Suction cups with flange

4 4 4 4 ZP10UT ZP 13 UT ZPT13UT-A6 4 4 4 4 ZP13UT ZP 16 UT ZPT16UT-A6 4 4 4 4 ZP16UT ZP 10 U ZPG10U-7A-X2 7 7 7 7 ZP10U ZPT2-7A-X2 ZP 13 U ZPG13U-7A-X2 7 7 7 8 ZP13U ZP 16 U ZPG16U-7A-X2 7 7 7 8 ZP16U ZP 20 U ZPG20U-7A-X2 9 10 10 10 ZP20U ZPT3-7A-X2 ZP 25 U ZPG25U-7A-X2 10 10 10 11 ZP25U ZP 32 U ZPG32U-7A-X2 10 11 11 12 ZP32U ZP 10 C ZPG10C-7A-X2 7 7 7 7 ZP10C ZPT2-7A-X2 ZP 13 C

VXP21/22/23

Model/Valve Specifications Av x 10-6m2 Cv converted C [dm 3/(sbar)] b Cv Water, Oil, Steam Air Flow characteristics Maximum operating pressure differential (MPa) Min. operating pressure differential (MPa) 10 10 15 10 15 20 Connection Orifice Max. system pressure (MPa) Weight (g) Model Water AC DC AC DC AC DC AC Air Oil Steam size (mm) Thread VXP2130-02 0.7 0.7 1.0 0.7 1.0 1.0 1 4 740 500

25

The result is approximately 10 L/min (ANR). Air consumption (L/min [ANR]) SUP = 0.7 MPa 40 35 30 SUP = 0.5 MPa 25 20 SUP = 0.35 MPa Caution 15 SUP = 0.2 MPa 10 1.

Electronic Pressure Switch Series (Separate Type)

Fixed 4% F .S.

Series SY100 3 Port Solenoid Valve Rubber Seal

List part numbers of the installed valve and option in required station location separately under manifold part number. 2.1-10 Series SY100 Common SUP/Common EXH 30 Type How to Order Applicable solenoid valve (1) SS3Y1 30 05 F SY113-l-M3 SY113A-l-M3 Stations 02 Applicable blank plate assembly 2 stations ... ...

Speed Controller with Uni One-touch Fitting AS Series

M Weight (g) AS AS221F-U01-23 AS221F-U01-04 AS221F-U01-06 AS221F-U01-08 AS221F-U01-10 AS221F-U02-04 AS221F-U02-06 AS221F-U02-08 AS221F-U02-10 AS321F-U02-06 AS321F-U02-08 AS321F-U02-10 AS321F-U02-12 AS321F-U03-06 AS321F-U03-08 AS321F-U03-10 AS321F-U03-12 AS421F-U04-10 AS421F-U04-12 3.2 4 6 8 10 4 6 8 10 6 8 10 12 6 8 10 12 10 12 7.8 8.9 11.0 15.2 18.5 8.9 11.0 15.2 18.5 11.0 15.2 18.5 20.9

3 Port Solenoid Valve/

1 xed orice 15 1.5 xed orice 20 2 xed orice Nil Rc F G N NPT 5 VP500 7 VP700 Body 2 Body ported 4 Base mounted VP700 only Note) X536 only body ported (option2).

11- Series MXP/MXPJ6 Air slide table 22- ø6, ø10, ø12, ø16

2-M3 x 0.5 (Plug: M-3P) 6 (fitting seat surface dimension) 170.05 M3 x 0.5 Vacuum suction port Stroke: S M 1 Mounting base side B D Piping port 2-M3 x 0.5 A 5 5.5 A 3.2 J 2.4 Z Section AA 3.5 Depth 2 2.5 +0.030 0 7 +0.030 0 Depth 2 2.5 Q QL 11-/22-MXPJ6-10 4M3 x 0.5 depth 3 F (mm) E F H J M Q QL S Z Model 23 25 38 27 37 28 8 5 44 11-/22-MXPJ6-51 30 35 53 42 47 37 11 10 59 11-/22-MXPJ6-10

Series MHZ2 11- ø10, ø16, ø20, ø25 22- Air Gripper

Fittings & Tubing Air Cylinders Rotary Actuators Suction flow rate L/min (ANR) Size 10/16 20/25 10 to 60C 0.01 180 c.p.m.

ZSE30/ISE30

-color display (Red and green) Sampling cycle: 5 times/s Display PF2 2% F .S. 2 digit (at 25C ambient temperature) 2% F .S. 1 digit (at 25C ambient temperature) Display accuracy IF Light up when output is ON (Green) 2% F .S. or less (based on 25C) IP40 Operating: 0 to 50C, Stored: 10 to 60C (No freezing or condensation) Operating and stored: 35 to 85% RH (No condensation) 1000 VAC for 1 min

PFA/PFW

Panel adapter B ZS-22-02 Thread type Piping port size Rc NPT G Nil N F 01 02 1/8 1/4 Specifications PFA301-m PFA300-m Model Specifications Note 1) 1 to 10, 5 to 50l/min (0.04 to 0.35, 0.18 to 1.77SCFM) Flow rate range measurement & setting Minimum setting unit 1% of maximum flow rate range Model PFA510-m PFA550-m Real-time flow rate l/min, CFM x 10-2 Display units Measured fluids Dry air,

