Process Pump <Fluororesin Type> Series PA3000

0.4MPa 10 0.4MPa 0.3MPa SUP = 0.5MPa 0.3MPa 0.2 100 0.2MPa 0.3MPa 0.2MPa 5 50 0.1 0.2MPa 00 50 100 150 00 5 10 00 5 10 Air consumption (l/min [ANR]) Flow rate (l/min) Operating cycle (Hz) PAP3313-T13: Flow rate characteristics (2.5Hz)* PAP3313-T13: Flow rate characteristics (5Hz)* PAP3310-T13: Flow rate characteristics 0.4 0.5 0.5 Discharge pressure (MPa) Discharge pressure (MPa) Discharge

Micro Mechanical Valve Series VM1000

Application Weight (g) Model Actuator Polyacetal roller 110 140 150 150 160 220 210 220 210 220 200 VM430-01-00 VM430-01-01 VM430-01-01S VM430-01-02 VM430-01-02S Basic VM-08A VM-07AS VM-07A VM-06AS VM-06A VM-05A VM-02AS VM-02A VM-01AS VM-01A Mechanical operation Manual operation Roller lever Hard steel roller Polyacetal roller Hard steel roller One way roller lever Straight plunger VM430

Compact Guide Cylinder

1.65 2.24 2.46 2.87 3.28 3.69 4.10 4.51 50 MGQM50 2.54 3.09 3.65 4.21 4.77 5.33 5.89 6.5 63 MGQM63 3.01 3.63 4.23 4.85 5.47 6.09 6.71 7.3 80 MGQM80 5.66 6.59 7.49 8.41 9.33 10.3 11.2 12.1 100 MGQM100 8.96 10.3 11.6 12.9 14.2 15.6 16.9 18.2 Ball Bushing MGQL12 to 100 (kg) (mm) Model Standard stroke (mm) Bore size 10 20 25 30 40 50 75 100 125 150 175 200 12 MGQL12 0.23 0.26 0.29 0.35 0.38

Process Pump

SUP = 0.2 MPa 0.2 0.2 0.2 0.1 0.1 0.1 0 0 0 50 100 150 200 0 Discharge (mL/min) 0 Discharge (mL/min) 200 400 600 800 1000 0 Discharge (mL/min) 200 400 600 800 1000 Air Consumption: Built-in Solenoid Valve/Air Operated Calculation of Air Consumption Air Consumption 45 Find the air consumption for operation with a 5 Hz switching cycle and pilot air pressure of 0.35 MPa from the air consumption

ø 20, ø 25, ø 32, ø 40, ø 50, ø 63, ø 80, ø 100 Series C55 ISO Standards [ISO/21287] Compact Cylinder

Standard Stroke Bore size (mm) Standard stroke (mm) 5, 10, 15, 20, 25, 30, 35, 40, 45, 50, 60, 80, 100, 125, 150 20 to 63 Theoretical Output OUT IN 10, 15, 20, 25, 30, 35, 40, 45, 50, 60, 80, 100, 125 80, 100 Unit: N Manufacture of Intermediate Stroke Bore size (mm) Operating direction Operating pressure (MPa) 0.3 0.5 0.7 Dealing with the stroke by the 1 mm interval by using an exclusive

Precision Cylinder Series MTS

121 90 188 141 294 215 482 362 754 565 0.5 25 19 57 42 101 75 157 118 245 179 402 302 628 471 8 5, 10, 15, 20, 25, 30 OUT IN OUT IN OUT IN OUT IN OUT IN OUT IN OUT IN 50 37 113 84 201 150 314 235 490 358 804 603 1,256 942 8 12, 16 25, 50, 75, 100 25, 50, 75, 100, 125, 150, 175, 200 12 20, 25, 32, 40 16 Strokes other than the above are produced upon receipt of order. 20 Stud Bolt Part Numbers

Series 10-SZ3000 5 Port Solenoid Valve Cassette Type Manifold

Switch (When equipped with switch) Internal Pilot Manifold L Dimension n: Stations External Pilot Manifold L Dimension n: Stations L n 4 160.5 150 129 16 L n 4 173 162.5 139.5 17 2 135.5 125 108 14 3 148 137.5 118.5 15 5 173 162.5 139.5 17 6 185.5 175 150 18 7 185.5 175 160.5 12.5 8 198 187.5 171 13.5 9 210.5 200 181.5 14.5 10 223 212.5 192 15.5 2 148 137.5 118.5 15 3 160.5 150 129 16 5 185.5

Digital Flow Monitor

(increment of 1 sec.), 20 sec., 30 sec., 40 sec., 50 sec. and 60 sec.

IIIIIIIIII

WETTED MATERIALS Polysulfone, Silicone, Buna-N TEMPERATURE RANGE 40 150 F (4 66 C) REPEATABILITY < +/1% F.S.

