SI unit ( device)

No.EX-OMY0021 PRODUCT NAME SI unit ( device) MODEL / Series / Product Number EX430-SIL1 Table of Contents Safety Instructions 2 Model Indication and How to Order 8 Summary of Product elements 9 Summary of product function 10 Installation and Wiring 11 Installation 11 Wiring 12 LED Indication, Settings and Status Monitoring 13 LED indication 13 Switch setting (Data transmission rate setting

XLGR Series

13 4 11 XL-OMP0001 7.

IP8101 Series

The input value (S value) will have no influence over the setting. 13: When an alarm is output, which will be indicated on a LCD indicator. See Contents of LCD Display for detail.

Electric Slide Table / High Precision Type 《 Battery-less absolute 》

/See 3.2 Caution (13) on p.18 end plate is tightened too much. 6) The bolt that is the fixation of Please use the bolt of appropriate length. /See 3.2 Caution (13) on p.18 work on the table presses the guide block.

LEC-OM036xx

Memory map .37 12. 1 Memory assignment.37 12. 2 Controller IF status flagIN Data.43 12. 3 Gateway unit status flagIN Data.43 12. 4 Gateway unit control flagOUT Data.45 13. Precautions for controlling the controller (LEC).46 13. 1. Communication delay between the gateway unit unit and the controller (LEC) 46 13. 2.

LEC-OM034xx

Memory map .39 12. 1 Memory assignment.39 12. 2 Controller IF status flagIN Data.43 12. 3 Gateway unit status flagIN Data.43 12. 4 Gateway unit control flagOUT Data.45 13. Precautions for controlling the controller (LEC).46 13. 1. Communication delay between the gateway unit unit and the controller(LEC) 46 13. 2.

AIR COMBINATION

N.C. type is recommended. 13 Option / Semi-standard : Select one each for a to j. Option / Attachment / Semi-standard symbol : When more than one specification is required, indicate in alphanumeric order.

MQQ

8.5 97.5 151 31.5 40.5 28.5 20.5 33 29 25 M26 x 1.5 18 Rc 1/8 10 M10 x 1.25 13 30 8.5 102.5 160 34.5 44.5 32 20.5 38 32 For details on rod end nut and mounting nut, refer to page 10-5-24. 10-5-20 20 Low Friction Cylinder: Anti-lateral Load Type Metal Seal Series MQM For other dimensions, refer to basic style on page 10-5-20.

CJ2

(mm) GB 5 5 GA 14.5 8 8 FZ 32 32 42 FY 14 14 20 FX 24 24 33 FT 1.6 1.6 2.3 FC 4.5 4.5 5.5 FB 13 13 19 F 8 8 8 D 3 4 5 T 3 NN M6 X 1.0 M8 X 1.0 C 14 14 20 S 49 46 47 MM M3 X 0.5 M4 X 0.7 M5 X 0.8 B 12 12 18 NB 7 9.5 9.5 H 28 28 28 A 15 15 15 NA 16 12.5 12.5 Z 77 74 75 Bore 6 10 16 M10 X 1.0 With air cushion/Dimensions not mentioned in the below table are the same as the above table.

Magnetically Coupled Rodless Cylinder

13 16 16 MM M4 x 0.7 M4 x 0.7 M5 x 0.8 M6 x 1 M6 x 1 G 5.5 7.5 7.5 8 11 NN M10 x 1 M20 x 1.5 M26 x 1.5 M26 x 1.5 M32 x 2 H 13 20 20.5 22 29 I 12 15 18 23 J 6 6 8 8 10 K 11 8 10 15 16 L 57 66 70 80 92 P (Piping port) Model Mounting nut/Included in the package (2 pcs).

Dedicated Controller

ALARM 24 Alarm output NO. 3 13 NO. 4 4 COM 12, 25 Common The output terminal common.

