Integrated Controller

Model Screw size Max. tightening torque [Nm] A [mm] L [mm] EQFS16 M3 0.6 3.5 23.5 EQFS25 M4 1.5 4.5 24 EQFS32 M5 3.0 5.5 30 EQFS40 M6 5.2 6.6 31 Body mounting Maintenance Warning Body mounting reference plane For housing B bottom Maintenance frequency Positioning pin (Reference plane) Perform maintenance according to the table below.

Compact Hydraulic Cylinder Series CH
KGB

8 58 11 81 1/4 24 10 24 63 20 depth13 90 77 13 35.5 30 M27 x 3 33 9 69 13 100 1/4 27.5 10 27.5 80 23 depth 15.2 105 88 17 45 41 M30 x 3.5 36 14 86 15 121 3/8 31 15 31 100 26 depth 17.5 132 106 26 56 50 M39 x 4 45 21 106 17 146 3/8 36 15 36 Note) Body dimensions are the same with or without auto switches.

Modular Type Air Filter Series AF

Note 2) When the compressor oil mist discharge concentration is 30mg/m3 (ANR). Accessory part no. Accessory Applicable model AFD20 AFD30 AFD40 AFD40-06 AFD40 Note 1) Bracket assembly AF20P-050AS AD27 AF30P-050AS AD38 AD38NNote 3) AF40P-050AS AD48 AD48NNote 3) AF40P-070AS AD48 AD48NNote 3) N.O. N.C.

IZx-OMV0005

(Mounting angle adjustable range) Pivoting bracketIZN10-B2 (Mounting angle adjustable range) 2 x Hexagon socket head cap screw M3 x 16 (Accessory) 30 Doc. no.IZ-OMV0005 DIN rail mounting bracketIZN10-B3 (Mounting angle adjustable range) 40o 2 x Hexagon socket head cap screw M3 x 6 (Accessory) Pivot mounting Inward mounting (Mounting angle adjustable range) 31 Doc. no.IZ-OMV0005 Power supply

Free Mount Cylinder for Vacuum Series ZCUK

(mm) DQ HQ HP Model Applicable pad model Note) ZPU-X11 ZC(D)UKD10 ZC(D)UKR10 SP 4 6 8 10 13 16 20 25 32 40 50 10 16 25 40 6 8 10 13 16 20 25 32 40 50 12 18 32 13 7 32 13 9 12 15 18 31 12 2. 6 26 10 2. 6 31 12 4. 8 26 10 4. 8 31 12 7 26 10 7 31 12 9 26 10 9 12 15 18 ZCUK DQ HQ HP AMJ ZP ZC(D)UKD16 ZC(D)UKR16 AMV DQ HQ HP ZC(D)UKD20 ZC(D)UKR20 ZP 53 15 36 16 37 28 20 44 43 29 16 37 53 38

Brake mechanism added

30 36 15.5 52 14 19 21 31 76 25 16 M12 x 1.75 11 198 17 Without rod boot With rod boot Bore size (mm) MM N NN P S W l H ZZ e f h ZZ 40 50 63 80 100 M14 x 1.5 27 161.5 1/4 218.5 8 51 280.5 43 11.2 59 288.5 M18 x 1.5 30 175.5 3/8 235.5 0 58 304.5 52 11.2 66 312.5 1/4 M18 x 1.5 31 187 3/8 254 0 58 326 52 11.2 66 334 stroke M22 x 1.5 37 205 1/2 284 0 71 372 65 12.5 80 381 M26 x 1.5 40 214 1/

Low Profile Slide Table Series MXF

x 0.5 MXS 3H9 +0.025 0 depth 3 Note) F (Equal pitch) N x M3 x 0.5 thread depth 6.5 (Insert) 6 A 4 4.7 MXQ 48 6 10.5 35 MXF 14 21 31 20.5 MXW 13 18 3H9 depth 3 +0.025 0 3H9 depth 3 +0.025 0 58 MXJ 4 x 3.2 4 x 6.5 15 9.5 MXP MXY 4.5 4.7 2 x M3 x 0.5 thread depth 6 A G H 4 x M4 x 0.7 8 MTS Section AA Operating port 2 x M3 x 0.5 M 8 N 2 ( 1): The number of pitches 0.3 15 (Table length) 16

IDX-OM-W014

R 11 R 11-1 11-2 1 AC100V AC200V, AC230V INOUT IDU3E/4E/6E-10-R IDU3E/4E/6E-20/23-R (A) 10 5 (mA) 30 11-3 M5 9.5mm 2 1.25mm L ,N N L () () IDU Series 11-1 11 1 IDX-OM-W014 11 R AC100V M4 () AC200V, AC230V (M3) 11-4 () () ONOFF 11-5 1-1 IDU Series 11-4 11 2 IDX-OM-W014 12.S 12 S IDU3E/4E/6E-10 12-1 IDU Series 12-1 12-1 IDX-OM-W014 12.S 12-2 L N PE M3 6.5mm 2

E-MY2B_E_A

Mounting screw(M3) Tightening torgue 0.5 to 0.7Nm A DIN rail mount bracket fig. 3 When setting to DIN rail, place A of fig. 3 into DIN rail. While pushing it, fix it by the clamp of screw in fig. 4. Inadequate pushing may cause falling of parts.

