New

Add 10 g for conduit type, 30 g for DIN terminal type, 60 g for conduit terminal type respectively.

155

1 Manual override SF4 Nil 1 2 3 4 5 6 7 9 Push type Slotted locking type Nil B 100 VAC 50/60 Hz 200 VAC 50/60 Hz 110 VAC 50/60 Hz 220 VAC 50/60 Hz 24 VDC 12 VDC 240 VAC 50/60 Hz Others Equivalent to the standard models except for u, i, !1. Refer to page 378.

Booster Regulator/Air Tank

130 VBAT05 VBAT10 Tank model 17 Air Tank Series VBAT Dimensions: CE Certified Product VBAT05A-Q Material: Carbon steel Connected to VBA10A, 11A Safety valve port Rc 3/8 Tank IN port Rc 3/8 Booster regulator IN port Rc 1/4 Spare port 2 x Rc 1/2 EXH: Rc 1/4 60 60 OUT (370) (307) Tank OUT port Rc 3/8 257 156 163 4 x 11 32 32 100 Drain port Rc 1/4 200 160 338 360 The length may be longer than

M8/M12 Connector PCA/EX9/EX500 Series EX260 Type 1 EX123/124/126 EX500 Type 2 EX600 EX245 Type 3 EX250 EX120/121/122 ¡Communication Cable/Connector EX140 Type 1 EX180 EX510 Type 2 M8/M12 ATEX

(Including insulating material) 1.5 mm 1.27 mm 1.65 mm 1.27 mm Rated current 3 A 4 A 3.1 A 4 A Rated voltage 125 V 60 V 125 V 60 V Contact resistance 40 mW or less 5 mW or less 40 mW or less 5 mW or less Insulation resistance 1000 MW or more 100 MW or more 1000 MW or more 100 MW or more Withstand voltage 1.5 kV 1.0 kV 1.5 kV 1.0 kV Rating/Performance Ambient temperature Connector 25 to +60C

CC

CRA1H50-180 60 50 40 50 CRA1H50-90 30 Selected model of rotary actuator 20 100 200 300 400 500 600 700 800 160 Nominal size of converter (mm) Cylinder stroke (mm) 100 63 40 Step (4) Select the size of valve unit How to read the graph (ex: when using a 100 to 450 st cylinder): Draw a line perpendicularly from the cylinder stroke of 450 to the point at which it intersects the (curve) cylinder

CC

CRA1H50-180 60 50 40 50 CRA1H50-90 30 Selected model of rotary actuator 20 100 200 300 400 500 600 700 800 160 Nominal size of converter (mm) Cylinder stroke (mm) 100 63 40 Step (4) Select the size of valve unit How to read the graph (ex: when using a 100 to 450 st cylinder): Draw a line perpendicularly from the cylinder stroke of 450 to the point at which it intersects the (curve) cylinder

5 Port Solenoid Valve SY Series

SY3120-C6 Horizontal actuation 800 700 600 500 400 300 200 100 0 SY5120-01 800 700 600 500 400 300 200 100 0 SY7120-02 800 700 600 500 400 300 200 100 0 SY9120-03 Base mounted Bore size Series CJ2 Pressure 0.5 MPa Load rate: 50% Stroke 60 mm Series CS1 Pressure 0.5 MPa Load rate: 50% Stroke 1000 mm 6 10 16 125 140 160 180 200 20 25 32 40 40 50 63 80 100 Series MB/CA2 Pressure 0.5 MPa Load

5 Port Solenoid Valve

Base Mounted Bore size Series CJ2 Pressure 73 psi (0.5 MPa) Load factor 50% Stroke 60 mm Series CM2 Pressure 73 psi (0.5 MPa) Load factor 50% Stroke 300 mm Average speed mm/s Series 6 10 16 20 25 32 40 800 Perpendicular, upward actuation Horizontal actuation 700 600 500 S0715-5G-M5 400 300 200 100 0 It is when the cylinder is extending that is meter-out controlled by speed controller which

C92

Contents CS92-32 CS92-40 CS92-50 CS92-63 CS92-80 CS92-100 CS92-125 CS92-160 32 40 50 63 80 100 125 160 Kits include items 16 to 21 Seal kits consist of items 16 to 21 1.12-5 Series C92 Without Mounting Bracket C92S B-Stroke Bore (mm) WA WB WH ZZ VD AM C D E EE G KK H J K KW M N P S SW B 22 24 32 32 40 40 54 72 30 32 40 40 52 52 60 65 33 44 52 64 78 92 110 140 12 16 20 20 25 30 32 40 46 60

CV/MVGQ

(Example) CDV3LN50-100-1 2 position single 2 position double Solenoid valve voltage Nil W 1 2 5 9 100 VAC (50/60 Hz) 200 VAC (50/60 Hz) 24 VDC Other Cylinder stroke (mm) (Refer to Standard Stroke on page 10-15-51.)

