AC Servo Motor Driver (MECHATROLINK-III type)

Troubleshooting . 37 7.1 Alarms List . 37 7.2 WarningAlarms List . 40 2 - LECYU Series / Driver Safety Instructions These safety instructions are intended to prevent hazardous situations and/or equipment damage. These instructions indicate the level of potential hazard with the labels of Caution, Warning or Danger.

ZQ-OM01301

Region generating noise Vacuum pressure peak pressure Vacuum 0 Standard supply pressure Supply pressure error 37 - Doc. No. ZQ-OM01301-A . Troubleshooting If the product fails in any way, perform the following troubleshooting measures.

High-precision Digital Pressure Switch ( compatible)

(Refer to page 37 for details.) -36No.PS-OMY0007-A Auto-preset When auto-preset is selected in function selection mode, the set value can be calculated and memorized from the measured pressure.

Digital Gap Checker ( compatible)

pressure gauge measurement value 16 bit No flag integer 32 to 47 SUP port pressure gauge measurement value 16 bit No flag integer 48 to 63 Distance measurement (guideline) displayed value 16 bit No flag integer Bit offset 63 62 61 60 59 58 57 56 55 54 53 52 51 50 49 48 Item Distance measurement (guideline) display value (16 bit With flag integer) Bit offset 47 46 45 44 43 42 41 40 39 38 37

SI unit for DeviceNet ®

Solenoid Output Assembly Instance ID Type Description Byte 35 Output 16 Solenoid Output Points 2 37 Output 32 Solenoid Output Points 4 The data format is shown below.

4 Port Solenoid Valve Series VQD1000

4ms, OFF: 2ms 10ms or less 10 to 50C (2) Ambient and fluid temperature Lubrication Manual override Shock/Vibration resistance(3) Mounting position Enclosure Mass Coil rated voltage Allowable voltage fluctuation Coil insulation type Not required L plug connector Base mounted L plug connector Body ported Locking type Non-locking push type 150/30 m/s2 Unrestricted Dust tight 34 g 24 V, 12 V 37

ø 40, ø 50, ø 63, ø 80, ø 100 Series CBA2 Standard type CA2 Standard type CA2W Standard/Non-rotating rod CA2K Standard/Non-rotating rod CA2KW Low friction CA2
Q End Lock Cylinder

32 78 25 52 14 21 71 13 65.8 M12 x 1.75 11 22 17 M22 x 1.5 23 37 21 4 40 204 102 18.5 80.5 116 1/2 up to 750 40 37 116 41 92 30 20 52 14 21 72 16 72.8 87.5 M12 x 1.75 11 26 17 M26 x 1.5 23 40 21 126 4 40 215 1/2 For more information about the rod end nut and accessories, please refer to page 12.

Smooth Cylinder Series CA2Y ø40, ø50, ø63, ø80, ø100 Specifications and auto switch information not provided below are the same as those of the standard, double acting, single rod type of Series CA2 .

Dimensions/40 to 100 Basic/CA2YB 4-J 2-P (Rc, NPT, G) MM Width across flats KA G G D E H1 AL B1 K A N F N B C M S + Stroke H ZZ + Stroke (mm) Bore size (mm) 40 50 63 80 100 Stroke range Up to 500 Up to 600 Up to 600 Up to 700 Up to 700 B C A AL B1 D E F G H H1 J K KA M MM N P S ZZ 30 35 35 40 40 27 32 32 37 37 60 70 85 102 116 22 27 27 32 41 44 52 64 78 92 16 20 20 25 30 32 40 40 52 52 10

Compact Hydraulic Cylinder Double Acting/Single Rod Series CH
QB ø 20, ø 32, ø 40, ø 50, ø 63, ø 80, ø 100

25 51 22 100 M26 x 1.5 40 37 30 52 26 30 Series CHQB Auto Switch Specifications Auto Switches: Proper Mounting Positions and Mounting Heights for Stroke End Detection 20 32 to 100 D-A7 D-A80 Approx.

End Lock Cylinder Series CBG1

63 35 32 27 38 20 16.5 32 2 14 14 58 11 45 59 72 M10 x 1.5 depth 16 to 1400 80 40 37 32 50 25 19 40 3 20 20 71 13 53.5 68 89 M10 x 1.5 depth 22 to 1500 100 40 37 41 60 30 20 50 3 20 20 71 16 64.5 79 110 M12 x 1.75 depth 22 Bore size (mm) K KA MM MO NA P RF S TA TC TDH9 TE TF TG WL ZZ 20 +0.08 0 5 6 M8 x 1.25 15 24 1/8 11 81 11 M5 x 0.8 8 4 0.5 5.5 15 118 25 5.5 8 M10 x 1.25 15 29 1/8 11

Clamp Cylinder with Lock Series CLK1

Chromated Aluminum alloy Carbon steel Flat washer Bushing Lead-bronze casting Rolled steel Cotter pin Bushing Lead-bronze casting Low carbon steel wire rod FR One-touch fitting Clevis bushing Oil-impregnated sintered alloy KRL08-02S Spatter cover Pivot Carbon steel Heat treated, Zinc chromated KR-08C FR double layer tube Lock ring Heat treated Carbon steel TRB0806W 30 31 32 33 34 35 36 37

