Vacuum Pad Dimensions: With Buffer ZP3P-T20PTSFJM-B5 ZP3P-T20PTSFKM-B5 Width across flats 8 M5 x 0.8 Width across flats 8 M5 x 0.8 5 1.6 5 Width across flats 14 Width across flats 14 3 3 3 3 17 21 A D B 17 21 A D B M10 x 1 M10 x 1 M5 x 0.8 Gasket M5 x 0.8 Gasket Width across flats 14 Width across flats 14 20 2.5 20 2.5 1.6 Dimensions Dimensions Part no.
Auto switch: (for main exhaust valve) Heater: 23 Series XLD, XLDV High Vacuum Angle Valve Dimensions (mm) 1in=25.4mm (b) XLD/Air operated type E C D E Fn (KF flange) Fd (K flange) (a) C E (c) B A G H J K Heater (optional) A (mm) H Fd G 26 41 52 70 83 Fn 40 55 75 87 114 D 1 2 2 3 3 C 48 66 79 100 117 B 123 170 183 217 256 A 50 65 70 88 90 E J 16 20 20 20 20 K 6.5 14 16.5 18.5 26.5 Model XLD
(P.64) * 7 PLC DeviceNet LED LED PWR ALM MS NS DeviceNet (()) LED 8.LED (P.31) (JXC)LEDNSPLC PLC 20.P.80 PLC 10 - 8() ()() () 9 10.P.33 PLC 14.P.53 11 - 3 3.1.
M5, M6 M5, M6 KAL23-M5 15 9.6 16 15.5 M5 0.8 M6 1.0 7 6 8 8 15.5 19.5 21 3.4 2.9 8 4 5 3.2 1 8 KAL23-M6 KAL23-U01 10 17.5 10 KAL04-M5 15.5 M5 0.8 M6 1.0 16 8 3.5 3.5 8 KAL04-M6 16 10.4 16 18 4 1 8 KAL04-U01 20 20.5 4.2 4.2 8 14 10 10 1 4 KAL04-U02 22 21.5 14 KAL06-M5 16 M5 0.8 M6 1.0 9 5 6 18 8 3.5 3.5 8 KAL06-M6 16.5 Uni thread 17 1 8 KAL06-U01 3 8 KAL06-U03 24 23 21.5 20 14 12.8 6 10 23.5
2 0 0 41 [5] 50 [10] 59 [15] 68 [20] 77 [25] 86 [30] 95 [35] 41 [5] 50 [10] 59 [15] 68 [20] 77 [25] 86 [30] 95 [35] Circulating fluid temperature F [C] Circulating fluid temperature F [C] HRS150-A -20/40(50 Hz) HRS150-A -20/40(60 Hz) 18 18 16 16 Ambient temperature 90F (32C) Cooling capacity [kW] Cooling capacity [kW] 14 14 Ambient temperature 90F (32C) 12 12 Ambient temperature 104F (40C
KAL23-M5 15 9.6 16 15.5 M5 X 0.8 M6 X 1.0 7 6 8 8 15.5 19.5 21 3.4 2.9 8 4 5 3.2 17.5 1 8 KAL23-M6 KAL23-U01 10 10 15.5 KAL04-M5 M5 X 0.8 M6 X 1.0 8 16 3.5 3.5 8 KAL04-M6 16 10.4 16 18 4 1 8 20 20.5 KAL04-U01 4.2 4.2 8 14 10 10 1 4 KAL04-U02 22 21.5 14 16 KAL06-M5 9 5 6 M5 X 0.8 M6 X 1.0 18 3.5 3.5 8 8 KAL06-M6 16.5 17 1 8 20 3 8 KAL06-U03 24 23 21.5 14 12.8 KAL06-U01 10 6 23.5
Nylon tubing L L D D Min. bore M L Model 10.4 3 31.6 4 KK3P-04L 5.3 7.2 16 3.7 18 10 12.8 4.5 32.8 6 -06L 11.4 8.0 17 10.1 20 18.4 1/8 15.2 34 8 -08L 16.8 9.7 18.5 15.0 12 23 6 18.5 36 10 -10L 18.5 23.0 21 18.0 17 26.5 12.8 4.5 40.2 6 KK4P-06L 11.4 19.6 17 10.1 20 14 15.2 6 41.4 8 -08L 19.8 21.3 18.5 17.5 23 25.2 1/4 18.5 7.5 42.8 10 -10L 27.5 25.7 21 24.7 26.5 17 44 -12L 29.6 28.0 29.0
Cleaning unit Note 2) Unit Standard unit (with gate valve) Part number (Mountable valve number) G06 G04 G02 02 04 06 08 10 12 14 16 18 20 40 U side (OUT port side) Stations Note 1) 4 5 2 3 1 Gate 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 39 40 Description/Model 2 port valve 2 port valve (Sliding type) VCC12-00 D side Valve options 2 port valve (Diaphragm type) VCC12D-00 Blanking
25 40 NC 14 21.3 32.4 A 80 105 165 B 9.5 14 17.5 C 5.4 8.6 10.8 LB 87.4 124.7 148.3 LE 5 6 8 (LL) 40 49.6 75 LD 5.5 9 11 Model MY2HT16G MY2HT25G MY2HT40G P M5 x 0.8 1/8 1/4 PF 10 12 20 PC 4 9.4 8.5 PD 23 29.2 36 PG 10 12.5 20 PH 10.2 13 18.5 PI 41 57.6 72 PA 44 63 113 PB 80 110 132 PE 1 3.4 0.5 R 5 8 12 RR 5.3 8.5 11 RW 69 100 116 SS 9.7 14 21.5 TT 12.5 19.3 35.4 NW 85.2 124.8 150.1 Q 140
20 11 22 14 60 60 129 MB-SIO . 100 11 4 \20 90 15 158 132 \84 26 13.5 24 17 75 100 '29 25 +008001 (mm) [~ "r.
