Series CG1-Z 10-/11- ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 21-/22- Air Cylinder: Double acting, Single rod

values) Specifications Bore size (mm) Item Bore size Suction flow rate L/min (ANR) 20/25/32/40 50/63/80/100 20 25 32 40 50 63 80 100 10 20 1.5 MPa 1.0 MPa 0.05 MPa Without auto switch: 10C to 70C With auto switch: 10C to 60C (No freezing) Proof pressure Maximum operating pressure Minimum operating pressure Ambient and fluid temperature Stroke length tolerance Piston speed 10-/11-: 30 to 400

CJ2-Z 10-/11- Series 21-/22- ø10, ø16 Air Cylinder

Without auto switch: 10C to 70C With auto switch: 10C to 60C (No freezing) Ambient and fluid temperature Mounting bracket Bore size (mm) 10 16 Foot Flange CJ-L016C CJK-L016C CJ-F016C CJK-F016C Piston speed Stroke length tolerance +1.0 0 50 to 400 mm/s Mounting Grease Cleanliness class (ISO class) Basic/Double-side bossed/Single foot/Double foot/Rod flange/Head flange 10-/11-: Fluorine grease

Magnetically Coupled Rodless Cylinder Low Profile Guide Type Series CY1F ø10, ø15, ø25 1

Maximum manufacturable stroke (mm) Bore size (mm) Standard stroke (mm) 10 50, 100, 150, 200, 250, 300 500 15 50, 100, 150, 200, 250, 300, 350, 400, 450, 500 750 25 100, 150, 200, 250, 300, 350, 400, 450, 500, 550, 600 1200 The stroke is available in 1 mm increments with the maximum stroke as the upper limit. For a stroke in the standard stroke range, suffix the part number with -XB10.

Low Profile Guide Type

Standard Stroke Maximum manufacturable stroke (mm) Bore size (mm) Standard stroke (mm) 10 50, 100, 150, 200, 250, 300 500 15 50, 100, 150, 200, 250, 300, 350, 400, 450, 500 750 25 100, 150, 200, 250, 300, 350, 400, 450, 500, 550, 600 1200 The stroke is available in 1 mm increments with the maximum stroke as the upper limit.

3

300 200 100 20 200 400 600 800 1000 25 200 400 600 800 1000 1200 1400 Flow rate Q [kg/h] ( ): Saturated steam holding heat (kcal/kg) ( ): Saturation temperature (C) For Water How to read the graph The pressure differential to generate a flow rate of 25 L/min water is as follows.

S

O S W I T C H E S A U T OS W I T C H C A P A B L E A U T O S W I T C H 2 Pieces S 1 Piece See Accessories Without Auto Switch D With Auto Switch S T R O K E A D J U S T M E N T S T R O K E ( I N C H) M O U N T I N G With Adjustment Bolts (Std) B With Shock Absorber BC With Cap Type Shock Absorber BCS With One Cap Type Shock Absorber B Housing fixed P End plate fixed 100 1 200 2 300 3 400

Dual Speed Controller with One-touch Fitting Series ASD

Metric size Inch size With One-touch fitting 04 06 08 10 12 01 03 05 07 09 11 4 6 8 10 12 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" Thread type Nil Metric thread (M5) Unified thread (10-32 UNF) R NPT AS N ASP Bore size ASN M5 U10/32 01 02 03 04 M5 x 0.8 10-32 UNF 1/8 1/4 3/8 1/2 AQ ASV AK ASS Needle Valve/Flow Characteristics (Inlet Pressure: 0.5 MPa) ASR ASD230F ASD330F ASD430F ASF 100 200 400 1.5

VZA200/400

VVZ400-32A-21 pc. 1798 Series VZA200/400 3 Port Air Operated Valve Dimensions Body ported : VZA2 2-P-M5 Pilot port M5 x 0.8 2 x 2.8 Mounting hole 2 x 2.8 mounting hole Manual override (Non-locking) 3 x M5 x 0.8 Foot bracket Body ported : VZA2 2-P-M5-F SYA SYJA VZA VFA VFRA 2 x 3.5 mounting hole Manual override (Non-locking) VA Pilot port M5 x 0.8 3 x M5 x 0.8 1799 Series VZA200/400 Dimensions

NCA1

R O D B O R E S I Z E 7/16-20 7/16-20 7/16-20 3/4-16 3/4-16 3/4-16 1-14 1-14 1 1/4-12 1 1/2-12 1 7/8-12 5/8 5/8 5/8 1 1 1 1-3/8 1-3/8 1-3/4 2 2-1/2 S TA N D A R D S T R O K E 150 1.5 200 2 250 2.5 325 3.25 400 4 500 5 600 6 800 8 1000 10 1200 12 1400 14 E 1 G 1 3/8 H 1 3/4 J 2 K 2 1/2 L 3 M 3 1/2 Z Please consult SMC Customer Service for larger sizes.

