Table Accuracy: Basic, Size: 10, Max. Rotation Torque: K (High Torque, LER10: 0.3; LER30: 1.2; LER50: 10), Rotation Angle: LER10: 310°; LER30/LER50: 320°, Motor Cable Entry: Basic, Entry on the Right Side, Actuator Cable: R (Robotic Type Cables, Flexible Type), Actuator Cable Length: A (10)

Table Accuracy: Basic Type, Max. Rotating Torque: Basic, 6.6 N.m, Rotation Angle: 320°, Motor Cable Entry: Basic, Entry Right Side, Actuator Cable Type, Length: 10m, Controller: -, Mounting: -, I/O Cable: -

Table Accuracy: Basic, Size: 30, Max. Rotation Torque: High Torque, LER10: 0.3; LER30: 1.2; LER50: 10, Rotation Angle: LER10: 310°; LER30/LER50: 320°, Motor Cable Entry: Basic, Entry on the Right Side, Actuator Cable: Robotic Type Cables, Flexible Type, Actuator Cable Length: 10, Controller Type - LEC, JXC: -, I/O Cable Length for LEC: -, Controller Option: -, Communication Plug Connector

Oscillation Angle A: 310°, Torque (Range)(N⋅m): Less than 1, Type: Rotary Actuator One Side Shaft Output, Main Body Shape: Block Shape, Rigidity Accuracy: Standard, Environment, Applications: High-Speed, Valves: Not Provided, Torque(N⋅m): 0.22, Size: 10, Motor cable entry direction: Basic type (entry on the right side), Actuator cable type: Robotic (flexible) cable, Actuator cable length(

Oscillation Angle A: 310°, Torque (Range)(N⋅m): Less than 1, Type: Rotary Actuator One Side Shaft Output, Main Body Shape: Block Shape, Rigidity Accuracy: Standard, Environment, Applications: High-Speed, Valves: Not Provided, Torque(N⋅m): 0.32, Size: 10, Motor cable entry direction: Basic type (entry on the right side), Actuator cable type: Robotic (flexible) cable, Actuator cable length(

DOC1023125

Applicable stroke table Size Stroke [mm] 50 100 150 200 250 300 350 400 450 500 550 600 650 700 750 800 850 900 950 1000 1100 1200 25 32 40 25 - .

JXCx-OMU0026

600 700 800 600 700 800 Max. speed [mm/s] 500 250 100 900 630 550 500 420 330 250 230 180 0 Min. speed [mm/s] (Independent and interpolation) 10 5 20 12 6 Min. speed [mm/s] (Speed tuning control) 17 9 33 20 10 Model LEFS32 Lead symbol H A B Lead [mm] 24 16 8 Stroke (mm) 600 700 800 900 1000 800 900 1000 800 900 1000 Max. speed [mm/s] 1200 930 750 610 500 500 410 340 250 200 170 Min. speed

CXS

Compact Type: CXSJ Vertical mounting L L Mounting orientation m m Maximum speed (mm/s) up to 600 up to 800 up to 400 up to 200 Stroke (mm) All strokes 6 10 Selection graph 1 2 3 4 Horizontal mounting L Mounting orientation m m Refer to the caution notes below. up to 800 up to 400 up to 800 up to 400 up to 400 up to 800 up to 400 up to 800 up to 50 up to 75 up to 10 up to 30 Stroke (mm) Maximum

Direct Operated Precision Regulator Modular Style Series ARP3000 1

900 1000 0 0 100 200 300 400 500 600 700 800 900 1000 AU Flow rate (/min (ANR)) Flow rate (/min (ANR)) AF AR Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com ARX21-01 ARX21-02 0.35 0.35 IR 0.30 0.30 Outlet pressure (MPa) Outlet pressure (MPa) VEX 0.25 0.25 0.20 0.20

VCL

Note 2) The weight is the value for the grommet type. 17-2-33 6 Series VCL Construction q w e r Component Parts t Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Description Material No.

VCS

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com VX3 VXA Clip type VN Ease of maintenance has been improved. Changing of the coil is made easy by means of clip design.

70pvvna

Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Warning Piping 1.Air bleeding Series VNA valves have no air bleeding port. Bleed air comes from the middle piping.

VNC

(P1) port (P2) port In the case of 32A to 50A Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com N.C.

VXD21/22/23

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com VX3 VXA VN LVC LVA LVH N.O. LVD Variations LVQ Valve Electrical entry LQ OUT Grommet Conduit DIN terminal Conduit terminal LVN Normally closed (N.C.) IN TI/ TIL OUT Normally open (N.O.)

Series SV

MB 63 10% 30% 50% 600 Stroke mm 70% 30% AS3201F -02-12 400 200 70% 50% 10% 0 800 MB 80 600 Stroke mm AS5000-02 AS420-02 400 200 0 AN300 -KM12 T1209 800 MB 100 600 Stroke mm AS5000-02 AS420-02 400 200 0 800 CS1 125 600 Stroke mm AS5000-02 AS420-02 400 200 0 Solenoid valve Silencer Tubing Speed controller 200 300 400 500 600 700 800 900 1000 1100 1200 Speed at the end mm/s Applicable related

Vacuum Ejector Box Type (Built-in Silencer)/Body Ported Type Series ZH 1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com ZL ZY Box type (Built-in silencer) Body ported ZQ EXH SUP ZF ZP Two types are available in the series: the box type with a silencer exhaust, and the body ported type, with an individual exhaust. ZCU AMJ Misc.

Thermo-chiller

Required installation space 8 e r o m r o m m 0 0 Required installation space for ventilation and maintenance 400 mm or more 800 mm or more 800 mm or more 400 mm = 15.7 inch 800 mm = 31.5 inch 800 mm or more Piping Caution 78.7 inch (2000 mm or more) 1.

Thermo-con

Cooling Capacity HEC002 HEC006 Circulating fluid: Clear water Circulating fluid: Clear water 800 1400 700 1200 Ambient temperature: 59 (15C) 600 1000 Cooling capacity (W) Cooling capacity (W) Ambient temperature: 59F (15C) 500 HRG HRS HRZ HRZD HRW HEC HEB HED Technical Data Related Products 800 Ambient temperature: 68F (20C) 400 600 Ambient temperature: 77F (25C) 300 Ambient temperature:

5 Port Solenoid Valve Series SV1000/2000/3000/4000

MB 63 10% 30% 50% SY 600 Stroke (mm) Stroke (mm) Stroke (mm) Stroke (mm) 70% 30% AS3201F -02-12 SV 400 SYJ 200 70% 50% 10% SZ 0 MB 80 800 VP4 600 S0700 AS5000-02 AS420-02 400 VQ 200 VQ4 0 SV400 AN300 -KM12 T1209 VQ5 800 MB 100 VQC 600 AS5000-02 AS420-02 400 VQZ 200 SQ 0 VFS CS1 125 800 VFR 600 VQ7 AS5000-02 AS420-02 400 200 0 Solenoid valve Silencer Tubing Speed controller 200 300 400 500

Electric Actuator Triple Axis P&P Unit

Stroke (mm) 900 1000 1100 1200 1300 1400 1500 Weight of body without motor (kg) 650 Stroke(mm) X axis 100 13.6 150 200 15.7 250 300 17.8 350 400 19.9 450 500 22.0 550 600 24.1 1500 43.0 Stroke(mm) X axis 700 26.2 750 800 28.3 850 900 30.4 950 1000 32.5 1100 34.6 1200 36.7 1300 38.8 1400 40.9 Weight of body for side mount without motor 650 Stroke(mm) X axis 100 17.1 150 200 19.2