CEU1

No.CE*-OMP0002-A 3 CEU1 SMC FG 0~50 35~85%RH 3 CEU1CE10.1mm 3 CE1-R** CE1** 3 CEU1** FG 3 DIN 3 2m/s 3 (100ms) 2 2 2 2-1 1 1 1 CEU1 4 2 2 2 2-2 2 2 2 3 3 3 3-1 1 1 1 : : 1 1 (mm) (mm) 25 25 25 25 50 50 50 50 75 75 75 75 100 100 100 100 125 125 125 125 150 150 150 150 175 175 175 175 200 200 200 200 250 250 250 250 300 300 300 300 400 400 400 400 500 500 500 500 12 12 12 12

“

150 128000 yen reduction Current model IR1000 Series IR2000 Series 100 100 IR1200-A Series IR2200-A Series 50 50 IR3200-A Series 0 0 0 10 20 30 40 50 0 10 20 30 40 50 Units used Units used Bleed air 0 IR No fixed throttle in the new design.

Mechanically Jointed Rodless Cylinder Series MY1

Load mass Allowable moment MY1H/m MY1H/M MY1H/M MY1H/M 2 1 3 40 50 50 40 50 40 50 4 40 5 30 30 30 30 20 20 20 20 MY1H40 MY1H32 MY1H40 MY1H32 10 10 10 MY1H40 MY1H40 MY1H40 MY1H40 MY1H32 MY1H40 MY1H32 MY1H32 MY1H32 MY1H32 5 4 MY1H25 MY1H25 10 MY1H40 MY1H40 Load mass kg Moment Nm Moment Nm Moment Nm 5 4 5 4 MY1H32 MY1H32 MY1H25 MY1H25 MY1H25 3 MY1H25 MY1H25 MY1H20 MY1H20 3 3 2 MY1H25 MY1H25

Sine Rodless Cylinder Series REBR Direct Mount Type

Model determination 61 Series REBR Model Selection 2 Design Parameters 1 Selection Method REBR25 REBR32 REBR15 500 400 300 200 300 200 Allowable driving force Fn (N) Load weight W (kg) Allowable driving force Fn (N) Allowable driving force Fn (N) 50 100 100 40 30 40 50 20 30 40 50 30 20 20 Usable range 10 10 10 Usable

HAA

Indoor ID Three phases 200 VAC (50/60 Hz) Three phases 200 VAC (50/60 Hz) Single phase 100 VAC (50/60 Hz) Single phase 200 VAC (50/60 Hz) Single phase 100 VAC (50/60 Hz) Three phases 200 VAC (50/60 Hz) Power source IDG 90 130 0.4 0.45 1.44 1.4 50 60 0.4 0.35 55 65 0.8 0.9 38 46 132 x 2 170 x 2 0.23 0.26 50 Hz 60 Hz 50 Hz 60 Hz AMG Power consumption (W) Compact size and lightweight Uses minimal

Air Cooled Aftercooler Series HAA 1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 2 to 50 Indoor Three phases 200 VAC (50/60 Hz) Three phases 200 VAC (50/60 Hz) Single phase 100 VAC (50/60 Hz) Single phase 200 VAC (50/60 Hz) Single phase 100 VAC (50/60 Hz) Three phases 200 VAC (50/60 Hz) Power source 90 130 0.4 0.45 1.44 1.4 50 60

Manifold Specifications

Internal wiring 1 3 5 6 01 C6 C8 VZ523MOZ-VZ3Applicable solenoid valve 100 VAC 50/60 Hz, 110 VAC 50/60 Hz, 24 VDC, 12 VDC Rated voltage Note) Withstand voltage specification of wiring unit part is equivalent to JIS C 0704 class 1.

ATX-OM-F003E

](mgCaCO3/L) 100 or less 50 or less 50 or less Total hardness (mgCaCO3/L) 200 or less 70 or less 70 or less Calcium hardness (mgCaCO3/L) 150 or less 50 or less 50 or less Ionic state silica (mgSiO2/L) 50 or less 30 or less 30 or less Iron (mg/L) 1.0 or less 0.3 or less 1.0 or less Copper (mg/L) 0.3 or less 0.1 or less 1.0 or less Reference items Sulfide ions (mg/L) Shall not be detected.

90

150 117000 yen reduction Current model IR1000 Series IR2000 Series 100 100 IR1000-A Series IR2000-A Series IR3000-A Series 50 50 0 0 0 10 20 30 40 50 0 10 20 30 40 50 Units used Units used Released into atmosphere IR Special bleeding structure No fixed throttle in the new design.

Stainless Steel Cylinder Series CJ5-S/Series CG5-S

Relationship of liquid entry and sliding distance Amount of liquid entry (g) X 15 10 Standard cylinder Stainless steel cylinder 5 0 50 100 150 200 Sliding distance (km) 250 300 Conditions Working fluid ...Air Pressure .. 0.5MPa Liquid ...

ZP

E2 A10 10 96.5 62.5 23 20 134.5 72.5 51 30 144.5 82.5 40 180.5 92.5 77 50 190.5 102.5 N S U F GN GS 20 51.5 33.5 Construction p. 118 J K ZP Y B Buffer Assembly p. 126 10 97 63 23 20 135 73 51 30 145 83 40 181 93 77 50 191 103 25 3.5 6 M10 x 1 14 3 52 34 10 102 68 23 20 140 78 51 30 150 88 40 186 98 77 50 196 108 32 57 39 10 142 74 20 139 84 30 149 94 50 194 114 75 50 40 62 44 N6 U6 A14 6