REC

Air cushion Cushion Screw-in type Piping M5 x 0.8 Relief port size 50 to 400 mm/s Piston speed Mounting Basic style, Axial foot style, Rod side flange style Head side flange style Auto switch can be mounted.

Guide Table Series MGF ø40, ø63, ø100 1

m (kg) Load weight m (kg) 30 30 MGF63 10 20 20 MGF63 5 10 10 MGF40 5 4 3 5 4 3 MGF40 MGF40 MGF40 5 MGF40 2 2 3 5 2 1 1 10 20 30 40 50 100 200 300 400 10 20 30 40 50 100 200 300 400 5 10 50 100 10 50 100 Eccentric distance l (mm) Eccentric distance l (mm) Stroke (mm) Stroke (mm) How to read the graph 1) When the load weight is 70 kg, eccentric distance is 60 mm, and the maximum speed is 150

Magnetically Coupled Rodless Cylinder Low Profile Guide Type Series CY1F ø10, ø15, ø25 1

Maximum manufacturable stroke (mm) Bore size (mm) Standard stroke (mm) 10 50, 100, 150, 200, 250, 300 500 15 50, 100, 150, 200, 250, 300, 350, 400, 450, 500 750 25 100, 150, 200, 250, 300, 350, 400, 450, 500, 550, 600 1200 The stroke is available in 1 mm increments with the maximum stroke as the upper limit. For a stroke in the standard stroke range, suffix the part number with -XB10.

Clean Room Rodless Cylinder Series CYP ø15, ø32 1

In order to maintain the particulate generation grade, use operation of 500 thousand cycles or travel distance of about 400 km as a standard. (Graph (1) below) If operation is continued beyond the recommended values, lubrication failure of the linear guide and loss of particulate generation characteristics may occur. 1.

SMC's series LER electric rotary table is available in a basic or high precision style, and features a low profile, space-saving design.  A digital control allows easy setting of the angular speed, and angular acceleration/deceleration, etc.  Rotation angle is possible up to 320° (310° on LER10).  Up to 6.6 N·m of rotation torque (3.3 N·m of pushing torque available).  The rotation speed

SMC's series LER electric rotary table is available in a basic or high precision style, and features a low profile, space-saving design.  A digital control allows easy setting of the angular speed, and angular acceleration/deceleration, etc.  Rotation angle is possible up to 320° (310° on LER10).  Up to 6.6 N·m of rotation torque (3.3 N·m of pushing torque available).  The rotation speed

Table Accuracy: Basic Type, Max. Rotating Torque: J (Basic, 6.6 N.m), Rotation Angle: 320°, Motor Cable Entry: Basic, Entry Right Side, Actuator Cable Type, Length: R5 (5m), Controller: C91 (Ether Net/IP™), Mounting: 8 (DIN Rail)

Table Accuracy: Basic Type, Max. Rotating Torque: K (High Torque, 10 N▪m), Rotation Angle: 320°, Motor Cable Entry: Basic, Entry Right Side, Actuator Cable Type, Length: R5 (5m), Controller: C91 (Ether Net/IP™), Mounting: 8 (DIN Rail)

Table Accuracy: H (High-precision Type), Max. Rotating Torque: K (High Torque, 10 N▪m), Rotation Angle: 320°, Motor Cable Entry: Basic, Entry Right Side, Actuator Cable Type, Length: R5 (5m), Controller: C91 (Ether Net/IP™), Mounting: 8 (DIN Rail)

Table Accuracy: H (High Precision), Size: 30, Max. Rotation Torque: K (High Torque, LER10: 0.3; LER30: 1.2; LER50: 10), Rotation Angle: LER10: 310°; LER30/LER50: 320°, Motor Cable Entry: Basic, Entry on the Right Side, Actuator Cable: R (Robotic Type Cables, Flexible Type), Actuator Cable Length: 5 (5), Controller Type - LEC, JXC: C91 (JXC91, EtherNet/IP™ Direct Input Type), I/O Cable

Table Accuracy: H (High Precision), Size: 10, Max. Rotation Torque: J (Basic, LER10: 0.2; LER30: 0.8; LER50: 6.6), Rotation Angle: LER10: 310°; LER30/LER50: 320°, Motor Cable Entry: Basic, Entry on the Right Side, Actuator Cable: R (Robotic Type Cables, Flexible Type), Actuator Cable Length: 5 (5), Controller Type - LEC, JXC: C91 (JXC91, EtherNet/IP™ Direct Input Type), I/O Cable Length