 8 169 (178) M10 x 1.25 107 8 6 14 M14 x 1.5 44 Rc(PT) 1/8 28 2.5 81 12 10 (12)

Cylinder with Lock Series CNG

x 0.8 141 (149) 88 5.5 M4 x 0.7 depth 7 5 6 M8 x 1.25 24 M5 x 0.8 21.5 2 65 11 11 15 (16) 23 30 3 12 M6 x 0.75 151 (159) 98 6 M5 x 0.8 depth 7.5 5.5 8 M10 x 1.25 29 M5 x 0.8 26.5 2.5 73 11 11 15 (16) 25 30 3 12 M8 x 1.0 154 (162) 99 6 M5 x 0.8 depth 8 5.5 10 M10 x 1.25 35.5 Rc(PT) 1/8 26.5 2.5 73 11 10 (11) 15 (16) 28.5 25 3 12 M10 x 1.25 169 (178) 107 8 M6 x 1 depth 12 6 14 M14 x 1.5 44

Compact Hydraulic Cylinder Double Acting/Double Rod Series CH
QWB ø 20, ø 32, ø 40, ø 50, ø 63, ø 80, ø 100

Example: M5 x 50l 4pcs.

CM2

20 33.5 5.5 M10 X 1.25 1to450 19.5 17 32 37 6 8 M26 X 1.5 120 40 10 15 30 62 22 13 41 7 4 60 25 75 8 45 26 34.5 37.5 5.5 M10 X 1.25 1to450 19.5 17 32 37 6 8 M26 X 1.5 122 40 12 15 64 22 13 41 7 4 60 32 75 8 45 26 21 47.3 7 M14 X 1.5 21.5 M32 X 2 42.5 46.5 1to500 22 41 8 10 154 52 14 88 24 16 45 7 5 66 40 36 82 11 50 32 With rod boot (mm) ZZ Symbol h l Stroke f e Bore 1 to 50 1 to 50 1

SMC Pneumatic Clean Series

14 C 130 121 119 114 ZZ 14 10 8 6 KA 78 79 77 77 S 16 12 10 8 D 25 18 14 12 E 2 2 2 2 F 40 32 25 20 30 22 22 18 23 0<23> 0 0 10 0 0 0 M5 x 0.8 depth 7.5 M5 x 0.8 depth 8 M14 x 1.5 M6 x 1 depth 12 12 12 1/4 1/4 3/8 1/2 58 58 27 27 32 41 14<12> 14<12> 10 10 10 10 23 20 20 20 11 11 58 72 20<17> 20<17> 16 16 71 71 13 16 89 110 7 7 10 10 55 69 80 100 10 10 10 10 32 38 50 60 150 150 182 182 18

Compact Guide Cylinder

175, 200 50.5 75.5 50.5 52.5 39 41 10 10 0 25 23 9 2.5 25 50.5 77 50.5 53.5 37.5 40.5 10 14 0 26.5 23.5 10 3 Bore size [mm] G GA GB GC H HA J K L MM ML NN OA OB OL P PA PB PW Q 100 st or less Over 100 st Nil TN TF 12 25 10 6 7 10 54 M5 12.5 12.5 17 M4 x 0.7 10 M4 x 0.7 4.3 8 4.5 M5 x 0.8 11.5 8 16 14 16 29 12.5 5.5 7.5 11.5 59 M3.5 14.5 14.5 20 M5 x 0.8 11 M5 x 0.8 4.3 8 4.5 M5 x 0.8 11.5

Rotary Table Series MSU

2-5.5 through Angle adjustment bolt 6 Adjustment: Max.10.2 2-M5 x 0.8 1.5 7 +0.030 0 3-4H9 long groove depth 3 ( A , B , C ) 4-M5 x 0.8 depth 10 B port A port 0.5 6g6 0.004 0.012 14h9 0 0.043 42 0 0.062 48h9 41 7 Rotary Table High Precision Type Series MSUA These drawings indicate the condition when the B port is pressurized.

Thermo-chiller

type 1.8 [1.0] 41 to 95 [5 to 35] (400 V as standard) HRSH090 Inverter type 0.18 [0.1] 41 to 104 [5 to 40] Indoor use (400 V as standard) UL Standards (To be obtained) (400 V as standard, 200 V as an option) Outdoor installation IPX4 HRSH Inverter type 0.18 [0.1] 41 to 95 [5 to 35] (200 V only as an option) 4 Thermo-chiller Standard Type Series HRS100/150 Circulating Fluid Temperature Controller

XM, XY

flange) (mm) Model A 75.8 102.5 119 B 48 66 79 C 1 2 2 D 23.5 38 53 E 40 55 75 Fn 26 41 52 G 40.5 57 70 H 21.5 30 35 J XYH-25 XYH-40 XYH-50 100.2 130 178 494 XMH, XYH Series Glossary 2 Shaft Sealing Method 1 Seal Materials Bellows Bellows offer cleaner sealing with reduced particle generation and less outgassing.

