Rotary Actuator/Vane Type

(Rotation range of single flat (key) when mounting 2 stopper blocks on the other sides groove is the opposite side from and the setting range is within either right 50 or 60 against port A and B.) Four chamfers for wrench Long groove Stopper block Section A-A (Double vane) Section A-A (Single vane) 60 50 Note) For size 40, each stopper block comes with 2 holding screws.

ø 20, ø 25, ø 32, ø 40, ø 50, ø 63, ø 80, ø 100 Series HYB Hygienic Design Cylinder Round Type

Standard Stroke Bore size (mm) Standard stroke (mm) 20 25, 50, 75, 100, 125, 150, 200 25 to 100 25, 50, 75, 100, 125, 150, 200, 250, 300 Intermediate strokes of 1 mm each can be produced. (The spacer is not used.)

Multistage Ejector Series ZL112.212

(l/min (ANR)) Air consumption (l/min (ANR)) Vacuum pressure (kPa) Vacuum pressure (kPa) Suction flow rate 250 125 Suction flow rate 80 80 70 70 200 100 60 60 ZA Air consumption Air consumption 150 50 50 75 40 40 100 50 ZX 30 30 20 20 50 25 ZR 10 10 0 0 0 0.1 0.2 0.3 0.4 0.5 0.6 0.1 0.2 0.3 0.4 0.5 0.6 ZM Supply pressure (MPa) Supply pressure (MPa) ZMA Flow Characteristics Flow Characteristics

2 Finger, 3 Finger, 4 Finger Air Gripper Parallel Type Series MHS

0.5MPa 0.5MPa Gripping force N Gripping force N 0.4MPa 0.4MPa 150 150 F 0.3MPa 0.3MPa 100 100 0.2MPa 0.2MPa 50 50 0.1MPa 0.1MPa 0 0 10 10 20 20 30 30 40 40 50 50 Gripping point L mm Gripping point L mm MHS2-50D MHS2-50D F 400 400 Internal gripping Pressure 0.6MPa Pressure 0.6MPa 300 300 Gripping force N 0.5MPa 0.5MPa Gripping force N 0.4MPa 0.4MPa 200 200 0.3MPa 0.3MPa 1N: Approx. 0.102kgf

Shot Pin Cylinder

Deflection + L F F (Dimension when extended) + M Built-in coil scraper and Lube-retainer MAllowable lateral load graph MSelectable proximity switches CKZP57L TURCK P&F 400 Allowable lateral load [N] 350 300 250 200 MAdjustable connector angle 150 100 CKZP57L: 45, 90 CKZP71: 0, 45, 90 50 0 0 50 100 150 200 250 Offset distance L [mm] CKZP71 0 50 100 150 200 250 300 350 400 450 500

10

F F MHL2-10D Z-X85 MHL2-16D Z-X85 1 2 1 2 MHL2-10DZ-X85 MHL2-16DZ-X85 25 25 70 60 70 60 20 20 Pressure 0.6 MPa Gripping force [N] Gripping force [N] Gripping force [N] Gripping force [N] Pressure 0.6 MPa Pressure 0.6 MPa 50 50 Pressure 0.6 MPa 0.5 MPa 0.5 MPa 15 15 40 40 0.5 MPa 0.5 MPa 0.4 MPa 0.4 MPa 30 30 10 10 0.4 MPa 0.4 MPa 0.30 MPa 0.3 MPa 20 20 5 5 10 10 0 0 10 20 30 40 50 60 70 0

Low Differential Pressure Sensor

(not including sensor accuracy), Response speed: 150 ms or less Resistance Weight Analog output 0.6% F.S. or less 1.0% F.S. or less 1.5% F.S. or less Accuracy (to display value) (25C) Output current: 4 to 20 mA (within rated pressure range) Current output Note 2) Maximum load impedance: 300 (at 12 VDC), 600 (at 24 VDC), Minimum load impedance: 50 Linearity: 0.2% F.S.

Rubber Seal 5 Port Solenoid Valve Series SY3000/5000

C4 C6 C4 C6 Stations L1 L2 L3 L4 3 4 5 6 7 8 9 10 2 123 135.5 125 102 16.5 148 148 160.5 150 173 185.5 175 198 210.5 200 112.5 91.5 15.5 137.5 137.5 123 12.5 162.5 144 14.5 187.5 165 16.5 133.5 13.5 154.5 15.5 175.5 17.5 112.5 17.5 Stations SS5Y3-45GUBC4 C6 2 3 4 5 6 7 8 9 10 Stations L1 L2 L3 L4 135.5 125 108 13.5 148 160.5 150 129 15.5 173 185.5 175 150 17.5 185.5 175 198 210.5 200 223

Process Pump <Fluororesin Type> Series PA3000

0.4MPa 10 0.4MPa 0.3MPa SUP = 0.5MPa 0.3MPa 0.2 100 0.2MPa 0.3MPa 0.2MPa 5 50 0.1 0.2MPa 00 50 100 150 00 5 10 00 5 10 Air consumption (l/min [ANR]) Flow rate (l/min) Operating cycle (Hz) PAP3313-T13: Flow rate characteristics (2.5Hz)* PAP3313-T13: Flow rate characteristics (5Hz)* PAP3310-T13: Flow rate characteristics 0.4 0.5 0.5 Discharge pressure (MPa) Discharge pressure (MPa) Discharge

Micro Mechanical Valve Series VM1000

Application Weight (g) Model Actuator Polyacetal roller 110 140 150 150 160 220 210 220 210 220 200 VM430-01-00 VM430-01-01 VM430-01-01S VM430-01-02 VM430-01-02S Basic VM-08A VM-07AS VM-07A VM-06AS VM-06A VM-05A VM-02AS VM-02A VM-01AS VM-01A Mechanical operation Manual operation Roller lever Hard steel roller Polyacetal roller Hard steel roller One way roller lever Straight plunger VM430

