CYPSeries Table 1 100 Total operation cycles (10,000) 50 40 30 20 10 100 200 300 400 500 700 1000 Stroke (mm) Table 2 10 Particle concentration (particles/m) Class M3.5 [Class100] 10 10 Class M2.5 [Class10] Inner cover holding screw tightening torque [Nm] 10 Tightening torque Model Screw size Class M1.5 [Class1] CYP15 0.3 M3 x 0.5 10 CYP32 2.45 M6 x 1 10 0.01 0.1 1 10 Plate Particle diameter (m) Note
SUP = 0.2 MPa 0.2 0.2 0.2 0.1 0.1 0.1 0 0 0 50 100 150 200 0 Discharge (mL/min) 0 Discharge (mL/min) 200 400 600 800 1000 0 Discharge (mL/min) 200 400 600 800 1000 Air Consumption: Built-in Solenoid Valve/Air Operated Calculation of Air Consumption Air Consumption 45 Find the air consumption for operation with a 5 Hz switching cycle and pilot air pressure of 0.35 MPa from the air consumption
1 OPEN o e CLOSE OPEN For 200 mm wafer For 300 mm wafer XGT22 XGT31 XGT22 (200 mm wafer type) Component Parts XLA No.
Specifications ISA2-G1 ISA2-G5 ISA2-H1 ISA2-H5 Model Detection distance Fluid Operating pressure range Recommended detection nozzle 0.01 to 0.25 mm 0.03 to 0.50 mm Dry air (filtered to 5 m) 30 to 200 kPa 1.5 5 or less 8 or less 12 or less 50 to 200 kPa 2.0 10 or less 15 or less 22 or less 50 kPa 100 kPa 200 kPa Supply pressure Consumption flow rate L/min (ANR) 12 to 24 VDC 10%, Ripple (p-p
LQ3T2A-R1 1/4" 1/8" 1/4" 4 17 16 10 9 17 16 6 12 16 11 16 34.5 33.5 30.5 29.5 34.5 33.5 20 14 20 2 LQ3T2A-R5 1/4" 1/8" 17 16 10 9 16 11 34.5 33.5 30.5 29.5 20 14 LQ3T3A-R1 20 25 4 LQ3T3A-R2 1/8" 3/8" 10 9 11 33.5 32.5 14 2 LQ3T3A-R5 3/8" 1/4" 22.5 19.5 17 16 21 16 47.5 44.5 38 37 25 20 4 LQ3T3A-R7 1/4" 1/4" 17 16 16 38 37 20 LQ3T3A-R9 1/4" 3/8" 1/4" 17 16 22.5 19.5 16 21 38 37 47.5 44.5 20
3 position cylinder series RZQ provides intermediate stop mechanism. 2 intermediate strokes are possible with only a small extension in total length. First stage stroke can be specified without changing the overall length. High accuracy is achieved by an intermediate stop method of pressing metallic components against each other. A tube rod with a large bore which is 70% the piston diameter
3 position cylinder series RZQ provides intermediate stop mechanism. 2 intermediate strokes are possible with only a small extension in total length. First stage stroke can be specified without changing the overall length. High accuracy is achieved by an intermediate stop method of pressing metallic components against each other. A tube rod with a large bore which is 70% the piston diameter
3 position cylinder series RZQ provides intermediate stop mechanism. 2 intermediate strokes are possible with only a small extension in total length. First stage stroke can be specified without changing the overall length. High accuracy is achieved by an intermediate stop method of pressing metallic components against each other. A tube rod with a large bore which is 70% the piston diameter
3 position cylinder series RZQ provides intermediate stop mechanism. 2 intermediate strokes are possible with only a small extension in total length. First stage stroke can be specified without changing the overall length. High accuracy is achieved by an intermediate stop method of pressing metallic components against each other. A tube rod with a large bore which is 70% the piston diameter
Bore size (mm) W P S WA WB WH ZZ 20 30 M5 x 0.8 83 22 16 23 118 25 30 M5 x 0.8 83 22 16 25 123 32 25 1/8 85 22 16 28.5 125 40 20 1/8 93 22 16 33 143 50 20 1/4 109 25 18 40.5 167 63 20 1/4 109 25 18 47.5 167 80 20 3/8 130 30 22 60.5 201 100 20 1/2 131 31 22 71 202 10 Series CG5-S Dimensions R V Axial foot type (L)/CG5LNS X165US inch rod option dimensional changes S + Stroke H GA GB Width across
(Cylinder: CYP32-200, Workpiece weight: 5 kg, Average speed: 200 mm/s) Note 5) The data above provides a guide for selection but is not guaranteed. Hexagon wrench + direction direction Inner cover holding screw Maintenance Caution 1. Never disassemble the cylinder tube or linear guide, etc.
