High Purity Fluoropolymer

J type fitting assembly procedure J type Pull out the lever pin q. Rotate the lever assembly w to align the holes on the lever assembly w and the base e. Insert the lever pin q into the holes to fix the lever assembly w. 1 y Tubing !

XL

XLGV/With solenoid valve Q Port R (exhaust port) N N With double solenoid P K M L (mm) L 6.5 6.5 6.5 11 11 11 K 9 9 9 11 11 11 N 14 Model K L M N P Q M 17 15 2 6 Q 16.5 16.5 17.5 28 29 29 P Model XLGV-16 XLGV-25 XLGV-40 XLGV-50 XLGV-63 XLGV-80 3 3 3 6.5 6.5 6.5 16 With single solenoid Port P (pressure port) 29 26 32 45 Other dimensions are the same as XLG. 19 Series XLD, XLDV Smooth Exhaust

Power Valve: Economy Valve Series VEX5

Port size E F G H I L M P Q A Model B J R T U C D K N O S Port 2 (A),1 (P) Port 3 (R) VEX5500 VEX5501 133.5 50 25 10 7 25 80 60 81.5 83.5 1 2, 3 4, 60 143.5 62.5 70 156.5 36.5 16.5 20 Center 2 x M6 Thread depth 9 116.5 1 2, 3 4, 1 1 25 VEX5700 VEX5701 160.5 150.5 62.5 90 60 30 15 7 173.5 37.5 100 60 13 88.5 86.5 18 2 x M6 Thread depth 6 136.5 17 82 1 4 1 4 1, 1 1 c Bracket mounting dimensions

VZ1000

Coil rated voltage (V) 24, 6, 12, 48 Allowable voltage fluctuation (%) Power consumption (W) [Current mA] 15 to +10% of rated voltage 1.8 (With indicator light 2.1) [24 VDC: 75 (With indicator light 87.5)] Note) DC 4.5/50 Hz, 4.2/60 Hz 100 VAC: 45/50 Hz, 42/60 Hz 200 VAC: 22.5/50 Hz, 21/60 Hz Inrush Note) Apparent power (VA) [Current mA] AC 3.5/50 Hz, 3/60 Hz 100 VAC: 35/50 Hz, 30/60 Hz 200

High Vacuum Angle Valve, XL Series

XLGV/With solenoid valve Q Port R (exhaust port) N N With double solenoid P K M L (mm) L 6.5 6.5 6.5 11 11 11 K 9 9 9 11 11 11 N 14 Model K L M N P Q M 17 15 2 6 Q 16.5 16.5 17.5 28 29 29 P Model XLGV-16 XLGV-25 XLGV-40 XLGV-50 XLGV-63 XLGV-80 3 3 3 6.5 6.5 6.5 16 With single solenoid Port P (pressure port) 29 26 32 45 Other dimensions are the same as XLG. 19 Series XLD, XLDV Smooth Exhaust

3 Position Cylinder Series RZQ

x PA+w x PC F=q x PA+(e-q) x PC F=-q x PA+r x PB+(w-e) x PC F=q x PA q, w and e are piston areas.

VZ5000

) [Current mA] Note) DC 4.5/50 Hz, 4.2/60 Hz 100 VAC: 45/50 Hz, 42/60 Hz 200 VAC: 22.5/50 Hz, 21/60 Hz Inrush Refer to pages 3-3-60 to 3-3-65 for manifold use.

Stroke Reading Cylinder and Counter

9 #0 w #1 #0 t q e @9 #1 @1 !9 t @5@6 @1 #0 q !1 w#1 #0 @2 @9 #1 @1 ML2B #8 12 40 to 63 @0 @4 @8 i u o @3 !1 #1 #2 @8@4 !2 @7 !3#3 r !4 e !6 @6 #7 #6 !5 !9 @5 t @6 y #0 w @1 #0 #5 !7 #4 q @9@2 !8 #1 #2 !7 #5 #4 @1 Component Parts Component Parts Material Note No. Description Material Note No.

Compact Cylinder with Lock Series CLQ

(mm) With auto switch B Without auto switch Stroke range (mm) A Bore size (mm) BP C OA Rc NPT G D E F G H I J K L M N O OB P Q RA RB T V Z B A 10 to 50 82 36 15.6 14 63 92 46 1/8 M5 x 0.8 15 20 77 10.5 38 M10 x 1.5 103 7 17 8 60 9 M8 x 1.25 1/4 53 16 4.2 1.6 16.5 19 depth 12 depth 10.5 75, 100 92 46 10 to 50 96.5 43.5 19.6 17.5 80 106.5 53.5 1/8 1/8 21 25 98 12.5 43 M16 x 2.0 132 6 22 10

Compact Rotary Actuator Series CRQ2

2 q w r y !5 i q w r y !5 !6 i Component Parts Component Parts Description Note Material No.