Compact Guide Cylinder

1.65 2.24 2.46 2.87 3.28 3.69 4.10 4.51 50 MGQM50 2.54 3.09 3.65 4.21 4.77 5.33 5.89 6.5 63 MGQM63 3.01 3.63 4.23 4.85 5.47 6.09 6.71 7.3 80 MGQM80 5.66 6.59 7.49 8.41 9.33 10.3 11.2 12.1 100 MGQM100 8.96 10.3 11.6 12.9 14.2 15.6 16.9 18.2 Ball Bushing MGQL12 to 100 (kg) (mm) Model Standard stroke (mm) Bore size 10 20 25 30 40 50 75 100 125 150 175 200 12 MGQL12 0.23 0.26 0.29 0.35 0.38

Process Pump

SUP = 0.2 MPa 0.2 0.2 0.2 0.1 0.1 0.1 0 0 0 50 100 150 200 0 Discharge (mL/min) 0 Discharge (mL/min) 200 400 600 800 1000 0 Discharge (mL/min) 200 400 600 800 1000 Air Consumption: Built-in Solenoid Valve/Air Operated Calculation of Air Consumption Air Consumption 45 Find the air consumption for operation with a 5 Hz switching cycle and pilot air pressure of 0.35 MPa from the air consumption

ø 20, ø 25, ø 32, ø 40, ø 50, ø 63, ø 80, ø 100 Series C55 ISO Standards [ISO/21287] Compact Cylinder

Standard Stroke Bore size (mm) Standard stroke (mm) 5, 10, 15, 20, 25, 30, 35, 40, 45, 50, 60, 80, 100, 125, 150 20 to 63 Theoretical Output OUT IN 10, 15, 20, 25, 30, 35, 40, 45, 50, 60, 80, 100, 125 80, 100 Unit: N Manufacture of Intermediate Stroke Bore size (mm) Operating direction Operating pressure (MPa) 0.3 0.5 0.7 Dealing with the stroke by the 1 mm interval by using an exclusive

Precision Cylinder Series MTS

121 90 188 141 294 215 482 362 754 565 0.5 25 19 57 42 101 75 157 118 245 179 402 302 628 471 8 5, 10, 15, 20, 25, 30 OUT IN OUT IN OUT IN OUT IN OUT IN OUT IN OUT IN 50 37 113 84 201 150 314 235 490 358 804 603 1,256 942 8 12, 16 25, 50, 75, 100 25, 50, 75, 100, 125, 150, 175, 200 12 20, 25, 32, 40 16 Strokes other than the above are produced upon receipt of order. 20 Stud Bolt Part Numbers

Series 10-SZ3000 5 Port Solenoid Valve Cassette Type Manifold

Switch (When equipped with switch) Internal Pilot Manifold L Dimension n: Stations External Pilot Manifold L Dimension n: Stations L n 4 160.5 150 129 16 L n 4 173 162.5 139.5 17 2 135.5 125 108 14 3 148 137.5 118.5 15 5 173 162.5 139.5 17 6 185.5 175 150 18 7 185.5 175 160.5 12.5 8 198 187.5 171 13.5 9 210.5 200 181.5 14.5 10 223 212.5 192 15.5 2 148 137.5 118.5 15 3 160.5 150 129 16 5 185.5

Digital Flow Monitor

(increment of 1 sec.), 20 sec., 30 sec., 40 sec., 50 sec. and 60 sec.

IIIIIIIIII

WETTED MATERIALS Polysulfone, Silicone, Buna-N TEMPERATURE RANGE 40 150 F (4 66 C) REPEATABILITY < +/1% F.S.

CEU1

No.CE*-OMP0002-A 3 CEU1 SMC FG 0~50 35~85%RH 3 CEU1CE10.1mm 3 CE1-R** CE1** 3 CEU1** FG 3 DIN 3 2m/s 3 (100ms) 2 2 2 2-1 1 1 1 CEU1 4 2 2 2 2-2 2 2 2 3 3 3 3-1 1 1 1 : : 1 1 (mm) (mm) 25 25 25 25 50 50 50 50 75 75 75 75 100 100 100 100 125 125 125 125 150 150 150 150 175 175 175 175 200 200 200 200 250 250 250 250 300 300 300 300 400 400 400 400 500 500 500 500 12 12 12 12

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150 128000 yen reduction Current model IR1000 Series IR2000 Series 100 100 IR1200-A Series IR2200-A Series 50 50 IR3200-A Series 0 0 0 10 20 30 40 50 0 10 20 30 40 50 Units used Units used Bleed air 0 IR No fixed throttle in the new design.

Mechanically Jointed Rodless Cylinder Series MY1

Load mass Allowable moment MY1H/m MY1H/M MY1H/M MY1H/M 2 1 3 40 50 50 40 50 40 50 4 40 5 30 30 30 30 20 20 20 20 MY1H40 MY1H32 MY1H40 MY1H32 10 10 10 MY1H40 MY1H40 MY1H40 MY1H40 MY1H32 MY1H40 MY1H32 MY1H32 MY1H32 MY1H32 5 4 MY1H25 MY1H25 10 MY1H40 MY1H40 Load mass kg Moment Nm Moment Nm Moment Nm 5 4 5 4 MY1H32 MY1H32 MY1H25 MY1H25 MY1H25 3 MY1H25 MY1H25 MY1H20 MY1H20 3 3 2 MY1H25 MY1H25