5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

L 60.5 3 48 2 85.5 5 73 4 110.5 7 98 6 135.5 9 123 8 160.5 11 148 10 185.5 13 173 12 210.5 15 198 14 235.5 17 223 16 19 248 18 20 260.5 VP7 285.5 21 273 No.

Direct Solenoid

I E = 48'Solsnoid Leads (24'STD) I e = Mounting Bs (AXT 33&11) II I F..tur"" D = Recessed non-locking manual operator F = Becessed non-locking manual operator and etectricat indicator light.' K = Recessed locking manual operator J = Recessed locking manual operator and electrical indicator light.'

Speed Controller with Residual Pressure Release Valve with One-touch Fitting AS  FE Series

AS-F (Hexagon width across flats) (Hexagon width across flats) AS22 1FE-01-04SK 12.7 27.5 20.4 4 9.3 26 TMH AS22 1FE-01-06SK 13.5 27.5 20.4 13.4 6 11.6 27 12 12 R 1/8 44.9 49.9 48 53 14.2 AS22 1FE-01-08SK 18.5 32.4 25.3 8 15.2 29 ASD AS22 1FE-01-10SK 21 40.2 33.1 14.1 10 18.5 31 Applicable tubing O.D. d AS22 1FE-02-04SK 16 34.4 25.2 4 10.4 36 AS AS22 1FE-02-06SK 17 34.4 25.2 17.7 6 12.8 37

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type Series AS-FG

53.9 18.5 32.6 39.7 43.7 8 15.2 3/8" 17.9 23 59 69 21 16.2 23 40.4 45.4 19 R 3/8 40 35 AS331FG-03-10 AS331FG-N03-07 32.6 52.4 45 21 25.6 43.7 38.7 10 18.5 1/4" 13.2 63 56 17 23 20.6 16.2 12.9 NPT 3/8 AS331FG-03-12 AS331FG-N03-09 45.4 40.4 40.2 35.2 34.4 54.2 48 22 28.2 44.9 39.7 12 20.9 5/16" 15.2 65 59 18.5 23 19 AS431FG-04-10 AS331FG-N03-11 32.6 57.1 52.4 21 32.6 49.4 43.7 25.8 10 18.5

Sine Cylinder Series REC

Y-020B Y-032B Y-040B Size 0.2 0.1 9 Type C9 for shaft 46 16 20 25 36 M8 x 1.25 9 18 5 14 CDP-1 0.2 0.1 9 Type C9 for shaft 48 18 20 25 38 9 18 5 14 M10 x 1.25 MQ CDP-1 0.3 0.1 16 3 x 18 l 68 22 24 55 12 38 13 25 49.7 M14 x 1.5 CDP-3 Knuckle pins and retaining rings (cotter pins for 40) are included.

reduces flow setting time

) AS321FS-02-09 (S) 5/16" 13.2 22.7 33 14.2 AS321FS-02-11 (S) 3/8" 15.5 26.7 37 35.9 15.6 48 (49) AS321FS-03-07 (S) 1/4" 3/8 19 11.2 16.6 21.8 32.1 28.7 55.4 54 50.2 48.8 13.3 24.5 28.5 9.3 19.2 38 (39) AS321FS-03-09 (S) 5/16" 13.2 22.7 33 14.2 AS321FS-03-11 (S) 3/8" 15.5 26.7 37 28.2 15.6 39 (40) AS421FS-04-11 (S) 3/8" 1/2 24 (23.8) 15.5 18.8 27.4 40.3 (40.2) 36.2 64.1 62.5 57 55.4 15.6

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type AS-FG Series

53.9 18.5 32.6 39.7 43.7 8 15.2 3/8" 17.9 23 59 21 69 16.2 23 40.4 45.4 19 R 3/8 40 35 AS331FG-03-10 AS331FG-N03-07 32.6 52.4 45 21 25.6 43.7 38.7 10 18.5 1/4" 13.2 63 17 56 23 20.6 16.2 12.9 NPT 3/8 AS331FG-03-12 AS331FG-N03-09 45.4 40.4 40.2 35.2 34.4 54.2 48 22 28.2 44.9 39.7 12 20.9 5/16" 15.2 65 18.5 59 23 19 AS431FG-04-10 AS331FG-N03-11 32.6 57.1 52.4 21 32.6 49.4 43.7 25.8 10 18.5

CE

66.5 62 6.6 8 39 48 60 133 8 124 12 18 8 16 9 114 10-12-23 23 Series CE1 Dimensions: 32, 40, 50, 63 Both ends tapped style: CE1B Bore size Stroke 4-N through 8-O thread depth 20 20 2.5 91 500 or 3000 K 7 H G D M E J F C X B + Stroke L Z M A + Stroke E T 2-P (Port size) I Q Metal connector 15.5 M14 x 1 A B C D E F G H I J K Bore size (mm) 32 40 50 63 Standard stroke 50, 75, 100, 125, 150,

Brake mechanism added

CE2 CE2 ML2B Component parts Note Description Material Aluminum alloy Aluminum alloy Aluminum alloy Aluminum alloy Free-cutting steel Aluminum alloy Carbon steel Carbon steel Carbon steel Carbon steel Special friction material Material Carbon steel No. 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 No. 28 29 30 31 32 33 34 35 36 37 38 39 40 41 42 43 44 45 46 47 48

Sine Cylinder Series REC

Y-020B Y-032B Y-040B Size 0.2 0.1 9 Type C9 for shaft 46 16 20 25 36 M8 x 1.25 9 18 5 14 CDP-1 0.2 0.1 9 Type C9 for shaft 48 18 20 25 38 9 18 5 14 M10 x 1.25 MQ CDP-1 0.3 0.1 16 3 x 18 l 68 22 24 55 12 38 13 25 49.7 M14 x 1.5 CDP-3 Knuckle pins and retaining rings (cotter pins for 40) are included.