Rotary Table Series MSU

B port 9.5 2-M3 x 0.5 8.5 3 Rotary Table High Precision Type Series MSUA Dimensions (mm) These drawings indicate the condition when the B port is pressurized. 1in = 25.4mm Scale: 80% With auto switch: MSUA1-S 1) 24 : When using D-90, 90A, S99, S99V, S9P, S9PV, T99, T99V 30 : When using D-97, 93A 2) 60: When using D-90, 90A, 97, 93A 69: When using D-S99, S99V, S9P, S9PV, T99, T99V 12.5 37

Modular Type Regulator Series AR

Outlet pressure MPa Outlet pressure MPa 0.4 0.4 0.3 0.3 0.2 0.2 0.1 0.1 0 0 5000 10 0 0 500 1000 1500 Flow rate L/min (ANR) Flow rate L/min (ANR) 37 Regulator AR10 to 60 Conditions: Inlet pressure 0.7MPa Outlet pressure 0.2MPa Flow rate 20L/min (ANR) Pressure Characteristics (Representative values) AR10 AR40 0.3 0.25 Set point 0.25 Set point Outlet pressure MPa Outlet pressure MPa 0.2 0.2

Solenoid Valve (with M Connector) Conforming to ISO 15407-1 Series EVS1-01, 1-02

34 2-4.6 mounting holes Manual override 2-4.6 mounting holes Manual override 37 34 M8 connector M8 connector 74.5 74.5 66.5 23 23 66.5 PE port PE port PE port PE port 13.5 13.5 8.5 8.5 SMC SMC 16 16 1/8-2 ports 3, 5 port 1/8 1 port 16 16 1/8-2 ports 3, 5 port 1/8 1 port 5

Electric Actuator Series LJ1H/LJ1S Made to Order Specifications

Coupling Motor 35 12 34 50 37 8 Section AA (Housing interior) Coupling mounting dimensions 143 Series LJ1 Clean Room Specification/Dust Seal Specification Series LJ1H S10 Motor mounting area dimensions Mitsubishi Electric Corporation Yaskawa Electric Corporation M4 x 0.7 8 2 46 Manufacturer Matsushita Electric Industrial Co., Ltd. 34 19.2 Housing D Thread size M3 x 0.5 6 4 45 B Effective

Rotary One-touch Fittings Series KS/KX

17 14 12.8 1 8 1 4 1 8 17 23 23 29 37 55 63 81 75 92 14 4 13.4 10.4 8 1 4 17 17 18.5 15.2 6 26.1 18.0 3 8 1 4 10 3 8 1 2 3 8 1 2 22 18.5 21 7 22 36.3 29.5 24 12 24 20.9 8 22 46.1 46.1 Reference dimensions after R(PT) thread installation.

Air Slide Table Series MXQ

Applicable auto swithces/Refer to pages 37 through 39 for detailed specifications of auto switches.

Compact and Low Profile Design Rodless Cylinder Series MY2H/HT, MY2C, MY3A/3B, CY1F

(dimension reduced by 12mm to 26mm) (mm) Series 40 25 16 MY2C MY2H MY2HT MY1C, MY1H 58 37 28 84 54 40 Mechanical Joint Rodless Cylinder/Cam Follower Guide Series MY2C MY2 C Cam Follower Guide Improved guide performance enhances dynamic load capacity over other P/A cylinder Long strokes 60 M 3 30 50 Series MY2C cylinder is now available in long strokes up to 5000mm.

Process Pump Series PA3000/5000/PAX1000 Series PB1000

KT-PA5-37 KT-PA5-38 KT-PA3-37 Switching valve parts kit Pilot valve kit Switching valve assembly kit KT-PA5-38 KT-PAX1-39 KT-PA5-38 Pilot valve kit Pulsation attenuator control valve kit Pilot valve kit PA5000/Air operated type PA3000/Air operated type PB1000 KT-PA3-31 KT-PA5-31 Diaphragm kit (PTFE) Diaphragm kit (PTFE) KT-PB1-2 Diaphragm kit KT-PA3-36 KT-PA5-36 Check valve kit Check valve

Process Pump Series PA3000/5000/PAX1000 Series PB1000

KT-PA5-37 KT-PA3-37 KT-PA5-38 Switching valve parts kit Pilot valve kit Switching valve assembly kit KT-PA5-38 KT-PA5-38 KT-PAX1-39 Pilot valve kit Pulsation attenuator control valve kit Pilot valve kit PA5000/Air operated type PA3000/Air operated type PB1000 KT-PA3-31 KT-PA5-31 Diaphragm kit (PTFE) Diaphragm kit (PTFE) KT-PB1-2 Diaphragm kit KT-PA3-36 KT-PA5-36 Check valve kit Check valve