SJ3A6

Z type 24 VDC: 7% to +10% 12 VDC: 4% to +10% T type 24 VDC: 5% to +10% 12 VDC: 6% to +10% PS port 2(B) Vacuum pad port Flow Characteristics Response Time Flow Characteristics (When restrictor is fully open) 2(B)3/5(E) 1(P)2(B) b 0.19 Cv 0.05 C [dm3/(sbar)] 0.40 b 0.18 Cv 0.10 C [dm3/(sbar)] 0.24 Valve model Fluid passage 2(B) Port size M5 Valve model Response time ms (at 0.5 MPa) SJ3A6-ll-l

4 Port Solenoid Valve Series VQD1000

U side 1 2 3 4 5 n Direct manual override (Non-locking) 2n x C4, M5 4(A), 2(B) port C4: One-touch fitting for 4 M5: M5 thread 2(B) 2(B) 27.5 20 15 4(A) 4(A) 5 P = 11 12.5 (46) L plug connector (L) n: Stations Dimensions n L 11 138 130 10 127 119 L1 L2 2 39 31 3 50 42 4 61 53 5 72 64 6 83 75 7 94 86 8 105 97 9 116 108 12 149 141 13 160 152 14 171 163 15 182 174 16 193 185 17 204 196 18 215

Compact

B When LECP1, LECP6 or LECPMJ is used.

MIST SEPARATOR

AF-OMR0020-C PRODUCT NAME MIST SEPARATOR MODEL / Series / Product Number AFM20-(F,N)01(F,N)02(B,C)(-2,6,C,J,R,Z)-A AFM30-(F,N)02(F,N)03(B,C,D)(-2,6,8,J,R,W,Z)-A AFM40-(F,N)02(F,N)04(B,C,D)(-2,6,8,J,R,W,Z)-A AFM40-(F,N)06(B,C,D)(-2,6,8,J,R,W,Z)-A Contents Page 1. SAFETY INSTRUCTIONS 1-5 2. APPLICATION 6 3. SPECIFICATIONS 6 4. HOW TO ORDER 7 5. OPTIONAL BRACKET ASSEMBLY 8 6.

MICRO MIST SEPARATOR

AF-OMR0021-C PRODUCT NAME MICRO MIST SEPARATOR MODEL / Series / Product Number AFD20-(F,N)01(F,N)02(B,C)(-2,6,C,J,R,Z)-A AFD30-(F,N)02(F,N)03(B,C,D)(-2,6,8,J,R,W,Z)-A AFD40-(F,N)02(F,N)04(B,C,D)(-2,6,8,J,R,W,Z)-A AFD40-(F,N)06(B,C,D)(-2,6,8,J,R,W,Z)-A Contents Page 1. SAFETY INSTRUCTIONS 1-5 2. APPLICATION 6 3. SPECIFICATIONS 6 4. HOW TO ORDER 7 5. OPTIONAL BRACKET ASSEMBLY 8 6.

Fieldbus system EtherCAT compatible SI Unit

DX#B DY#B DM#E AXA AYA LBB1 SEC3 System Valve 32 Diag. Unit 0 Unit 1 Unit 2 Unit 3 Unit 4 Unit 5 Unit 6 Diag.

VEX1

T1209 (12) DL12-02 C AS420 AN300 T1209 (12) DL12-03 VEX3 2 3 4 D AS420 AN400 SGP elbow 90 1 2 B SGP B 1 2 E AS420 AN400 90 elbow F G AS500 AN500 AN600 SGP B 90 elbow 90 elbow 90 elbow VEX350 3 4 SGP1B SGP1B AS600 VEX30 Port VEX31 VEX32 External pilot External pilot H AS600 AN600 I VEX370 External pilot Pilot exhaust Pilot exhaust SGP1 B 90 elbow 90 elbow 90 elbow 1 4 SGP1 B SGP2B AS700 AS800

LEC-OM071xx

C D E F H N-OT 0 1 2 3 4 5 6 Reverse Run Prohibited Pn50B.0 7 8 L /N-OT 0 A B C D E F L /P-CL 0 1 2 3 4 5 6 Forward External Torque Limit Pn50B.2 8 7 H P-CL 9 A B C D E F L /N-CL 0 1 2 3 4 5 6 Reserve External Torque Limit Pn50B.3 8 7 H N-CL 9 A B C D E F L /DEC 0 1 2 3 4 5 6 Homing Deceleration LS Pn511.0 8 7 H DEC 9 A B C D E F L EXT1 * * * * 4 5 6 External Latch Signal 1 Pn511.1 7 8 H

