EXxx-OMN0037CN

4 0 V() 5 FE FE 1M12 (4 ) 1 1 24 V NC 2 2 A/D DC24 V D/A DC24 V 3 34 0 V 0 V 4 5 FE FE 5 FE FE 100 k 250 1 k 600 IP67 -34No.EX-OMN0037CN-A 0V 2 EX600 4 (-)2 (+) 4 3 4 -35No.EX-OMN0037CN-A LED LED OFF OFF 0 1 () () (SI ) -36No.EX-OMN0037CN-A EX600-AMB M12 (5 ) 1 2 (1 /) () DC24 V Class22 A 0.5 A/ 12 bit 010 V15 V05 V 020 mA420 mA 15 V 40 mA 100 k 250 (25 ) 0.05

Electric Actuator Miniature Rod Type Miniature Slide table Type

Note 4) When the stroke is 25 mm, the maximum speed will be 250 mm/sec. Note 5) Set to the pushing speed when pushing operation. Note 6) The speed and force may change depending on the cable length, load and mounting conditions. Furthermore, if the cable length exceeds 5 m, then it will decrease by up to 10% for each 5 m.

pa

Recommended Valve PA3000 PA5000 VQZ140 (Exhaust center) VQZ240 (Exhaust center) Refer to page 17-5-160 for details. 17-5-153 Series PA Performance Curve: Air Operated Type PA313 Flow Characteristics PA513 Flow Characteristics 50 50 Cycle 7 Hz Cycle 5 Hz Cycle 3 Hz (No change when SUP = 0.2 MPa) Cycle 7 Hz Cycle 5 Hz Cycle 3 Hz (No change when SUP = 0.2 MPa or 0.3 MPa) SUP = 0.5 MPa 40 40

E-MY2B_E_A

33 Specifications 34 22 Names and Functions of Controller (5 positions) Controller detail General 3 positions 5 positions General A 1 2 5 7 State of indicator light D B C E 8 3 4 6 Switch No.

E-MY2_E_D

Heavy load Standard load Medium load Light load 1 10 50 100 200 1 0.25 0.49 0.98 1.96 2 20 2 0.49 75 200 400 0.74 1.47 2.94 3 30 3 0.74 100 300 600 0.98 1.96 3.92 4 40 125 400 800 4 0.98 1.23 2.45 4.90 5 50 5 1.23 150 500 1000 1.47 2.94 5.88 6 75 200 600 1200 6 1.47 1.96 3.92 7.84 7 100 250 700 1400 7 1.72 2.45 4.90 9.80 8 300 300 800 1600 8 1.96 2.94 5.88 11.76 9 500 500 900 1800 9 2.21

CLA

~~ , A 00) 0(0) 0 (2.5) 2(6) 4(7. 5) ~ , 40 D-AG 43.5 49 55.5 3 D-AS 1(0 1(0) 5(1.5 I O{S.5) 8(4 3t 35 42 so 57 .5 ~ Ht A 00) 00) 0(2.5 26 417 .5) D-A3 B !

XL

XLAV 5 Series XLA, XLAV High Vacuum Angle Valve Specifications Model XLA(V)-50 XLA(V)-63 XLA(V)-80 XLA(V)-16 XLA(V)-25 XLA(V)-40 Valve type Normally closed (pressurize to open, spring seal) Non-corrosive gas for aluminum alloy (A6063) and SUS304/316 Fluid 5 to 60C (41 to 140F) [high temperature type: 5 to 150C (41 to 302F)] XLA Operating temperature C 5 to 50C ( 41 to 122F) XLAV Atmospheric

Digital Flow Switches Series PF2A

output 1 to 5 V (within the flow rate range) Linearity: 5% F.S. or less; allowable load resistance: 100 k or more.

Title not found

4-3/8 4-1/2 4-3/4 4-3/4 4-7/8 5 150 5-3/8 5-3/8 5-3/8 5-1/2 5-1/2 5-1/2 5-3/4 6 CAUTION: Horizontal or angle mounted cylinders (anything other than vertical) creates a bend stress on the rod when extended, just from the weight of the rod and cylinder itself.

Title not found

4-3/8 4-1/2 4-3/4 4-3/4 4-7/8 5 150 5-3/8 5-3/8 5-3/8 5-1/2 5-1/2 5-1/2 5-3/4 6 CAUTION: Horizontal or angle mounted cylinders (anything other than vertical) creates a bend stress on the rod when extended, just from the weight of the rod and cylinder itself.

