REC

20 19 25 M10 x 1.25 Up to 700 22 19.5 17 9 10 10 26 13 10 45 6 37.5 5.5 30 20 19 32 M10 x 1.25 Up to 1000 22 19.5 17 9 10 12 26 13 11 45 6 46.5 5.5 30 22 19 40 M14 x 1.5 Up to 1000 24 21 22 10 15 14 32 16 12.5 50 8 56.2 7 39 26.5 30 NN P RR S U Z ZZ NA Bore (mm) Stroke range 20 M20 x 1.5 Up to 700 1/8 9 146 14 217 226 30 25 M26 x 1.5 Up to 700 1/8 9 146 14 221 230 34.5 32 M26 x 1.5 Up to

Pilot Operated

AC Specification (Class H coil) AC Specification (Class B coil) Apparent power (VA) Energized 19 16 43 35 62 52 Apparent power (VA) Energized 19 16 43 35 62 52 Temperature rise (C) Note) Temperature rise (C) Note) Model Model Inrush Frequency (Hz) 45 40 55 50 65 60 Inrush Frequency (Hz) 45 40 55 50 65 60 50 60 50 60 50 60 50 60 50 60 50 60 9 7 19 16 30 25 9 7 19 16 30 25 VXD21 VXD21 VXD22

New

The optimum size for a pressure differential of P 0.4 MPa and a flow of 50 L/min will be the VXZ2 3 A (10 orifice, port size 1/4). 500 400 VXZ2 25 Cv = 12 6 D 300 VXZ2 20 Cv = 9.2 5 C 200 VXZ2 15 Cv = 5.3 4 B Flow rate Q [L/min] 100 VXZ2 Port size 3/8 10 Cv = 2.4 VXZ2 Port size 1/4 10 Cv = 1.9 50 3 A 40 3 A 30 25 20 10 0.01 0.02 0.03 0.04 0.05 0.1 0.2 0.3 0.4 0.5 Pressure differential P

DOC1023126

Specification Table Battery-less absolute encoder type (Step motor 24 VDC) Model EQY25 EQY32 Storoke [mm] 30 to 400 30 to 500 Work load[kg] *1 Horizontal 8 26 40 70 30 50 90 100 Vertical 2 8 16 30 3 13 26 46 Pushing force [N] Note2),3),4) 36 to 76 63 to 122 126 to 238 232 to 452 50 to 118 80 to 189 156 to 370 296 to 707 to 300 30 to 900 18 to 700 9 to 450 5 to 225 30 to 900 24 to 800 12 to

One-touch Fittings

Connection Female Thread: Rc, NPT, NPTF Uni thread size Wrench tightening angle after hand-tightening [deg] Tightening torque [Nm] 1/8 30 to 60 3 to 5 1/4 30 to 60 8 to 12 3/8 15 to 45 14 to 16 1/2 15 to 30 20 to 22 Connection Female Thread: G Uni thread size Wrench tightening angle after hand-tightening [deg] Tightening torque [Nm] 1/8 30 to 45 3 to 4 1/4 15 to 30 4 to 5 3/8 15 to 30 8 to

Electric Actuator / Slider Type 《 AC Servo Motor 》

Slider type LEFS series 2.1 Specification LEFS25,32,40 AC servo motor (100W / 200W/400W/) Model LEFS25 LEFS32 LEFS40 Stroke [mm] Note 1) 50800 501000 1501200 Work load [kg] Note 2) Work load [kg] 10 20 20 30 40 45 30 50 60 Vertical 4 8 15 5 10 20 7 15 30 400 1500 900 450 1500 1000 500 1500 1000 500 401 500 1200 720 360 1500 1000 500 1500 1000 500 501 600 900 540 270 1200 800 400 1500 1000

Mechanically Jointed Rodless Cylinder MY1H Series Linear Guide Type: ø25, ø32, ø40  Piping can be connected from 4 directions on the head cover.  Allows on-site piping to suit the MY1B installation MY1H MY1H conditions. MY1B MY1M MY1C MY

