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Pressure units conversion (Approximation) 17 Unit Pa (N/m2) kPa MPa bar kgf/cm2 atm mmH2O or mmAq mmHg or Torr PSI 1 x 103 1 x 106 1 x 105 1.0197 x 105 9.8692 x 106 1.0197 x 101 7.5006 x 103 1.4503 x 104 1 1.4503 x 101 1 x 103 1 x 103 1 x 102 1.0197 x 102 9.8692 x 103 1.0197 x 102 1 7.5006 1 x 106 1 x 103 1.0197 x 105 7.5006 x 103 1.4503 x 102 1 1 x 10 1.0197 x 10 9.8692 1 x 105 1 x 102 1

Plug-in Unit

C8, C10, C12 <4(A), 2(B) port> 31 Rc 1/4:1/4" Female thread 38.7 Rc 3/8: 3/8" Female thread C8 : 8 One-touch fitting P=25 65.5 C10 : 10 One-touch fitting C12 : 12 One-touch fitting L2 39.5 L1 6.5 Manual override Indicator light 65.5 P=25 A A A B A B A B A B A B 9 A A A A A A A 143 163 PWR COM series EX500 9 B B SI unit B B B 10 1 2 3 4 5 6 7 8 n Stations D-side U-side Formulas L1 = 25n + 106

Air Cylinder Series CG1 ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

LS + Stroke ZZ + Stroke CJ1 82.5 45 5 22 13 82 106 101 55 5 28.5 14 100 125 121 65 7 30 16 120 150 CJP Other dimensions are the same as basic style.

Electric Actuator High Rigidity and High Precision Slider Type Circular arc grooves allow for high rigidity and high precision. Moment resistance*1 *2 61% Improved by up to Table displacement*1 50% Reduced by up to With internal battery-less absolute e

4 106 48 5 3H9 (+0.025 0 ) depth 35 3H9 (+0.025 0 ) depth 35 8 46 46 47 47 H G *1 When mounting the actuator using the body mounting reference plane, set the height of the opposite surface or pin to be 3 mm or more.

Process Pump

13 14 97 77 43 Silencer: AN20-02 (Option) Foot (Option) FLUID IN Rc, NPT, G 3/8" AIR EXH Rc, NPT, G 1/4" 63 74 Tube extension: PAF3410--X68 P13 P13N P13F 152 2 x M5 x 0.8 Thread depth 9 139 Reset button 133 95 114 19 4 x 7 Bottom view of body (12.7) AIR SUP Rc, NPT, G 1/4" 16 Air operated reset port Rc, NPT, G 1/8" FLUID OUT 1/2" Tube extension (102) (9.5) 40 119 106 13 14 97 77 Silencer

SMC Pneumatic Clean Series

Note 1) Sampling air flow rate: Number of particles contained in 75l of air Note 2) Actuator: 1 million cycles Solenoid valve: 2 million cycles Particle generation characteristics of CM2 Particle generation characteristics of CXSL Particle generation characteristics of CY1B 106 106 106 Particle concentration (particles/m3) Particle concentration (particles/m3) Particle concentration (particles

CV/MVGQ

CVJ3B S Bore size Stroke M5 x 0.8 28 [34.5] 48 [49] Manual override Width across flats B1 Rod End Nut Bore size (mm) 10 16 H1 B1 7 3.2 16 [17] S + Stroke Z + Stroke 8 4 [ ]: Denotes the values of AC. 5 to 15 st 16 to 30 st 31 to 45 st 46 to 60 st Bore size (mm) NN NB NA MM HX H F D C B A ND Z Z S Z S Z S S 128 [129] 129 [130] 116 [117] 117 [118] 96.5 [97.5] 104 [105] 96.5 [97.5] 105 [106

CV/MVGQ

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 5 to 15 st 16 to 30 st 31 to 45 st 46 to 60 st Bore size (mm) NN NB NA MM HX H F D C B A ND Z Z S Z S Z S S 128 [129] 129 [130] 116 [117] 117 [118] 96.5 [97.5] 104 [105] 96.5 [97.5] 105 [106] 10 16 84 72 60 52.5 M8 x 1 9.5 12.5 M4 x 0.7 34.5 28 8 4 14

Guide Cylinder Series MGG ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

Therefore, the operating frequency can be increased according to the energy absorption. 8-21-7 7 Series MGG Theoretical Output OUT IN (N) Operating pressure (MPa) Bore size (mm) Rod size (mm) Operating direction Piston area (mm2) 0.4 0.2 0.3 0.5 0.6 0.7 0.8 0.9 1.0 283 251 314 220 188 94.2 126 157 62.8 314 OUT 20 8 238 211 264 185 158 79.2 106 132 52.8 264 IN 442 393 491 344 295 147 196 246

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Note 2) Reference thread dimensions after installation. 25.8 32.6 55.3 21 16.2 49.4 18.5 3/8" 24 (23.8) 57.6 28.6 50.1 49.6 42.1 1/2 106 AS431F-04-13 26.8 36.3 58 22 19.4 52 21.7 1/2" 15-9-7 1 Speed Controller with One-touch Fitting Series AS Elbow Type (Metal Body) Speed controller with One-touch fittings for metal body specifications Uses flame resistant resin as standard.

