Slider Type Ball Screw Drive/11-LEFS Series

779 456 560 10 4 480 11-LEFS25ll-500l 789 829 506 610 10 4 480 11-LEFS25ll-550l 839 879 556 660 12 5 600 11-LEFS25ll-600l 889 929 606 710 12 5 600 35 524 Electric Actuator/Slider Type Ball Screw Drive 11-LEFS Series AC Servo Motor Clean Room Specification Dimensions: Ball Screw Drive 11-LEFS32 5H9 ( ) depth 5 +0.030 0 (122) LEF Encoder cable (7) Body mounting Note 1) reference plane 4 x M6

Series 12-REA Sine rodless cylinder

D I NB NB T N K W N S + Stroke F F NA R ZZ + Stroke 43 35 29 22 20.5 27.8 D Model Port size K NN B L MM x J N NA H 16 15 10 I 46 36 30 NB 19 17 17 T S 11 9 8 G ZZ 10 8 8 R 60 50 50 W 16 16 13 F 40 40 30 X 12-REA40 12-REA32 12-REA25 Rc, NPT, G 1/8 Rc, NPT, G 1/8 Rc, NPT, G 1/4 70 60 46 M26 x 1.5 M26 x 1.5 M32 x 2.0 21 17 15 50 40 34 19 15 13 150 124 111 182 156 137 92 80 70 M5 x 0.8 x 8 M6

D. P. Lube ALD600/900 Series

D OUT OUT IN E 2 x A (Port size) F SMC J C H 4 x K Bracket mounting thread A C D E F G H J K Model AF30-02 to 03-X2230 AF40-02 to 04-X2230 AF40-06-X2230 AF50-06 to 10-X2230 AF60-10-X2230 57 118 Rc 1/4, 3/8 Rc 1/4, 3/8, 1/2 Rc 3/4 Rc 3/4, 1 Rc 1 M4 x 0.7 x 0.5 M5 x 0.8 M5 x 0.8 M6 x 1 M6 x 1 44 35 53 14 53 258 245 169 165 78 73 60 60 63 59 47 47 73 73 95 90 70 70 24 24 20 18 95 90 75 70 1056

C76

42.5 37.5 46.5 17 22 28 31 12 14 29 38 16 16 42.3 52.3 30 38 17 19 20 24 47 58.5 21 26 80 105 M10 x 1.5 9, 14 depth of counterbore 10 CS1 32 0 0.039 145 M12 x 1.75 11, 17.5 depth of counterbore 12.5 C76 C85 Rubber cushion: C76RBF Without magnet, Built-in magnet Bore Stroke B C95 CP95 NCM NCA D-X 20Data S + Stroke ZZ + Stroke (mm) AM 20 24 C 12 14 D 37.5 46.5 EE G 1/8 G 1/4 F 42.4 52.4 FF M6

•

.5 2-M6 Screw depth 11 L _ M_ 'e' _ ' -, _a __ ;a'_Carbon steel I Material Cast Iron Material : Gast iron ApPljCabl;~ clamp cy l~nder j I Part No. A Applicable clamp cylinder Part No.

39

CKZ-50A013 CKZ-50A014 CKZ-50A015 NAAMS code ACA221M ACA222M ACA223M 55.0 85.0 115.0 50 mm Offset-Machined 50 mm Offset-Machined A A B B C C 6H6 through +0.008 0 8F7 through +0.028 +0.013 D D E E F F 200.03 200.03 10 G G 10 300.025 300.025 300.025 300.025 9 through 11 through H H I I J J 250.05 250.05 45 45 M6 x 1.0 M6x 1.0 750.05 750.05 R25 R25 6.5 6.5 10 10 1 1 1 1 R25 R25 18 18 19 19 19

Series MXP/MXPJ6 11- ø6, ø10, ø12, ø16 22- Air Slide Table

x 1 10.5 26.7 11 5 5.5 34 35 8.5 4 x M6 x 1 +0.030 0 ) depth 4 4H9 ( ) depth 4 4H9 ( Prepared hole diameter 5.1 A 6.5 19 320.05 +0.030 0 30 W 0.50.05 B D 2 x M5 x 0.8 Piping port M5 x 0.8 Vacuum port 47 46 13 ) depth 2 4H9 ( J 10.5 8 +0.030 0 +0.030 0 ) depth 2 4H9 ( 16.5 14.5 Section AA 5 B D Mounting base side Q QL 11-/22-MXP16-30 Without magnet and switch rail 8 2 x M2 x 0.4 depth 3

