ITV0000

SUP, VAC port (4, 5/32") OUTx 3 2 5 EXH, ATM port (4, 5/32") 38 2-M3 x 0.5 thread depth 3.5 Bracket mounting hole L bracket (optional) Flat bracket (optional) 6-3.5 19 74 2-3.5 19 27 19 64 28 Minimum bending radius 80 Body +50 0 3000 15 35 (30.9) 8.7 4 9.9 Cable connector (4-wire) Straight type (optional) 7 14 Body Cable connector (4-wire) Right angle type (optional) 8.3 4.3 10.2 Minimum

Miniature Tubing & Miniature Fittings Series TU/M

Model AU ALU ALHU F R Barb fitting M3, M5 M3 M5 Barb elbow Barb one-touch Reducer Removing tubing Withdraw the sleeve straight along the tubing. Use a tool such as long-nose pliers if it is difficult to pull out by hand. 1. Withdraw the tubing straight. 2.

Miniature Tubing & Miniature Fittings

Model AU ALU ALHU F R Barb fitting M3, M5 M3 M5 Barb elbow Barb one-touch Reducer Removing tubing Withdraw the sleeve straight along the tubing. Use a tool such as long-nose pliers if it is difficult to pull out by hand. 1. Withdraw the tubing straight. 2.

Aluminum High Vacuum Angle Valve

A XL Series Case Model Weight (kg) A (mm) Conductance (L/s) XLA-16 XLA-25 XLA-40 XLA-50 XLA-63 XLA-80 XLA-100 XLA-160 B (mm) 40 103 0.25 5 50 113 0.45 14 65 158 1.1 45 Little heavy metal contamination 70 170 1.6 80 88 196 2.9 160 90 235 5.0 200 The valve does not contain heavy metals such as Ni (nickel) or Cr (chrome) and a low sputtering yield also helps to minimize heavy metal contamination

CE2

13 14 14 17 14 16 15 18 Reed switch Without indicator light RB 8 7 5.5 6.5 6.5 J 2-color indication 2-color indication Water resistant 3.5 3.5 5 5 5 Grommet (In-line) D-F5BAL DSolid state switch D-F5NTL D-G5NTL D-Y69A/Y7PV/Y69B D-Y7NWV/Y7PWV/Y7BWV With timer 4 4 4.5 4.5 4.5 -X Grommet (Perpendicular) 2-color indication 20With pre-wire connector is also available in solid state auto switches

Electric Actuator / Slider Type 《 AC Servo Motor 》

Bolts Size Tightening torque (Nm) M3 0.6310% M4 1.510% M5 310% 8.Troubleshooting When a fault occurs during the operation, the corresponding alarm or warning is displayed.

IDX-OM-W093

OFF ON OFF ON 6 4 3 2 2 1 8 4 0.5 10 5 0.5 min s IDF60/70/80/90 Series 13-2 IDX-OM-W093 14 14.1 / IDF60/70/80/90 Series 14-1 Revision history 2020 6 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL https://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer

I

D 00 Without subplate 1% 0.5% + -0.5% M5 M5 0.007 00 Without subplate B M5 M5 0.28 01 18 0.41 2.5% 1% + -1% Base Mounted Type 00 Without subplate 2 01 18 0.9 02 14 1.4 00 Without subplate 02 14 2.0 3% 1.5% + -1% 4 03 38 3.3 04 12 3.9 A M5 M5 0.28 1 01 18 0.9 02 14 1.4 2.5% 1% + -1% Wiring: The use of three-core screened cable is strongly recommended with the screen earthed at the end away

MGQ

MGQM, MGQL Common Dimensions Bore size (mm) Standard stroke (mm) B Z G NN F MM ML DA L R C H K Q X GA GB J P PW S T TA TB V W YY YL 32 40 50 63 80 100 1/8 1/8 1/4 1/4 3/8 3/8 16 17 17 19 21 25 51 51 59 72 92 112 12.5 14 14 16.5 19 23 114 96 48 112 80 100 8 8 10 10 16 16 20 20 25 25 30 35 16 16 20 20 25 30 38 38 44 44 56 62 37.5 44 44 49 56.5 66 26 26 30 36.5 46.5 56.5 30 30 40 50 60 80 47.5

Rotary Table

(g) Size 1 2 3 7 Basic Type 75 105 150 250 High precision Type 80 115 165 265 * Values excluding the weight of auto switch Effective torque 0.8 7 Effective torque (Nm) 0.6 3 0.4 2 0.2 1 0 0.1 0.2 0.3 0.4 0.5 0.6 0.7 Operating pressure (MPa) 19 - Internal construction and parts MSQ1 to 7 20 11 18 12 17 23 21 2 24 7 1 15 14 13 6 14 15 24 5 10 9 16 22 8 4 3 19 24 O ring 4 23 Hexagon socket set

MHx-OMY0005

:GR-S-010(10g):GR-L-005(5g) 14 3-3. 2 (MHF2-8D2MHF2-12D20D) 1. 2. 8:12:R 1620:C ABC 3. (8:) (12 ) :GR-S-010(10g):GR-L-005(5g)GR-L-010(10g) 8 2 12 2.5 16 3 20 4 B C C 8 A 12 0.9 16 C MHF2-8D2 20 1.3 MHF2-12D* R MHF2-8D2 8 1.5 12 2 16 2.5 20 3 12 15 3-4. /1 MHF2-8DMHF2-8D1 1 16 2 17 3 18 4 19 5 20 NBR 6 21 NBR 7 8 A 9 B 10 C 11 12 13 14 15 MHF2-8D