1

Close High Vacuum Solenoid Valve XSA Series Dimensions: (Rc, NPT) Female Thread Grommet: G Female thread type D 300 G F C H E P Fitting size 2 1 Q B 2 x M5 thread depth M A Q Grommet: GS Flat terminal: F Conduit: C 11 G F 300 G F 280 G F Terminal part Flat terminal connector 11 23 9 H C 15 6.5 H C H C G1/2 Terminal: T DIN terminal: D Applicable cable O.D.: 6 to 12 G F G F Width across flats

Modular F.R.L. Units

Note 11) : For thread type: NPT only.

Stroke Reading Cylinder and Counter

OFF OFF 1 ON OFF 2 Binary Output OFF ON 3 ON ON 4 31 point preset output is possible without bank switching, by means of binary system output from a 5 point output terminal. Cylinder stop output is used as the readout release signal. 31 30 4 When the count value coincides with preset no. 3. 3 2 1 Preset no.

CXWM/CXWL

Theoretical Output (N) Made to Order Specifications (For details, refer to page 8-31-1.)

Series PF2D Digital Flow Switch For Deionized Water and Chemicals

1 q t i 48 Series PF2D Dimensions: Remote Type Sensor Unit PF2D504-11/520-13 60 70 176 40 15 A Model PF2D504 PF2D520 9.52 12.7 62 52 42 A Internal circuits and wiring examples z to , are the terminal numbers. 4-4.5 Display unit (PF2D30/31) Sensor unit 52 1 Brown 6 2 Analog output Switch output or Pulse output Main circuit Main circuit 8 4 Load + 12 to 24 VDC White 7 3 Black 5 1 Blue 18

Angular Air Gripper Series MHC2/MHCA2/MHCM2

M3 x 0.5 Finger opening port 4 0.005 0.025 1.6 7 M3 x 0.5 Finger closing port 18 In the case of MHC2-6S, finger opening port is a breathing hole. 8 Series MHC2-6/MHCA2-6 Dimensions MHCA2-6 (Short body) 2-M2 x 0.4 thread depth 4 (Mounting thread) 4-M2 x 0.4 through (Attachment mounting thread) 5 10 Attachment mounting limiting range 16 11 2-M3 x 0.5 through Prepared hole dia. 2.6 through

Electromagnetic Digital Flow Switch

Lead wire and M12 connector (31) (24) (45) Brown Cable Specifications (3000) (30) White Conductor Nominal cross section area AWG21 External diameter Approx. 0.9 mm 3: Blue 4: Black Blue Insulator Material Non-lead heat resistant PVC Pin no.

Series 12-CY3B ø6, ø10, ø15, ø20, ø25, ø32, ø40 ø50, ø63 Magnetically Coupled Rodless Cylinder

14 14 H 13.5 12.5 13 20 20.5 22 29 33 33 I 28 34 40 50 58 72 J 4.5 4.5 6 6 8 8 10 12 12 N 9.5 11 11 18 18.5 20 26 25 25 Q NN S 62 63 83 106 111 124 150 176 188 K 5 4 11 8 10 15 16 25 26 V A 4 4 4 8 8 8 10 T C 8 14 14 26 32 32 41 L 35 38 57 66 70 80 92 110 122 MM NA 10 14 17 24 30 36 46 55 69 Model 12-CY3B6 12-CY3B10 12-CY3B15 12-CY3B20 12-CY3B25 12-CY3B32 12-CY3B40 12-CY3B50 12-CY3B63

Dedicated Controller

T-brackets T-nuts Model LC1-1-L5 (Weight: 16.0g) Model LC1-1-L3 (Weight: 15.5g) M (Weight: 10.0g) M5 M3 17.5 17.5 17.5 7.5 18 12 11 M Model 20 7.5 7.5 21 LC1-1-N3 M3 x 0.5 29 30 LC1-1-N5 M5 x 0.8 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Controller Connectors

SI unit for EtherNet/IP TM

No.EX-OMX1001 PRODUCT NAME SI unit for EtherNet/IPTM MODEL / Series / Product Number EX260-SEN2-X205 Table of Contents Safety Instructions 2 Model Indication and How to Order 8 Summary of Product parts 9 Definition and terminology 10 Installation and Wiring 11 Installation 11 Wiring 12 LED Indication and Settings 16 Hardware Configuration 19 EDS file and icon 19 Setting using RSLogix5000TM

XSA Series

Class B coil: AWG20 Insulator O.D. 2.5 mm Terminal cover Round head combination screw M3 Tightening torque: 0.5 to 0.6 Nm mark mark Tightening torque: 0.5 to 0.6Nm Round head combination screw M3 Tightening torque: 0.5 to 0.6Nm Conduit terminal Cross section A-A (Wiring inside) Lead wire Seal Conduit piping (Port size G1/2 Tightening torque 0.5 to 0.6Nm) Rated voltage Lead wire color (1)