Series 12-REA ø25, ø32, ø40, ø50, ø63 Sine Rodless Cylinder

Air Cylinders Rotary Actuators 0 L0.1 4 x MM Thread depth J 2 x P (Piping port) A G E H G B NN Effective thread length T (R) D X Mounting nut Width across flats C F N ZZ + Stroke S + Stroke W K N F I NA TT 6 T Model MM L K J I H G F E D C B A S NN NA 34 N R 12-REA25 12-REA32 12-REA40 8 46 32 26.4 2 13 7.5 20.5 8 10 70 15 M5 x 0.8 18.5 30 M26 x 1.5 111 10 8 60 32 33.6 2 16 8 22 8 15 80 18 M6

SMC Pneumatic Clean Series

NA H S + Stroke ZZ + Stroke (mm) 36 30 26 22 ND 20-0.033 0 AL MM NA FX GB 22 22 GA ZZ S P N F D A B1 NB 32-0.039 0 7 5.5 5.5 5 K I GC 34 31 31 27 H1 H FF 46.5 37.5 33.5 28 Bore size 138 109 107 103 1/8 36.4 42.4 52.4 M14 x 1.5 M10 x 1.25 M10 x 1.25 M8 x 1.25 8 8 40 32 25 20 15 15 6 6 5 17 17 13 6 6 42.5 34.5 30 24 24 22 22 18 37.5 29 29 29 21 19.5 19.5 15.5 14 12 10 8 30.4 104 78 76 76 M6

CXS

-5.5 through 2 x 2-9.5 counterbore with depth 5.3 2 x 2-6.5 through 2 x 2-11 counterbore with depth 6.3 2 x 2-6.5 through 2 x 2-11 counterbore with depth 6.3 2-M4 x 0.7 with depth 6 15 54 19 70 52 17 8.5 2-M5 x 0.8 42 25 5 10 2.5 20 8 9.5 38 57.5 9 2-M4 x 0.7 with depth 6 20 62 24 84 60 22 11 2-M5 x 0.8 50 29 6 12 4.5 25 10 12 45 67.5 9 2-M5 x 0.8 with depth 7.5 25 73 29 87 71 27 13.5 2-M6

3 Port Air Operated Valve

thread) (6.4) 12 64 9.4 38.5 63 56.5 (63) 31.5 51.5 31 (60) (74) (43) 3/8, 1/2 1(P), 3(R) port (Distance between ports) 3R 1P NO 40 3 9 M5 x 0.8 (Breathing hole) 42 30.5 100.8 For vacuum/VPA742V-1(-F) 03 04 A B 3/8, 1/2 2(A) port 51.5 2 x 5.2 (For mounting) NC 33 4.5 2A 31 41 (2) (9) 115.1 2 x 5.2 (For mounting) 1/8 12(PA) port (Mounting groove for M6 thread) (6.4) 12 (63) 64 9.4 38.5 63

Angle Seat Valve /

Housing assembly Body Caution M5 hexagon socket head cap screw q M6 special screw (Do not disassemble.) Caution M6 special screw (Do not disassemble.) M5 hexagon socket head cap screw w Fig.1 Caution 1. Before disassembling, be sure to shut off the pressure supply, and then release the residual pressure. 2. After assembly, confirm that there is no fluid leakage.

