Angle Seat Valve /

M5, 1/8, 3.2 to 6 1, 1.6, 2.3, 3.2 N.C.

MLGP

7 8 9.5 10 D-Y7BAL 5 5 6 6 6 6 6 6.5 CL D-P5DWL 4 4 5 4 4 Since this is a guideline including hysteresis, not meant to be guaranteed.

MLGP

7 8 9.5 10 D-Y7BAL 5 5 6 6 6 6 6 6.5 CL D-P5DWL 4 4 5 4 4 Since this is a guideline including hysteresis, not meant to be guaranteed.

REC

9 e r t q !3 w !0 @3 @2 !1 !2 !5 !4 y u i o @1 @0 !8 !6 Description Material Note Component Parts Qty. No. No. Description Material Note Qty. Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 1 1 Rod cover Aluminum alloy Rod seal A NBR White anodized q !

Vacuum Equipment

capacity V = 50 (l) Max. adsorption flow Q (l/min (ANR)) Work Tubing O.D.

Series KG Stainless Steel One-touch Fittings

(mm) Effective orifice(mm 2) Weight (g) Nylon Urethane L1 M1 L2 Q D2 M2 D1 Part No. 4 6 KGT04-06 KGT06-08 16.4 16.4 7.1 6.5 17 18.5 18.5 20.9 12.8 15.2 4.5 5.3 21 22 18 20 19.5 22.5 10.4 12.8 16 17 56 44.5 36 27.2 9 6 8 6 10 8 KGT08-10 15.2 18.5 26.5 28.5 23 26.5 6 6.8 18.5 21 14 21 10 12 KGT10-12 Male run tee: KGY Effective orifice(mm 2) A Applicable tube O.D.

Fluoropolymer Piping Equipment

Class Class No. 1 1 2 2 2 2 2 2 3 3 3 3 3 3 3 3 3 3 4 4 4 4 4 4 4 4 5 5 5 5 5 5 5 5 6 6 6 6 6 6 1 2 1 2 C 3 4 F 1 2 3 4 5 6 7 E 9 10 1 2 3 4 5 6 F 9 1 2 3 4 5 7 8 9 1 2 3 4 5 6 1/8" A A B C D E F A B C D E F A B C D E F G A B C D E F G H A B C D E F 1 2 2 2 2 2 2 3 3 3 3 3 3 4 4 4 4 4 4 4 5 5 5 5 5 5 5 5 6 6 6 6 6 6 1/8" 1/8" 1/8" Branch tee female Run tee male Run tee female 1/4" A A 1/4

SX

124 to 1-6-138.)

Valve Single Unit

124 to 1-6-138.)

Valve Single Unit

124 to 1-6-138.)

11- Series MXP/MXPJ6 Air slide table 22- ø6, ø10, ø12, ø16

2.5 Width across flats 6 E 5 6 5 Prepared hole diameter 3.3 2-M4 x 0.7 Piping port 2-M3 x 0.5 (Plug: M-3P) F 6 QL 13.5 17 0.05 Stroke: S M 2 M4 x 0.7 Mounting base side B D 7 5 2-M3 x 0.5 Piping port Y J 3 M3 x 0.5 Vacuum suction port Z Max. 9.5 (Rubber stopper) 2.4 depth 2 2.5 3.5 +0.030 0 7 +0.030 0 depth 2 2.5 Q QL Without magnet and switch rail 2 2-M2 x 0.4 depth 2.2 12 Metal stopper

Modular Type Regulator Series AR

e OUT IN OUT IN e q r r w w AR50, 60 AR30, 40 t q t q e e IN OUT IN OUT r w w r Parts list Material Note No.

Series KV2 Fittings

Union 90 Elbow KV2L_ _-00 D2 D1 Applicable Tube M L Q D1 D2 M L App. Tube OD (inch) Q M Min. Flow Dia.

