Compact Low Friction Cylinder Series MQQ ø10, ø16, ø20, ø25, ø30, ø40

10 to 50,75,100 84.5 103.7 12 6.6 4 30 LX LZ 30 10 to 50,75,100 104 123.2 12 6.6 4 33 A + Stroke 40 10 to 50,75,100 104 124.2 12 9 5 39 B + Stroke L 25, 30, 40 Bore size (mm) LS LT LX LY LZ X Y 10 49.5 2 38 33.5 48 8 5 M LY 16 58.5 3.2 48 42 62 9.2 5.8 LH 20 64 3.2 52 46 66 10.7 5.8 25 68.5 3.2 57 57 71 11.2 5.8 X X LG Y Y 4-LD LT 30 88 3.2 64 64 78 11.2 7 LS + Stroke LX 40 81 3.2 79 78 95

Magnetically Coupled Rodless Cylinder Series CY3B/CY3R

39 44 55 65 GW 31.5 37.5 42.5 53.5 63.5 H 32 39 44 55 67 HA 30 36 41 52 62 HB 17 21 23.5 29 36 Model CY3RG15 CY3RG20 CY3RG25 CY3RG32 CY3RG40 LD 4.3 5.6 5.6 7 7 T 19 20.5 21.5 24 26 Y 54.5 64 72 79 93 M 5 5 6 7 8 TC 17 20 22.5 28 33 Z 94 107 117 130 148 MM M4 x 0.7 M4 x 0.7 M5 x 0.8 M6 x 1 M6 x 1 W 25 40 40 50 60 X 18 22 28 35 40 N 6 7 6.5 8.5 11 WP 16 19 21.5 27 32 PW 32 38 43 54 64 Q 84 95

Process Pump <Fluororesin Type> Series PA3000

Bottom view without foot SUP (P1) Rc, G, NPT, NPTF 1/4 Manual reset Air pilot actuation reset (Rc, G, NPT, NPTF 1/8) FLUID OUT Rc, G, NPT, NPTF 3/8 140 8 110 14 6 81 84 67 30 13 26 10 FLUID IN Rc, G, NPT, NPTF 3/8 EXH (P2) Rc, G, NPT, NPTF 1/4 PAP331m(with tube inlet/outlet) P11m P13m 152 2-M5 with depth 8 4-7 139 64 10 10 120 95 Bottom view without foot SUP (P1) Rc, G, NPT, NPTF 1/4 Manual

4 Way • 4 and 5 Port, Rubber Seal • Solenoid Pilot Valve, Series SYJ3000

20M -M3 30.5 19.5 30.5 19.5 About 300 5.3 1.8 1.8 5.3 8.2 8.2 (Lead wire length) 4 4 A B B A 7 21.8 (Mounting holes for manifold) 7 21.8 (Mounting holes for manifold) 36.7 (Lead wire length) 84.4 39.1 [45.6] About 300 Bracket Bracket 23.2 equivalent (Mounting holes) 23.2 equivalent (Mounting holes) 18.5 18.5 28 [34.5] 28 [34.5] 20 15.6 20 18.5 18.5 13.5 13.5 9 9 50.4 40.7 [42] 111.6 92.4 [95

Series VC, Direct Operated, 2 Port Solenoid Valve for Water, Series VCW

stations) Model Dimension 2 3 4 6 9 7 5 8 10 L1 69 103.5 138 207 310.5 241.5 172.5 276 345 VV2CW2 L2 81 115.5 150 219 322.5 253.5 184.5 288 357 L3 93 127.5 162 231 334.5 265.5 196.5 300 369 L1 77 115.5 154 231 346.5 269.5 192.5 308 385 VV2CW3 L2 89 127.5 166 243 358.5 281.5 204.5 320 397 L3 101 139.5 178 255 370.5 293.5 216.5 332 409 L1 83 124.5 166 249 373.5 290.5 207.5 332 415 VV2CW4 L2 95

3 Port Direct Operated Poppet, Solenoid Valve, Series VKF300

) 1/8 (ports P) Applicable cord O.D. 4 to 6.5 78.5 Max .10 71.5 71 Light (DZtype only) 67.5 59 32 17 2 2-4.5 (mounting holes) P 19 35 P Pg.7 2-Rc(PT) 1/8 (ports P) A A A 11 20 26 49 Approx. 300 (lead wire length) 1 P = 19 13.5 L2 5.5 L1 47.5 11 5 n-Rc(PT) 1/8, M5 x 0.8 (port A) 19 35 n-Rc(PT) 1/8 (port R) 47.5 11 R R P = 19 19 L: Dimension table n: Stations n L 1 38 27 2 57 46 3 76 65 4 95

