HRX-OM-S004

Configuration One thermo-chiller for one master. 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers. Fig. 3-15 Connection of RS-232C HRS Series 3.3Installation 3-27 HRX-OM-S004 Chapter 3 Transport and Setting Up 3.4 Piping Piping port size Connect piping firmly.

HRX-OM-T002

Configuration One thermo-chiller for one master. 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers. Fig. 3-17 Connection of RS-232C HRS090 Series 3.3Installation 3-27 HRX-OMT002 Chapter 3 Transport and Setting Up 3.4 Piping Piping port size Connect piping firmly.

Guide Cylinder Series MGG

R Y + Stroke 32 to 50 MGQ Front mounting flange 63 Front mounting flange MGG MGC MGF R Y + Stroke Q X Bore size (mm) R Y (mm) MGZ Y + Stroke 25 32 40 50 63 20 14 14 14 15 16 16 MGT 63 to 100 79 79 81 89 104 119 Front mounting flange Copper and Fluorine-free (For CRT production processes) To prevent the influence of copper ions or halogen ions during CRT manufacturing processes, copper and

HRX-OM-W038

Configuration 1 master : 1 thermo-chiller 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Fig. 3-11 Connection of RS-232C 3.3 Installation HRS Series 3-16 HRX-OM-W038 Chapter 3 Transport and Setting Up 3.4 Piping Connect piping firmly. Incorrect piping might cause leakage of supplied or drained leakage and wet surrounding area and facility.

HRX-OM-O021

Configuration 1 master : 1 thermo-chiller 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers. Fig. 3-11 Connection of RS-232C 3.3 Installation HRS Series 3-16 HRX-OM-O021 Chapter 3 Transport and Setting Up 3.4 Piping Connect piping firmly.

Quick Exhaust Valve Series AQ 1

1 Quick Exhaust Valve Series AQ Model Excellent exhaust characteristics Large flow capacity Compact and lightweight A wide selection of models Port size Effective area (mm2) Weight (g) Model IN OUT OUT EXH M5 x 0.8 AQ1500-M5 AQ1510-01 AQ2000-01 AQ2000-02 AQ3000-02 AQ3000-03 AQ5000-04 AQ5000-06 2 4 25 35 40 60 105 135 2.8 5.8 25 40 42 70 115 180 25 45 110 105 215 205 690 650 1 8 1 8 1 4

CC

Conditions: Operating pressure 0.5MPa, Operating oil Turbine oil Class 1 (ISO VG32), Piping length 1m AS420-02, 03, 04 AS500-06 AS2000-01, 02 AS600-10 AS3000-02, 03 AS4000-02, 03, 04 Circuit 4.12-12

Microspeed Cylinder

Elbow Type (Metal Body) Flow rate and effective area AS220M-02 Model AS120M AS220M-01 R 1/4 Cylinder side Tubing side M5 x 0.8 10-32UNF NPT1/8 NPT1/4 R 1/8 Port size Rc 1/4 Rc 1/8 l/min (ANR) (CFM) Flow rate 38 (1.33) 7 (0.25) 12 (0.42) Controlled flow 0.6 (0.03) 0.1 (0.006) 0.2 (0.01) Effective area mm (cv) l/min (ANR) (CFM) 420 (14.7) Flow rate 105 (3.7) 280 (9.8) Free flow 6.5 (0.36) 1.6

CJ2X/CUX/CQSX/CQ2X/CM2X

Elbow/Universal Type Air Flow/Effective Area Model AS121FM-M5 AS131FM-M5 AS221FM-01 AS231FM-01 AS221FM-02 AS231FM-02 RE A B 3.2, 4, 6 3.2, 4 6, 8 4 6 8, 10 Metric size Tubing O.D.

VXP21/22/23

LVH Connection LVD 02 03 04 06 10 12 14 20 1 4 Thread type Nil T F N Refer to the table (2) given below for availability. 3 8 1 2 3 4 Rc NPTF G NPT Thread LVQ Refer to page 17-3-16 for ordering coil only. 1 1 1 2 LQ 1 4 1 2 LVN 32 40 50 For 32A For 40A For 50A Flange TI/ TIL PA Refer to the table (1) given below for availability.