VDW

21 27 27 Rectifier element AC type Rectifier element AC type 20 2 x 3.5 14 2 x 3.2 27 20 20.5 17 56 48 5 11 1 1 6 8 5 M5 1 (IN) port 2 (OUT) port M5, 1/8 1 (IN) port M5, 1/8 M5 2 (OUT) port 15 2 x M3 x 5 2 x M2.5 x 3.5 VDW31-l G W 36 (27.6) Lead wire l Approx. 300 30 40 SMC SMC 1 1 Rectifier element AC type 4 x 5 25 34 28 Bracket assembly part no.

High Vacuum Angle Valve, XL Series

XLAV 5 Series XLA, XLAV High Vacuum Angle Valve Specifications Model XLA(V)-50 XLA(V)-63 XLA(V)-80 XLA(V)-16 XLA(V)-25 XLA(V)-40 Valve type Normally closed (pressurize to open, spring seal) Non-corrosive gas for aluminum alloy (A6063) and SUS304/316 Fluid 5 to 60C (41 to 140F) [high temperature type: 5 to 150C (41 to 302F)] XLA Operating temperature C 5 to 50C ( 41 to 122F) XLAV Atmospheric

Process Valve Series VNA

to 60C Note 1)/5 to 60C Note 1) (NBR seal) 5 to 60C Note 1)/5 to 99C Note 1) (FKM seal) VNH A VNH B 1 3 1 3 Pressure Temperature Lubrication 5 to 50C Note 1) 0.25 to 0.7 MPa Pilot air Not required (Use turbine oil Class 1 ISO VG32, if lubricated.)

CJ2X/CUX/CQSX/CQ2X/CM2X

MK(2) 10 Note) 15 Note) 1 pc. 5 5 Note) Please consult with SMC for shorter stroke length than indicated in the table.

CJ2X/CUX/CQSX/CQ2X/CM2X

MK(2) 10 Note) 15 Note) 1 pc. 5 5 Note) Please consult with SMC for shorter stroke length than indicated in the table.

OMR0031

Note 5) Cables are not included. 15 - 3.2 2 Parts description Details of the parts of the controller. (1) (2) (3) Remove the housing. (10) (8) (4) (5) ON (6) ON (7) OFF 1 2 3 4 5 6 (9) Pulse input signal switch (default) No.

High Rigidity Slider Type Ball Screw Drive/11-LEJS Series

LEC Y 10 5 5 Motorless 0 0 500 1000 1500 2000 0 0 500 1000 1500 2000 2500 3000 LAT Speed [mm/s] Speed [mm/s] When the stroke of the LEJB40 series exceeds 1000 mm, the work load is 10 kg.

LA-OMP0023

[ m] Note 4) Note 5) 90 5 90 5 90 5 20 5 Measurement Accuracy [ m] Note 4) Note 5) 100 10 100 10 100 10 40 10 Maximum speed [mm/s] Note 6) 400 Operating temperature range [oC] 5 to 40 (No condensation) Operating humidity range [%] 35 to 85 (No condensation) Weight [g] Note 7) 130 190 250 360 Table weight [g] 50 70 90 110 Note 1) Continuous thrust can be generated and maintained continuously

Bag Filter

B to Nominal filtration accuracy of 5, 10, 25, 50, 100 m can be selected.

Mechanically Jointed Rodless Cylinder Series MY2H/HT ø16, ø25, ø40

6 NC 14 21.3 32.4 NT 3.5 5.3 6.5 NE 27 35.5 56.5 NH 2 3 4 NX 5.8 8.5 10.5 NW 48.2 71.8 82.1 NV 3.4 5.5 6.6 Model MY2H16G MY2H25G MY2H40G PF 3.5 5.5 17 Z 160 210 330 X 6 7.5 9 XX 12 14 23 Y 5 5 8 VV 10.5 15.3 29 TT 12.5 19.3 35.4 U 4 5 6 UU 3 4.4 2 SS 9.7 14 21.5 R 5 5 8 RR 5.3 8.5 11 RW 40 50 53.5 QW 40 60 57 PP 5.3 8 16 Q 152 198 312 QQ 16.4 20.4 25.5 PB 40 60 70 PA 40 60 100 PC 7.2 8.2