3

P Port size 2 x P Port size Bracket mounting hole a1 (VXS23, 25) a a1 (VXS24, 26) 6.5 10.5 Dimensions (mm) Model Port size P A B B1 C D E F G H J M Bracket mounting a b d e f g h i j VXS23 1/4, 3/8 21 57 28.5 87.5 35 10.5 22 40 35 10 M5 56 75 2.3 30 6.5 10.5 31 37 VXS24 1/2 28 70 37.5 94 35 14 22 48 35 14 M5 56 75 2.3 34 6.5 10.5 35 41 VXS25 3/4 33.5 71 38.5 105.5 40 17 24.5 62 33 15.2 M6

NCA1

x 0.75 94 : M36 x 4.0 06 : 5-44 34 : 1 1/8-12 67 : M6 x 1.0 95 : M16 x 1.25 07 : 6-32 35 : 1 1/4-7 68 : M8 x 1.0 96 : M36 x 1.5 08 : 6-40 36 : 1 1/4-12 69 : M8 x 1.25 97 : M36 x 2.0 09 : 8-32 37 : 1 3/8-6 70 : M10 x 1.25 10 : 8-36 38 : 1 3/8-12 71 : M10 x 1.5 11 : 10-24 39 : 1-14 72 : M12 x 1.5 12 : 10-32 40 : 1 1/2-16 73 : M12 x 1.75 This chart represents all current 13 : 1/4-20 41 : 1

High Power Cylinder:

5 20: M5 X 0.8 X 6 25, 32: M6 X 1 X 6 40: M8 X 1.25 X 8 Chrome-molybdenum steel Nickel plated Hexagon socket head screw 20, 25: M5 X 0.8 X 6 32, 40: M6 X 1 X 8 Hexagon socket head set screw Nickel plated Chrome-molybdenum steel !6 Name plate !7 Special resin Cushion seal !8 Replacement Parts Bore size (mm)/Part No. Description No.

RHC

4 20: M5 x 0.8 x 6 25, 32: M6 x 1 x 6 40: M8 x 1.25 x 8 Nickel plated Carbon steel Hexagon socket head cap screw !5 20, 25: M5 x 0.8 x 6 32, 40: M6 x 1 x 8 Carbon steel Hexagon socket head set screw !6 Nickel plated !7 Plate Special resin !8 Cushion seal NBR !9 Piston seal Replacement Parts Resin @0 Wear ring NBR Bore size (mm) Kit no.

C76

24 42.3 52.3 12 14 37.5 46.5 G1 /8 G1 /4 22 27 36 40 10 12 47 58.5 21 26 30 38 29 38 17 22 34.5 42.5 80 105 17 19 16 16 28 31 M10 x 1.5 9, 14 depth of counter bore 10 32 0 0.039 M12 x 1.75 11, 17.5 depth of counter bore 12.5 145 Rubber cushion: C76RBY Without magnet, Built-in magnet Bore Stroke B S + Stroke ZZ + Stroke (mm) AM 20 24 NDh8 C 12 14 D 37.5 46.5 EE G 1/8 G 1/4 F 42.4 52.4 FF M6

CXS

-5.5 through 2 x 2-9.5 counterbore with depth 5.3 2 x 2-6.5 through 2 x 2-11 counterbore with depth 6.3 2 x 2-6.5 through 2 x 2-11 counterbore with depth 6.3 2-M4 x 0.7 with depth 6 15 54 19 70 52 17 8.5 2-M5 x 0.8 42 25 5 10 2.5 20 8 9.5 38 57.5 9 2-M4 x 0.7 with depth 6 20 62 24 84 60 22 11 2-M5 x 0.8 50 29 6 12 4.5 25 10 12 45 67.5 9 2-M5 x 0.8 with depth 7.5 25 73 29 87 71 27 13.5 2-M6

CLS

The lock is released by screwing in the manual release bolt until the white mark of the lock monitor on the top of the brake cylinder moves to the FREE position. 140 160 180 200 250 Bore size (mm) 125 M6 x 1.0 x 35l M6 x 1.0 x 40l M8 x 1.25 x 40l M10 x 1.5 x 50l M10 x 1.5 x 55l M12 x 1.75 x 70l Manual release bolt Screw depth 30 32 35 40.5 45 55 In the case the manual release bolt is not

MXH

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com l1 Maximum tightening torque (Nm) 1.1 2.5 2.5 5.1 l1 l Model MXH6 MXH10 MXH16 MXH20 Bolt M3 x 0.5 M4 x 0.7 M4 x 0.7 M5 x 0.8 Maximum tightening torque (Nm) 2.5 5.1 5.1 8.1 Bolt M4 x 0.7 M5 x 0.8 M5 x 0.8 M6 x 1 Model MXH6 MXH10 MXH16 MXH20 12.7 15.6 20.6