E-P HYREG ® VY1 Series

Applicable pilot valve (4) 00 M5 00 M5 01 00 01 02 00 02 03 04 M5 01 02 02 03 04 04 06 10 10 12 14 20 Without sub-plate M5 Without sub-plate M5 D B 1 8 Without sub-plate Base mounted Symbol 2 1 8 1 4 Internal pilot VY1D0 (5) Without sub-plate 1 4 4 3 8 1 2 (3) (3) A M5 3(R) 1 8 2(A) 1(P) (3) (3) 1 1 4 1 4 3 8 3 External pilot 1 2 Body ported 1 2 5 3 4 P1 1 1 VY1B0 (5) 7 1 1 4 1 4 1 1 2 1

CJ2X/CUX/CQSX/CQ2X/CM2X

Elbow/Universal Type Air Flow/Effective Area Model AS121FM-M5 AS131FM-M5 AS221FM-01 AS231FM-01 AS221FM-02 AS231FM-02 RE A B 3.2, 4, 6 3.2, 4 6, 8 4 6 8, 10 Metric size Tubing O.D.

CJ2X/CUX/CQSX/CQ2X/CM2X

Elbow/Universal Type Air Flow/Effective Area Model AS121FM-M5 AS131FM-M5 AS221FM-01 AS231FM-01 AS221FM-02 AS231FM-02 RE A B 3.2, 4, 6 3.2, 4 6, 8 4 6 8, 10 Metric size Tubing O.D.

CL

(mm) A A1 E1 L1 MM U1 NX NZ L R1 R Part No.

Combination Cylinder

(mm) A A1 E1 L1 MM U1 NX NZ L R1 R Part No.

90

Note 10) Fixed unit: kPa Note 11) When K, Q, R or S is selected, select K for e Combination of Supply Valve and Release Valve.

VH Series, 4 Way Hand Valve

3 (R) 3 (R) 1 (P) 1 (P) 25 17 2 4-1/4,3/8,1/2NPT 4-3/4NPT VH43 -N02/N03/N04 (Bottom porting) VH43 -N06 (Bottom porting) 2 (A) 2 (A) 46 54 1 (P) 3 (R) 1 (P) 3 (R) 4 (B) 4 (B) 4-3/4NPT 4-1/4,3/8,1/2NPT 9

NAR Series

Specialty Regulators NAR Series Pressure Regulator NAR425, 435, 625, 635, 825, 835, 925, 935 s n o i t a c i f i c e p S l e d o M 5 2 4 R A N 5 3 4 R A N 5 2 6 R A N 5 3 6 R A N 5 2 8 R A N 5 3 8 R A N 5 2 9 R A N 5 3 9 R A N e z i S t r o P 2 / 1 8 / 3 4 / 1 1 4 / 3 2 / 1 1 4 / 1 1 2 ) a P M ( g i s p e r u s s e r p f o o r P ) 5 . 1 ( 0 2 2 e r u s s e r p g n i t a r e p o . x a

Compressed Air Preparation Filter

Example) AMK30-N03B-6RZ-D q e r t y w V w Symbol Description Body size 20 30 40 50 60 V q Filter type AMK Activated carbon filter V V V V V + V e Thread type Nil Rc V V V V V N NPT V V V V V F G V V V V V + 01 1/8 V 02 1/4 V V V 03 3/8 V V 04 1/2 V 06 3/4 V 10 1 V V + V r Port size a Mounting Nil Without mounting option V V V V V Option V t B1 With bracket V V V V V + Nil Polycarbonate

SI unit ( device)

ID N EX430-SIL1 0x0014 (20) 0 R Product Text N SI unit 0x0015 (21) 0 R Serial Number N "x" 4 0x0016 (22) 0 R Hardware Revision N HW-Vx.y 5 0x0017 (23) 0 R Software Revision N FW-Vx.y 5 0x0018 (24) 0 R/W Application Specific Tag Y "* *" 6 Refer to page 17 "Device Status parameter" for details 0x0024 (36) 0 R Device Status N Refer to page 17 "Detailed Device Status parameter" for details 0x0025