CC

CCT40-200 SCCS, #1 CCT63-200 SCCS, #2(#2+#13) CCT100-200 SCCS, #3(#3+#14) CCT63 SCCS, #13 CCT100 SCCS, #14 CCT100-200 SCCL, #1(#1+#12) CCT160-200 SCCL, #2(#2+#13) CCT100 SCCL, #12 CCT160 SCCL, #13 4.12-7 Air-hydro Converter Series CCT How to Order CCT 63 100 Effective oil level stroke (mm) Air-hydro converter Converter nominal size/stroke (mm) 63 100 160 50, 100, 200, 300, 400, 500

MLGP

Proper mounting position (mm) (mm) B 8 8 7 9.5 (9) A 4 4.5 5.5 9.5 (9) A B Bore size (mm) 20 25 32 40 Bore size (mm) 50 63 80 100 7.5 (7) 11.5 (11) 10 (9.5) 14 (13.5) 13 (12.5) 18.5 (18) 17.5 (17) 23.5 (23) Note 1) Values inside ( ) are for D-P5DW, which can only be mounted on bores sizes 40 through 100.

MLGP

Proper mounting position (mm) (mm) B 8 8 7 9.5 (9) A 4 4.5 5.5 9.5 (9) A B Bore size (mm) 20 25 32 40 Bore size (mm) 50 63 80 100 7.5 (7) 11.5 (11) 10 (9.5) 14 (13.5) 13 (12.5) 18.5 (18) 17.5 (17) 23.5 (23) Note 1) Values inside ( ) are for D-P5DW, which can only be mounted on bores sizes 40 through 100.

3 Port Solenoid Valve Series VQ100 1

White Black Black Red Red Red Black Black White 1 station SOL. 2 stations 2 SOL. 3 3 stations SOL. 4 stations 4 SOL. 5 5 stations SOL. 6 stations 6 SOL. 7 7 stations SOL. 8 stations 8 (a) SOL. 9 9 stations (2) SOL. 10 stations 10 SOL. 11 11 stations (b) (1) Black White SOL. 12 stations 12 SOL. 13 13 stations SOL. 14 stations 14 SOL. 15 15 stations SOL. 16 stations 16 How to Calculate the

3 Port Solenoid Valve Metal Seal/Rubber Seal, Body Ported Series VQZ100/200/300 1

VK VZ Note) For VQZ100, refer to page 4-14-13.

VFS

Brown Brown White White Pink Pink Gray Gray Unused Unused Light green Light green 13 14 15 16 17 18 19 20 21 22 24 Yellow Pink Blue Purple Gray Orange Red Brown Pink 14 15 16 17 18 19 20 21 22 Gray Black White 23 24 25 23 Terminal no.

VP4

Series 50-VFE Series 50-VPE 3-6-13

CE

13 13 D-A9/A9V 11.5 9.5 9.5 9.5 D-F7/J79 D-F7V/J79C D-F7W/F7WV D-J79W/F7NTL D-F7BAL/F7BAVL/F79F 6.5 6 6 6 5.5 5.5 D-M9/M9V D-F9W/F9WV D-F9BAL 4.5 4.5 4.5 4.5 6 5.5 5.5 5.5 Since this is a guideline including hysteresis, not meant to be guaranteed.

1 High Purity Chemical Valve Compact Type Series LVD VC
Space saving, compact type is available. Space saving, compact type is available. VDW Compact type is introduced as a new series to complement VQ Body: New PFA Body: New PFA Body: New PFA conventio

S) (mm) Dimensions PB S Model LVD2-T LVD3-T LVD4-T LVD5-T PA 13 26 A B 26 29.5 Dimensions (mm) A B C D E F G H J K L M N P Q T U Model LVD2-T LVD3-T LVD4-T LVD5-T 30 30 61 56 14.5 104 35 13 4 20 44 7 30 6 31.5 17 M5 to 0.8 35 35 79.5 62 17.5 136 42.5 17.5 6 22 50 7 37 6 36 21 M5 to 0.8 35 35 82 62 20 137 45 17.5 6 22 50 7 39 6 36 21 M5 to 0.8 45 45 105.5 76 25 169.5 65 17.5 8 32 64 7 52 6