Fluoropolymer Fittings Hyper Fitting / Flare Type Series LQ3

LQ3A2B LQ3A2C LQ3A2D LQ3A2E LQ3A3A LQ3A3B LQ3A3C LQ3A4A LQ3A4B LQ3A4C LQ3A4D LQ3A5A LQ3A5B LQ3A5C LQ3A6A LQ3A6B LQ3A6C LQ3A7A 46 58 44.5 13.7 21.3 26.7 33.4 60.3 13.7 21.3 26.7 21.3 26.7 33.4 60.3 21.3 26.7 33.4 26.7 33.4 60.3 33.4 32 30.5 56.5 17 16 16 20 14 70.5 74.5 56 69 73 53 32.5 31 22.5 19.5 21 40 39 25 18 66 65 47 49 45 47 80 78 24.5 22.5 24 29 22 88 86 26.5 24 32 37 30 57 54.5 95

High Purity Chemical Valve

239 73 109.5 146 182.5 LLC3A 84 120.5 157 193.5 183 219.5 256 292.5 Dimensions (mm) 94 141 188 235 A B Q C D E G H K N R S U V W Y LLC4A Model LLC2A LLC3A LLC4A LLC5A 109 156 203 250 M5 x 0.8 M3 x 0.5 46.5 31 67.5 67 19 41.5 13 18 36.5 11.5 19 34 M4 5.5 219 266 313 360 47 36.5 93.5 76 27.5 57.5 17.5 39 53.5 24 27.5 47 M5 6.5 118 177 236 295 Rc 1/8 NPT 1/8 Rc 1/8 NPT 1/8 LLC5A 60 47 111.5 95

Compact Rotary Actuator Series CRQ2

angle per rotation of angle adjustment screw 10 20 30 50 95 ta ro m mu xi Ma 10.2 7.2 6.5 8.2 Note) The drawing shows the rotation range of the positioning pin hole.

m (95% filtered particle size)Maximum 1.0 mg/m3 (ANR) (approx. 0.8 ppm) (2)PolycarbonateStandard250.22

Fluoropolymer Piping Equipment

L2, L2 22.5 19.5 21 40 39 54 53 25 6.4 13.7 9 18 LQ3A34 66 65 21.3 15.4 LQ3A36 66 26.7 20.5 LQ3A37 44 41 82 79 7.5 33.4 26.3 LQ3A41 (E,E): Reference dimension for the inserted tubing from the end surface of the nut (E),L1,L2: Nut material PVDF dimensions W: Width across flats dimension 21.3 15.4 22 LQ3A42 26.7 20.5 LQ3A43 33.4 26.3 LQ3A44 49 47 88 86 60.3 52.5 LQ3A51 26.5 24 32 57 54.5 95

Thermo-chiller

Fluid level indicator Circulating fluid return port (CH2) Rc1/2 Power cable entry Applicable wire total: 14.5 to 18.5 Circulating fluid outlet (CH1) Rc1 Communication cable entry Applicable wire total: 6.5 to 10.5 Drain port Rc1/4 Caster (unfixed) with locking lever 14 HRLE Series Compact Dual/Basic Type for Lasers Dimensions HRLE090-W-20/40 484 385 150 Anchor bolt mounting position 965 95

Series 10-, 21- AR-B Regulator, Series 10-, 21- ARK-B Regulator with Backflow Function

24.8 53 10.5 85.6 44 30.7 66.4 M38 x 1.5 41 29.4 40 45.8 6.5 8 53 2.3 31.1 38.5 19 7 1/4, 3/8, 1/2 3.5 33.8 1/8 28.9 70 10.5 91.7 44 35.8 70.8 M42 x 1.5 50 33.8 54 54 8.5 10.5 70 2.3 35.5 42.5 21 7 3/4 3 33.8 1/8 30.4 75 8 93.2 44 35.8 70.8 M42 x 1.5 50 33.8 54 55.5 8.5 10.5 70 2.3 37 42.5 21 7 3/4, 1 3.2 43.3 1/8 40 90 7 125.2 44 43 80.3 70 43.3 66 65.8 11 13 90 3.2 1 3.2 43.3 1/8 44.5 95

Slider Type Ball Screw Drive/11-LEFS Series

When determining particle generation grades, the 95% upper condence limit of the average particle concentration (average value), when each specimen is operated at a specied number of cycles Note 2) is considered. The plots in the graphs indicate the 95% upper condence limit of the average particle concentration of particles with a diameter within the horizontal axis range.

