Speed Controller with

L4 Note) Weight (g) 5 5.5 6.5 8.5 9.5 19 22 35 38 52 86 95 Model Applicable tube O.D. d AS1002F-01 AS1002F-03 AS1002F-07 AS2002F-03 AS2002F-07 AS2052F-07 AS2052F-09 AS3002F-07 AS3002F-09 AS3002F-11 AS4002F-11 AS4002F-13 MIN.

LEC-OM071xx

bits) Reference 0003H unit Position error (upper 32 bits) Reference 0004H unit unit Encoder count (lower 32 bits) Reference 000AH Count value of the actually driven motor encoder Encoder count (upper 32 bits) Reference 000BH unit unit FPG count (lower 32 bits) Reference 000CH Count value of the actually driven external encoder FPG count (upper 32 bits) Reference 000DH unit Pn824 Pn825

ARM10/11

58 68 69 70 75 76 77 82 83 84 06 07 08 18 19 20 25 26 27 32 33 34 3.

ARM10/11

58 68 69 70 75 76 77 82 83 84 06 07 08 18 19 20 25 26 27 32 33 34 3.

Compact Manifold Regulator

IN/OUT Piping Position IRV Metric size Inch size Position IN side OUT side VEX IN side Straight 4 6 OUT side IN side Straight OUT side Mounting position Mounting position Bottom Top Bottom Top Symbol Elbow Straight Elbow 4 6 Elbow Straight Elbow Fitting type Symbol Fitting type Symbol 1 2 3 4 4 6 4 6 5/32 1/4 5/32 1/4 5/32 1/4 5/32 1/4 SRH 06 07 08 18 19 20 25 26 27 32 33 34 56 57 58 68 69

LVQ

Metric sizes Inch sizes Body Class Type LQ-GP J PAX 3 03 03 10 10 10 12 12 12 19 19 19 25 25 1/8" 03 03 03 03 3/16" 05 05 1/4" 07 07 07 3/8" 11 11 1/2" 13 13 3/4" 19 19 1" 25 4 04 04 04 04 6 06 06 06 8 08 Insert pin holder assembly (with the parts case) Type Insert pin/ Holder type 1 2 1 2 3 4 5 6 J PB Insert pin material (J/K type only) Nil N Metric sizes Inch sizes Nil S Resin

Tamper Proof Speed Controller with One-touch Fitting Series AS


1F-T Elbow Type/Universal Type

Elbow Universal 2 3 Metric size Inch size 3.2 23 01 1/8" 04 06 08 10 12 03 05 07 09 11 13 4 5/32" 6 3/16" Control 8 1/4" Meter-out Meter-in 0 1 10 5/16" 12 3/8" Use 1/8" tube. 1/2" M5 Port size With One-touch fitting M5 x 0.8 R 1/8 R 1/4 R 3/8 R 1/2 10-32 UNF NPT 1/8 NPT 1/4 NPT 3/8 NPT 1/2 01 02 03 04 U10/32 N01 N02 N03 N04 Needle Valve/Flow Characteristics AS1201FG, AS1211FG AS2201FG-

Speed Controller with

Inch Size Holder for speed controller Applicable tubing 01 03 07 09 11 13 1/8" 5/32" 1/4" 5/16" 3/8" 1/2" AS1002Fm TMH-01J TMH-03J TMH-07J AS2002Fm AS2052Fm TMH-07 TMH-09 AS3002Fm TMH-10 AS4002Fm TMH-13 Tubing size Applicable model Dimensions Part no.

7ND9071en

-07, ISA 60079-107, ISA 60079-31-2009, ANSI/IEC 60529:2004 Ui 32 V Class I, Div 1, Groups B, C, D; Class II, Div 1, Groups E, F, G; Class III; T4T6, Enclosure type 4X Ex d IIC T4T6 AEx d IIC T4T6 Ex tb IIIC T100 C IP66 AEx tb IIIC T100 C IP66 Japanese Ex-d Certification: ND_E4 II 2 G Ex d IIC T6 Gb II 2 D Ex tb IIIC T80C Db Input: Ui 30 V Output: Ui 30 V, Pmax = device limits itself. 7

AC Servo Motor Driver (Pulse input type/Positioning type ）

Recommended branch connector: BMJ-8 (Hachiko Electric) 7. n 32 (Up to 32 axes can be connected.) 8. RS-422/232C conversion cable DSV-CABV (Diatrend) 14 4 14.

Flow Control Equipment

Millimeter Inch With One-touch fittings 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 01 03 05 07 09 11 4 6 8 10 12 04 06 08 10 12 Thread _ Meter thread (M5) Unified thread (10-32 UNF) R(PT) N NPT Port size M5 X 0.8 10-32UNF 1/8 1/4 3/8 1/2 M5 U10/32 01 02 03 04 AS ASN AQ ASV Needle Valve/Flow Characteristics AK ASD230F ASD330F ASD430F ASS 100 200 400 1.5 6 3 07, 08, 09, 10, 11 Effective area (mm2) Flow

Compact manifold regulator ARM5 Series

IN/OUT Piping Position SRF Metric size Inch size Symbol Pressure gauge Note) Configuration ITV 4 6 4 4 6 6 4 6 Straight Elbow Straight Elbow OUT side Straight Elbow Straight Elbow OUT side IN side IN side Mounting position Mounting position Fitting type Fitting type IC 5/32 1/4 5/32 5/32 1/4 1/4 5/32 1/4 Nil Symbol Symbol None 06 07 08 18 19 20 25 26 27 32 33 34 56 57 58 68 69 70 75 76 77

IIIIIII

(NOM.M5) 1/c'.PE10-32(NOM.

Mechanical Valves Series NVM, NVFM, NVZNI

(NOM.M5) 1/c'.PE10-32(NOM.

Vacuum System Peripherals:

32 e Valve Model Fill in the blanks below with symbols of necessary specifications.

Valve Mounting Direction: Solenoid on the Side Opposite to A,B Ports, Piping: 20 (5 Port/Body Ported Common SUP Common EXH), Stations: 7 Stations

Valve Mounting Direction: Solenoid on the Side Opposite to A,B Ports, Piping: 5 Port/Body Ported Common SUP Common EXH, Stations: 7 Stations, A B Port Size: -, P R Port Thread: -

Piping: Body Ported/Common SUP Common EXH, Stations: 7 Stations, A, B Port: -, P R Port Thread: -

1/8" Polyurethane Tubing 50 ft. - Black TIUB-01-B-100-MW 1/8" Polyurethane Tubing 100 ft. - Black TIUB-03-B-50-MW 5/32" Polyurethane Tubing 50 ft. - Black TIUB-03-B-100-MW 5/32" Polyurethane Tubing 100 ft. - Black TIUB-07-B-50-MW 1/4" Polyurethane Tubing 50 ft. - Black TIUB-07-B-100-MW 1/4" Polyurethane Tubing

1/8" Polyurethane Tubing 50 ft. - Black TIUB-01-B-100-MW 1/8" Polyurethane Tubing 100 ft. - Black TIUB-03-B-50-MW 5/32" Polyurethane Tubing 50 ft. - Black TIUB-03-B-100-MW 5/32" Polyurethane Tubing 100 ft. - Black TIUB-07-B-50-MW 1/4" Polyurethane Tubing 50 ft. - Black TIUB-07-B-100-MW 1/4" Polyurethane Tubing