Mounting: L (Foot), Bore Size: 50mm, Thread: Rc, Full Stroke: 200mm, First Stroke: 190mm

rail type, DUST SEAL BAND, ELECTRIC ACTUATOR, 130 lb

PFxx-OMO0004CN

g 8 50 g 65 g +45 g +35 g +20 g +15 g DIN +65 g -66No.PF-OMO0004CN-E 1 () 2()10024 551005009.5 221002003.8 3OUT 40()90% ON(OFF) 5 6 70()90% 8 9 10 ZS-33-D AWG26 1.00 mm +0.10 3.5 -0.25 -67No.PF-OMO0004CN-E A B C 1 V 1.04 V 5 V 4 mA 4.16 mA 20 mA PFMB7201 2 L/min 200 L/min -68No.PF-OMO0004CN-E -() [L/min] OUT ()( ) [kPa] IN 200kPa IN 400kPa [L/min] -69No.PF-OMO0004CN-E

PFxx-OMU0002

PF3A703H (For 3000 L/min) PF3A706H (For 6000 L/min) PF3A712H (For 12000 L/min) 74 No.PF-OMU0002-D Dimensions Symbol Models A B D E F H K L N PF3A703H 130 45 79.1 55.3 22.5 25 35 60 30 4 x M4 x 0.7 depth 7 PF3A706H 170 60 94.1 70.3 30 68 45 80 40 4 x M5 x 0.8 depth 8 PF3A712H 200 70 104.1 80.3 35 85 50 100 50 4 x M6 x 1.0 depth 9 75 No.PF-OMU0002-D Lead wire with M12 connector (ZS-37-A) Pin

XMC/XYC Series

XYC Exterior dimensions D G C C B J Fd (K Flange) 45 H Fn (KF Flange) A E Unit:mm Model A B C D E Fn Fd G H J XYC-25 100.2 85 48 1 23.5 40 26 64 28 XYC-40 130 115 66 2 38 55 41 84 36 C D G C B J Fd (K Flange) 45 K H Fn (KF Flange) A E Unit:mm Model A B C D E Fn Fd G H J K XYC-50 178 121 80 31 53 75 52 104 29 10.5 XYC-63 209 148 100 39 61 87 95 70 126 36 9 XYC-80 268 177 117 45.5 80 114 110

SI unit ( device)

SI unit is reset to an initial state such as power-on 0x80 (128) Device reset 0x81 (129) Application reset All outputs switching count value are cleared All parameter values are restored to factory default setting and all output count values are cleared 0x82 (130) Restore factory settings 0xA0 (160) OUT0 count value reset Output 0 count value is cleared 0xA1 (161) OUT1 count value reset Output

Fieldbus system (PROFIBUS DP compliant)

Network length Communication speed [kbps] 9.6 19.2 45.45 93.75 187.5 Max. cable length [m] 1200 1000 Communication speed [kbps] 500 1500 3000 6000 12000 Max. cable length [m] 400 200 100 : Maximum cable length differs depending on the specifications of a cable. The above cable length is based on type A cable.

LC6D/LC6C

Driver Energization type Divisions per rotation Full step 200 LC6D-220ADHalf step 400 Full step 500 LC6D-507ADHalf step 1000 Dimensions 100 97 52 42 Operation window 35 38 96 35 Label DIN rail holding plate Connectors (included) [Manufacturer: Molex Japan, Co., Ltd.] Quantity Description Part no.

Speed Controller with One-touch Fittings Series AS In-line Type 1

M5 standard 1/8 standard 1/4 standard 3/8 standard 1/2 standard 100 200 205 300 400 Applicable tubing O.D.

Mist Separator Series AM Model Series AM can separate and Model AM850 AM250 AM350 AM450 AM550 AM650 AM150 remove oil mist in compressed air Rated flow 750 1500 2200 3500 6000 12000 300 (1) (l/min (ANR)) which is difficult to remove by Port size ordin

180 Q 26 28 28 34 34 50 50 60 76 R 45 5 5 5 5 9 9 10 12 S 1.6 2.0 2.0 2.3 2.3 3.2 3.2 4.5 4.5 T U 37 37 37 37 37 37 37 37 37 AFF 159 172 178 204 210 225 232 259 311 13 13 16 16 19 19 22 22 32 100 113 119 145 151 166 173 200 253 63 76 76 90 90 106 106 122 160 20 20 20 20 20 20 20 20 20 63 76 76 90 90 106 106 122 160 24 27 27 32 32 37 37 39 55 166 187 187 218 218 241 241 277 334 AM150 1 8

AME

Model AME250 AME350 AME450 AME550 AME650 AME850 AME150 12000 (1) 12000 Rated flow (l/min (ANR)) 500 1000 2000 3500 6000 200 Port size (Nominal size B) 1 8 1 4 3 8 , , , , , , , , , , 1 4 3 8 1 2 3 8 1 2 3 4 1 2 3 4 1 1 3 4 1 1, 1 2 1 2 1 2 Weight (kg) 0.38 0.55 0.9 1.4 2.1 4.2 10.5 Note 1) Max. flow capacity at a pressure of 0.7MPa. It varies depending on operating pressure.