(If m otor option is with lock, lo ck ca ble is also include d.) 200 to 230 LECSC2-S C2 S1 LECSS1S 100 to 120 *6 The standa rd direction of each c a ble is shaft side(A)..
MXP16-30 MXP16-20 MXP16-30 0.08 0.12 0.06 MXP16-20 MXP16-30 MXP16-20 MXP16-30 MXP16-20 MXP16-30 MXP16-20 MXP16-30 0.10 Table displacement mm Table displacement mm Table displacement mm 0.06 0.04 0.08 0.04 0.06 0.04 0.02 0.02 0.02 0 0 0 50 200 250 Load N 150 100 50 200 250 Load N 150 100 100 400 500 Load N 300 200 3 Precision Air Slide Table Series MXP Table Accuracy Clean Series: Precision
Therefore, the graph used for your model selection should be the one for CXSJL25-75 14 ). 32 8 mm 3 Compact Type Dual-Rod Cylinder Series CXSJ Vertical Mounting CXSJM CXSJL CXSJM CXSJL Graph V = up to 200 mm/s 1 Graph V = up to 400 mm/s 2 20 10 32 25 1 20 32 Weight m (kg) Weight m (kg) Weight m (kg) 25 15 1 20 15 10 0.1 10 0.1 6 6 0.03 5 5 10 20 30 40 50 100 10 20 30 40 50 100 Overhang L
Therefore, the graph used for your model selection should be the one for CXSJL25-75 14 ). 32 8 mm 3 Compact Type Dual-Rod Cylinder Series CXSJ Vertical Mounting CXSJM CXSJL CXSJM CXSJL Graph V = up to 200 mm/s 1 Graph V = up to 400 mm/s 2 20 10 32 25 1 20 32 Weight m (kg) Weight m (kg) Weight m (kg) 25 15 1 20 15 10 0.1 10 0.1 6 6 0.03 5 5 10 20 30 40 50 100 10 20 30 40 50 100 Overhang L
20 18 21 20 20 22.5 27.5 42.5 47.5 71 80 81 90 21 27 1 4 3 8 4.1-71 Direct Air Operated 3 Port Valve/Manifold Series VVXA31/32 For Air, Gas, Vacuum and Oil Compatible with a wide variety of fluids.
speed (mm/s) 20 1 50 100 150 200 0 Stroke + Eccentric distance (mm) Refer to Model Selection in Best Pneumatics catalog Vol. 6/7 for details about model selection procedure. 3 ISO Standards [ISO/21287] Compact Cylinder Series C55 Construction 20, 25 With auto switch (Built-in magnet) w u i t r !
25, 32 40, 50, 63 CY1S, CY1L: 6 to 40 12, 16, 20 25, 32, 40 50, 63, 80 100 6, 10 15, 20 25, 32 12, 16, 20 25, 32, 40 50, 63, 80 100 10, 16 20 25, 32 12, 16 20, 25 32, 40 32, 40 50, 63 80, 100 6, 10 16, 20 25, 32 20, 25 32, 40 50, 63 12, 16 20, 25 6, 10 16 20, 25, 32 40, 50 10, 15 25 6, 10 16 20, 25 32, 45 Bore size (mm) 5 to 50mm/s 7 to 50 mm/s 5 to 50 mm/s 5 to 50mm/s Piston speed Rubber
40 15 30 10 20 5 10 0 0 0 0.6 0.5 0.4 0.3 0.2 0.1 0 0.6 0.5 0.4 0.3 0.2 0.1 Supply pressure [MPa] Supply pressure [MPa] Air Consumption ZNC30m ZNC40m ZNC20m 160 200 140 180 Air consumption [L/min (ANR)] Air consumption [L/min (ANR)] Air consumption [L/min (ANR)] 140 120 160 120 100 140 100 120 80 100 80 60 80 60 60 40 40 40 20 20 20 0 0 0 0 0.6 0.5 0.4 0.3 0.2 0.1 Supply pressure [MPa] 0