Flow Rate Range: 25 [0.5 to 25 (12.5 for CO2) â„“/min], Flow Adjustment Valve: Yes, Port Size: Rc1/8, Piping Entry Direction: Straight, Output Specification: 1 [Analog Output (1 to 5 V)], Instruction Manual: -, Calibration Certificate: -, Connector: -, Option: -

Flow Rate Range: 25 [0.5 to 25 (12.5 for CO2) â„“/min], Flow Adjustment Valve: Yes, Port Size: NPT1/8, Piping Entry Direction: Straight, Output Specification: 1 [Analog Output (1 to 5 V)], Instruction Manual: -, Calibration Certificate: -, Connector: -, Option: -

Table of Contents

Refer to pages 13-2-4 to 13-2-5 for ejector system unit. Refer to pages 13-2-32 for ejector system manifold. Refer to pages 13-2-40 to 13-2-41 for external vacuum supply system unit. Single unit Single unit 13-2-68 to 13-2-72 Manifold Manifold Refer to page 13-2-54 for external vacuum supply system manifold.

VQ7-6/7-8

Blank plate (filter, regulator) 4 Number of manifold blocks required for mounting (stations) 2 2 2 2 2 2 2 1 2 VQ7-6-FHG-D 4 Use of control units 2 VQ7-6-FG-D 1) The supply pressure (Po) passes through the regulator with filter and is adjusted to the prescribed pressure.

Table of Contents

0.5 to 4 30 30 0.5 to 4 Y 2 L2 2 11.5 to 22 L1-2 X 5 W2 = 13.5 to 30 0.5 to 5 40 40 0.5 to 5 Y 4.5 L2 2 15.5 to 30 L1-2 X 5.5 11-2-32 32 Simple Specials Series CRB2 Simple Specials Series CRB2 Axial: Top (Long shaft side) Symbol: A47 Machine a keyway into the long shaft.

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

0.5 to 4 30 30 0.5 to 4 Y 2 L2 2 11.5 to 22 L1-2 X 5 W2 = 13.5 to 30 0.5 to 5 40 40 0.5 to 5 Y 4.5 L2 2 15.5 to 30 L1-2 X 5.5 11-2-32 32 Simple Specials Series CRB2 Simple Specials Series CRB2 Axial: Top (Long shaft side) Symbol: A47 Machine a keyway into the long shaft.

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

0.5 to 4 30 30 0.5 to 4 Y 2 L2 2 11.5 to 22 L1-2 X 5 W2 = 13.5 to 30 0.5 to 5 40 40 0.5 to 5 Y 4.5 L2 2 15.5 to 30 L1-2 X 5.5 11-2-32 32 Simple Specials Series CRB2 Simple Specials Series CRB2 Axial: Top (Long shaft side) Symbol: A47 Machine a keyway into the long shaft.

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BK-1 or 10BK-2 10 BK-2 1/2 10 RBK4-2 1/4 BK-3 10 RBK4-2 1/2 Page 17 Distributed by Power Aire, Inc.

CRB2/CRBU2/CRB1

Inertial moment . 3.5 x 10-6 kgm2 2 t E = I 2, = 1 2 Rotation time . 0.12s/90 CRB2BW, CRBU2W20 are selected in this case. 2.

The PFM is available in four maximum flow rate options 10, 25, 50 and 100 /min, and is suitable for use with air, nitrogen, argon or carbon dioxide. 2-color display flow switch., Sensor and monitor separation, which allows remote monitors centralization., Integrated flow adjustment valve as an option, reducing piping and saving space (unique feature in the market)., Operation indication

VK300

(Lead wire length) (Mounting hole for manifold) 2 x 3.2 2 x 3.2 16 [14] M5: M5 x 0.8 [01: 1/8] [14] M5: M5 x 0.8 [01: 1/8] (Mounting hole for manifold) Manual override (Non-locking) 300 2 x M2.5 x 0.45 (Mounting screw) (Mounting screw) Applicable cable O.D: 3.5 to 7 Pg7 (Mounting hole) 3 4 2 x 3.5 63.4 57.9 (Mounting hole) (Bleed hole) 50.4 (P, A, R port) 2 x M5 x 0.8 24 21 3R 1P 62.8 2.3