AMG

Options J: With drain guide M Mounting Dimensions Model Port Size (Nominal size B) A G F E D C B S 1.6 2.0 2.0 2.3 2.3 3.2 3.2 4.5 4.5 R 4.5 5 5 5 5 9 9 10 12 Q 26 28 28 34 34 50 50 60 76 P 70 84 84 100 100 110 110 130 180 O 54 66 66 80 80 88 88 102 136 N 35 40 40 50 50 55 55 65 85 L 9 12 12 14 14 14 14 16 20 K 5 8 8 8 8 10 10 10 15 J 15 20 17 22 19 25 21 30 40 I 56 66 66 80 80 90 90 100

Pneumatic Purification

DEWPOINT CFM CFM MAX PSIG A B C lbs IDF3D-S 5.8 12 115/1/60 3/8 145 R134a 8.9 14.1 18.5 39.7 IDF4D-S 8.1 18 115/1/60 3/8 215 R134a 9.5 18.9 23.9 57.3 IDF6D-S 12.6 26 115/1/60 1/2 215 R134a 8.7 23.6 20.5 70.5 IDF8D-S 16.5 35 115/1/60 3/4 215 R134a 8.7 23.6 20.5 70.5 IDF11C-S 25 53 115/1/60 3/4 215 R22 10.2 24.4 22.4 103.6 IDF15C-S 40 85 115/1/60 1 215 R22 11.0 24.4 24.4 110.2 IDF22C1-S 58 130

MIW/MIS

transfer speed and the operating range of the point of application L. 30 20 10 L=120mm L=100mm L=80mm L=60mm L=40mm 20 L=90mm L=70mm L=50mm L=30mm 10 Work piece weight kg Work piece weight kg 5 5 1 1 Point of application L Work piece weight m kg Transfer speed V m/min 0.1 0.1 30 20 10 5 5 40 30 20 10 Transfer speed V m/min Transfer speed V m/min Allowable lateral load MIW20 MIS20 MIW12 MIS12 200

13

Maximum flow rate 200 /min (ANR). The collected dust does not remain in the case. Air suction filter 13-10-1 Series ZFA Using an ejector with a 2-stage nozzle, the ejector system can be used most efficiently. Air suction filter 13-10-4 Prevents problems related to vacuum circuits or airborne contaminants.

High Purity Fluoropolymer Fittings HYPER FITTING ® Series LQ1 1

Insert bushing Tubing 17-5-130 35 Series LQ 1 2 High Purity Fluoropolymer Fittings Assemble fittings following the procedure shown below.

NAIV

Symbol fl:] w 8$ Flow Characteristics NAN200 900 o Specifications 35 70 125 3s0 200 r7s0 An Flow (SCFMI Mar opetating pressu|e-145PSl(t0 2kg lcIrf) Nois reduction-30d B or more Operating tenperature range-40 1 40"F (5 ' 60 "C) Noise Level Model Model Port size (NPT) Eftectlve oririce mm2 (Cv) Wbight rbs.

Siiiil"Tivrc

1 I.{ 50 114 139 13 100 10 t 15 5 9 5.5 v 74 4.5 AMG25O 3/8 '152 13 1 1 3 6 10 '| 69 n '12 4 84 a 5 2 n Ai/lc350 1/2 144 16 145 s s '10 198 m 2 14 7 80 100 g 2.3 ANtG450 314 205 19 147 106 106 JO s 10 14 88 1 1 0 3.2 AMG55O 239 200 10 257 100 s 10 't6 102 130 m 10 4.5 AIVG&5O 1 112 291 c 253 r60 160 10 364 150 .10 20 1 1 s 136 180 4.5 2 48 a 348 220 ?

NAMUR

NAMUR Interface 5 Port Solenoid Valve Series VFN2000N Specifications VK Fluid Max. operating pressure Min. operating pressure Ambient and fluid temperature Lubrication Pilot operator manual override Enclosure Port size Cv factor (Effective area) Weight Other AC DC Allowable voltage range Coil insulation Inrush Holding Power consumption DC Air/Inert gas 0.9 MPa {130 PSI} 0.15 MPa {22 PSI}

TS/TISA

TS0425 TS0604 TS0806 TS1075 TS1209 TISA01 TISA05 TISA07 TISA11 TISA13 Color 100 m reel Black, White, Red, Blue, Yellow, Green 150 m reel X3 200 m reel 500 m reel Red, Blue, Yellow, Green 20 m roll X4 15-6-3 Safety Instructions These safety instructions are intended to prevent a hazardous situation and/or equipment damage.