VK3000

VFN 48 V DC None Z Precautions Plug a connector in or out vertically, never at an angle. How to Calculate the Flow Rate S 6 V For obtaining the flow rate, refer to page 3-1-10.

INFORMATION Modular Connection Type Residual Pressure Relief 3 Port Solenoid Valve For connecting to F.R.L. units AC25-A AC30-A AC40-A VP500 IN OUT VP700 Allows for space saving and reduced piping labor. Power consumption: 0.35 W (Without light) EXH Exam

Response Time/Weight Response time [ms](at 0.5 MPa) Model Pressure specifications Weight [g] Without light/surge voltage suppressor With light/surge voltage suppressor AC VP517Y Standard (0.2 to 0.7 MPa) 27 32 44 222 (With bracket: 257) High-pressure type (0.2 to 1.0 MPa) 41 48 44 VP717Y Standard (0.2 to 0.7 MPa) 41 48 50 413 (With bracket: 468) High-pressure type (0.2 to 1.0 MPa) 67 76 50

Compact and Lightweight

Body ported ZM Vacuum pressure reached ZL S 90 kPa L 48 kPa (ZH05 to 13DA) 66 kPa (ZH15 to 20DA) ZH ZH ZH Port (SUP./VAC./EXH.) size Note) Silencer can only be selected for EXH. port with One-touch fitting. The silencer part number depends on the size of the EXH. port.

Bernoulli Gripper

Body material: Resin Lightweight type For the adsorption of thin cloths For the adsorption of plastic cases Body size: 40 Body size: 20 The body mounting adapter should be provided by the customer. 2 Bernoulli Gripper ZNC Series Series Variations Attachment Pressure sensor With stoppers With vibration suppression cover Material Size Weight [g] Resin Stainless steel 20 12 V 30 27 V 40 48

ZP3

Form w 1 Material e Buffer spec. r Buffer stroke t Vacuum inlet M5 x 0.8 Effective thread depth 4 3 42 24.5 11 6 48 27 14.5 10 58 31 20.5 N S U F GN GS J K A ZP3 Y 04 06 08 B B5 15 61 44.5 10 20 68.5 52 JB K Dimensions Per Vacuum Inlet: One-touch Fitting 20 B Model 4 D E F Fitting part min. hole size Fitting part no. Vacuum inlet direction q Pad dia.

Vacuum Pad: Ball Joint Type

12 Hexagon width across flats 3 2 A B 3 2 A B Dimensions: 10 mm Stroke (mm) B Stroke: 10 mm A C D F H I J Y Model ZPT10F10-B5-A10 10 12 10 12.5 27 38.5 74.5 1.5 ZPT13F10-B5-A10 13 15 23 10.5 13 27.5 39 75 2 ZPT16F10-B5-A10 16 18 1/8 (Rc, NPT, NPTF) Hexagon width across flats 13 Additional Dimensions by Stroke (mm) H I J Stroke M14 x 1 20 +10 +38 Hexagon width across flats 19 +28 30 +20 +48

Compact and

Piping diameter ZU05mA 0.5 90 48 7 13 14 3.9 18.6 ZU07mA 0.7 11 16 28 4.3 19.1 The piping diameter for each port should be the standard size of One-touch fitting.

NCA1

Male threads 17 : 3/8-16 45 : 2-12 78 : M18 x 1.5 cannot be specified equal to, but 18 : 3/8-24 46 : 2 1/4-12 79 : M18 x 2.5 19 : 7/16-14 47 : 1 7/8-12 80 : M20 x 2.0 not, greater than the rod diame20 : 7/16-20 48 : 2 3/4-12 81 : M20 x 2.5 ters as standard. 21 : 1/2-13 49 : 3-12 82 : M22 x 1.5 22 : 1/2-20 50 : 3 1/4-12 83 : M22 x 2.5 23 : 9/16-12 51 : 3 1/2-12 84 : M24 x 2.0 24 : 9/16-18

IDG

Refer to Made to Order Specifications on page 14-19-48. Note 2) Specifications with micro mist separator is also available. Refer to Made to Order Specifications on page 14-19-50. Note) Not applicable with the cases of standard dew point 20C (Nil), 15C (symbol H).

CE

66.5 62 6.6 8 39 48 60 133 8 124 12 18 8 16 9 114 10-12-23 23 Series CE1 Dimensions: 32, 40, 50, 63 Both ends tapped style: CE1B Bore size Stroke 4-N through 8-O thread depth 20 20 2.5 91 500 or 3000 K 7 H Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com G D M E J