Series 10-, 21- AW-B Filter Regulator

Note) D E 6 7 7 7 14 19 21 21 28.5 38.5 42.5 42.5 30.2 31.1 35.5 37 2.3 2.3 2.3 2.3 3.2 55 53 70 70 90 15.4 8 10.5 10.5 13 5.4 6.5 8.5 8.5 11 43.9 45.8 54 55.5 65.8 34 40 54 54 66 30 41 50 50 70 30 38.4 38.4 47.5 63 66.4 74.3 74.3 80.3 26 29.4 37.3 37.3 43.3 44 44 44 44 44 72.4 85.6 91.7 93.2 175.5 11 10.5 10.5 8 6.5 91.4 121.9 153.9 155.9 242.6 25.5 24.8 28.9 30.4 42.2 40 53 70 75 95

Support Guide/11-LEFG Series

When determining particle generation grades, the 95% upper condence limit of the average particle concentration (average value), when each specimen is operated at a specied number of cycles Note 2) is considered. The plots in the graphs indicate the 95% upper condence limit of the average particle concentration of particles with a diameter within the horizontal axis range.

39

34.2 42.6 50.6 58.7 66.9 74.8 81.6 86.4 5 Series CKZ3N Dimensions Pivot point with square flats Nh9 Release point RA (Dual arm) XA RR RB (Right arm) RC (Left arm) XB R XC RW LB PB0.02 PD0.05 PC0.05 PA0.02 GC LA0.1 GB L C 2 x 2 x PH7 Depth D 2 x 2 x MM Depth J Hexagon socket head plug 2 x 2 x NPT 1/4 G Rc GA E B RD (mm) Bore size (mm) B C D E GA GC J L LA LB MM N P GB 50 63 92 48 12 13.7 95

Shot Pin Cylinder

. * Please contact SMC for NPN switches. 2 CKZP Series Dimensions CKZP57L-m Rod extended 11.4 50 95 + Stroke 40 + Stroke 0.05 24.8 40 0.1 25 View A-A 50 100 (119.3) 11 0.1 11 0.1 30 0.03 4 surfaces 2 x 9 4 surfaces 2 x 6 F7 11 0.1 11 0.1 40 0.05 45 10 15 Coil scraper 68.5 55 127 + Stroke 45 0.03 95 9.5 26.5 A A 11 30 M12 connector (4 pin) 109 Protective plate 132.5 2 x 8 F7 depth 16 90 9.5

Series 12-CY3B ø6, ø10, ø15, ø20, ø25, ø32, ø40 ø50, ø63 Magnetically Coupled Rodless Cylinder

5.5 6.5 8 9 8.5 10.5 13 17 18 HC 18 25 31 38 43 54 66 84 96 HP 10.5 14 17 24 23.5 29 36 45 51 K 7 9 14 11 15 13 15 25 24 HA 17 24 30 36 41 52 62 80 92 G 3 4 5 6 6 7 7 8.5 8.5 HT 10.5 14 17 24 23.5 29 36 45 51 J x E M4 x 0.7 x 6 M4 x 0.7 x 6 M5 x 0.8 x 7 M6 x 1 x 8 M6 x 1 x 8 M8 x 1.25 x 10 M8 x 1.25 x 10 M10 x 1.5 x 15 M10 x 1.5 x 15 B 6.5 8 9.5 9.5 11 11 14 14 GP 20 27 33 39 44 55 65 83 95

15

24 19 20 10.5 22 5.4 16 2 5.5 8 45 16 70 28 62 5.8 46 10 CY1S25-Z M6 x 1 M6 x 1 10 26.4 52 8.5 40.5 40.5 27.5 21.5 21 12.5 22 11 6.5 16 5.5 53 20 49 2 8 70 70 54 7 10 CY1S32-Z M8 x 1.25 M8 x 1.25 12.5 14 33.6 64 9.5 50 50 33 26 24 11.5 23.5 8.6 20 2 5.5 9 64 26 85 52 86 66 9 12 CY1S40-Z M8 x 1.25 M8 x 1.25 12.5 41.6 74 10.5 55.5 55.5 38 27 27 10.5 22.5 14 8.6 25 5.5 74 28 51 2 10 104 76 95