VQ4000

Note 2) Double wiring is used on sub-plate VQ410 . 0 1 Suitable tightening torque Nm Plug lead: Grommet Connect each corresponding wire. 0.8 to 1.2 Mounting screw (M3) Lead wire color Lead wire color SOL.A SOL.A () Black () Black COM COM (+) Red (+) Red SOL.B SOL.B () White () White Single solenoid Double solenoid Caution Changing the One-touch Fittings Single solenoid Double solenoid Black

Mini-rotary Actuator Rack & Pinion Style Series CRJ Size: 05, 1 1

x 0.5 (Opposite side, same location) Q H 2 x J through CRBU2 1.5 JA depth of counterbore JB (Opposite side, same location) (Side port) (For front port, use hexagon socket head set screw) S BE CB CA CRB1 BF DD MSU D BD BG A CRJ 2.2 (0.4) Note 1) CRA1 SD 16 BA CRQ2 2 x M3 x 0.5 depth 4 BB W MSQ 2 x M3 x 0.5 (Front port) (For side port, use hexagon socket head set screw) MRQ N DBC 20With external

Mini-rotary Actuator Rack & Pinion Style Series CRJ Size: 05, 1 1

x 0.5 depth 4 BB W MSQ 2 x M3 x 0.5 (Front port) (For side port, use hexagon socket head set screw) MRQ N DBC 20With external stopper: CRJU Note 2) For the 180 specification, the slated line area do not exist.

Compact Vacuum Ejector Series ZQ

Note 2) Including a 0.3 m connector for the supply and release valves and a 0.6 m connector for the switch. 23 -80 kPa 14 46 Maximum vacuum pressure Calculation of weight for the manifold type (Single unit weight) x (Number of stations) + (Weight of end plate assembly for manifold) Example) Switch + 8 stations with suction filter 109 g x 8 + 122 g = 994 g Supply pressure range 0.3 MPa to

MA2

AHC System Series MA2 How to Order AHC unit AHC unit MA 210 Y M3 N R3 Tool adapter Robot adapter Without robot adapter 8 10 11 14 15 20 Nil S1 R1 R2 R3 R4 R5 Auto hand changer Air gripper for AHC Applicable shaft diameter Transportable mass Transportable mass 3 kg 2 AHC unit Electric specifications Air connection size M3 M3 x 0.5 None N Air gripper for AHC Tool adapter <10/15> MA 210 A M3

ZQ

Note 2) Including a 0.3 m connector for the supply and release valves and a 0.6 m connector for the switch. 23 14 46 Maximum vacuum pressure 80 kPa Calculation of weight for the manifold type (Single unit weight) x (Number of stations) + (Weight of end plate assembly for manifold) Example) Switch + 8 stations with suction filter 109 g x 8 + 122 g = 994 g Supply pressure range 0.3 MPa to 0.6

Direct Operated Precision Regulator ARP20/30/40 Series  Sensitivity: Within 0.2% F.S.  Expanded lineup  ARJ 3 types of set pressure and the body size AR425  Energy saving, Air consumption: allow more freedom in designing a circuit. to 935 80% reduct

SRF ITV IC ITVH Recommended Tightening Torque ITVX Unit: Nm Connection thread 1/2 3/8 1/4 1/8 PVQ Torque 28 to 30 22 to 24 12 to 14 7 to 9 VY1 2. Avoid excessive torsional moment or bending moment other than those caused by the equipments own weight as this can cause damage. Support external piping separately. 3.

MHx-OMU0057

B 9960-1: 1 ) JIS B 8433-1993: *2) 1. 2. 3. 1. 2. 3. 4. 2 - / *3) 1 1.5 *3)1 1 () 3 - 1 1-1. 1)0.5MPa L = 20mm MHZ2-10* MHZ2-16* MHZ2-20* MHZ2-25* MHZ2-32* MHZ2-40* mm 10 16 20 25 32 40 D 0.20.7 0.10.7 MPa S 0.350.7 0.250.7 C oC -1060 mm 0.01 0.02 c.p.m. 180 60 D 11 34 42 65 158 254 1 N 17 45 66 104 193 318 S 7.1 27 33 45 131 217 C 13 38 57 83 161 267 mm 4 6 10 14

AMG

Options J: With drain guide M Mounting Dimensions Model Port Size (Nominal size B) A G F E D C B S 1.6 2.0 2.0 2.3 2.3 3.2 3.2 4.5 4.5 R 4.5 5 5 5 5 9 9 10 12 Q 26 28 28 34 34 50 50 60 76 P 70 84 84 100 100 110 110 130 180 O 54 66 66 80 80 88 88 102 136 N 35 40 40 50 50 55 55 65 85 L 9 12 12 14 14 14 14 16 20 K 5 8 8 8 8 10 10 10 15 J 15 20 17 22 19 25 21 30 40 I 56 66 66 80 80 90 90 100