MY2 H/HT MY3A MY3B MY3M Load Mass Allowable Moment MY1H/m3 MY1H/M3 MY1H/M1 MY1H/M2 q r w e t 30 40 50 50 40 30 40 50 30 40 50 30 20 20 20 20 MY1H40 MY1H32 10 10 10 MY1H40 MY1H40 MY1H32 Load mass kg MY1H32 Moment Nm Moment Nm Moment Nm 5 4 3 MY1H25 MY1H40 10 5 4 3 5 4 3 MY1H32 MY1H25 MY1H25 2 MY1H25 5 4 2 2 1 3 1 1 0.5 0.4 0.3 2 0.5 0.4 0.3 0.5 0.4 0.3 D0.2 1 0.2 0.2 0.1 -X 100 200 300 400

High Vacuum L Type Valve

Bonnet assembly/Part indication number (1) Temperature specifications Indicator Valve size 16 25 40 50 General use Without XLF16-30-1-2 XLF25-30-1-2 XLF40-30-1-2 XLF50-30-1-2 With XLF16A-30-1-2 XLF25A-30-1-2 XLF40A-30-1-2 XLF50A-30-1-2 High temperature Without XLF16-30-1H-2 XLF25-30-1H-2 XLF40-30-1H-2 XLF50-30-1H-2 With XLF16A-30-1H-2 XLF25A-30-1H-2 XLF40A-30-1H-2 XLF50A-30-1H-2 Temperature

90

exhaust) Vacuum pressure 60 40 Suction flow (Silencer exhaust) Air consumption 20 Port exhaust Silencer exhaust 0 0 10 20 30 40 50 60 Suction flow [L/min (ANR)] ZK212 Flow-rate Characteristics Exhaust Characteristics 0 10 20 30 40 50 60 70 80 90 100 100 90 80 70 60 50 40 30 20 10 0 0 0.1 0.2 0.3 0.4 0.5 0.6 Supply pressure [MPa] 100 Suction flow (Port exhaust) Vacuum pressure [kPa] Vacuum

High Vacuum Angle Valve, XL Series

17.1 35 25.5 23 96 129 128.5 121.5 138.5 50 48 40 26.2 28 25.5 40 XLS-25D XLS-25T 120.5 121.5 154.5 63 97 51 66 30 High Vacuum Angle Valve Series XLS Dimensions (mm) 1in=25.4mm XLS/With control power supply Grommet (G) H G 41 D 72 530 10 E J B C F A A (mm) E A 40 50 B 113 138.5 C 121 147 D 38 48 30 40 F 17.1 26.2 G 87 89.5 H 110 115 J 66.5 Model XLS-16-P G XLS-25-P G 69 31 Series XSA Normally

Refrigerated Air Dryer

(per 1 m3) The amount of water at the intersection C the amount of water at the intersection H = the amount of condensed water 18.2 3.0 = 15.2 g/m3 Dew Point Conversion Chart 60 50 40 30 20 Pressure dew point (C) B A 10 1.5 MPa 1.3 MPa 1.1 MPa 0.9 MPa 0.7 MPa 0.5 MPa 0.3 MPa 0.1 MPa Atmospheric pressure 0 -10 -20 -30 -40 -50 C -60 -50 -60 -20 -10 0 10 20 30 -40 -30 Atmospheric pressure

Digital Flow Switch

Symbol Model S T U V W PFMC7501/7102 24 22 32 40 50 PFMC7202 30 30 42 48 58 -71No.PF-OMS0002-B Lead wire with M8 connector (ZS-40-A) -72No.PF-OMS0002-B Revision history A: Contents revised in several places.