Slider Type/Ball Bushing Bearing

24 40 M4 x 0.7 11 10.5 30 27 24 19 M8 x 1.0 6 40 20 3.5 16 60 17.5 85 103 77 1.0 0.5 12.5 30 60 M4 x 0.7 M8 x 1.0 8 68 26 4.3 20.5 80 PA dimensions are for split from center.

Rotary Actuator/Vane Style Series CRB1

CRQ2X MSQX M1 M2 Body (B) MRQ N Body (A) 2 x R A port J E2 H E1 F S A port B port N 2 x R Y Y A1 M1 A2 P 6 x Q X A1 (mm) R () E1 (g6) E2 (h9) F (h9) Model A1 A2 B C D G H J K L M1 M2 N P Q S T U V W X Y Z CRB1BW 5026 18 14 M6 x 1 depth 9 0 0.043 0.006 0.017 0 0.052 R6 1/8 67 70 3 10 13 5 50 60 34 66 46 5.5 6.5 78 19.5 39.5 13.5 11 11.9 12 25 CRB1BW 50-E CRB1BW 6321 18 29 22 15 M8 x 1.25

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SZ3000

When ordering TUV approved products, add " Q" at the end of the standard part number.

Speed Controller with Indicator

2 q !5 q t t r u u i i r y y w !6 w Meter-in type Meter-out type Meter-out type Meter-in type Seal method: Face seal For G thread e o !3 !1 !0 !4 !2 !5 q t u i r y !7 w Meter-in type Meter-out type Component Parts No.

Compact Cylinder

10 -15 -20 -25 -30 -35 -40 -45 -50 -60 -80 -100 -125 -150 C(D)55B40-5 -10 -15 -20 -25 -30 -35 -40 -45 -50 -60 -80 -100 -125 -150 55 60 65 70 75 80 85 90 95 100 110 130 150 55 60 65 70 75 80 85 90 95 100 110 130 150 M6 x 55 l x 60 l x 65 l x 70 l x 75 l x 80 l x 85 l x 90 l x 95 l x 100 l x 110 l x 130 l x 150 l M5 x 55 l x 60 l x 65 l x 70 l x 75 l x 80 l x 85 l x 90 l x 95 l x 100 l x 110

RQ

Mounting bolt C D Mounting bolt Mounting bolt Model C D 50 55 60 65 75 85 55 60 65 70 80 90 60 65 70 80 90 115 140 Model C D 65 70 75 85 95 120 145 85 95 105 130 155 90 100 110 135 160 105 115 140 165 120 130 155 180 R(D)QB20-15 -20 -25 -30 -40 -50 R(D)QB25-15 -20 -25 -30 -40 -50 R(D)QB32-20 -25 -30 -40 -50 -75 -100 R(D)QB40-20 -25 -30 -40 -50 -75 -100 R(D)QB50-30 -40 -50 -75 -100 R(D)QB63

0.01

ID Construction IDG SFD101-02 SFD102-02 IDK w q r t e q r e w AMG AFF AM AMD AMH Component Parts Component Parts No. Description Note Material Aluminum alloy No.

Magnetically Coupled Rodless Cylinder

2 y r i q !9 !8 @2 @0 @3 @5 @8 @7 o u !7 t CY3R15, 20 CY3R15 Parts list No. Description No.

Magnetically Coupled Rodless Cylinder Series CY3B/CY3R

2 y r i q !9 !8 @2 @0 @3 @5 @8 @7 o u !7 t CY3R15, 20 CY3R15 Parts list No. Description No.

180
Angular Style Air Gripper Series MHY2/MHW2 Cam Style Rack & Pinion Style 1

2 i q !1 y !9 !0 u !2 i q !1 y !9 !0 u !3 !2 i q !1 y !9 !4 !4 !4 Open condition Component Parts Note Note No. q Description Material No. Description Material Bushing B !0 o Body Hard anodized Aluminum alloy Sintered alloy steel End plate Stainless steel 10: Stainless steel 16 to 25: Aluminum alloy w Piston 16 to 25: Chromated Bumper !