Digital Flow Switches

Pin description A B Output specification 1 DC(+) Output for display unit only 42 62 2 NC/Analog output 3 DC() Output for display unit + Analog output 52 72 4 OUT Flow direction 22 Series PF2W Dimensions: Remote Type Sensor Unit for Water PF2W511-(N)B 148 32 80 70 58 46 45 36 2-Port size 45 2 4-5.5 (44.2) A (mm) A B Output specification Output for display unit only 63 77 Output for display

Series MLGP

locking) Section B-B Section B-B Section A-A *Above figure show the unlocked state.

Compact Guide Cylinder

JIS B 8361: General rules for hydraulic equipment. JIS B 9960-1: Safety of machinery Electrical equipment for machines. (Part 1: General requirements) JIS B 8433-1993: Manipulating industrial robots Safety. etc. *2) Labor Safety and Sanitation Law, etc. Caution Operator error could result in injury or equipment damage.

Compact Cylinder: Standard Type Double Acting, Single Rod Series CQS ø 12, ø 16, ø 20, ø 25

Compact Cylinder: Standard Type Double Acting, Single Rod Series CQS 12, 16, 20, 25 How to Order B D 30 20 CQS M9BW B D 20 30 CDQS With auto switch Made to Order Refer to page 552 for details.

CJ2-Z 10-/11- Series 21-/22- ø10, ø16 Air Cylinder

CJ216 16 15, 30, 45, 60, 75, 100, 125, 150, 175, 200 Air cushion is not available for 21-/22-.

BP1000

(ASME B40.1 Grade B or better) psig/bar 4) (No code) Accuracy Cleanliness No oil ASME B40.1 level IV No oil Brass Polycarbonate Brass Phosphor bronze B Case Window Socket Bourdon tube Material MPa MPA 1.14 (29) 2.28 (58) 2.1 (53.5) 2.12 (54) NPT 1/4 0.42 (10.5) inch (mm) 3) Part number of pressure gauge itself.

LEC-OM005xx

Table b.2 Condition that the file can be loaded The caution screen, when the file cannot be loaded.

Booster Regulator/Air Tank

END 5 Booster Regulator Series VBA Working Principle The IN air passes through the check valve to booster chambers A and B. Meanwhile, air is supplied to drive chamber B via the governor and the switching valve. Then, the air pressure fromdrive chamber B and booster chamber A are applied to the piston, boosting the air in booster chamber B.

Space Saving Vacuum Ejector/Vacuum Pump System Series ZQ

0 A B 0 8 L1 L2 Vacuum release flow adjusting needle P PE Exhaust part 2 x 3.5 (Body mounting hole Note 4)) 13.2 (With L-type plug connector) 28.8 62.8 3 75 Vacuum pressure switch Suction filter 63.6 68.9 Note 2) 76.8 Attached washer Attached washer (60.1) SMC SMC SMC V 81 8.9 10.2 8.5 9 Right Left Left Right 107.5 Note 1) Vacuum (V) port (M5) Note 5) 21 10 111 Note 1) (3.7) Dimensions 1

Fieldbus system CC-Link IE Field compatible SI Unit IO-Link Master Unit

code, Socket, Straight 2 m, SPEEDCON compatible PCA-1564930: Cable with M12 connector, B code, Socket, Straight 6 m, SPEEDCON compatible PCA-1564943: Cable with M12 connector, B code, Socket, Right angle 2 m, SPEEDCON compatible PCA-1564969: Cable with M12 connector, B code, Socket, Right angle 6 m, SPEEDCON compatible -90No.EX-OMW1003-A Revision history A: Contents revised in several places

1

H B Part no.

Modular Type Lubricator Series AL

2.3 2.3 3.2 3.2 AL10 AL20 AL30 AL40 AL40-06 AL50 AL60 M5 x 0.8 1/8, 1/4 1/4, 3/8 1/4, 3/8, 1/2 3/4 3/4, 1 1 25 40 53 70 75 90 95 Optional specification Metal bowl B 82 121 142 176 176 250 268 Model Metal bowl with level gauge B 162 196 196 270 288 Metal bowl with drain cock & level gauge B 186 220 220 294 312 With drain cock B 85 123 153 187 187 261 279 With barb fitting B 161 195