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

VAC (50/60 Hz) 200 VAC (50/60 Hz) 110 VAC (50/60 Hz) 220 VAC (50/60 Hz) 24 VDC 12 VDC Note 1) Refer to page 522 for power consumption of AC type.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

VAC (50/60 Hz) 200 VAC (50/60 Hz) 110 VAC (50/60 Hz) 220 VAC (50/60 Hz) 24 VDC 12 VDC Note 1) Refer to page 522 for power consumption of AC type.

Electric Actuator High Rigidity and High Precision Slider Type Circular arc grooves allow for high rigidity and high precision. Moment resistance*1 *2 61% Improved by up to Table displacement*1 50% Reduced by up to With internal battery-less absolute e

106 (170) L 13 (86) A (Table traveling distance)2 86 62.4 Stroke (90) [88]4 88 [(90)]4 90 4 [2]4 2 [(4)]4 (60) 61 (8.5) [Origin]4 Origin3 (60) (68) 31 8 M4 x 0.7 thread depth 8 (F.G. terminal) Auto switch groove5 8 53.8 68 (1 row per side) B D x 150 (= E) 60 15 Motor mounting position: Left side parallel 150 153 n x 6.6 6H9 ( +0.030 0 ) depth 66 7 60 64 76 7 6H9 (+0.030 0 ) depth 66 6H9

KJ

Possible to use in vacuum to 100 kPa Tubing material Tubing O.D.

RHC

NF 215 NE 27 ND 25 MM 31 M M18 x 1.5 LZ 7.5 LX 73 LY 53 LT 88.5 LS 10 LH 275 Bore size (mm) 50 52 63 342 10 37 1/2 215 27 24.5 31 M18 x 1.5 7.5 80 60 95 10 289 55 80 371 8.5 to 13.5 13 40 3/4 228 32 30.5 37 M22 x 1.5 10 100 75 115 12 308 65 100 391 13 47 3/4 236 41 34 47.3 M26 x 1.5 10 118 90 139 14 330 80 10-6-13 13 Series RHC Dimensions: Rod Side Flange Style 20 to 40 Rc P Rc P GA GB 4

Compact Type

0.01 0.01 0 20 40 100 60 80 0 20 40 100 60 80 Overhang L (mm) Overhang L (mm) CXSJM CXSJL Graph V = over 400 mm/s; up to 100 mm stroke 14 15 CXSJM CXSJL Graph V = over 400 mm/s; up to 75 mm stroke 1 1 Weight m (kg) Weight m (kg) 32 32 0.1 0.1 25 25 20 20 10 15 15 0.01 0.01 0 20 40 100 60 80 0 20 40 100 60 80 Overhang L (mm) Overhang L (mm) 6 Series CXSJ Construction: Standard Piping CXSJM

CQM

-30 -35 -40 -45 -50 -75 -100 35 40 45 50 55 60 65 70 75 80 115 140 45 50 55 60 65 70 75 80 85 120 145 30 35 40 45 50 55 60 65 70 75 30 35 40 45 50 55 60 65 70 75 110 135 M5 x 35 x 40 x 45 x 50 x 55 x 60 x 65 x 70 x 75 x 80 x 115 x 140 M6 x 45 x 50 x 55 x 60 x 65 x 70 x 75 x 80 x 85 x 120 x 145 M5 x 30 x 35 x 40 x 45 x 50 x 55 x 60 x 65 x 70 x 75 M5 x 30 x 35 x 40 x 45 x 50 x 55 x 60 x 65

Short Stroke Electric Actuator Series LX

D 4 4 6 6 E 60 90 90 90 F 30 60 60 60 G (50) (50) 100 100 Model LXFH5BC-25 LXFH5BC-50 LXFH5BC-75 LXFH5BC-100 Positioning Time Guide (for Horizontal Mount) For transfer load of 0kg For transfer load of 2kg Positioning time (sec) Positioning time (sec) Positioning distance (mm) Positioning distance (mm) 100 50 10 1 100 50 10 1 10 10 10.1 5.1 1.1 0.2 10.1 5.1 1.1 0.2 Speed (mm/s) Speed (mm/s

125

VAC (50/60 Hz) 2 200 VAC (50/60 Hz) 3 110 VAC (50/60 Hz)[115 VAC (50/60 Hz)] 4 220 VAC (50/60 Hz)[230 VAC (50/60 Hz)] 5 24 VDC 6 12 VDC V 6 VDC S 5 VDC R 3 VDC * There is no S option for AC, since a rectifier prevents surge voltage generation.

Compact Type Dual-Rod Cylinder Series CXSJ

0.01 0.01 0 20 40 100 60 80 0 20 40 100 60 80 Overhang L (mm) Overhang L (mm) CXSJM CXSJL Graph V = over 400 mm/s; up to 100 mm stroke 14 15 CXSJM CXSJL Graph V = over 400 mm/s; up to 75 mm stroke 1 1 Weight m (kg) Weight m (kg) 32 32 0.1 0.1 25 25 20 20 10 15 15 0.01 0.01 0 20 40 100 60 80 0 20 40 100 60 80 Overhang L (mm) Overhang L (mm) 6 Series CXSJ Construction: Standard Piping CXSJM