Prevents Micro-Bubbles

T) W Model LVC20 LVC30 LVC40 LVC50 LVC60 (mm) Dimensions 64 S T Model LVC3 LVC4 LVC5 90 24 49.5 110.5 29 54.5 147 34.5 60.5 156 Suck back (Single type) Suck back (Unit type) 50 3.5 4.5 37 30 44 37 30 44 4-3.5 20 (Max. 11.5) 51 51 (Max. 11.5) M5 x 0.8 M5 x 0.8 M5 x 0.8 45 12.5 45 30 SMC SMC SMC A B A B 12.5 61 4 4 30 (110) (78) 17-5-12 10 Series LVC Manifolds Manifold Specifications LLC5A

Heavy Duty Stopper Cylinder Series RSH/RS1H

Duty Stopper Cylinder 50, 63, 80 RS1H 30 50 Z73 D L Bore size Number of auto switches 50mm 63mm 80mm 50 63 80 (auto switch number mounted) Port thread type Nil S 2 pcs. 1 pc.

125

Groove Cover For 200 VAC: SY100 30 2A Pin Cover For other voltages of AC: SY100 30 3A Groove DC polarity display Lever Pin Without lead wire: SY100 30 A Lead wire length (with connector and 2 of sockets only) Nil 300 mm 6 600 mm 10 1000 mm 15 1500 mm 20 2000 mm 25 2500 mm 30 3000 mm 50 5000 mm -+ Socket Lead wire How to Order Enter the part number for a plug connector solenoid valve without

Air Cylinder/End Lock Series MBB ø32, ø40, ø50, ø63, ø80, ø100

) Wl Hl/ Rl (mm) Port Cushion valve Stroke range Bore size (mm) -0.1 -0.3 CDH10 U ZZ RR Z Z L CX ZZ CDH10 32 40 50 63 80 100 up to 500 10 13 180.5 10.5 162 170 23 14 172.5 up to 500 10 13 195 11 171 184 23 14 182 up to 600 14 17 221 15 194 206 30 20 209 up to 600 14 17 221 15 194 206 30 20 209 U up to 750 22 26 287 23 246 264 42 30 269 CX L RR up to 750 22 26 287 23 246 264 42 30 269 Z +

HRX-OM-M005

This system Your system Communication data TEMP PV 30 TEMP PV TEMP PV 30 TEMP SP 30 External communication 30 Discharge temp: OFFSET 1 31 Heat dissipation: 1 Circulating fluid temp. in your system: 30 Figure 8-6 When MODE3 is selected 8.4 Offset Function HRZD Series 8-16 HRX-OM-M005 Chapter 8 Appendix 8.5 BAND/READY Function Sets BAND to TEMP SP value, and notifies TEMP PV value reaches within

Compact Manifold Regulator

PBT Material 30 40 0.5 g Weight 30 6.5 (R) 2 4.5 1 16 4 11 745 ARM10F Series Made to Order Specifications: Please contact SMC for detailed dimensions, specifications and lead times.

RLQ

RLQB32-20 RLQB32-25 RLQB32-30 RLQB32-40 RLQB32-50 RLQB32-75 RLQB32-100 RLQB40-20 RLQB40-25 RLQB40-30 RLQB40-40 RLQB40-50 RLQB40-75 RLQB40-100 RLQB50-30 RLQB50-40 RLQB50-50 RLQB50-75 RLQB50-100 RLQB63-30 RLQB63-40 RLQB63-50 RLQB63-75 RLQB63-100 M5 x 90l M5 x 95l M5 x 100l M5 x 110l M5 x 120l M5 x 145l M5 x 170l M5 x 100l M5 x 105l M5 x 110l M5 x 120l M5 x 130l M5 x 155l M5 x 180l M6 x 120l

Conforming to ISO Standard Solenoid Valve (with M12 Connector) Series EVS7-6/7-8/7-10 (Size 1) (Size 2) (Size 3) 1

(72) 75 (86) 38 50 62 (72) 75 (86) 14 12 50 38 14 12 Manual override PA P R2 R1 49 (64) 49 (64) Manual override PA 2-8 mounting hole Indicator light P R2 R1 2-8 mounting hole Indicator light 49 (64) 49 (64) M12 connector M12 connector 126.5 (139.5) 126.5 (139.5) PE port PE port PE port PE port 50 (63) 3 5 38 (53) 50 (63) 32 (42) 3 5 1 38 (53) 23 (30) 32 (42) 1 23 (30) 1/8 14 port 3/8, 1/