Series CE1

9 #0 w #1 #0 t q e @9 #1 @1 !9 t @5@6 @1 #0 q !1 w #1 #0 @2 @9 #1 @1 RSH CE1 40 to 63 CE2 @0 @4 @8 i u o @3 !1 #1 #2 @8@4 !2 @7 !3#3 r !4 e !6 @6 ML2B ML1C #7 #6 !5 REA REC RHC !9 @5 t @6 y #0 w @1 #0 #5 !7 #4 q @9@2 !8 #1 #2 !7 #5 #4 @1 MTS CC Component Parts Component Parts Description Material Note Description Material No. No.

High Purity Fluoropolymer

Class Size combination Applicable tubing size (mm) 4 x 3 3 x 2 6 x 4 4 x 3 6 x 4 4 x 3 10 x 8 8 x 6 6 x 4 10 x 8 8 x 6 6 x 4 12 x 10 10 x 8 12 x 10 10 x 8 19 x 16 12 x 10 19 x 16 12 x 10 25 x 22 19 x 16 25 x 22 19 x 16 Connection threads Symbol 1 2 2 2 2 2 2 3 3 3 3 4 4 4 4 5 5 5 5 6 6 6 6 Connection threads A A B C D E F A B C D A B C D A B C D A B C D Applicable tubing size (inch) No.

Mechanically Jointed Rodless Cylinder Series MY2

6 @9 #8 MY2H16 MY2HT16 @3 MY2H16 MY2HT16 !3 e $2 q $0 #9 !8 u i o y !0 @8 $6 !1 $1 #0 r $5 !4 @5 !9 @3 !5 #1 @4 $4 !2 $3 #3 #5 #6 @0 #4 #7 !7 #2 @6 @7 Component Parts Note No.

High Purity Fluoropolymer Fittings HYPER FITTING ® Series LQ1 1

6 6 6 No. 1 2 2 2 2 2 2 3 3 3 3 4 4 4 4 5 5 5 5 6 6 6 6 Class Applicable tubing size (mm) 4 x 3 3 x 2 6 x 4 4 x 3 6 x 4 4 x 3 10 x 8 8 x 6 6 x 4 10 x 8 8 x 6 6 x 4 12 x 10 10 x 8 12 x 10 10 x 8 19 x 16 12 x 10 19 x 16 12 x 10 25 x 22 19 x 16 25 x 22 19 x 16 Tubing O.D.

Series MXP/MXPJ6 11- ø6, ø10, ø12, ø16 22- Air Slide Table

+0.030 0 depth 2.5 2.5 6 E 5 2 x M4 x 0.7 Piping port F QL 6 13.5 Prepared hole diameter 3.3 2 x M3 x 0.5 (Plug: M-3P) 170.05 6 (fitting seat surface dimension) M3 x 0.5 Vacuum suction port Stroke: S M 1 Mounting base side B D Piping port A 2 x M3 x 0.5 A 5 5.5 3.2 J 2.4 Z Section AA 3.5 depth 2 2.5 +0.030 0 7 +0.030 0 depth 2 2.5 Q QL 11-/22-MXPJ6-10 4 x M3 x 0.5 depth 3 F (mm) E F H J M

S070

1 Barb fitting assembly (for 1(P), 3(R) ports) SS07051A60 Applicable tubing 6/4 Note) Order is accepted in 10 units. 4-11-15 Series S070 Exploded View of Stacking Type Body Ported Type/SS073M01-C Exploded View of Stacking Type D side end plate assembly Valve U side end plate assembly w e q r < U End Plate Assembly > q U end plate assembly no.

Power Clamp Cylinder

15) 63 How to Order Right type CKZ63 42 3681N R 47 37 54 78 Arm position/Mounting hole A A 20 Arm position Mounting hole Symbol Center type D1 6 6 6 8 8 8 D2 9 9 9 10.2 10.2 10.2 D3 14 14 14 17.5 17.5 17.5 L 6 6 6 8 8 8 Left type A B C D E F Center Right Left Center Right Left 2 x D1H7 through (9) 300.2 2 x D2 through 300.02 1050.1 144 65 280.1 150.2 22 L D3 Sectional view A-A (1:1) 80 How