I/O Configurator (NFC version)

The number of effective points is limited within the set range of the output size. 0 to 32 points (0 to 4 bytes) Increase and decrease by 8 points. d) Valve manifold 32 points/ 4 bytes Available output size e) Wireless communication Active/Idle Active Available If it is set to "Idle", the wireless communication is disconnected. f) AD refresh time 0.1/0.2/0.5/1/2/5/10/30/60 s 1 s Available

3 Way, 3 Port NVF110 Series Direct Solenoid Operated

Six station manifrcld ass'y: sta. 1-4) NVF'I'10-5G-017 sta. 5-6) NVF1 10-3G-017 NW3F1 -30-061-017 No. ot Stgliorg I l 5 I F Mounting Brackets tPoding 01 ,d' NPIF DltrlENSlON D E F G H J x ll ta o P n s T u w x z AA BB 3.78 (96) 3.41 1.77 (,r5)0.39 (10) o.59 (15) 0.20 (5) 0.63 (16) 1.O2 (28t 3.50 (89) 1 . 1 8 (30) 0.59 (15) 2.76 (70) o.87 (21) o_20 {5) 1 . 1 8 {30} 0.67 ltTl 0.59 (ls) o.32

lVFl 10

Six station manifrcld ass'y: sta. 1-4) NVF'I'10-5G-017 sta. 5-6) NVF1 10-3G-017 NW3F1 -30-061-017 No. ot Stgliorg I l 5 I F Mounting Brackets tPoding 01 ,d' NPIF DltrlENSlON D E F G H J x ll ta o P n s T u w x z AA BB 3.78 (96) 3.41 1.77 (,r5)0.39 (10) o.59 (15) 0.20 (5) 0.63 (16) 1.O2 (28t 3.50 (89) 1 . 1 8 (30) 0.59 (15) 2.76 (70) o.87 (21) o_20 {5) 1 . 1 8 {30} 0.67 ltTl 0.59 (ls) o.32

125

1.30) 220 V 1.27 (With indicator light: 1.46) 23(P2) D b b Air operated External pilot solenoid Internal pilot solenoid Power consumption [W] DC G, L, M 1.0 (With indicator light: 1.1) D 1.0 (With indicator light: 1.1) * Allowable voltage fluctuation for S and Z types 24 VDC: 7% to +10% 12 VDC: 4% to +10% Flow Rate Characteristics/Weight Caution Flow rate characteristics Weight [kg] 1(P)

AS-FPQ/AS-FPG

(mm) Elbow type Port size 4 6 8 10 12 AS-FPG AS-FPQ Clean performance Resin: PP Metal: Brass (electroless nickel plated) Resin: PP Metal: Stainless steel 304 AS121FP-M5 M5 x 0.8 AS221FP-01 R 1/8 AS221FP-02 R 1/4 AS321FP-03 R 3/8 10-AS-F 10-AS-FG AS421FP-04 R 1/2 Resin: PBT, POM Metal: Brass (electroless nickel plated) Resin: PBT, POM Metal: Stainless steel 303 Environmental resistance Excellent

AS-FPQ/AS-FPG

(mm) Elbow type Port size 4 6 8 10 12 AS-FPG AS-FPQ Clean performance Resin: PP Metal: Brass (electroless nickel plated) Resin: PP Metal: Stainless steel 304 AS121FP-M5 M5 x 0.8 AS221FP-01 R 1/8 AS221FP-02 R 1/4 AS321FP-03 R 3/8 10-AS-F 10-AS-FG AS421FP-04 R 1/2 Resin: PBT, POM Metal: Brass (electroless nickel plated) Resin: PBT, POM Metal: Stainless steel 303 Environmental resistance Excellent

3 Position Cylinder Series RZQ

N] F=-q x PA+w x PC F=q x PA+(e-q) x PC F=-q x PA+r x PB+(w-e) x PC F=q x PA q, w and e are piston areas.

Possible to transfer a workpiece at low-speed.

Applicable shaft types: S, W d1 = d1 = E3 = E1 = L2 = Y = L4 = L3 = Size 10, 15 Size 20, 30, 40 L1 = X = (mm) d1 Size 10 15 20 30 40 E4 = E2 = 2 to 3 2 to 4 2.5 to 3.5 3 to 5.5 4 to 7 (mm) (mm) L4 max Y Y L2 6 (9 Y) to Y 7 (10 Y) to Y Y 3 to 9 3 to10 L3 max X 2 X 2 L1 {10 (18 X)} to (X 2) {10 (20 X)} to (X 2) X 8 to 18 10 to 20 Size 10 15 Size 10 15 Symbol: A14 Symbol: A15 Symbol

CJ2X/CUX/CQSX/CQ2X/CM2X

0.8 10-3-16 16 Series 10-, 11-CM2X Microspeed Cylinder for Clean Room Series 10-, 11-CM2X How to Order Clean Series Mounting style 10 11 Relief type Vacuum type B L F G BZ Basic style Axial foot style Rod side flange style C(D)M2X L 40 10 150 F9BW Head side flange style Boss-cut basic style Boss-cut rod style Flange style RE A B Built-in magnet FZ REC Low speed cylinder Bore size 20 25 32