Base Mounted How to Order Manifold VQC1000 Series Plug-in Unit

outputs Communication connector Stations SQ SD0 SQA SQB SNA SNB SNC SND SVA SVB SDA SDB SFA SFB SEA SEB Without SI unit 2 to 12 stations (24) 32 16 32 16 32 16 32 16 32 16 32 16 32 16 M12 DeviceNet 2 to 8 stations (16) 2 to 12 stations (24) 2 to 8 stations (16) 2 to 12 stations (24) 2 to 8 stations (16) 2 to 12 stations (24) 2 to 8 stations (16) 2 to 12 stations (24) 2 to 8 stations (16)

VK300

VK300-82-2-01 VK300-82-2-03 110 VAC 110V VK300-82-2-02 200 VAC 200V VK300-82-2-04 220 VAC 220V DIN terminal type VK300-82-2-07 VK300-82-4-51 VK300-82-4-06 VK300-82-3-05 VK300-82-3-53 240 VAC 240V 6 VDC 6V 12 VDC 12V 24 VDC 24VD 48 VDC 48VD Indicator light (Built-in connector) Marking Circuit with indicator light AC circuit diagram 12 VDC or less circuit diagram 24 VDC or more circuit diagram

Ejector Valve Unit Series ZYY/ZYX 1

Ejector valve ZYY35LZ-10S-E15C Double solenoid (24 VDC) SY3240-5LZ J ZZY 1 U Single solenoid (24 VDC) SY3140-5LZ Blanking plate assembly SX3000-75-1A Cylinder port size C6 : With 6 One-touch fitting Manifold base (4 stations) ZZYY3-45-04D-C6-J1U With ejector Number of ejectors 1 to 10 Example) ZYY-J3U ZYY35LZ-10S1-E15C ZYY35LZ-10S 2 SET 1 SET 1 SET U side Stations3 2 1 D side 13-8-6 7 Ejector

Ejector Valve Unit Series ZYY/ZYX

Note 2) V, S and R specifications are 45T, 45T1.

Vacuum Pad with Ejector ZHP Series Pad Diameter: ø63, ø80 ZK2 ZQ Ejector and pad are integrated. ZR Space saving and reduced piping labor! Bellows type with groove ZB ZA Two-stage ejector ZX More efficient ejector 30% reduced 50% increased ZM Air Suction

2 No. Description Note 1 Stud ZK2 2 Strainer 3 Mounting bracket !1 ZQ 4 Lock nut 2 pcs. included for male thread mounting (Not included for female thread mounting) y ZR 5 Lock pin 6 Check valve ZB 7 Lock plate !5 ZA Replacement Parts ZX No. Description Part no.

Series 10-SV ® EX500 Decentralized Serial Wiring

Note 1) Note 2) A, B port size (Metric) A, B port size (Inch) P, E port Applicable series P, E port Applicable series A, B port Symbol C3 C4 C6 C4 C6 C8 C6 C8 C10 C8 C10 C12 02 03 02F 03F M A, B port Symbol N1 N3 N7 N3 N7 N9 N7 N9 N11 N9 N11 02N 03N 02T 03T M 1/8" One-touch fitting 5/32" One-touch fitting 1/4" One-touch fitting 5/32" One-touch fitting 1/4" One-touch fitting 5/16" One-touch

EX500 Gateway System Serial Transmission System Series SV ® How to Order Manifold Mounting Direct mounting Nil D DIN rail mounting (With DIN rail) Series D0 DIN rail mounting (Without DIN rail) 1 SV1000 D3 When a longer DIN rail is For 3 stations

For 3 stations 0 Without SI unit 16 DeviceNet/PROFIBUS DP/ CC-Link/EtherNet/IP For 16 stations A2W Valve stations P, E port location Stations 2 stations Note Symbol 02 U D B U side (2 to 10 stations) D side (2 to 10 stations) Both sides (2 to 16 stations) (1) Double wiring specifications 08 02 8 stations 2 stations (2) Specified layout (up to 16 solenoids possible.)

4) C6 (One-touch fitting for ?6) C8 (One-touch fitting for ?8)2 to 10 stations: W = 47n + 15611 to 20 stations: W = 47n + 190

4) C6 (One-touch fitting for ?6) C8 (One-touch fitting for ?8)2 to 10 stations: W = 47n + 15611 to 20 stations: W = 47n + 190