A1 L1 R1 U1 NDH10 E1 MM NX Applicable bore size (mm) I-020B I-032B I-04A IA-04 A B C D E F M R Size Tolerance Note +0.027 0 +0.027 0 +0.027 0 +0.027 0 +0.058 0 +0.058 0 +0.070 0 +0.070 0 0.1 0.2 0.1 0.2 0.1 0.3 0.1 0.3 AD-FI-20 AD-FI-25 AD-FI-32 AD-FI-40 9 9 16 16 16 18 22 22 36 38 55 55 9 9 12 12 10 10 15.5 15.5 20 25 32 40 20 20 24 24 14 14 20 20 30 10 16 22 60 20 25 32 40 46 28 M8 x 1.25
T 14-1 . 14-1 14-2 . 14-1 14-3 . 14-1 14-4 . 14-2 14-5 . 14-3 15 15-1 . 15-1 3 IDX-OM-W011 i i i-1 () 3 i 1 1 3 IDF Series i-1 i-1 IDX-OM-W011 i i-2 5 i 2 1 IDF Series i-2 i-2 IDX-OM-W011 i i 2 2 i 2 3 50 i 2 4 i 2 5 0 IDF Series i-2 i-3 IDX-OM-W011 i i 2 6 WARNING !
ih* phfi &Jt vJ300-10-1A Tyw 42R (External pilot lype) Station I o2T, staf,o"s lT, 20 I 20 stations A port siae Ts llcarr.romfMs) B3T lo"d !
ih* phfi &Jt vJ300-10-1A Tyw 42R (External pilot lype) Station I o2T, staf,o"s lT, 20 I 20 stations A port siae Ts llcarr.romfMs) B3T lo"d !
ih* phfi &Jt vJ300-10-1A Tyw 42R (External pilot lype) Station I o2T, staf,o"s lT, 20 I 20 stations A port siae Ts llcarr.romfMs) B3T lo"d !
Kit components main parts MIS12-10D MI-A1201-10 MI-A1202-10 MI-A1203-10 MIS12-20D MI-A1201-20 MI-A1202-20 MI-A1203-20 MIS12-30D MI-A1201-30 MI-A1202-30 MI-A1203-30 MIS20-10D MI-A2001-10 MI-A2002-10 MI-A2003-10 MIS20-20D MI-A2001-20 MI-A2002-20 MI-A2003-20 MIS20-30D MI-A2001-30 MI-A2002-30 MI-A2003-30 Standard Finger Tapped on upper and lower faces Tapped on all faces 3 12 13 14 20 Seal kit
End Lock Specifications Model MXS8 MXS12 MXS16 MXS20 MXS25 8 12 16 20 25 Bore size (mm) 2-20 in/s (50~500m/s) Operating speed range 5.62 13.5 24.7 36.0 56.2 Holding force (lbf) 1 lbf = 4.4482 N Note) Refer to P. 14 for cautions on end lock.
12 13 11 14 Parts List Note Material No.
20 14 44 52 64 77 40 46 58 12 16 16 10 11 13 16.5 27 32 39 44 47 50 14 54 64 78 6.5 6.8 7.5 14 19 19 4 7 6.5 40 50 63 25, 50, 75, 100, 125, 150 175, 200, 250, 300, 350 107 M8 39.5 14 44 11 12 115 M10 46 16.5 49 13.5 16.5 WA Bore size (mm) ML S T U VA OA OB OL P PA PB PW Q R VB MM NN st25 25
20 14 44 52 64 77 40 46 58 12 16 16 10 11 13 16.5 27 32 39 44 47 50 14 54 64 78 6.5 6.8 7.5 14 19 19 4 7 6.5 40 50 63 25, 50, 75, 100, 125, 150 175, 200, 250, 300, 350 107 M8 39.5 14 44 11 12 115 M10 46 16.5 49 13.5 16.5 WA Bore size (mm) ML S T U VA OA OB OL P PA PB PW Q R VB MM NN st25 25