CQSY/CQ2Y/CM2Y/CG1Y/CA2Y

15 H1 M5 x 0.8 M6 x 1.0 L1 14 15.5 18.5 22.5 X 10.5 12 14 17.5 M8 x 1.25 M10 x 1.25 Basic Style (mm) Without auto switch With auto switch Bore size (mm) Stroke range (mm) A 25.5 25.5 29 32.5 C D E F H I K L M N OA OB Q RA RB T B 22 22 24.5 27.5 A 30.5 30.5 39 42.5 B 27 27 34.5 37.5 12 16 20 25 5 to 30 5 to 30 5 to 50 5 to 50 6 8 7 12 6 8 10 12 25 29 36 40 5 5 5.5 5.5 M3 x 0.5 M4 x 0.7 M5

CQSY/CQ2Y/CM2Y/CG1Y/CA2Y

D M E T Plain washer K B + Stroke L M A + Stroke E 20, 25 Rod end male thread H1 Rod end nut Note 2) C1 X L1 Rod End Male Thread Bore size (mm) 12 16 20 25 (mm) C1 9 10 12 15 H1 M5 x 0.8 M6 x 1.0 L1 14 15.5 18.5 22.5 X 10.5 12 14 17.5 M8 x 1.25 M10 x 1.25 Basic Style (mm) Without auto switch With auto switch Bore size (mm) Stroke range (mm) A 25.5 25.5 29 32.5 C D E F H I K L M N OA OB Q

Series CG1-Z 10-/11- ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 21-/22- Air Cylinder: Double acting, Single rod

200 201 to 1500 6 8 10 14 18 18 22 26 8 10 12 16 20 20 25 30 18 22 22 30 35 35 40 40 5 6 6 8 11 11 13 16 77 (85) 77 (85) 79 (87) 78 (87) 90 (102) 90 (102) 108 (122) 108 (122) 12 14 18 25 30 32 40 50 2 2 2 2 2 2 3 3 20 20 20 13 14 14 20 20 M5 x 0.8 depth 7.5 M5 x 0.8 depth 8 M6 x 1 depth 12 Up to 300 301 to 1500 M8 x 1.25 depth 16 M10 x 1.5 depth 16 M10 x 1.5 depth 22 M12 x 1.75 depth 22

Modular Type Filter Regulator Series AW

75 75 B 108 160 201 239 242 E 28 40 57 73 73 P 30 44 46 54 56 K 0 5 3.5 1.5 1.2 M 25 30 41 50 50 N 28 34 40 54 54 Q 4.5 5.4 6.5 8.5 8.5 H 26 63 66 76 76 G 25 40 55 80 80 Y 14 19 21 21 U 2 2.3 2.3 2.3 2.3 T 40 55 53 70 70 Z 6 7 7 7 W 18.5 28.5 38.5 42.5 42.5 B 125 177 242 278 278 V 18 30 31 35.5 37 J 27 30.5 38.5 38.5 S 6.5 15.4 8 10.5 10.5 AW10 AW20 AW30 AW40 AW40-06 M5 x 0.8 1/8, 1/4

Stroke Reading Cylinder and Counter

x 1.25 10 8 28 25.5 Q R T V Y N O P Bore size (mm) 12 20 M4 x 0.7 M5 x 0.8 47 7 53.5 22 7 5.5 M6 x 1 M5 x 0.8 50 15 62.5 36 5 For rod end nut accessory bracket, refer to page 658.

Series 12-CY3B ø6, ø10, ø15, ø20, ø25, ø32, ø40 ø50, ø63 Magnetically Coupled Rodless Cylinder

TF G 1/8 G 1/8 G 1/8 G 1/4 G 1/4 G 1/4 TN NPT 1/8 NPT 1/8 NPT 1/8 NPT 1/4 NPT 1/4 NPT 1/4 Nil M3 x 0.5 M5 x 0.8 M5 x 0.8 Rc 1/8 Rc 1/8 Rc 1/8 Rc 1/4 Rc 1/4 Rc 1/4 12-CY3B6 12-CY3B10 12-CY3B15 12-CY3B20 12-CY3B25 12-CY3B32 12-CY3B40 12-CY3B50 12-CY3B63 25 30 35 50 50 50 60 60 70 10 16 19 25 30 40 40 60 70 16 16 78 81 103 132 137 156 182 180 192 d C H B H 4 4 8 8 10 B 8 14 26 32 41 C 9.2 16.2

Compact Type

2 2-8 counterbore with depth 4.3 2 2-5.5 through 2 2-9.5 counterbore with depth 5.3 2 2-6.5 through 2 2-11 counterbore with depth 6.3 2 2-6.5 through 2 2-11 counterbore with depth 6.3 2-M4 0.7 with depth 6 15 2-M5 0.8 54 19 70 52 17 8.5 42 25 5 10 2.5 20 8 9.5 38 57.5 9 2-M4 0.7 with depth 6 20 2-M5 0.8 62 24 84 60 22 11 50 29 6 12 4.5 25 10 12 45 67.5 9 2-M5 0.8 with depth 7.5