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DY08-01 18 44 32 8 14 DY08-02 16 21 51 14 12 24.5 DY08-03 22 69 26.5 56 10 17 DY10-02 23 70 14 26.5 DY10-03 17 22 77 Connection thread DY10-04 27 28.5 116 DY12-02 25 106 17 62 12 19 DY12-03 17 28.5 26 112 DY12-04 27 17 Bulkhead Union: DE H1 (width across flats) H2 (width across flats) Applicable tubing O.D.

Cylinder with Lock Series CLS

338 9 56 53 182 95 23 5 132 169 144 40 18.5 130 74 M16 x 1.5 to 1400 (mm) Bore size (mm) Stroke range (mm) 125 140 160 LX LY M MM N P S X Y W H ZZ 100 221 27 M30 x 1.5 35 1/2 98 45 20 110 383 to 1400 112 246 27 M30 x 1.5 35 1/2 98 45 30 8 110 393 to 1400 118 275 30.5 M36 x 1.5 39 3/4 106 50 25 9 120 433 to 1400 For long strokes (mm) With rod boot (mm) Stroke range (mm) Bore size (mm) 125

Air Slide Table

MXQ 16B-ZN Shorter total length type Dimensions [mm] Model M MXQ16B-10ZN 96 MXQ16B-20ZN 106 MXQ16B-30ZN 116 MXQ16B-40ZN 126 MXQ16B-50ZN 142 MXQ16B-75ZN 176 MXQ16B-100ZN 249 MXQ16B-125ZN 274 MXQ16B-150ZN 299 M 3 *3 As the total length has been reduced by removing the extension stroke end adjuster mounting holes, an extension stroke end adjuster cannot be mounted afterward.

SMC

Note 1) Sampling air flow rate: Number of particles contained in 75l of air Note 2) Actuator: 1 million cycles Solenoid valve: 2 million cycles Particle generation characteristics of CM2 Particle generation characteristics of CXSL Particle generation characteristics of CY1B 106 106 106 Particle concentration (particles/m3) Particle concentration (particles/m3) Particle concentration (particles

CL

38 20 168 25 M26 x 1.5 5.5 24 M10 x 1.25 15 30 24 27 137 195 41 25 182 32 M26 x 1.5 5.5 24 M10 x 1.25 15 34.5 24 27 139 197 41 32 184 40 M32 x 2 7 24 M14 x 1.5 21.5 42.5 24 29 167 233 41 40 217 With Rod Boot h l Bore size (mm) e f 1 to 50 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 12.5 68 81 93 106

MY1

MY1C (Cam follower guide type) B A (mm) 16 20 Mounting position A 74 94 B 86 106 Operating range l Note) 8.5 (6.5) 6.5 (7) Note) Figures in parentheses are the cases for D-M9, D-M9V switch types.

Rubber seal Series 10-SYJ3000/5000/7000 4/5 port solenoid valve

Stations n L1 L2 3 74 56 4 90 72 5 106 88 6 122 104 7 138 120 8 154 136 9 170 152 10 186 168 15 266 248 16 282 264 17 298 280 18 314 296 11 202 184 12 218 200 13 234 216 14 250 232 19 330 312 2 stations 58 40 20 stations 346 328 531 Manifold specifications 10-SYJ5000 Type 41: Side ported / 10-SS5YJ5-41Stations -M5 [ ]: AC Grommet (G) Approx. 300 (Lead wire length) L1 L2 4.5 Manual override

Slider Type Ball Screw Drive/11-LEFS Series

[mm] Dimensions Model L A B n D E Without lock With lock 11-LEFS32l-50l 332 384 56 180 4 11-LEFS32l-100l 382 434 106 230 4 11-LEFS32l-150l 432 484 156 280 4 11-LEFS32l-200l 482 534 206 330 6 2 300 11-LEFS32l-250l 532 584 256 380 6 2 300 11-LEFS32l-300l 582 634 306 430 6 2 300 11-LEFS32l-350l 632 684 356 480 8 3 450 11-LEFS32l-400l 682 734 406 530 8 3 450 11-LEFS32l-450l 732 784 456

CXS

0.7 33.6 22.4 28.0 8.4 39.2 11.2 16.8 OUT 4 CXSJ6 21.7 18.6 12.4 15.5 4.6 6.2 9.3 IN 31 110 94.2 62.8 78.5 OUT 31.4 47.1 15.7 157 6 CXSJ10 70.0 IN 60.0 40.0 50.0 20.0 30.0 10.0 100 Note) Theoretical output (N) = Pressure (MPa) x Piston area (mm) Weights (g) Standard stroke (mm) Model 75 10 20 67 50 30 40 57 47 77 CXSJM6 87 68 58 48 78 CXSJL6 88 129 114 99 144 198 CXSJM10 159 136 121 106

SYJ300/500/700

Station n L1 L2 3 78 68 Station 20 401 391 6 135 125 8 173 163 10 211 201 Station 2 59 49 4 97 87 5 116 106 7 154 144 9 192 182 11 230 220 12 249 239 13 268 258 14 287 277 15 306 296 16 325 315 17 344 334 18 363 353 19 382 372 4-4-47 48 Series SYJ700 N7 N9 C6 C8 [ ] for AC Type 42 Manifold: Side Ported/SS3YJ7-42Stations -01, , Grommet (G) For (Built-in One-touch fitting) N7 N9 C6, C8,